Keynote Lecture
SectionName, Affiliation and PhotoPaper TitleShort Biography
1-1: Advanced Lithography and Patterning
1-2: Electron and Ion Beam Technologies
Prof. Masayoshi Esashi, Tohoku Univ.
DEVELOPMENT OF MASSIVE PARALLEL ELECTRON BEAM WRITE (MPEBW) SYSTEM : AIMING AT DIGITAL FABRICATION OF INTEGRATED CIRCUITMasayoshi Esashi received the Doctor of Engineering degree in electronic engineering in 1976 at Tohoku University. He served as a research associate from 1976 and an associate professor from 1981 at the Department of Electronic Engineering, Tohoku University. He has been a professor in Department of Precision Engineering since 1990, in The World Premier International Research Center Advanced Institute for Materials Research (WPI-AIMR) since 2007 and in the Micro System Integration Center (μSIC) since 2017 in Tohoku University. He is now CTO in MEMS Core Co. Ltd and concurrently senior research fellow, μSIC in Tohoku University since 2019. He has been studying microsensors, MEMS (Micro Electro Mechanical Systems) and integrated microsystems.
1-3: Patterning Materials
2-1 Nanocarbon & 2D Materials
2-2: Nanodevices
2-3: Nanofabrication
2-4: Inorganic Nanomaterials
2-5: Organic Nanomaterials
2-6: NanoTool
3: Nanoimprint, Hybrid-NIL, Biomimetics, and Functional Surfaces
4: BioMEMS, Lab on a Chip, and Nanobiotechnolog
5: Microsystem Technology and MEMS
6: Atomic Layer Processing (ALP)
Dr. Christian Dussarrat, Air Liquide