General Information
Conference Name34th International Microprocesses and Nanotechnology Conference (MNC 2021)
Date and SiteOctober 26-29, 2021
Online and On-Demand Conference
Sponsored byThe Japan Society of Applied Physics
Cooperation byThe Institute of Electrical Engineers of Japan
The Institute of Electronics, Information and Communication Engineers
The Japan Society for Precision Engineering
The Japan Society of Mechanical Engineers
The Japanese Society for Synchrotron Radiation Research
The Japanese Society of Microscopy
The Japan Society of Vacuum and Surface Science
OutlineMicroprocesses and Nanotechnology play an important role of technical backbone
for constructing the advanced information communications society with ubiquitous
net works of the 21st century.
The MNC conference is now in its 34th year and is intended to provide a forum for
discussing lithography science and process technology using photon, electron, ion,
other energetic particles and nanomaterials. This conference covers not only their
applications to micro-and nano-structure fabrication and related physics and devices,
but also their fusion applications with other fields like bio, medical information, and
communication technology.
Scope1: Lithography, Metrology and Related Technologies
1-1: Advanced Lithography and Patterning
1-2: Electron and Ion Beam Technologies
1-3: Patterning Materials
2: Nanotechnology
2-1: Nanocarbons & 2D Materials
2-2: Nanodevices
2-3: Nanofabrication
2-4: Inorganic Nanomaterials
2-5: Organic Nanomaterials
2-6: NanoTool
3: Nanoimprint, Hybrid-NIL, Biomimetics, and Functional Surfaces
4: BioMEMS, Lab on a Chip, and Nanobiotechnology
5: Microsystem Technology and MEMS
6: Atomic Layer Processing (ALP)
PublicationsDigest of Papers (Abstract) , Release date: October 26.
On-demand Video, Release date: October 26.
MNC Special Issue from Japanese Journal of Applied Physics (JJAP)
ChairsOrganizing Committee Chair: Takahiro Kozawa (Osaka Univ.)
Organizing Committee Vice Chair: Toshiyuki Tsuchiya (Kyoto Univ.)

Steering Committee Chair: Masao Nagase (Tokushima Univ.)
Steering Committee Vice Chair: Seiya Kasai (Hokkaido Univ.)
Steering Committee Vice Chair: Katsuhiko Nishiguchi (NTT)

Program Committee Chair: Seiji Nagahara (Tokyo Electron)  
Program Committee Vice Chair: Kouji Asakawa (KIOXIA)
Program Committee Vice Chair: Daiyu Kondo (Fujitsu Labs.)
Program Committee Vice Chair: Kazuaki Furukawa (Meisei Univ.)

Presentation Types at MNC 2021

Type of presentationStyle of presentationAbstract Deadline
Presentation video upload deadlineAdditional request (for MNC web site)
Plenary TalkOnline + On-demand
40 min. (Max 35min. Talk and
5min. Discussion)
Until August 31
Video File (MP4)
Until September 24
Short Biography
Keynote TalkOn-demand Only
from 45 min. to 90 min.
Until August 31
Video File (MP4)
Until September 24
Short Biography
Invited TalkOnline + On-demand
30 min. (Max 25min. Talk and 5min. Discussion)
Until August 31
Video File (MP4)
Until September 24
Short Biography
Oral Talk
Online + On-demand
20 min. (Max 16min. Talk and
4min. Discussion)
Until July 20
Video File (MP4)
Until September 24
Max 16 min.
Until July 20
Video File (MP4)
Until September 24
Note: Even when presenter talks online without using a video file, the submission of recorded MP4 video presentation file is still requested for making it easy for attendees to join the conference from different time zones.

The video will be used for online live sessions. However, if presenter requests, live talk by ZOOM online is possible. All Q&A session will be done only by online live and the Q&A will not be posted on website.