Keynote Lecture
SectionName, Affiliation and PhotoPaper TitleShort Biography
1-1: Advanced Lithography and Patterning
Dr. Harry Levinson, HJL Lithography, USA
High NA EUV lithography: Current status and outlook for the futureHarry J. Levinson is currently an independent lithography consultant. He spent most of his career working in the field of lithography. Dr. Levinson has published numerous articles on lithographic science and is the author of three books on lithography. Dr. Levinson is an SPIE Fellow. In recognition of his contributions to SPIE, he received the Society’s 2014 Directors’ Award. Dr. Levinson is currently Editor-in-Chief of the Journal of Micro/Nanopatterning, Materials, and Metrology. He has a PhD in physics from the University of Pennsylvania. For his Ph.D. thesis work, he received the Wayne B. Nottingham Prize in surface science.
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1-2: Electron and Ion Beam Technologies
Prof. Masayoshi Esashi, Tohoku Univ., Japan
DEVELOPMENT OF MASSIVE PARALLEL ELECTRON BEAM WRITE (MPEBW) SYSTEM : AIMING AT DIGITAL FABRICATION OF INTEGRATED CIRCUITMasayoshi Esashi received the Doctor of Engineering degree in electronic engineering in 1976 at Tohoku University. He served as a research associate from 1976 and an associate professor from 1981 at the Department of Electronic Engineering, Tohoku University. He has been a professor in Department of Precision Engineering since 1990, in The World Premier International Research Center Advanced Institute for Materials Research (WPI-AIMR) since 2007 and in the Micro System Integration Center (μSIC) since 2017 in Tohoku University. He is now CTO in MEMS Core Co. Ltd and concurrently senior research fellow, μSIC in Tohoku University since 2019. He has been studying microsensors, MEMS (Micro Electro Mechanical Systems) and integrated microsystems.
1-3: Patterning Materials
Dr. Dario L. Goldfarb, IBM Watson Research Center, USA
Evolution of patterning materials towards the Moore's Law 2.0 EraDario Goldfarb is a Research Staff Member at the IBM Watson Research Center located in Yorktown Heights, NY (USA). He received his doctorate degree in the field of Physical Chemistry from the University of Buenos Aires, Argentina in 1999 and held visiting scholar and post-doctoral positions at Oxford University (UK) and University of Wisconsin-Madison, (USA). He joined IBM in 2000 and is focused on the understanding of the fundamental properties, limits and applicability of lithographic materials and processes for the patterning of future semiconductor technology nodes. He has authored and co-authored over 80 technical publications and holds over 80 patents.
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2-1 Nanocarbon & 2D MaterialsProf. Kazu Suenaga, Osaka Univ., JapanLow-dimensional carbon nanostructures: From graphene to carbon atomic chainsKazu Suenaga got his Ph.D in Materials Science at the University of Tokyo in 1994. He was a postdoctoral fellow at Ecole Nationale Superieure des Mine de Paris (1994–1997) and at the Solid State Physics Laboratory in the University Paris-Sud (1997–1998). Then he joined the Japan Science and Technology Corporation (JST) (1998–2001), National Institute of Advanced Industrial Science and Technology (AIST) (2001-2021) and is now a professor in Osaka University since 2021. A recipient of the Seto award (Japanese Society of Microscopy 2005), winner of the Sir Martin Wood prize (the British Embassy 2006) and grantee par JST-CREST/ACCEL (2006-2011, 2012-2017, 2020-2026) for the "Triple-C" project. His major research theme involves the single atom spectroscopy and the single molecular imaging by means of TEM/STEM.
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2-2: Nanodevices
2-3: Nanofabrication
2-4: Inorganic Nanomaterials
Prof. Mitsuru Takenaka, Univ. of Tokyo, Japan
Materials drive Si photonicsMitsuru Takenaka received his B.E., M.E., and Ph.D. degrees in electronic engineering from the University of Tokyo, Japan, in 1998, 2000, and 2003, respectively. During 2003-2007, he was a research fellow of the Optoelectronics Industry and Technology Development Association. In 2007, he joined the Department of Electrical Engineering, the University of Tokyo, as a lecturer. In 2008, he became an associate professor. Since 2020, he is a professor at the Department of Electrical Engineering and Information Systems, the University of Tokyo. His research interests presently focus on the heterogeneous integration of III-V/Ge/2D materials on a Si photonics platform.
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2-5: Organic Nanomaterials
2-6: NanoTool
Prof. Yoichiroh Hosokawa, NAIST, Japan
Applications of femtosecond laser amplifier to microprocesses for
biological cells
Yoichiroh Hosokawa received the B.S. degree in Applied Physics from
Osaka City University in 1995, and M.S. and Ph.D. degrees in Applied
Physics from Osaka University in 1997 and 2000, respectively. He has
been Joint Associate Professor in the Institute of BioPhotonics,
National Yang Ming University, Taiwan, since 2016. His interest is in
the investigation of strong photo-excitation phenomena induced by
intense ultra-short pulse lasers and their applications to the
manipulation and analysis of biological cells and tissues.
3: Nanoimprint, Hybrid-NIL, Biomimetics, and Functional SurfacesProf. Jussi, VTT Technical Research Centre of Finland
4: BioMEMS, Lab on a Chip, and Nanobiotechnolog
Prof. Takanori Ichiki, Univ. of Tokyo, Japan
Biodevice Technology: From Fundamentals to ApplicationsTakanori Ichiki obtained his M.S. and Ph.D. degrees in Metallurgy from the University of Tokyo in 1992 and 1995, respectively. He joined the Department of Electric and Electronics Engineering, Toyo University in 1995, where he studied ULSI nano/microfabrication technology and extended it to the nanobiodevice. In 2004, he was assigned to the University of Tokyo, as Associate Professor of the Department of Bioengineering and Institute of Engineering Innovation from 2006 to 2015. In 2016 he was appointed Professor of the Department of Materials Engineering and Department of Bioengineering. He is also the Principal Research Scientist/Laboratory Head of Innovation Center of NanoMedicine (iCONM), Institute of Industry Promotion-Kawasaki, which launched in 2015. His current research activities include the development of point-of-care testing devices, a high-speed enzyme molecule evolution system using in situ synthesized ultrahigh-density microarray chips, and an analytical platform for nanoparticles such as exosomes.
5: Microsystem Technology and MEMSProf. Isao Shimoyama, Toyama Prefectural Univ., Japan
6: Atomic Layer Processing (ALP)
Dr. Christian Dussarrat, Air Liquide, Japan
Specifications of ALD precursor design for industrial applications