| 1-1: Advanced Lithography and Patterning | | | |
| 1-2: Electron and Ion Beam Technologies | | | |
| 1-3: Patterning Materials | | | |
| 2-1 Nanocarbon & 2D Materials | | | |
| 2-2: Nanodevices | | | |
| 2-3: Nanofabrication | | | |
| 2-4: Inorganic Nanomaterials | | | |
| 2-5: Organic Nanomaterials | | | |
| 2-6: NanoTool | | | |
| 3: Nanoimprint, Hybrid-NIL, Biomimetics, and Functional Surfaces | | | |
| 4: BioMEMS, Lab on a Chip, and Nanobiotechnolog | | | |
| 5: Microsystem Technology and MEMS | | | |
| 6: Atomic Layer Processing (ALP) | Chang-Yong Nam, Brookhaven National Laboratory, USA | Vapor-phase infiltration for microelectronics applications | |
| 6: Atomic Layer Processing (ALP) | Mato Knez, CIC nano, GUNE BRTA, Spain | Atomic Layer Processing: A toolbox for fabricating novel functional hybrid materials | |
| 6: Atomic Layer Processing (ALP) | Woohee Kim, Hanyang Univ., Korea | | |
