Program
MNC2021_Session Schedule  World time converter https://www.worldtimebuddy.com/
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MNC 2021 Online Manual
(for Oral Speakers, Chairperson and Participants)		  How to Join MNC 2021 from October 26
October 26, On-demand (Keynote and Poster Session)
On-demand Session: Keynote Session and Poster Session
Keynote Speakers
Keynote-11
HIGH-NA EUV LITHOGRAPHY: CURRENT STATUS AND OUTLOOK FOR THE FUTURE (Keynote)

Harry Levinson, HJL Lithography, USA
Keynote-12
DEVELOPMENT OF MASSIVE PARALLEL ELECTRON BEAM WRITE (MPEBW)
SYSTEM : AIMING AT DIGITAL FABRICATION OF INTEGRATED CIRCUIT (Keynote)

Masayoshi Esashi 1, Hiroshi Miyaguchi 1, Akira Kojima 1, Naokatsu Ikegami 1, Nobuyoshi Koshida 2 and Hideyuki Ohyi 3, 1 Tohoku Univ., 2 Tokyo Univ. of Agriculture and Technol. and 3 Crestec, Japan		Keynote-13
Evolution of patterning materials towards the Moore's Law 2.0 Era (Keynote)

Dario L. Goldfarb, IBM Watson Res. Center, USA
Keynote-21
Low-dimensional carbon nanostructures: From graphene to carbon atomic chains (Keynote)

Kazu Suenaga 1, Ryosuke Senga 2, Jinhua Hong 2, Junhao Lin 2, Pranjal Gogoi 2, Luiz Tizei 2 and Yung-Chang Lin 2, 1 Osaka Univ. and 2 AIST, Japan
Keynote-23
Development of probe microscope techniques for nanofabrication and manipulation (Keynote)

Futoshi Iwata, Shizuoka Univ., Japan
Keynote-24
Materials drive Si photonics (Keynote)

Mitsuru Takenaka, Kasidit Toprasertpong and Shinichi Takagi, Univ. of Tokyo, Japan
Keynote-26
Applications of femtosecond laser amplifier to microprocesses for biological cells (Keynote)

Yoichiroh Hosokawa, NAIST, Japan
Keynote-3
Roll-to-roll fabrication of lab-on-chip devices (Keynote)

Jussi Hiltunen, VTT Technical Research Centre of Finland
Keynote-4
Biodevice Technology: From Fundamentals to Applications (Keynote)

Takanori Ichiki 1,2, 1 Univ. of Tokyo and 2 iCONM, Japan
Keynote-5
MEMS Piezo-resistive Strain Gages with Expanding Applications (Keynote)

Isao Shimoyama, Toyama Prefectural Univ., Japan
Keynote-6
POWDER ALD: A MATERIALS SUPPLIER’S PERSPECTIVES (Keynote)

Christian Dussarrat, Air Liquide Labs., Japan
Poster Session (1-1: Advanced Lithography and Patterning)
P11-1
CLIP-ON OPTICAL COMPONENTS BY ADDITIVE MANUFACTURING FOR ENHANCED IMAGING CAPABILITIES
Parvathi Nair S.1, Jonathan Trisno 1, and Joel K.W. Yang 1,2, 1 SUTD and 2 IMRE, Singapore
P11-2
STRIVING FOR ATOMIC PRECISION IN DOPANT ARRAY QUANTUM DEVICES
James H.G. Owen, Ehud Fuchs, Robin Santini and John N. Randall, Zyvex Labs, USA
P11-3
Anisotropic pyrochemical dry etching of fluorinated ethylene propylene initiated by irradiation of synchrotron radiation
K. Fujitani, S. Amano, A. Yamaguchi, Y. Haruyama, and Y. Utsumi, Univ. of Hyogo, Japan
Poster Session (1-3: Patterning Materials)
P13-1
Fabrication of ZnO/Si Surface Patterning by defect control via Galvanic-Submerged Photo-Synthesis of Crystallites
Jumpei Tsukamura 1,Yuki Takahashi 1 , Zhang Lihua 1, Melbert Jeem 1, Kazumasa Okamoto 2, and Seiichi Watanabe 1, 1 Hokkaido Univ. and 2 Osaka Univ., Japan
P13-2
Analysis of mitigating factors for line edge roughness generated during electron beam lithography using machine learning
Yuqing Jin 1, Takahiro Kozawa 1, and Takao Tamura 2, 1 Osaka Univ. and 2 NuFlare Technol., Japan
P13-3
Fabrication of 3D hetero nanostructure via galvanic submerged photo-synthesis of crystallites
Yuki Takahashi, Melbert Jeem, Lihua Zhang, and Seiichi Watanabe, Hokkaido Univ., Japan
P13-4
Utilizing a photosensitive dry film resist in proton beam writing
Hironori Seki 1, Keiya Kawamura 1, Hidetaka Hayashi 2, Yasuyuki Ishii 3, Nitipon Puttaraksa 4 and Hiroyuki Nishikawa 1, 1 Shibaura Inst. of Technol., 2 Ecodesign Promotion Networ, 3 Takasaki Advanced Radiation Res. Inst., Japan and 4 King Mongkut's Univ. of Technol., Thailand
P13-5
Application of ethyltrimethylammonium hydroxide (ETMAH) developer for contact hole patterning in EUVL
Julius Joseph Santillan and Toshiro Itani, Osaka Univ., Japan
Poster Session (2-1: Nanocarbons & 2D Materials)
P21-1
Far-infrared emission from graphene on SiC by current injection
Taichi Kataoka, Fumiya Fukunaga, Naruse Murakami, Yoshiki Sugiyama, Yasuhide Ohno and Masao Nagase, Tokushima Univ., Japan

P21-2
Electrically Driven Broadband Emitter with A Macroscopically Aligned Carbon Nanotube Film on Silicon Chips
Shinichiro Matano 1, Hidenori Takahashi 1, Natsumi Komatsu 2, Yui Shimura 1, Kenta Nakagawa 1,3, Junichiro Kono 2, and Hideyuki Maki 1, 1 Keio Univ., Japan, 2 Rice Univ., USA and 3 KISTEC., Japan		P21-3
Electrical detection of influenza virus based on DNA-aptamer-modified graphene
Kanna Takematsu, Takashi Ikuta, Kaori Tsukakoshi, Kazunori Ikebukuro and Kenzo Maehashi, Tokyo Univ. of Agriculture and Technol., Japan
P21-4
Fabrication and evaluation of Polymer actuator using polyaniline
Taiga Mitsuda, Kei Miyakawa, Shohei Sakurai, and Masahito Kushida, Chiba Univ., Japan		P21-5
Vertically aligned carbon nanotubes grown from Langmuir-Blodgett films with nano alloy particles
Shohei Sakurai, Mayu Iida, Kousei Okunuki, and Masahito Kushida, Chiba Univ., Japan		P21-6
Study Of N Doped Carbon Nanofibers Synthesized On Nichrome Foil For Urea Oxidation Reaction Bhagyahsri Todankar 1, Yazid Yaakob 1,2, Golap Kalita 1, and Masaki Tanemura 1, 1 Nagoya Inst. of Technol., Japan and 2 Univ. Putra Malaysia, Malaysia
P21-7
Characterization of Epitaxial CVD Graphene on Ir(111)/α-Al2O3(0001) by Photoelectron Momentum Microscopy
Eri Hashimoto 1, Keigo Tamura 1, Hayato Yamaguchi 1, Fumihiko Matsui 2, and Shinji Koh 1, 1 Aoyama Gakuin Univ. and 2 Inst. for Molecular Sci., Japan		P21-8
Integrated FPC Laser-Induced Graphene Strain Sensor with Pneumatic Finger by Fused Additive Method 3D Printed Method
Chao-Shin Hsu 1, Yi-Chun Chuang 1, Yu-Hsin Yen 1, Cheng-Chun Huang 2, Ching-Yuan Su 2, Ching-Liang Dai 1, and Yao-Chuan Tsai 1, 1 Natl. Chung Hsing Univ. and 2 Natl. Central Univ., Taiwan		P21-9
CNT-Si heterojunction solar cells with aligned carbon nanotube films
Motonori Nakamura 1, Keisuke Sugimoto 1, Junichiro Kono 2, and Koji Takamura 1, 1 Natl. Inst. of Technol., Asahikawa College, Japan and 2 Rice Univ., USA
P21-10
Deep ultraviolet light detection by AlGaN/Gr hetero junction photodiode array
Yoshinori Nakagawa 1, Shigeki Okauchi 1, Masahiko Sano 1, Takashi Mukai 1, Yasuhide Ohno 2, and Masao Nagase 2, 1 Nichia and 2 Tokushima Univ., Japan
P21-11
Metal Linkers and Edge Structures on Coordination Nanosheets Stimulate Hydrogen Evolution Reaction
Atsuki Sato 1, Akichika Kumatani 1,2, Choon Meng Tan 3, Ying-Chiao Wang 2, Naoya Fukui 3, Hiroaki Maeda 3, Hitoshi Shiku 1, Kazuhito Tsukagoshi 1,2, Hiroshi Nishihara 2, 1 Tohoku Univ., 2 NIMS, 3 Tokyo Univ. of Sci., Japan
P21-12
Growth of ultra-high-density carbon nanotube forest for thermal and electrical transport materials
Kento Tabata, Yuga Kono, Takayuki Nakano and Yoku Inoue, Shizuoka Univ., Japan
P21-13
Pd-Ni-decorated CNTs based hydrogen gas sensor
Maeum Han 1, Jae Keon Kim 1,2, J. Lee 1,2, H.K. An 2, S.H. Kong 1 and Daewoong Jung 2, 1 Kyungpook Natl. Univ. and 2 KITECH, Korea
P21-14
Highly stretchable CNT yarn strain sensor for health monitoring
Maeum Han 1, Jun Yeop Lee 1,2, Dong Geon Jung 2, Seong Ho Kong 1 and Daewoong Jung 2, 1 Kyungpook Natl. Univ., 2 KITECH, Korea
P21-15
Temperature, magnetic field, and gate-voltage dependence on the electrical conductivity of single-walled carbon nanotube thin films
Hiroki Date 1, Takenori Fujii 1, Taiki Inoue 2, Esko I. Kauppinen 3, Shigeo Maruyama 1 and Shohei Chiashi 1, 1 Univ. of Tokyo, 2 Osaka Univ., Japan and 3 Aalto Univ., Finland
P21-16
Study the influence of radical materials on the progress of unzipping carbon nanotube
Rikuto Oyabu, Yuki Usami and Hirofumi Tanaka, Kyushu inst. of Technol., Japan
Poster Session (2-2: Nanodevices )
P22-1
Selective-Area Growth of Ge Nanowires on SiO2-Masked Si (111) Substrates by Vaper-Liquid-Solid Method
D. Goto 1, M. Makino 1, R. Horiguchi 1, W. Jevasuwan 2, N. Fukata 2, and S. Hara 1, 1 Hokkaido Univ. and 2 NIMS, Japan
P22-2 Modeling of Quantum Electron Transmission Process in Two-dimensional Nanowire System using Recurrent Neural Network Keita Kawahara 1, Yuto Ogra 1, Yoshitaka Itoh 1, Tota Suko 2, and Masakazu Muraguchi 1, 1 Hokkaido Univ. of Sci. and 2 Waseda Univ., Japan
P22-3
Self-Catalyzed Molecular Beam Epitaxial Growth of GaAs nanowires on 2-inch Si (001) wafer
Naoto Danjo, Kenta Sakaguchi, Fumitaro Ishikawa, Ehime Univ., Japan
P22-4
Radiation Plumes on Gallium Nitride Nanocircuits Under Simulated Space Radiation
K. Xie and V. M. Ayres, Michigan State Univ., USA		P22-5
Observation and theoretical calculation of spin transport in Ni78Fe22/molecules/Ni78Fe22 nanojunction devices
Kyohei Hayashi 1, Yuma Sasaki 2, Kaeko Senshu 1, Takahiro Misawa 2, Junji Nishii 2, and Hideo Kaiju 1, 1 Keio Univ. and 2 Hokkaido Univ., Japan
P22-6
Electrical Characteristics of Single-Electron Transistors Made by Dielectrophoresis of Gold Nanoparticles with Different Diameters
Tetsuya Urae 1, Tomoki Yagai 1, Kazuma Sekine 1, Masataka Moriya 1, Hiroshi Shimada 1, Ayumi Hirano-Iwata 2, Fumihiko Hirose 3, and Yoshinao Mizugaki 1, 1 Univ. of Electro-Communications, 2 Tohoku Univ., and 3 Yamagata Univ., Japan
P22-7
Negative Capacitance Field-Effect Transistor with Hetero-MetalGate to Suppress the Reverse Drain-Induced Barrier Lowering
Jae Yeon Park, Shinhee Kim, Seungwon Go and Sangwan Kim, Ajou Univ., Korea
P22-8
Temperature Dependence of Power Generation Capacity of Cavity-free Planar Si Micro Thermoelectric Device
T. Hoshina 1, K. Abe 1, M. Tomita 1, T. Matsuki 1,2, S.Y.Y. Chung 1, H. Ikeda 3, and T. Watanabe 1, 1 Waseda Univ., 2 AIST and 3 Shizuoka Univ., Japan
P22-9
Consideration of Multiple 3D Bottleneck Barrier Heights on Vth Fluctuated by Ion Implantation to Source and Drain Extensions of SOI Tri-Gate FinFETs
Toshiyuki Tsutsumi, Meiji Univ., Japan
P22-10
Design of comb-shaped single-electron slime mold circuit and its applications to solving travelling salesman problem
Takuya Matsuoka and Takahide Oya, Yokohama Natl. Univ., Japan
P22-11
Improvement of noble metal-free ReRAM characteristics by insertion of thin SiOx layer at the ZrOx/electrode interfaces
Keito Toyama, Ryusuke Akiyama, Kento Yuki and Shinya Aikawa, Kogakuin Univ., Japan
P22-12
Effect of Resistance of Wiring on Power Generation Performance in Planar Micro Thermoelectric Generation Module
A. Kurosaki 1, M. Tomita 1, K. Oda 1, K. Abe 1, T. Matsuki 1,2, S.Y.Y. Chung 1, T. Watanabe 1, 1 Waseda Univ. and 2 AIST, Japan
Poster Session (2-3: Nanofabrication)
P23-1
Study on Silicidation Reaction of Fe-NDs with SiH4
Hiroshi Furuhata, Katsunori Makihara, Akio Ohta, Noriyuki Taoka, and Seiichi Miyazaki, Nagoya Univ., Japan
P23-2
Voice Data Augmentation for Classification Using Silver Selenide Nanowire Device Connecting to Neural Network Hardware
Takumi Kotooka, Yuichiro Tanaka, Hakaru Tamkoh, Yuki Usami, and Hirofumi Tanaka, Kyushu Inst. of Technol., Japan
P23-3
Synaptic emulation by Ag-Ag2S nanoparticles-based atomic switch
Oradee Srikimkaew 1,2, Saman Azhari 1, Yuki Usami 1 and Hirofumi Tanaka 1,2, 1 Kyushu Inst. of Technol., Japan and 2 Suranaree Univ. of Technol., Thailand
P23-4
N-O Co-Doped Sb2Te3 Chalcogenide for High Performance Artificial Synaptic Device
You Yin, Koji Niiyama and Takao Fujiwara, Gunma Univ., Japan

P23-5
Fabrication of TiO2/Au core-shell array for visible light responsive photocatalysts
Isami Nakamura, Kaito Oshio and Kouichi Takase, Nihon Univ., Japan		Withdrawn

P23-6
Magnetic properties of TiO2 nanoparticles pulverlized by a ball mill
Taiga Yamanouchi, and Kouichi Takase, Nihon Univ., Japan
P23-7
Femtosecond laser direct writing of layered pure hydroxyapatite based on nanoparticle assembly
Hiroaki Nishiyama, Shogo Nara and Feng Zhonggang, Yamagata Univ., Japan

P23-8
Fabrication of metal oxide 2D inverse opal film using ordered polystyrene spheres template
Yusuke Kiyomi, Takeshi Ito, Shoso Shingubara and Tomohiro Shimizu, Kansai Univ., Japan		P23-9
Supervised optimization of Boolean logic functions by in-materio reservoir computing using single-walled carbon nanotube/porphyrin polyoxometalate random network
Deep Banerjee, Saman Azhari, Yuki Usami and Hirofumi Tanaka, Kyushu Inst. of Technol., Japan
P23-10
Development of Pd Nanospheres (Core)/TiO2(Shell) Nanospheres Showing Surface Plasmon Resonance in a Near-Infrared Region for Photothermal Therapy
Yutaro Hayakawa, Kosuke Sugawa, and Joe Otsuki, Nihon Univ., Japan


P23-11
The critical role of single-walled carbon nanotubes in nonlinear spatiotemporal dynamics of carbon nanotubes-polyoxometalate network for reservoir computing
Saman Azhari, Deep Banerjee, Shuho Murazoe, Takumi Kotooka, Yuki Usami and Hirofumi Tanaka, Kyushu Inst. of Technol., Japan		P23-12
Direct Electrospray Patterning Deposition for Flexible Organic Devices
Ayaka Kanno, Takahisa Moriwaki, Hiroshi Yamauchi and Takashi Tadokoro, Tokyo Denki Univ., Japan
P23-13
Nonlinearity and memory function of in-materio reservoirs using Polyoxometalate /Single-Walled Carbon Nanotube Complex Random Network
Shuho Murazoe, Takumi Kotooka, Yuki Usami and Hirofumi Tanaka, Kyushu Inst. of Technol., Japan		P23-14
Promotion of perpendicular growth of silicon nanowires by MACE-formed surface nanoholes
Akio Uesugi, Syusuke Nishiyori, Koji Sugano, and Yoshitada Isono, Kobe Univ., Japan
P23-15
Refractive Index Susceptibility of Mie Resonance-Based Extinction Band of PbS nanocrystals
Masato Furuya，Kosuke Sugawa and Joe Otsuki, Nihon Univ., Japan
Poster Session (2-4: Inorganic Nanomaterials )
P24-1
Resistive switching and neuromorphic function of Pt/Ti0.96Co0.04O2-δ/Pt thin films by controlling interface state
T. Takada 1, Y. Yamaguchi 1, T. Tsuchiya 2 and T. Higuchi 1, 1 Tokyo Univ. of Sci. and 2 NIMS, Japan



P24-2
Charge transfer and conduction type conversion in n-type SnO2 thin films by nitrogen annealing
Kotaro Watanabe, Takuma Kawaguchi, Tomohiro Yamaguchi, Takeyoshi Onuma, Tohru Honda and Shinya Aikawa, Kogakuin Univ., Japan		P24-3
Understanding opto-electrical emission and absorption behavior in corrosion by-product of zinc
M. Jeem 1, M. Fujioka 1, M. Ono 1,2, S. Watanabe 1 and J. Nishii 1, 1 Hokkaido Univ. and 2 AGC, Japan
P24-4
The Fabrication of Mesoporous Single Crystal Ellipsoid TiO2 Nanoparticle with Enhanced Visible Light Photodegradation
Efficiency Zhehan Yu, Shilei Zhu, Lihua Zhang and Seiichi Watanabe, Hokkaido Univ., Japan
P24-5
SWCNT freestanding films decorated with Sb2Te3 nanoparticles and electrodeposited Sb2Te3 layers for thermoelectric applications
R. Eguchi and M. Takashiri, Tokai Univ., Japan		P24-6
Structural manipulation for solid electrolyte Na3OBr to improve ionic conductivity
Hiroaki Asakawa, Wei Shi, Mariko Murayama and Xinwei Zhao, Tokyo Univ. of Sci., Japan
P24-7
Metal decoration on bismuth telluride nanoplates using electroless plating
H. Yamazaki and M. Takashiri, Tokai Univ., Japan
Poster Session (2-5: Organic Nanomaterials)
P25-1
Blue emissive perovskite quantum dots with superior optical properties
Naoaki Oshita 1, Keisuke Kikuchi 1, Satoshi Asakura 1,2, Takayuki Chiba 1 and Akito Masuhara 1, 1 Yamagata Univ. and 2 Ise Chem., Japan
P25-2
Photoinduced phase transition of compatible polymer blends of side-chain liquid crystalline polymers containing azobenzene mesogens
Takumi Kokubo 1, Tatsunaga Nakajima 1, Naoki Hida 2, Takahiro Seki 2 and Shusaku Nagano 1, 1 Rikkyo Univ. and 2 Nagoya Univ., Japan
P25-3
Effect of spacer length on induced SmE phase in side-chain liquid crystalline copolymers by random copolymerization
Yuma Shibuya 1, Naoki Hida 2, Takahiro Seki 2 and Shusaku Nagano 1, 1 Rikkyo Univ. and 2 Nagoya Univ., Japan
P25-4
Synthesis and stabilization of high-performance perovskite quantum dots with novel cross-linkable ligands
Taisei Kimura 1, Ryohei Yamakado 1, Satoshi Asakura 1,2, Takayuki Chiba 1 and Akito Masuhara 1, 1 Yamagata Univ., and 2 Ise Chem., Japan
P25-5
Anisotropic SRG formation systems in monoaxially oriented liquid crystalline polymer films
Reona Kanazu 1, Mitsuo Hara 1, Syusaku Nagano 2 and Takahiro Seki 1, 1 Nagoya Univ. and 2 Rikkyo Univ., Japan
P25-6
Induced highly ordered smectic phases in side-chain liquid crystal polysiloxanes with binary mesogen mixtures by copolymerization and blending.
Naoki Hida 1, Tatsunaga Nakajima 2 and Takumi Kokubo 2, Mitsuo Hara 1, Shusaku Nagano 2 and Takahiro Seki 1, 1 Nagoya Univ. and 2 Rikkyo Univ., Japan
P25-7
Proton conductive side-chain liquid crystalline polymer system and photoalignment
Kazuya Hirata 1, Wang Fangfang 2, Yuki Nagao 2, Takahiro Seki 3 and Shusaku Nagano 1, 1 Rikkyo Univ., 2 JAIST and 3 Nagoya Univ., Japan
P25-8
Induced smectic E phase in binary polymer blends of in side-chain liquid crystal polymers.
Tatsunaga Nakajima 1, Naoki Hida 2, Takahiro Seki 2 and Shusaku Nagano 1, 1 Rikkyo Univ. and 2 Nagoya Univ., Japan
P25-9
OH- Conductivity and Water Uptake of Anion Exchange Ionomer
Fangfang Wang, Dongjin Wang and Yuki Nagao, JAIST, Japan
P25-10
Lyotropic liquid crystal property and organized structure in sulfonated polyimide thin films with oligooxyethylene side chains
Yuze Yao 1, Miaomiao Liu 1, Hayato Watanabe 2, Mitsuo Hara 2, Shusaku Nagano 3 amd Yuki Nagao 1, 1 JAIST, 2 Nagoya Univ. and 3 Rikkyo Univ., Japan
Poster Session (2-6: NanoTool)
P26-1
Speed switching of gliding microtubule motility by an electron beam
Hiroki Miyazako 1, Kai Uemura 1, Ryuzo Kawamura 2 and Takayuki Hoshino 1,3, 1 Univ. of Tokyo and 2 Saitama Univ. and 3 Hirosaki Univ., Japan
P26-2
Atomic resolution liquid cell scanning transmission electron microscopy
M. Takeguchi, X. Li and and K. Mitsuishi, NIMS, Japan
P26-3
Evaluation of Thermal Transport Properties of Single Crystal Silicon with Different Crystal Orientation by Nanoindentation Method
O. Norimasa, M. Hase, M. Hayamizu, H. Murotani and M.Takashiri, Tokai Univ., Japan
P26-4
Withdrawn		P26-5
Fabrication of an optomechanical resonator with a spiral bull’s eye antenna for the measurement of light wavelength
Reo Kometani, Penekwong Khemnat and Shin'ichi Warisawa, Univ. of Tokyo, Japan
Poster Session (3: Nanoimprint, Hybrid-NIL, Biomimetics, and Functional Surfaces)
P3-1
Smart design system for thermal nanoimprint process using machine learning
Ryuhei Yamamura, Kai Kameyama, Hideki Tanabe, Sou Tsukamoto, Hiroaki Kawata, Masaaki Yasuda and Yoshihiko Hirai, Osaka Pref. Univ., Japan
P3-2
Optimization of resist drop layout in nanoimprint lithography process
Yasutada Nakagawa 1, Takuya Kono 2 and Kazuhiro Takahata 2, 1 Toshiba and 2 KIOXIA, Jaapan
, Japan		P3-3
Lifetime Prediction of Release coating for UV-NIL using Line-patterned Silicon Mold
Atsuhiro Furuta and Jun Taiguchi, Tokyo Univ. of Sci., Japan
P3-4
Study on Filling Process of Molecular Weight Dispersive Resin for fine Cavity
Keisuke Nakajima, Masaaki Yasuda, Yuya Miyashita, Ryuhei Yamamura and Yoshihiko Hirai, Osaka Pref. Univ., Japan
P3-5
The Magnetic Molecularly Imprinted Polymers based on Screen-Printed Electrode for Albumin Protein Determination
Piyawan Leepheng, Dalawan Limthin, Korakot Onlaor, Benchapol Tunhoo, Darinee Phromyothin and Thutiyaporn Thiwawong, King Mongkut's Inst. of Technol. Ladkrabang, Thailand
P3-6
Fabrication of the glass microstructures by a low energy consumption
Yoshiyuki Doi, Yuji Hirai and Masatsugu Shimomura, Chitose Institute of Science and Technol., Japan
P3-7
Enhanced Sensitivity and Selectivity of Salbutamol Detection based on Reduced Graphene Oxide combined with Molecularly Imprinted Polymers (RGO/MIP)
Dalawan Limthin 1, Piyawan Leepheng 1, Korakot Onlaor 1, Benchapol Tunhoo 1, and Annop Klamchuen 2, Thutiyaporn Thiwawong 1 and Darinee Phromyothin 1, 1 King Mongkut's Institute of Technol. and 2 National Science and Technology Development Agency, Thailand
P3-8
The adhesion of marine benthic diatoms on the surfaces with hexagonal packed micro dimple arrays
Taiki kishigami 1, Takayuki Murosaki 2, Yasuyuki Nogata 3, Masatsugu Shimomura 1 and Yuji Hirai 1, 1 Chitose Institute of Sci. and Technol., 2 Asahikawa Medical Univ. and 3 Central Research Institute of Electric Power, Japan
Poster Session (4: BioMEMS, Lab on a Chip, and Nanobiotechnology)
P4-1
Proposal of chlorophyll concentration and a/b ratio measurement method using a filter-free multiple-wavelength detection sensor
Nobuhiro Watanabe, Yong-Joon Choi, Kazuhiro Takahashi, Seitaro Toda, Kotaro Takayama, Toshihiko Noda, and Kazuaki Sawada, Toyohashi Univ. of Technol., Japan
P4-2
Intracellular cargo delivery through electrochemical metal-organic hybrid nanogate
Bowen Zhang 1, Dinuo Zheng 1, Kazuhiro Oyama 1, Tsutomu Mikawa 2, Takeo Miyake 1,3, 1 Waseda Univ., 2 RIKEN and 3 JST-PRESTO, Japan
P4-3
Cell Separation and Concentration Microfluidic Chip for Allergy Diagnosis
Shunsuke Shinuchi 1, Koichiro Kobayashi 2, Yuhki Yanase 3 and Kenji Sakamoto 1, 1 Kyushu Inst. of Technol., 2 Natl. Inst. of Technol. Oshima College and 3 Hirosima Univ., Japan
P4-4
On-chip long-term perfusable microvascular network culture
Masataka Nakamura, Kotaro Nishikata, Yusuke Ninomiya and Nobuyuki Futai, Shibaura Inst. of Technol., Japan
P4-5
Improved Read-Out of an Automated Neuronal Cell Assay using Micro Patterned Micro Titer Plates fabricated by UV-NIL
M. Lohse 1, M.W. Thesen 1, A. Haase 2, M. Smolka 2, N. Briz Iceta 3, A. Ayerdi Izquierdo 3, I. Ramos 4, C. Salado 4 and A. Schleunitz 1, 1 micro resist technology GmbH, 2 Joanneum Research Materials, Austria, 3 TECNALIA and 4 Innoprot, Spain
P4-6
Quantitative Evaluation of a Single Exosome on a Plasmonic Chip with Fluorescence Microscope under the Transmitted-Light
K. Fukutomi, E. Fujimoto and K. Tawa, Kwansei Gakuin Univ., Japan
P4-7
Optimization of the spinning condition for simultaneously determination of raw milk components using lab-on-a-disc
P. Chamnan 1, M. Yingkajorn 1, P. Saengdee 2, W. Sripumkhai 2, P. Pattamang 2, N. Ranron 2, W. Jeamsaksiri 2, N. Atthi 2, K. Vongkamjan 1,3, 1
Prince of Songkla Univ., Thailand, 2 NECTEC and 3 Kasetsart Univ., Thailand"
Poster Session (5: Microsystem Technology and MEMS)
P5-1
Characteristics of Ni-Nb-Zr thin film amorphous alloy diaphragms annealed below crystallization temperature
F. Haga 1, T. Yamazaki 1, C. Oka 1, S. Hata 1, Y. Hoshino 2 and J. Sakurai 1, 1 Nagoya Univ. and 2 MIRISE Technologies, Japan
P5-2
Carbon nanomaterials integrated with silicone substrate for stretchable strain sensor applications
Zheng-Yan Lei 1, Hsin-Jou Wang 1, Cheng-Chun Huang 2, Ching-Yuan Su 2, Ching-Liang Dai 1 and Yao-Chuan Tsai 1, 1 Natl. Chung Hsing Univ. and 2 Natl. Central Univ., Taiwan
P5-3
Fabrication and characterization of coupled silicon phononic resonators with piezoelectric transducers
M. Kurosu, D. Hatanaka, H. Okamoto and H. Yamaguchi, NTT, Japan
P5-4
Broadband stop filters using H-shaped metamaterial at the THz region
Ying Huang, Taiyu Okatani and Yoshiaki Kanamori, Tohoku Univ., Japan
P5-5
Observation of materials under the load by in-situ tensile test
Fuyu Shimada，Masashi Nakatani，Mie Kawabata，Kei Ameyama and Taeko Ando, Ritsumeikan Univ., Japan
P5-6
Smoothing of silicon micropore X-ray optics by thermal annealing
Aoto Fukushima 1, Yuichiro Ezoe 1, Kumi Ishikawa 1, Daiki Ishi 1, Sae Sakuda 1, Tomoki Uchino 1, Ayata Inagaki 1, Yoko Ueda 1, Hiromi Morishita 1, Luna Sekiguchi 1, Takatoshi Murakawa 1, Yukine Tsuji 1, Masaki Numazawa 2, Kazuhisa Mitsuda 3 and Yoshiaki Kanamori 4, 1 Tokyo Metropolitan Univ., 2 RIKEN, 3 Natl. Astronomical Observatory of Japan and 4 Tohoku Univ., Japan
P5-7
Non-invasive heart rate measurement system using Laser doppler flowmetry with body motion artifact noise reduction algorithm for Husbandry training
Takumi Hiejima 1, Hirofumi Nogami 1, Aya Saito 2, Kazuyuki Ban 3, Ryo Takigawa 1and Jumpei Arata 1, 1 Kyushu Univ., 2 Omuta City Zoo and 3 Toyohashi Zoo and Botanical Park, Japan
P5-8
Effect of B-doped Al/Ni multilayer film on cracking NiAl layer after reactive bonding
Kenta Kodama and Takahiro Namazu, Kyoto Univ. of Advanced Sci., Japan
P5-9
Electron Beam Induced Silicon Quantum Dots for Strength Control of Silicon Oxide Film
Shingo Kammachi and Takahiro Namazu, Kyoto Univ. of Advanced Sci., Japan
P5-10
Pressure-Controlled Ultrasound Probe for Reliable Imaging in Breast Cancer Diagnosis
Yukina Matsumoto, Ayu Katsumura and Norihisa Miki, Keio Univ., Japan
P5-11
POLYCRYSTALLINE-SILICON BASED DOUBLE-GATE ION-SENSITIVE FIELDEFFECT TRANSISTORS USING APTES/SiO2 STACKED SENSING MEMBRANE
Jun-Rong Chen 1, Henry J.H. Chen 1, Shin-Lun Tseng 1and Sun-Zen Chen 2, 1 Natl. Chi Nan Univ. and 2 Natl. Tsing Hua Univ., Taiwan
P5-12
Consideration of the mechanism of single-layered Cu2O nanospheres bonded on metal substrates in irradiating near-infrared femtosecond laser pulses
Shohei Murayama 1, Kien Vu Trung Nguyen 1, Masateru Anzai 1, Hideyuki Magara 2, Takahiro Nakamura 2 and Mizue Mizoshiri 1, 1 Nagaoka Univ. of Technol. and 2 Tohoku Univ., Japan
P5-13
Improved MEMS-based hydrogen sensor
Maeum Han 1, Young Sam Kim 1,2, Yijun. Yang 2, H.K. An 2, S.H. Kong 1 and Daewoong Jung 2, 1 Kyungpook Natl. Univ. and 2 KITECH., Korea
P5-14
Evaluation of thermal effusivity of intermetallic compounds by modulated thermoreflectance method
Fumiya Nakamura, Taishi Murakami and Shugo Miyake, Kobe City College of Technol., Japan
P5-15
Acceleration measurement in dental implants
Hirofumi Nogami, Takumi Hiejima, Ryo Takigawa and Yasuyuki Matsushita, Kyushu Univ., Japan
P5-16
DEVELOPMENT OF MICROFLUIDIC-BASED TASTE SENSOR WITH LIPID POLYMER MEMBRANE
Yuma Kurihara 1, Ryo Takigawa 2, Fumihiro Sassa 2 and Yusuke Tahara 1, 1 Shinshu Univ. and 2 Kyushu Univ., Japan
P5-17
Surface activated bonding of Au thin microbumps using ultra-violet treatment
Toshiki Maeakawa 1, Kaname Watanabe 1, Hirofumi Nogami 1, Yuichiro Kurokawa 1, Yusuke Tahara 2 and Ryo Takigawa 1, 1 Kyushu Univ. and 2 Shinshu Univ., Japan
P5-18
Continuous Size Classification Device for Marine Microplastics by Pinched Flow Fractionation
Kentaro Shimomoto and Sumito Nagasawa, Shibaura Inst. of Technol., Japan

October 27, Online (Plenary, Symposium, Regular Session)
Room ARoom BRoom C
27A-1-0
10:00
Opening Remark
Takahiro Kozawa, Osaka Univ., Japan
27A-1-1
10:10
NANOPORES AND NANOGAPS FOR SENSING SINGLE BIOMOLECULES (Plenary)
Masateru Taniguchi, Osaka Univ., Japan
27A-1-2
10:50
Patterning at the atomic scale, can EUV get us there? (Pleanry)
Patrick Naulleau, Lawrence Berkeley National Laboratory
27A-1-3
11:30
Computational Lithography: Accelerating the Future (Plenary)
Vivek Singh, NVIDIA, USA
Lunch Time
27A-2: Symp. A. EUVL Stochastics Symposium: Overcoming the Challenge of Stochastics for High Resolution EUV Lithography I
13:30-15:15, October 27, 2021
Chairs:
Shinji Okazaki (Alitecs)
Tomoki Nagai (JSR)
27B-2: Nanofabrication I
13:30-14:40, October 27, 2021
Chairs:
Kouichi Takase (Nihon Univ.)
Tomohiro Shimizu (Kansai Univ.)
27C-2: CNT & TMDC I
13:30-14:50, October 27, 2021
Chairs:
Yasumitsu Miyata (Tokyo Metropolitan Univ.)
Ryota Negishi (Toyo Univ.)
27A-2-1
13:30
EUVL Stochastics Symposium (Invited)
Takahiro Kozawa, Osaka Univ., Japan
27B-2-1
13:30
Development of Digital Type CMOS-MEMS Cointegrated
Pressure Sensor Using Cost-Effective Minimal Fab Tools
(Invited)
Yongxun Liu 1, I. Akita 1, T. Matsukawa 1, H. Tanaka 1,
K. Koga 2, K. Nemoto 1, S. Khumpuang 1,2, M. Nagao 1,
Y. Morita 1, and S. Hara 1, 2, 1 AIST and MINIMAL, Japan
27C-2-1
13:30
Time-domain thermoreflectance study on the correlation
between heat and charge carrier flows via vertical
electrolyte-gating device
Kan Ueji 1, Nobuhiro Muto 1, Yuya Matsuoka 1, Yota Ichinose 1,
Yohei Yomogida 1, Takashi Yagi 2, Jana Zaumseil 3,
Kazuhiro Yanagi 1, 1 Tokyo Metropolitan Univ., 2 AIST, Japan
and 3 Univ. Heidelberg, Germany

27A-2-2
13:45
Development status of EUV Chemically Amplified Resist (Invited)
Kazuishi Tanno, Yuki Fukumura, Tatsuya Fujii, Kenta Suzuki, Yasuhiro Yoshii, Tasuku Matsumiya, Takuya Ikeda, Yoshitaka Komuro and Shinichi Hidesaka, Tokyo Ohka Kogyo, Japan

27B-2-2
14:00
Transmission color sheet using 2D plasmonic metasurface
embedded in elastomer nanosheet
Tay Shan Wei 1, Toshinori Fujie 2, Kazuaki Sawada 1, Kazuhiro
Takahashi 1, 1 Toyohashi Univ. of Technol. and 2 Tokyo Tech., Japan
27C-2-2
13:50
Hall effect in random networks of single-wall carbon
nanotubes
Yohei Yomogida 1, Kanako Horiuchi 1, Ryotaro Okada 1,
Hideki Kawai 1, Yota Ichinose 1, Hiroyuki Nishidome 1,
Kan Ueji 1, Natsumi Komatsu 2, Weilu Gao 3, Junichiro Kono 2
and Kazuhiro Yanag 1, 1 Tokyo Metropolitan Univ., Japan,
2 Rice Univ. and 3 Univ. of Utah, USA
27A-2-3
14:15
The status of stochastic issues - Photon stochastic and Chemical stochastic - (Invited)
Toru Fujimori, FUJIFILM Corporation, Japan
27B-2-3
14:20
Thinning of silicon nitride films for in situ environmental cell by
gas cluster ion beam
Masaya Takeuchi, Reki Fujiwara, and Noriaki Toyoda,
Univ. of Hyogo, Japan
27C-2-3
14:10
Air-stable, efficient n-type doping of MoS2 by salt–crown
ether treatment
Hiroto Ogura 1, Masahiko Kaneda 1, Yusuke Nakanishi 1,
Yoshiyuki Nonoguchi 2, Jiang Pu 3, Mari Ohfuchi 4,
Toshifumi Irisawa 5, Hong En Lim 1, Takahiko Endo 1,
Kazuhiro Yanagi 1, Taishi Takenobu 3 and Yasumitsu Miyata 1,
1 Tokyo Metropolitan Univ., 2 Kyoto Inst. of Technol.,
3 Nagoya Univ., 4 Fujitsu and 5 AIST, Japan
27A-2-4
14:45
The study of chain scission type photoresist for EUV lithography (Invited)
H. Matsumoto 1, M. Hoshino 1, A. Shirotori 1,2, D. De Simone 2 and G. Vandenberghe 2, 1 ZEON, Japan and 2 IMEC, Belgium

27C-2-4
14:30
Improved method for determining layer number of two-dimensional materials using optical microscopy
Miki Miyazaki, Akinobu Kanda and Hikari Tomori, Univ. of Tsukuba, Japan
27A-3: Symp. A. EUVL Stochastics Symposium: Overcoming the Challenge of Stochastics for High Resolution EUV Lithography II
15:45-17:15, October 27, 2021
Chairs:
Shinji Okazaki (Alitecs)
Tomoki Nagai (JSR)
27B-3: Nanofabrication II
15:10-16:10, October 27
Chairs:
Ryu Hasunuma (Univ. of Tsukuba)
Takeru Okada (Tohoku Univ.)
27C-3:Symp. B. Forefront of low-dimensional nanomaterials for
future applications
15:30-18:00, October 27, 2021
Chairs:
Daiyu Kondo (Fujitsu)
Atsushi Ando (AIST)
27A-3-1
15:45
Study on beam-induced transient reaction process of carboxylic acids used as ligands of metal oxide nanocluster resists (Invited)
Yusa Muroya, Osaka University, Japan
27B-3-1
15:10
In-materio voice classification based on self-doped polyaniline
by binarized convolutional neural network
Yuki Usami 1,2, Yuichiro Tanaka 1, Hakaru Tamukoh 1, Takuya Matsumoto 2, Wilfred G. van der Wiel 3 and Hirofumi Tanaka 1,2, 1 Kyushu Inst. of Technol., 2 Osaka Univ., Japan and 3 Univ. of Twente, The Netherlands		27C-3-1
15:30
Impurity control of hexagonal Boron Nitride Crystals obtained by flux growth process (Invited)
Takashi Taniguchi, NIMS, Japan
27A-3-3
16:15
Fundamental Study of the Origin of the Stochastics in EUV Resist (Invited)
Takeo Watanabe, Testuo Harada, and Shinji Yamawaka, Univ. of Hyogo, Japan

27B-3-2
15:30
Reservoir Computing Hardware-based Ag/Ag2S Core-shell
Nanoparticles for Supervised Learning
Dang Thien Tan 1,2, Banerjee Deep 1, Yuki Usami 1 and
Hirofumi Tanaka 1,2, 1 Kyushu Inst. of Technol., Japan and
2 Ho Chi Minh Univ. of Technol., Vietnam
27C-3-2
16:00
Room temperature in-plane ferroelectricity in SnS (Invited)
Kosuke Nagashio, Univ. of Tokyo, Japan
27A-3-4
16:45
The Lithography Roadmap and the Impact of Stochastics (Invited)
Mark Neisser, Tan Kah Kee Innovation Laboratory, China
27B-3-3
15:50
Demonstration of deep learning with molecular-gap atomic
switches using a sulfurized Ag active electrode
Yuta Iwakiri and Tsuyoshi Hasegawa, Waseda Univ., Japan
27C-3-3
16:30
C60-Nanowire Two-State Resistance Switching (Invited)
Kazuhito Tsukagoshi 1,2, Hiroshi Suga 1,2 and Yukiya Umeta 1,2, 1 NIMS and 2 Chiba Inst. of Technol., Japan
27C-3-4
17:00
CARBON NANOTUBE TECHNOLOGIES FOR FLEXIBLE ELECTRONICS (Invited)
Yutaka Ohno, Nagoya Univ., Jpaan
27C-3-5
17:30
On the Fundamental Mechanisms that underpin Process Technology for Atomically Thin 2D Films (Invited)
Stephan Hofmann, Univ. of Cambridge, UK
27A-4: Symp. A. EUVL Stochastics Symposium: Overcoming the Challenge of Stochastics for High Resolution EUV Lithography III
18:30-20:00, October 27, 2021
Chairs:
Seiji Nagahara (Tokyo Electron)
Tomoki Nagai (JSR)
27B-4: Nanofabrication III
16:10-17:10, October 27
Chairs:
Tsuyoshi Hatano (Nihon Univ.)
Wataru Mizubayashi (AIST)
27A-4-1
18:30
High-NA EUV Imaging and stochastics: From system introduction towards low-k1 extension (Invited)
Eelco van Setten, Jan van Schoot, Ruben Maas, Claire van Lare, Friso Wittebrood, Gijsbert Rispens, Gerardo Bottiglieri, John McNamara, Jo Finders, ASML Netherlands, The Netherlands
27B-4-1
16:10
Characterization of Electronic Charged States of High Density Self-aligned Si-based Quantum Dots Evaluated with AFM/Kelvin Probe Technique
Yuki Imai, Katsunori Makihara, Akio Ohta, Noriyuki Taoka, and Seiichi Miyazaki, Nagoya Univ., Japan
27A-4-2
19:00
Materials for Extreme Ultraviolet Lithography: State of the Art and Challenges towards High-NA (Invited)
Danilo De Simone, Imec, Belgium
27B-4-2
16:30
Ordered Nanodot Array Fabrication for quantum Dot
Solar Cell
You Yin, Keisuke Yanagisawa, Takashi Akahane and
Rento Mayuzumi, Gunma Univ., Japan
27A-4-3
19:30
Stochastic challenges for the ultimate resolution in photolithography (Invited)
Yasin Ekinci, Paul Scherrer Inst., Switzerland
27B-4-3
16:50
Improved thermal treatment of polydimethylsiloxane (PDMS)
for double casting of microstructures
Shichen Li, Son Van Nguyen, and Bong-Kee Lee,
Chonnam Natl Univ., Korea

October 28, Online (Symposium, Regular Session)
Room ARoom BRoom C
28A-1: Symp. A. EUVL Stochastics Symposium: Overcoming the Challenge of Stochastics for High Resolution EUV Lithography IV
9:00-10:30, October 28, 2021
Chairs:
Takahiro Kozawa (Osaka Univ.)
Seiji Nagahara (Tokyo Electron)		28B-1: TMDC II
9:00-10:10, October 28
Chairs:
Haruka Omachi (Nagoya Univ.)
Taishi Takenobu (Nagoya Univ.)
28A-1-1
9:00
Traversing from 0.33 NA to 0.55 NA EUV lithography: a EUV resist perspective (Invited)
Anna Lio, Intel, USA
28B-1-1
9:00
Evolutions of the Dirac Fermions in Monatomic Layers (Invited)
Iwao Matsuda, Univ. of Tokyo, Japan
28A-1-2
9:30
EUVL Adoption to 7nm Versal Production (Invited)
Toshiyuki Hisamura, Xilinx, USA
28B-1-2
9:30
Improved synthesis of WS2 nanotubes with relatively small diameters by tuning sulfurization timing and reaction temperature
Md. Ashiqur Rahman 1,2, Yohei Yomogida 1, Mai Nagano 1, Ryoga Tanaka 1, Yasumitsu Miyata 1, and Kazuhiro Yanagi 1, Tokyo Metropolitan Univ., Japan and 2 Comilla Univ., Bangladesh
28A-1-3
10:00
Fast quantification of EUV stochastic defect probabilities using Gaussian Random Field models (Invited)
Azat Latypov 1, Chih-I Wei 2, Peter De Bisschop 3, Gurdaman Khaira 1 and Germain Fenger 1, 1Siemens Digital Industries Software, USA, 2 Siemens Digital Industries Software and 3 IMEC, Belgium
28B-1-3
9:50
Influence of Intercalation on the Thermal Conductance on Artificially Stacked MoS2
Wenyu Yuan　1, Kan Ueji 1, Takashi Yagi 2, Takahiko Endo 1, Hong En Lim 1, Yasumitsu Miyata 1, Yohei Yomogida 1, Kazuhiro Yanagi 1, 1 Tokyo Metropolitan Univ. and 2 AIST, Japan
28A-2: Symp. A. EUVL Stochastics Symposium: Overcoming the Challenge of Stochastics for High Resolution EUV Lithography V
11:00-12:30, October 28, 2021
Chairs:
Takahiro Kozawa (Osaka Univ.)
Seiji Nagahara (Tokyo Electron)
28B-2: Graphene, Nanocarbon
10:30-11:30, October 28, 2021
Chairs:
Susumu Okada (Univ. of Tsukuba)
Masaki Tanemura (Nagoya Inst. of Technol.)
28C-2: BioMEMS, Lab on a Chip, and Nanobiotechnolog I
11:00-12:00, October 28, 2021
Shinya Kumagai (Meijo Univ.)
28A-2-1
11:00
Applying Stochastic Simulation to Study Defect Formation in EUV Photoresists (Invited)
Lawrence S. Melvin III 1, Ulrich Welling 2, Yudhishthir Kandel 1, Zachary A. Levinson 1, Hironobu Taoka 3, Hans-Jurgen Stock 2, Wolfgang Demmerle 2, 1 Synopsys, USA, 2 Synopsys, Germany and 3 Nihon Synopsys, Japan


28B-2-1
10:30
Oxygen Resistance Enhancement of Graphene-Oxide-Semiconductor Planar-Type Electron Sources Using Hexagonal Boron Nitride
Naoyuki Matsumoto 1,2, Yoshinori Takao 1, Masayoshi Nagao 2 and Katsuhisa Murakami 2, 1 Yokohama Natl. Univ. and 2 AIST, Japan
28C-2-1
11:00
Detection system of bacteria, Legionella by photogate type
optical sensor
Yuto Honda 1, Yong-Joon Choi 1, Kensuke Murakami 1,
Kazuhiro Takahashi 1, Toshihiko Noda 1, Kazuaki Sawada 1,
Hiromu Ishii 1, Katsuyuki Machida 2, Hiroyuki Ito 2,
Satoshi Miyahara 3, Yasuhiko Nikaido 3 and Mitsumasa Saito 3,
1 Toyohashi Univ. of Technol., 2 Tokyo Tech and 3 Medical Univ.
of Occupational and Environmental Health, Japan
28A-2-2
11:30
DEFECT REDUCTION IN EUV LITHOGRAPHY MATERIALS USING HIGH PERFORMANCE FILTRATION (Invited)
R. Beera 1, L.D' Urzo 2, T. Umeda 3, T. Mizuno 3, A. Singh 1, R. Shick 1, P. Foubert 4 and W. Drent 4, 1 Pall, USA, 2 Pall, Belgium, 3 Nihon Pall, Japan and 4 imec, Belgium

28B-2-2
10:50
Flexible piezoresistive stretchable strain sensor based on laser-induced graphene
Yu-Hsin Yen 1, Chao-Shin Hsu 1, Cheng-Chun Huang 2, Ching-Yuan Su 2 and Yao-Chuan Tsai 1, 1 Natl. Chung Hsing Univ. and 2 Natl. Central Univ., Taiwan
28C-2-2
11:20
Highly sensitive passive glucose sensor based on parity-time (PT) symmetric resonators
T. Takamatsu 1, Y. Shijie 1, T. Xiao 1, L. Hu 1, Y. Cui 1, Q. Zhang 1 and T. Miyake 1,2, 1 Waseda Univ. and 2 JST-PRESTO, Japan
28A-2-3
12:00
Addressing the Defectivity Challenges of EUV Lithography (Invited)
David Medeiros, Entegris, USA
28B-2-3
11:10
Carbon Onion Stored Mechanical Energy Response to Space Radiation
K. Xie　1, V.M. Ayres 1, H.C. Shaw 2 and A. Hirata 3, 1 Michigan State Univ., 2 NASA Goddard Space, USA and 3 Tokyo Tech., Japan
28C-2-3
11:40
Wireless electrochromic soft contact lenses controlled by a dual-band wireless power transfer system
Lunjie Hu, Taiki Takamatsu, Lu Chen, Te Xiao and Takeo Miyake, Waseda Univ., Japan
Lunch Time
28A-3: Symp. A. EUVL Stochastics Symposium: Overcoming the Challenge of Stochastics for High Resolution EUV Lithography VI
13:30-15:00, October 28, 2021
Chairs:
Takahiro Kozawa (Osaka Univ.)
Shinji Okazaki (Alitecs)		28B-3: Nanowires/Quantum Dots
13:30-15:00, October 28, 2021
Chair:
Shinjiro Hara (Hokkaido Univ.)
28C-3: BioMEMS, Lab on a Chip, and Nanobiotechnolog II
13:30-15:00, October 28, 2021
Chair:
Atsushi Miura (Hokkaido Univ.)
28A-3-1
13:30
Update of >300W High Power LPP-EUV Source Challenge IV for Semiconductor HVM (Invited)
Hakaru Mizoguchi, Hiroaki Tomuro, Yuichi Nishimura, Hirokazu Hosoda, Tamotsu Abe, Hiroshi Tanaka, Yukio Watanabe, Yutaka Shiraishi, Tatsuya Yanagida, Georg Soumagne, Fumio
Iwamoto, Shinji Nagai, Yoshifumi Ueno, Takashi Suganuma, Gouta Niimi, Takayuki Yabu, Tsuyoshi Yamada, Hiroaki Nakarai and Takashi Saitou, Gigaphoton, Japan		28B-3-1
13:30
Metal Oxide Nanostructures and Nanodevices for Artificial Odor/Smell Integrated Systems (Invited)
Takeshi Yanagida, Univ. of Tokyo, Japan
27C-3-1
13:30
Electrochemical control of enzyme cascade reactions with a protonic biotransducer
Yukun Chen 1, Mingyin Cui 1, Bingfu Liu 1, Noriyo Mitome 2 and Takeo Miyake 1,3, 1 Waseda Univ., 2 Tokoha Univ. and 3 JST-PRESTO, Japan
28A-3-2
14:00
EUV resist material and process optimization for reducing stochastics effects in EUV lithography (Invited)
Seiji Nagahara, Tokyo Electron, Japan
28B-3-2
14:00
Formation and optical characteristics of GaN:Eu/GaN core-shell nanowires grown by organometallic vapor phase epitaxy
T. Otabara, J. Tatebayashi, S. Hasegawa, S. Ichikawa, M. Ashida, and Y. Fujiwara, Osaka Univ., Japan
28C-3-2
13:50
Bottom-up fabrication of bicontinuously structured and
diffusion-functionalized microneedles as a platform for
sustained drug delivery applications
Takuya Miyazaki 1,2, Kevin Barthelmes 1,2, Kiyoshi Ikehara 1,
Yuji Miyahara 2 and Akira Matsumoto 1,2, 1 KISTEC and
2 Tokyo Medical and Dental Univ., Japan
28A-3-3
14:30
A study of the effect of EUV masks on the EUVL stochastics (Invited)
Yasutaka Morikawa, DNP, Japan		28B-3-3
14:20
AlGaOx Nanowires Phosphor Obtained by Wet Oxidation of AlGaAs Providing a White Light Under UV-LED Illumination
Takeru Tanigawa, Rikuo Tsutsumi and Fumitaro Ishikawa, Ehime Univ., Japan
28C-3-3
14:10
Development of shape prediction model for nanoparticles in liquid based on deep learning analysis of Brownian motion
Hiroaki Fukuda 1, Hiromi Kuramochi 1, Hiroaki Takehara 1,2, and Takanori Ichiki 1,2, 1 Univ. of Tokyo and 2 iCONM, Japan
28B-3-4
14:40
Near-infrared dual-wavelength surface-emitting light source using a vertical cavity resonating with discrete emission wavelengths of InAs quantum dots
J. Oshima 1, N. Ozaki 1, H. Oda 2, E. Watanabe 3, H. Ohsato 3, N. Ikeda 3, Y. Sugimoto 3 and R. Hogg 4, 1 Wakayama Univ., 2 CIST, 3 NIMS, Japan and 4 Univ. Glasgow, UK

28C-3-4
14:30
In-Mold Flexible Hybrid Electronics (FHE) Based on Advanced Wafer-Level Packaging with Chiplets (Invited)
Takafumi Fukushima, Tohoku Univ., Japan
28A-4-1: Symp. A. EUVL Stochastics Symposium: Overcoming the Challenge of Stochastics for High Resolution EUV Lithography VII
15:15-16:45, October 28, 2021
Seiji Nagahara (Tokyo Electron)
Shinji Okazaki (Alitecs)
28B-4: Nanoelectronics
15:30-17:00, October 28
Chair:
Yuuichiro Mitani (Tokyo City Univ.)
28C-4: Symp. C. Biological Phenomena and Functions within Micro- and Nanospace
16:00-18:00, October 28
Chairs;
Kazuaki Furukawa (Meisei Univ.)
Akihide Hibara (Tohoku Univ.)
28-A4
15:15
Panel Discussion
Seiji Nagahara, Tokyo Electron (TEL), Japan,
Anna Lio, Intel, USA,
Eelco van Setten, ASML, Netherlands
Danilo De Simone, imec, Belgium
Patrick Naulleau, Lawrence Berkeley National Lab., USA
Takeo Watanabe, Univ. of Hyogo, Japan
Harry Levinson, HJL Lithography, USA		28B-4-1
15:30
Ultra-sharp three-terminal switch using nano-scale phase transition material (Invited)
Takeaki Yajima, Kyushu Univ., Japan
28C-4-1
16:00
MICROFLUIDIC DEVICES FOR CLINICAL APPLICATIONS (Invited)
Manabu Tokeshi 1,2, 1 Hokkaido Univ. and 2 Nagoya Univ., Japan
28B-4-2
16:00
Dual switching operation of vertical gate-all-around transistor using InGaAs/GaSb core-shell nanowires on Si
Hironori Gamo, Junichi Motohisa and Katsuhiro Tomioka, Hokkaido Univ., Japan
28C-4-2
16:30
Biomolecular Needling Systems for Medicals (Invited)
Beomjoon Kim, Univ. of Tokyo, Japan
28B-4-3
16:20
Experimental Investigation of Interface Defect Properties in PtOx/ZnO Schottky Diodes by Deep Level Transient Spectroscopy
Mikiya Matsumura, Takahisa Tanaka and Ken Uchida, Univ. of Tokyo, Japan
28C-4-3
17:00
Additive fabrication for low-cost, large-area bioelectronics (Invited)
Philipp Rinklin, Leroy Grob, Sabine Zips and Bernhard Wolfrum, Technical Univ. of Munich, Germany
28B-4-4
16:40
Electronic state analysis of rectangular cross-sectional GeSn nanowires with various geometries and Sn composition
M. Sato 1, H. Tanaka 1,2, and T. Kimoto 1, 1 Kyoto Univ. and 2 Osaka Univ., Japan		28C-4-4
17:30
RECENT PROGRESS IN METASURFACE BIOSENSORS (Invited)
Masanobu Iwanaga, NIMS, Japan
28A-5: Symp. D. Enhancing technology for next generation lithography I
17:15-19:15, October 28, 2021
Chairs:
Seiji Nagahara (Tokyo Electron)
Kouji Asakawa (KIOXIA)
28B-5: Atomic Layer Processing (ALP) I
18:30-20:10, October 28, 2021
Chairs:
Hiroshi Arimoto (AIST)
Norifusa Sato (NIMS)
28B-5: Atomic Layer Processing (ALP) II
20:20-22:10, October 28, 2021
Chairs:
Fumikazu Mizutani (Kojundo Chemical Lab.)
Shigeo Yasuhara (Japan Advanced Chemicals)
28A-5-1
17:15
UV nanoimprint lithography with laser-drilled screen printing, fluorescence alignment, and hybridized resist materials (Invited)
Masaru Nakagawa, Tohoku Univ., Japan
28B-5-1
18:30
Atomic Layer Processing: A toolbox for fabricating novel functional hybrid materials (Invited)
Mato Knez, CIC nano, GUNE BRTA, Spain
28B-5-5
20:20
Vapor-phase infiltration for microelectronics applications (Invited)
Chang-Yong Nam, Brookhaven National Laboratory, USA
28A-5-2
17:45
Chemically Tailored Block Copolymers For Patternable Nanostructured Materials (Invited)
Teruaki Hayakawa, Tokyo Tech., Japan
28B-5-2
19:00
Process Overview of Area Selective Atomic Layer Deposition for Advanced Bottom-up Nanofabrication (Invited)
Woohee Kim, Hanyang Univ., Korea
28B-5-6
20:50
Surface reaction via cyclic HI and O2 plasma for Ge digital etching
H. Ishii　1,2, W. H. Chang 2, H. Ishii 2, M. Ke 1 and T. Maeda 1,2, 1 Tokyo Univ. of Sci. and 2 AIST, Japan
28A-5-3
18:15
Development of non-expanding Polymers after Vapor Phase Infiltration and Evaluation of their Etch-resistance (Invited)
Norikatsu Sasao, Shinobu Sugimura and Koji Asakawa, KIOXIA, Japan
28B-5-3
19:30
PMA Evaluation of TiN ALD in InGaAs Nanosheet MOSFETs
T. Go, M. Kitamura, T. Gotow and Y. Miyamoto, Tokyo Tech., Japan
28B-5-7
21:10
High Temperature Atomic Layer Deposition of Hafnium Oxide using Homoleptic Hafnium Aminoalkoxide Precursor
Akihiro Nishida 1,2, Tomoharu Yoshino 2, Yoshiki Ooe 2 and Yasutaka Matsuo 1, 1 Hokkaido Univ., 2 ADEKA, Japan
28A-5-4
18:45
Al2O3 nanostructures fabricated by Sequential Infiltration Synthesis in Cylinder Forming PS-b-PMMA Block Copolymer Thin Films (Invited)
Michele Perego 1, Alessia Motta 1, Marco Bigatti 1, Gabriele Seguini 1, Federica E. Caligiore 1, Alessia Motta 1, Grazia Tallarida 1, Elena Cianci 1, Soonmin Yim 2, Paul Nealey 2, Francesc, Perez Murano 3, Guido Rademaker 4, Ahmed Gharbi 4, Raluca Tiron 4, 1 IMM-CNR Agrate Unit, Italy, 2 Univ. of Chicago, USA, 3 IMB-CNM, CSIC, Spain and 4 CEA-LETI MINATEC, France
28B-5-4
19:50
Growth mechanism of the atomic layer deposition of GaN thin films using pentamethylcyclopentadienyl gallium and combinations of NH3/H2 plasma and N2 plasma
M. Mizui, N. Takahashi, S. Higashi and F. Mizutani, Kojundo Chemical Lab., Japan
28B-5-8
21:30
Multistep inorganic synthesis with atomic layer deposition to fabricate 3-dimensional THz phononic structure
Norifusa Satoh, NIMS, Japan
28B-5-9
21:50
Ferroelectric HfZrO2 downscaling limit on Silicon using O3, and H2O as oxidation agents
Heber Hernandez-Arriaga 1, Jaidah Mohan 1, Yong Chan Jung 1, Jin-Hyun Kim 1, Chang-Han Rho 2, Rino Choi 2 and Jiyoung Kim 1, 1 Univ. of Texas, USA and 2 Inha Univ., Korea

October 29, Online (Symposium, Regular Session)
Room ARoom BRoom C
29A-1: Symp. D. Enhancing technology for next generation lithography II
9:30-10:30, October 29, 2021
Chairs:
Masaru Nakagawa (Tohoku Univ.)
Norikatsu Sasao (Kioxia)

29C-1: Microsystem Technology and MEMS Session I
Chair:
Sumito Nagasawa (Shibaura Inst. of Technol.)
29A-1-2
9:30
Leveraging Selective Deposition to Enable Next Generation EUV Lithography and Novel Patterning Integration (Invited)
Katie lutker-Lee, TEL Technology Center, America, USA		29C-1-1
9:00
Raman Spectroscopic Analysis for Nondestructive Estimation of Bundled Carbon Nanotube Defects Leading to Failure
Tomohito Kino and and Takahiro Namazu, Kyoto Univ. of Advanced Sci., Japan
29A-1-3
10:00
Post-Polymerization Modification of PS-b-PMMA: A Strategy for Fine-Tuning the Microphase-Separated Nanostructures (Invited)
Takuya Isono 1, Ken Miyagi 2, Takahiro Dazai 2, Kazufumi Sato 2, Redouane Borsali 3, Takuya Yamamoto 1, Kenji Tajima 1 and Toshifumi Satoh 1, 1 Hokkaido Univ., 2 Tokyo Ohka Kogyo, Japan and 3 Univ. Grenoble Alps, France		29C-1-2
9:20
Comparison in Sintered Silver Die Attach Failure between Thermal Shocked Test and Four-point Bending Test
Keisuke Wakamoto 1,2, Yuga Kumakiri 2, Takukazu Otsuka 1, Ken Nakahara 1 and Takahiro Namazu 2, 1 ROHM and 2 Kyoto Univ. of Advanced Sci., Japan
29C-1-3
9:40
Evaluation of microscale thermal characteristics of cold-rolled aluminum alloy by thermoreflectance method
Souto Yamashita and Shugo Miyake, Kobe City College of Technol., Japan
29C-1-4
10:00
Study on the thermal behavior of Carbon-Fiber-Reinforced-Plastic (CFRP) sheet using a periodic heating method
Sho Nagata 1, Tsuyoshi Nishi 1, Hiromichi Ohta 1, Takahiro Igarashi 2 and Shugo Miyake 3, 1 Ibaraki Univ., 2 Japan Atomic Energy Agency and 3 Kobe City College of Technol., Japan
29A-2: Patterning Materials
11:00-12:30, October 29, 2021
Chairs:
Kazumasa Okamoto (Osaka Univ.)
Kazuyo Morita (Oji Holdings)

29B-2: NanoTool
10:10-12:20, October 29, 2021
Chairs:
Koji Sugano (Kobe Univ.)
Takayuki Hoshino (Hirosaki Univ.)

29C-2: Microsystem Technology and MEMS Session II
Chair:
Ryo Takigawa (Kyushu Univ.)
29A-2-1
11:00
Light-driven fabrication of helical nanostructures and their optical applications(Invited)
Dong Ki Yoon, KAIST, Korea

29B-2-1
10:10
Applications of femtosecond laser amplifier to microprocesses for biological cells (Invited)
Yoichiroh Hosokawa, NAIST, Japan		29C-2-1
11:00
Drift and Noise Characteristics of Sensor Module With A Single Axis Gold Proof Mass MEMS Accelerometer for Micro Muscle Sound Measurement
Akira Onishi, Kohei Shibata, Akihiro Uchiyama, Katsuyuki Machida, Taiki Ogata, Noboru Ishihara, Hirotaka Uchitomi, Tso-Fu Mark Chang, Masato Sone, Yoshihiro Miyake, Kazuya Masu and Hiroyuki Ito, Tokyo Tech., Japan
29A-2-2
11:30
Effects of Resist-CrN Interaction on Resist Patterns of Chemically Amplified Resists Used for Electron Beam Lithography
Akihiro Konda 1, Kazumasa Okamoto 1, Takahiro Kozawa 1, and Takao Tamura 2, 1 Osaka Univ. and 2 NuFlare Technol., Japan

29B-2-2
10:50
Fabrication and observation of nanopore in two-dimensional materials using Helium ion microscope (Invited)
Kentaro Kawai 1, Shogo Sugita, Kohei Noda, Takumi Hayashi 1, Kenta Arima 1, Kazuya Yamamura 1, and Osamu Tabata 2, 1 Osaka University and 2 Kyoto Univ. of Advanced Science, Japan
29C-2-2
11:20
Micro-Hexapod Robot Having an Origami-like SU-8 Coated Rigid Frame
Kenjiro Sugimoto and Sumito Nagasawa, Shibaura Inst. of Technol., Japan
29A-2-3
11:50
Decarboxylation and polymerization processes of metal resist ligands
T. Otsuka 1, Y. Muroya 1, T. Kozawa 1, T. Ikeda 2, Y. Komuro 2, and D. Kawana 2, 1 Osaka Univ. and 2 Tokyo Ohka Kogyo, Japan
29B-2-3
11:20
Design of Scanning Path for Dynamic Virtual Cathode Tool
Ken Sasaki, Kenki Nomura and Takayuki Hoshino, Hirosaki Univ., Japan
29C-2-3
11:40
Sensor and Actuator Double Functional Component for Micro Robot Leg Joints
T. Hara and S. Nagasawa, Sibaura Inst. of Technol., Jaan
29A-2-4
12:10
The effects of tetramethyl ammonium hydroxide concentration on the dissolution of poly(4-hydroxystyrene)
Naoki Tanaka 1, Kyoko Matsuoka 1, Takahiro Kozawa 1, Takuya Ikeda 2, Yoshitaka Komuro 2, and Daisuke Kawana 2, 1 Osaka Univ. and 2 Tokyo Ohka Kogyo, Japan		29B-2-4
11:40
Characterization of nanogap with gold nanoparticle dimer controlled by four-point bending for electrical and optical single molecule measurement
Yuanzhi Chang, Takayuki Sumitomo, Akio Uesugi, Koji Sugano and Yoshitada Isono, Kobe Univ., Japan
29B-2-5
12:00
Highly sensitive vibration measurement method of nanomechanical resonator using convolutional neural network
Kohei Tsumune, Shin'ichi Warisawa and Reo Kometani, Univ. of Tokyo, Japan
29A-3: Advanced Lithography and Patterning
13:30-15:00 October 29, 2021
Chairs:
Sachiko Kobayashi (KIOXIA)
Tetsuo Harada (Univ. of Hyogo)
29B-3: Nanomaterials
13:30-15:20, Ocotober 29, 2021
Chairs:
Jun Kano (Okayama Univ.)
Takao Shimizu (NIMS)

29C-3: Microsystem Technology and MEMS Session III
Chair:
Yoshihiro Hasegawa (Hiroshima City Univ.)
29A-3-1
13:30
Challenge of attenuated phase shift mask for EUV lithography (Invited)
Ikuya Fukasawa, Yohei Ikebe, Takeshi Aizawa, Tsutomu Shoki, and Takahiro Onoue, HOYA, Japan

29B-3-1
13:30
(Invited)
Nobuhiro Matsushita, Tokyo Tech., Japan
29C-3-1
13:30
SOI-MEMS device for fabrication and physical properties measurement of single-crystal silicon nanogap with (111) cleavage plane surfaces
Masaki Shimofuri, Yoshikazu Hirai, Amit Banerjee and Toshiyuki Tsuchiya, Kyoto Univ., Japan
29A-3-2
14:00
EUV stochastic resist modeling in high NA
R. Tsuzuki and K. Oyama, Tokyo Electron, Japan
29B-3-2
14:00
Crystalline Phase Transition in Two-dimensional Ruthenate Nanosheets Induced by Cobalt-doping
Leanddas Nurdiwijayanto and Takaaki Taniguchi, NIMS, Japan
29C-3-2
13:50
Sequential Automatic Assembling Method for Microstructure Using Shape Memory Polymer Units
K. Kojima and S. Nagasawa, Shibaura Inst. of Technol., Japan
29A-3-3
14:20
The measurement of the refractive index n and k value of the EUV resist by EUV reflectivity measurement method
Yosuke Ohta 1, Atsushi Sekiguchi 1, Tetsuo Harada 2 and Takeo Watanabe 2, 1 Litho Tech Japan and 2 Univ. of Hyogo, Japan
29B-3-3
14:20
Role of Ca in CaF2 incorporated In2O3 transparent conductive films
Kaito Oe, Shun Mori, Kotaro Watanabe, Hiroki Nagai, Tomohiro Yamaguchi, Takeyoshi Onuma, Tohru Honda and Shinya Aikawa, Kogakuin Univ., Japan
29C-3-3
14:10
Miniaturized pneumatic finger integrated with FPCB strain sensor
Yi-Chun Chuang 1, Tun-Yi Cheng 1, Yu-Ching Lin 2, Takahito Ono 2 and Yao-Chuan Tsai 1, 1 Natl. Chung Hsing Univ., Taiwan and 2 Tohoku Univ., Japan
29A-3-4
14:40
INVESTIGATION OF PROJECTION EXPOSURE SYSTEM USING A PAIR OF PARABOLIC MIRRORS
Toshiyuki Horiuchi and Hiroshi Kobayashi, Tokyo Denki Univ., Japan
29B-3-4
14:40
Design of high fluorescence Sm3+ doped anatase type TiO2 thin film by machine learning using experimental XRD patterns
Yuri Tamamoto, Mariko Murayama and Xiwei Zhao, Toyo Univ., Japan
29C-3-4
14:30
MAGNETIC DRIVEN TENTACLES FOR BIO-MIMIC
MOTION
Toshiki Murakami and Fujio Tsumori, Kyushu Univ., Japan
29B-3-5
15:00
Conductivity Improvement of Anti-perovskite Solid Electrolyte Na3OX for Sodium Batteries
Wei Shi 1, Masataka Ohta 1, Mariko Murayama 1,2 and Xinwei Zhao 1, 1 Tokyo Univ. of Sci. and 2 Toyo Univ., Japan
29A-4:Electron and Ion Beam Technologies
15:30-17:00, October 29, 2021
Chairs:
Makoto Sakakibara (Hitachi)
Hiroshi Yamashita (Nuflare Technol.)
Junichi Yanagisawa (Univ. of Shiga Pref.)

29B-4: Nano Devices
15:40-17:30, October 29, 2021
Chairs:
Takashi Tsuchiya (NIMS)
Kazuto Hatakeyama (AIST)
29C-4: Organic Nanomaterials
15:30-17:20, October 29, 2021
Chairs:
Akito Masuhara (Yamagata Univ.)
Shusaku Nagano (Rikkyo Univ.)
29A-4-1
15:30
Deep learning model for 3D profiling of high-aspect-ratio features using high-voltage CD-SEM (Invited)
Wei Sun 1, Yasunori Goto 2, Takuma Yamamoto 2 and Keiichiro Hitomi 1, 1 Hitachi and 2 Hitachi High-Tech, Japan
29B-4-1
15:40
in situ observation of electrochemical lithiation/delithiation of Si thin film electrodes by X-ray photoelectron spectroscopy (Invited)
Takuya Masuda, NIMS and Hokkaido Univ., Japan
29C-4-1
15:30
Highly proton-conductive polymer thin films with organized structure and molecularly oriented structure (Invited)
Yuki Nagao, JAIST, Japan
29A-4-2
16:00
Development of electron beam lithography technique for fabrication of highly integrated silicon quantum bits
Kimihiko Kato, Yongxun Liu, Shigenori Murakami, Yukinori Morita and Takahiro Mori, AIST, Japan
29B-4-2
16:10
Anomalous Surface Ion conduction of Ce1-xSmxO2-δ Thin Film with Mixed Valence State
Go Notake 1, Daiki Nishioka 1, Ukyo Kobayashi 1, Hideaki Murasawa 1, Daisuke Shiga 2, Koji Horiba 3, Hiroshi Kumigashira 2 and Tohru Higuchi 1, 1 Tokyo Univ. of Sci., 2 Tohoku Univ. and 3 KEK, Japan

29C-4-2
16:00
Weakly Acidic Filler-filled Type Polymer Electrolyte Membrane for PEFC
Tomohiro Nohara 1, Yukina Suzuki 1, Keisuke Tabata 1, Takaaki Saito 1, Toshihiko Arita 2, Akito Masuhara 1, 1 Yamagata Univ. and 2 Tohoku Univ., Japan
29A-4-3
16:20
Characterization of Ar beam from the new fast atom beam source
R. Morisaki 1, T. Yamazaki 1, C. Oka 1, J. Sakurai 1, T. Akao 2, T. Takahashi 2, H. Tsuji 2, N. Ohno 1, and S. Hata 1, 1 Nagoya Univ., 2 NGK INSULATORS, Japan
29B-4-3
16:30
Fabrication of nanostructured Pt counter electrodes for electrochemical sensors
Ivan Turkevych, AIST, Japan

29C-4-3
16:20
Establishing precise control conditions of the emission wavelength on perovskite quantum dots by crystal lattice distortion
Ryota Sato 1, Rikuo Suzuki 1, Yusaku Morikawa 1, Satoshi Asakura 1,2, Takayuki Chiba 1 and Akito Masuhara 1, 1 Yamagata Univ. and 2 Ise Chem., Japan
29A-4-4
16:40
Universal Liquid Metal Alloy Ion Sources (LMAIS) for FIB nanofabrication
T. Richter 1*, P. Mazarov 1, F. Meyer 1, W. Pilz 1, L. Bischoff 2, and N. Klingner 2, 1 Raith and 2 Helmholtz-Zentrum Dresden-Rossendorf, Germany		29B-4-4
16:50
Metal-assisted chemical etching of silicon nanowires for nanocomposite field effect transistors
Chun-Teng Chen, Jung-Chun Tseng, Hao-Jen Cheng and Gen-Wen Hsieh, Natl. Yang Ming Chiao Tung Univ., Taiwan

29C-4-4
16:40
Multi polymer layer-coated silica nanoparticles for polymer electrolyte membrane prepared by RAFT polymerization with particles
Keisuke Tabata 1, Haruki Nakazaki 1, Tomohiro Nohara 1, Toshihiko Arita 2 and Akito Masuhara 1, 1 Yamagata Univ. and 2 Tohoku Univ., Japan
29B-4-5
17:10
Demonstration of flexible transparent conductive film using B-doped In2O3
Shun Mori, Yukiya Ichinoseki, Kotaro Watanabe, Kaito Murano, Kaito Oe, Hiroki Nagai, Tomohiro Yamaguchi, Takeyoshi Onuma, Tohru Honda and Shinya Aikawa
Kogakuin Univ., Japan		29C-4-5
17:00
Ultrapure-blue Light-emitting Electrochemical Cell Using ν-DABNA
Yuki Tanaka 1, Jiang Pu 1, Takuji Hatakeyama 2 and Taishi Takenobu 1, 1 Nagoya Univ. and 2 Kwansei Gakuin Univ., Japan
29A-5: Nanoimprint, Hybrid-NIL, Biomimetics, and Functional Surfaces
17:30-20:00, October 29, 2021
Chairs:
Akihiro Miyauchi (Tokyo Medical and Dental)
Jun Taniguchi (Tokyo Univ. of Sci.)
Kazuma Kurihara (AIST)
Junpei Sakurai (Nagoya Univ.)
29A-5-1
17:30
Technology Transfer from Reflection to Transmission on the Optical Devices inspired by Morpho Butterfly (Invited)
Akira Saito 1,2, Kazuma Yamashita 1, Takuma Hattori 1,2, and Yuji Kuwahara 1,2, 1 Osaka Univ. and 2 RIKEN SPring-8 Center, Japan
29A-5-2
18:00
A new adhesive mechanism learning from the nanofilaments and mucus of a clingfish sucker
Kazuma Tsujioka 1, Yasutaka Matsuo 2, Yuji Hirai 1 and Masatsugu Shimomura 1, 1 Chitose Inst. of Sci. and 2 Hokkaido Univ., Japan
29A-5-3
18:20
Development of a Morpho butterfly-inspired optical diffuser with high controllability
Kazuma Yamashita 1, Takuma Hattori 1,2, Yuji Kuwahara 1,2 and Akira Saito 1,2, 1 Osaka Univ. and 2 RIKEN SPring-8, Japan
29A-5-4
18:40
Nanoimprint Lithography Methods for Achieving sub-3nm Overlay
Shintaro Aichi 1, Kenji Yamamoto 1, Hideyuki Wada 1, Yoshio Suzaki 1, Kazuhiro Sato 1, Satoshi Iino 1, Satoru Jimbo 1, Osamu Morimoto 1, Mitsuru Hiura 1, Nilabh Roy 2, Anshuman Cherala 2 and Jin Choi 2, 1 Canon, Japan and 2 Canon Nanotechnologies, USA
29A-5-5
19:00
Fabrication of self-standing thin films with small through-holes by imprint and photolithography hybrid process
H. Tanabe, H. Kawata, M. Yasuda, Y. Hirai and H. Kikuta, Osaka Pref. Univ., Japan
29A-5-6
19:20
SUB-MICRON IMPRINT PATTERNING OF COMPOUND SHEET WITH CERAMIC NANO POWDER
Ryoma Taira and Fujio Tsumori, Kyushu Univ., Japan
29A-5-7
19:40
Robust PDMS Pattern and Hexagonal Guard Ring Micro-structure with Hydrophobic Properties for Marine Antifouling Applications
Nithi Atthi 1, Witsaroot Sripumkhai 1, Pattaraluck Pattamang 1, Rattanawan Meananeatra 1, Oraphan Thongsook 1, Norabadee Ranron 1, Krynnaras Pankong 1, Wutthinan Jeamsaksiri 1, Yoichiro Kitani 2, Shouzo Ogiso 2 and Nobuo Suzuki 2, 1 NECTEC, Thailand and 2 Kanazawa Univ., Japan
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