MNC 2026 Program
MNC 2026 Session Plan
MNC 2026 Program
MNC 2026 Speaker’s List
| MNC 2026 Speaker's List (Program No., Paper title, Authors and Affiliation) | ||||
|---|---|---|---|---|
| Date | Program No. | Start | Paper Title | Authors and Affiliation |
| Nov. 11 | 11M-1 | 9:30 | Advances in Spin-based Quantum Computing in Silicon (Plenary) | Seigo Tarucha, RIKEN, Japan |
| Nov. 11 | 11M-2 | 10:10 | Advanced Organic Optoelectronic Devices: Precise Control of Charge-Transfer States (Plenary) | Chihaya Adachi, Kyushu Univ., Japan |
| Nov. 11 | 11M-3 | 11:10 | High-NA Lithography at the Turning Point: Preparing for Industry Insertion (Plenary) | Geert Vandenberghe, imec, Belgium |
| Nov. 11 | 11M-4 | 11:50 | Reconfigurable Nonlinear-Processing Units (Plenary) | Wilfred van der Wiel, Univ. of Twente, The Netherlands |
| Nov. 11 | 11A-1 | 13:45 | (Special Talk) | Greet Storms, ASML, The Netherlands |
| Nov. 11 | 11A-2 | 14:25 | (Invited) | Luciana Meli, IBM Research, USA |
| Nov. 11 | 11A-3 | 14:55 | Dissolution mechanism of resist films (Invited) | Takahiro Kozawa, The Univ. of Osaka, Japan |
| Nov. 11 | 11A-4 | 15:40 | Extending the Scaling Roadmap Through Dry Patterning Innovation (Invited) | Anuja De Silva, Lam Research, USA |
| Nov. 11 | 11A-5 | 16:10 | The importance of the atmospheric environment in EUV post-exposure events for metal oxide resists : from stability to optimization (Invited) | Ivan Pollentier, imec, Belgium |
| Nov. 11 | 11A-6 | 16:40 | Novel Patterning Technologies enabling High NA EUV Logic and DRAM features scaling (Invited) | Arame Thiam, Tokyo Electron Europe, Belgium |
| Nov. 11 | 11B-1 | 13:45 | High-fidelity readout and control of silicon spin qubits (Invited) | Kenta Takeda, RIKEN, Japan |
| Nov. 11 | 11B-2 | 14:15 | Silicon qubits fabricated using industrial 300mm wafer processes (Invited) | Ross C.C. Leon, Quantum motion, UK |
| Nov. 11 | 11B-3 | 15:10 | Exploring Spin Qubits with Floating Electrons (Invited) | Erika Kawakami, RIKEN, Japan |
| Nov. 11 | 11B-4 | 15:40 | Tunnelling spectroscopy of Andreev states in superconductor-semiconductor hybrids (Invited) | Sadashige Matsuo 1,2, 1 Science Tokyo and 2 RIKEN, Japan |
| Nov. 11 | 11B-5 | 16:10 | Development of Frequency-Multiplexed Quantum Repeaters for Long-Distance Quantum Communication (Invited) | Tomoyuki Horikiri, Yokohama National Univ., Japan |
| Nov. 11 | 11C-1 | 13:40 | Multimode Color printing Based on Asymmetric Reflection and Transmission of Silicon Nanoparticle Layers | Hiroto Yamana, Hiroshi Sugimoto and Minoru Fujii, Kobe Univ., Japan |
| Nov. 11 | 11C-2 | 14:00 | Correlation Between Strain and Optical Properties in Multilayered SiGe Nanodots with Different Stacking Arrangements | Hiromu Kudo 1, Yuta Ito 1,2, Wei-Chen Wen 3, Yuji Yamamoto 3 and Atsushi Ogura 1, 1 Meiji Univ., 2 JSPS Research Fellow and 3 IHP, Japan |
| Nov. 11 | 11C-3 | 14:20 | Nanosilica-Guided Crystal-Structural and Optical Engineering of Eu-Doped Calcium Silicate Nanophosphors for Photonic Devices and Biodegradable Bioimaging Probes | Hyun-Joo Woo 1,2, 1 Changwon National Univ., Korea and 2 Michigan State Univ., USA |
| Nov. 11 | 11C-4 | 14:40 | Investigation of Electric Double-Layer Effects Using an InLi-Gated B doped Diamond-type Electric Double-Layer Transistor | R. Maruyama 1,2, D. Nishioka 1, T. Takei 1, H. Kitano 1,2, W. Namiki 1, Y. Shingaya 1, K. Terabe 1 and T. Tsuchiya 1,2, 1 NIMS and 2 Tokyo Univ. of Sci., Japan |
| Nov. 11 | 11C-5 | 15:20 | Effects of non-stoichiometric bismuth oxide and bismuth incorporation site on current non-linearity and threshold voltage of Bi-doped ZnO thin-film varistors | Efi Dwi Indari, Shinjiro Yagyu, Naoki Ohashi and Takahiro Nagata, NIMS, Japan |
| Nov. 11 | 11C-6 | 15:40 | Correlation between local crystal structure and electronic-state changes in Nb-doped (Ga0.75In0.25)2O3 thin films | Masaharu Watanabe 1,2, Masaaki Kobata 3, Tatsuo Fukuda 3, Atsushi Ogura 1 and Takahiro Nagata 2,1, 1 Meiji Univ., 2 NIMS and 3 JAEA, Japan |
| Nov. 11 | 11C-7 | 16:00 | Investigation of NO2 Gas Sensors Using In2O3 Nanospheres Under Different Hydrogen Annealing Conditions | Mu-Ju Wu1, Cheng-Yuan Li 1, Ching-Ting Lee 1,2 and Hsin-Ying Lee 1, 1 National Cheng Kung Univ. and 2 Yuan Ze Univ., Taiwan |
| Nov. 11 | 11C-8 | 16:20 | Geometric Space Analysis of Inorganic Crystals: Ferroelectrics and Ion Conductors | Michiko Yoshitake and Takahiro Nagata, NIMS, Japan |
| Nov. 11 | 11D-1 | 13:40 | Self-Assembled Nanomaterials:from Fundamentals to Applications (Invited) | Kaoru Tamada, Kyushu Univ., Japan |
| Nov. 11 | 11D-2 | 14:10 | Continuous-Flow Electrorotation System for High-Throughput Electrophysical Analysis of Single Cells | Sooyeon Kim, Ryusei Yanase, Daisuke Sekiguchi, Misa Ishimura and Masahiro Motosuke, Tokyo Univ. of Sci., Japan |
| Nov. 11 | 11D-3 | 14:30 | Image analysis of cell membrane for elucidating mechanism of plasma gene transfer | Ori Tanaka, Ryoji Gonta, Ryunosuke Tsuji and Shinya Kumagai, Meijo Univ., Japan |
| Nov. 11 | 11D-4 | 14:50 | Evaluating the Reservoir Computing Performance of a Particle-Driven Dynamic Aqueous Microfluidic Platform | Muzhen Xu and Hirofumi Tanaka, Kyushu Inst. of Technol., Japan |
| Nov. 11 | 11D-5 | 15:30 | Written in water: interfacial behavior of water molecules and anti-biofouling property (Invited) | Tomohiro Hayashi, Science Tokyo, Japan |
| Nov. 11 | 11D-6 | 16:00 | Microfabrication of Neural Electrodes Using Self-Doped PEDOT | Toichiro Goto, Koji Sakai, Yosuke Mizuno, Taiki Otomo and Aya Tanaka, NTT, Japan |
| Nov. 11 | 11D-7 | 16:20 | High-performance procalcitonin biosensing based on sol–gel HfxZr1-xO2 thin films | Tung-Ming Pan 1,2, Li-Sin Wang 1, Hong-Yang Ding 1 and Shao-Hsuan Chang 1, 1 Chang Gung Univ. and 2 Chang Gung Memorial Hospital, Taiwan |
| Nov. 11 | 11D-8 | 16:40 | Nanofabricated Structures for Lymphocyte Mechanostimulation – from Fundamental Immuno-Mechano-Sensing to Advances in Immunotherapy | Mark Schvartzman, Ben-Gurion Univ. of the Negev, Israel |
| Nov. 12 | 12A-1 | 9:00 | Status of EUV Lithography R&D (Invited) | Tsumoru Shintake, OIST, Japan |
| Nov. 12 | 12A-2 | 9:30 | CD-RSoXS: Chemically Sensitive 3D Metrology for EUV Patterning and Next-Generation 3D Semiconductor Nodes (Invited) | Cheng Wang, Lawrence Berkeley National Lab., USA |
| Nov. 12 | 12A-3 | 10:10 | All-Dry Processing Strategies for Semiconductor Technologies (Invited) | Howard Fairbrother 1 , Patrick M. Eckhert 1, Paul Hanrahan 1, Kayley E. Waltz 1, Peter Corkery 1, Oleg Kostko 2, Tom J. Kempa 1 and Michael Tsapatsis 1, 1 Johns Hopkins Univ. and 2 Lawrence Berkeley National Lab., USA |
| Nov. 12 | 12A-4 | 10:40 | High-Precision Electron-Beam Fabrication of Variable-Line-Spacing Blazed Gratings on Curved Silicon (Invited) | Kevin Hofhuis 1, Nazanin Samadi 1, Bjarke A. Frederiksen 1, Konstantins Jefimovs 1, Analía F. Herrero 2,3, Tino Seliger 2, Frank Siewert 2, Bas Ketelaars 4, Christiaan Zonnevylle 4, Vitaliy A. Guzenko 1 and Christian David 1, 1 PSI Center for Photon Science, Switzerland 2 Helmholtz-Zentrum Berlin für Materialien und Energie, Germany, 3 Physikalisch-Technische Bundesanstalt, Germany and 4 Raith B.V., The Netherlands |
| Nov. 12 | 12A-5 | 11:10 | Electromagnetic Field Observations for Novel Materials by Electron Holography (Invited) | Toshiaki Tanigaki, Hitachi, Ltd., Japan |
| Nov. 12 | 12A-6 | 12:00 | Marine Antifouling Technology by Hydrophilic Polymer Brush Nano Layers (Invited) | Motoyasu Kobayashi, Kogakuin Univ., Japan |
| Nov. 12 | 12A-7 | 12:30 | Development of molecular dynamics simulation of pattern formation in UV nanoimprint | Hiroto Wakamatsu, Yoshihiko Hirai and Masaaki Yasuda, Osaka Metropolitan Univ., Japan |
| Nov. 12 | 12A-8 | 12:50 | Fabrication of Triangular Nanofluidic Channels with Heterogeneous Semiconductor Materials via Nanoimprint Lithography | Yi-Hsin Wang 1, Chung-Hsiang Lin 2, Kang-Yuan Lee 2 and Chao-Min Cheng 1, 1 National Tsing Hua Univ. and 2 Quantum NIL, Taiwan |
| Nov. 12 | 12A-9 | 14:00 | Wiggling Metrology for High NA EUVL | Gian Lorusso 1, Danilo De Simone 1, Hyo Seon Suh 1, Roberto Fallica 1, Gianluca Martini 1, Sahel Habashieh 1, Stijn Schoofs 1, Diziana Vangoidsenhoven 1, Philippe Foubert 1, Nemanja Peric 1, Remi Vallat 1, Laurent Souriau 1, Chris Mack 2, Junghwan Moon 3, Anne-Laure Charley 1 and Kurt Ronse 1, 1 imec, Belgium, 2 Fractilia LLC, USA and 3 Samsung Electronics, Korea |
| Nov. 12 | 12A-10 | 14:20 | Process optimization for high NA P28 DRAM hexagonal contact holes | Wonchan Lee, Honggu Im, Sara Paolillo, Dieter Van Den Heuvel and andreas Frommhold, imec, Belgium |
| Nov. 12 | 12A-11 | 14:40 | Importance of high-NA and CAR in vertical tip-to-tip patterning for MD layer scaling | Sujan K. Sarkar 1, Yusuke Wako 2, Marc Demand 3, Arame Thiam 3, Alec Dorfner 4, HungYu Chang 4, Chimaobi Mbanaso 5, Tsann-Bim Chiou 6 and Victor M. Blanco 1, 1 Imec, Belgium, 2 Tokyo Electron Miyagi, Japan, 3 Tokyo Electron Europe, Belgium, 4 Tokyo Electron America, USA, 5 TEL Manufacturing and Engineering of America, USA and 6 ASML Taiwan, Taiwan |
| Nov. 12 | 12A-12 | 15:00 | Evaluation of Resist-Process-Induced Aggregation by Reflection-Mode RSoXS | Ayumu Tanaka 1, Shinji Yamakawa 1, Masashi Yoshimura 2, Naoki Hayase 1 and Tetsuo Harada 1, 1 Univ. of Hyogo and 2 SPring-8 Service, Japan |
| Nov. 12 | 12B-1 | 09:00 | Polyhistidine-Tagged Removable Oriented-Antibody Functionalization onto Epitaxial Graphene Film on SiC Substrate | Masayoshi Watanabe, Hiromu Matsumura, Hiroshi Takashima, Takashi Ikuta, Yasuhide Ohno, Atsushi Tabata and Hideaki Nagamune, Tokushima Univ., Japan |
| Nov. 12 | 12B-2 | 09:20 | Impact of Graphene/Sumanene/Graphene resistive devices on low power spiking neural network circuit design | Oliver Velasco 1, Hyunjun Kim 2, Yuichiro Mitani 2, Kota ando 1, Tetsuya Asai 1 and Takao Marukame 1, 1 Hokkaido Univ. and 2 Tokyo City Univ., Japan |
| Nov. 12 | 12B-3 | 9:40 | On-chip optoelectronic devices based on nanocarbon materials (Invited) | Hideyuki Maki 1,2, 1 Keio Univ. and 2 Graphenory, Japan |
| Nov. 12 | 12B-4 | 10:10 | Investigation of the Response Mechanism of an Epitaxial Graphene FET pH Sensor on SiC Substrate | Kouji Ueno, Chikato Furukawa, Takashi Ikuta, and Yasuhide Ohno, Tokushima Univ., Japan |
| Nov. 12 | 12B-5 | 10:50 | Selective transfer of horizontally aligned single-walled carbon nanotubes using sublimable substance for device applications | K. Ogata, R. Fujiwara, S. Okita, Y. Yamaguchi, Y. Kanai, K. Otsuka and S. Chiashi, The Univ. of Tokyo, Japan |
| Nov. 12 | 12B-6 | 11:10 | Large-Area Lateral Alignment of WS₂ Nanotubes Enabled by Epitaxial Nanowire Templates | Hongyun Yao, Ena Hayama, Sayuki Oka, Kazuki Nagashima, Hiromichi Ohta and Yohei Yomogida, Hokkaido Univ., Japan |
| Nov. 12 | 12B-7 | 11:30 | Energetics and electronic structure of graphene monolayer encapsulated in hexagonal boron nitride monolayers | Mina Maruyama and Susumu Okada, Univ. of Tsukuba, Japan |
| Nov. 12 | 12B-8 | 11:50 | Control Synthesis of 2D MoTe2 and High-Performance Photodetectors | Yuwei Wang, Yating Li, Shiyu Wei, Fengyuan Zhang and Mingsheng Xu, Zhejiang Univ., China |
| Nov. 12 | 12B-9 | 12:10 | Light-Induced Anti-Ambipolar WSe2 Transistor for Optically Reconfigurable Synapse-Neuron Integrated Neuromorphic Devices | Jihoon Huh 1, Jeongyeol Park 1, Seung-Ji Lo 1, Yohan Lee 1, Su Jin Jo 1, Narae Lee 1, Jae Hyun Kim 1 and Moonsang Lee 1,2, 1 Inha Univ. and 2 MSGSoultion, Korea |
| Nov. 12 | 12B-10 | 12:30 | Strain and Symmetry Engineering in Atomically-Thin Chiral Light-Emitting Device | Tenta Kitamura 1, Haruto Yoshida 1, Takahiko Endo 2. , Mina Maruyama 3, Yanlin Gao 3, Susumu Okada 3, Hiroo Suzuki 4, Yasuhiko Hayashi 4, Yasumitsu Miyata 2, Shun Fujii 5, Hao Ou 1, Jiang Pu 1, 1 Inst. of Sci. Tokyo and 2 NIMS, 3 Univ. of Tsukuba, 4 Okayama Univ. and 5 Keio Univ, Japan |
| Nov. 12 | 12B-11 | 14:00 | Oxidative Exfoliation of Graphite into 2D Nanocarbons (Invited) | Yuta Nishina, Okayama Univ., Japan |
| Nov. 12 | 12B-12 | 14:30 | Frozen Electric Double Layers Enable Redox-Window-Unlimited Ultrahigh Current Injection in Monolayer Light-Emitting Devices | Koshi Oi 1, Hao Ou 2, Takahiko Endo 3, Jiang Pu 2, Yasumitsu Miyata 2, Akitoshi Nakano 1 and Taishi Takenobu 1, 1 Nagoya Univ., 2 Inst. of Sci. Tokyo and 3 NIMS, Japan |
| Nov. 12 | 12B-13 | 14:50 | BEOL-Compatible Two-Dimensional MoSe2 Schottky-Barrier Transistors for On-Chip Thermal Sensing | Dylan Tua 1, Viktor Labuntsov 1, Onoruoiza David Shaibu 1, Luke N. Holtzman 2, Aarbaj Mundaganur 1, Shahabaj Mundaganur 1, Katayun Barmak 2, Paras Prasad 1, Vasili Perebeinos 1, Nobuyuki Aoki 3 and Jonathan P. Bird 1,3, 1 Univ. at Buffalo, the State Univ. of New York, 2 Columbia Univ., USA and 3 Chiba Univ., Japan |
| Nov. 12 | 12C-1 | 09:00 | Unveiling the Ultrafast Photoinduced Charge Carrier Dynamics in PbBi2S4 Grown CsPbBr3 Nanorods for Enhanced Carrier Transfer. | Anil Chazhoor Asokan, Ramesh Raju, Malar Auxilia Francis, Shreya Rajeevan, Maarit Karppinen and Harri Lipsanen, Aalto Univ., Finland |
| Nov. 12 | 12C-2 | 09:20 | Near-Infrared Luminescent Nanoparticles Enable Olaparib Delivery for Radiosensitized Image-Guided Theranostics | Tsai-Lan Liao 1, Chia-Ying Lee 2, Hsi-Feng Tu 1, Fei-Ting Hsu 3 and Ming-Hsien Chan 1, 1 National Yang Ming Chiao Tung Univ., 2 Far Eastern Memorial Hospital and 3 National Central Univ., Taiwan |
| Nov. 12 | 12C-3 | 09:40 | Investigation of Synthesis Conditions for Wadalite Prepared from Weathered Biotite via the Molten Salt Method | Tomoya Wada 1, Masakazu Muraguchi 1, Masato Oda 2, Hiroyuki Ishii 3, Kosetsu Hayakawa 4 and Mitsunori Honda 4, 1 Hokkaido Univ. of Sci., 2 Wakayama Univ., 3 Univ. of Tsukuba and 4 JAEA Pioneer Lab., Japan |
| Nov. 12 | 12C-4 | 10:00 | High Temperature Ferroelectricity in Wurtzite (Al,B)N Thin Films | Dilan Priyankara Wijekoon 1, Kazuki Okamoto 1, Daiki Shibayama 1, Ian Mercer 2, Shinya Kondo 4, Soshun Doko 1,3, Naoko Matsui 3, Toshikazu Irisawa 3, Tomoaki Yamada 4, Koji Tsunekawa 3, Jon-Paul Maria 2 and Hiroshi Funakubo 1, 1 Science Tokyo, Japan, 2 Pennsylvania State Univ., USA, 3 Canon ANELVA and 4 Nagoya Univ., Japan |
| Nov. 12 | 12C-5 | 10:40 | Nanoscale Oxide Semiconductor Transistor Technology for Memory Application (Invited) | Masaharu Kobayashi, The Univ. of Tokyo, Japan |
| Nov. 12 | 12C-6 | 11:10 | Two-dimensional (2D) Materials for Chemoresistive Sensing: Current Challenges and Hybrid Solutions (Invited) | Tung Tran, Adelaide University, Australia |
| Nov. 12 | 12C-7 | 11:40 | Unexpected Gate-Length Dependence of Subthreshold Swing in n- and p-MOSFETs at Cryogenic Temperatures | Takumi Katori 1, 2, Hidehiro Asai 1, Hiroshi Oka 1, Kimihiko Kato 1, Takumi Inaba 1, Yuika Kobayashi 1, Takashi Nakayama 1, Satoshi Moriyama 2 and Takahiro Mori 1, 1 AIST, 2 Tokyo Denki Univ., Japan |
| Nov. 12 | 12C-8 | 12:00 | Performance and Reliability Enhancement of Low-Temperature ALD Deposited Double-Layer AFE-HZO FETs via 2-nm ALD-TiN Internal Metal Gate Insertion | Kun Tao Lin, Yu Yun Wang, Shu Chieh Chang, Kuan-Wen Huang and Tien Sheng Chao, National Yang Ming Chiao Tung Univ., Taiwan |
| Nov. 12 | 12C-9 | 12:20 | Multiple-Patterning-Induced Operating-Voltage Variation in AdvancedNode BEOL-Integrated Nanoelectromechanical Memory Switches | Jin Wook Lee, Seung Hun Baek, Myeong Su Shin, Geun Tae Park, Min Seung Kim, Seon Woo Son, Jae Seung Woo and Woo Young Choi, Seoul National Univ., Korea |
| Nov. 12 | 12C-10 | 12:40 | Spectroscopic Analysis of the Metal/Chalcogenide Interface: Effects of Intentional Active Layer Oxidation | MiRiNae Lee 1,2, Junghoon Han1,3, Seyong Oh 1,2, Kyunghee Choi 1 and Sooji Nam 1,2, 1 Electronics and Telecommunications Research Inst., 2 Univ. of Science and Technol. and 3 Korea Univ., Korea |
| Nov. 12 | 12C-11 | 14:00 | Highly Reliable 3-T Embedded Flash-Based Binary Neural Network Accelerator | Jae Seung Woo 1 , Geun Tae Park 1, Kyoung Min Choi 1,2 , Jin Ho Chang 1, Jin Wook Lee 1 and Woo Young Choi 1, 1 Seoul National Univ. and 2 Samsung Electronics, Korea |
| Nov. 12 | 12C-12 | 14:20 | Integration of n-type and p-type WSe2 field-effect transistors for digital and analog CMOS operation | Takamasa Kawanago 1,2 and Naoya Okada 1, 1 AIST and 2 JST-PREST, Japan |
| Nov. 12 | 12C-13 | 14:40 | Femtosecond Laser-Fabricated Flexible ZnO Nanowires/LIG Gas Sensor with an Integrated Microheater | Yu-Chen Chi, Pin-Jui Su, Rong-Ti Chang and Tien-Li Chang, National Taiwan Normal Univ., Taiwan |
| Nov. 12 | 12C-14 | 15:00 | Binarized weight learning in convolutional neural networks with nanocarbon sumanene-wire memristors | Seiji Adachi 1, Yoshinari Wada 1, Tetsuro Mizuno 1, Yuichiro Mitani 2, Alexandre Schmid 3, Kota ando 1, Tetsuya Asai 1, and Takao Marukame 1, 1 Hokkaido Univ., 2 Tokyo City Univ., Japan and 3 EPFL, Switzerland |
| Nov. 12 | 12D-1 | 9:00 | Post-Transition Metal Selenide-Based Gas Sensors: From Rational Material Engineering to Artificial Olfaction (Invited) | Yong He, Chongqing University, China |
| Nov. 12 | 12D-2 | 9:30 | Plasmonic Biosensors and Meta-Devices by 3D Nanotechnology (Invited) | Stella W. Pang, City University of Hong Kong, Hong Kong |
| Nov. 12 | 12D-3 | 10:00 | Damage-Free Nanofabrication of Low-Dimensional Material Devices by Thermal Scanning Probe Lithography | J. Gao, J. Chaaban, J. Stark, E. Clerc, A. Damyanova, F. Könemann, K. Buddha, S. Bonanni and E. Çağın, Heidelberg Instruments Nano, Switzerland |
| Nov. 12 | 12D-4 | 10:20 | Flexible Gas Sensor based on Femtosecond Laser-Fabricated SnO2/rGO Heterostructures Integrated with LIG Microheaters | Yuan-Jun Chen, Rong-Ti Chang, Wen-Kai Chen, Chai-Jui Chang and Tien-Li Chang, National Taiwan Normal Univ., Taiwan |
| Nov. 12 | 12D-5 | 11:00 | Process development for Si nanosheet GAAFET on 300 mm wafer: inner spacer formation and channel release (Invited) | Chia-Tsong Chen, AIST, Japan |
| Nov. 12 | 12D-6 | 11:30 | Improvement of Vertical Gate-All-Around Tunnel FETs Using ModulationDoped InGaAs Nanowire/Si | Kai Fujimoto, Keita Taniyama, Yuki Azuma and Katsuhiro Tomioka, Hokkaido Univ., Japan |
| Nov. 12 | 12D-7 | 11:50 | Capacitance enhancement of Ru/ZrO2/Ru metal-insulator-metal capacitors via annealing-induced densification of the top Ru electrode | Jun Hyeong Park, Sung Jun Kim, Hoi Yoon Jung, Byeong Hun Pyun, In-Sung Park, Taeho Lee, Wangchul Shin, Young Wook Park and Jinho Ahn, Hanyang Univ., Korea |
| Nov. 12 | 12D-8 | 12:10 | Maskless Laser Lithography and Optical Properties of Resonator Arrays with Submicron Silicon Bowls | Kota Yamakawa, Tomoya Oshikiri, Iori Morita, Kaori Sato, Daisuke Tojima, Tomoko Hasegawa, Yuina Kokai, Hiromasa Niinomi and Masaru Nakagawa, Tohoku Univ., Japan |
| Nov. 12 | 12D-9 | 14:00 | Three-Dimensional Graph-Based Electrical Simulation of Conductive Pathway Evolution in Atomic-Switch Nanoparticle Networks | Yuki Usami 1, Thien Tan Dang 1, Oradee Srikimkaew 1, Gianluca Milano 2, Carlo Ricciardi 3 and Hirofumi Tanaka 1, 1 Kyushu Institute of Technology, Japan, 2 INRiM and 3 Politecnico di Torino, Italy |
| Nov. 12 | 12D-10 | 14:20 | Classification of Optical Patterns Directly Irradiated to a Physical Reservoir Made of Liquid Crystal Molecules | Rio Okuda 1, Yuya Ishizaki-Betchaku 2, Shusaku Nagano 3 and Tsuyoshi Hasegawa 1, 1 Waseda Univ. and 2 Shinshu Univ. and 3 Rikkyo Univ., Japan |
| Nov. 12 | 12D-11 | 14:40 | In-Materio Physical Reservoir Computing Based on SWNT/{Mo154/152}-Ring Composite | Muhammad Syahmi Hazim 1, Kouki Kimizuka 1, Yuki Usami 1, Tomoki Misaka 2, Takuya Matsumoto 2 and Hirofumi Tanaka 1, 1 Kyushu Institute of Technology and 2 The Univ. of Osaka, Japan |
| Nov. 12 | 12D-12 | 15:00 | On-Off Reflectivity Switching in Low-Concentration Liquid Colloidal Photonic Crystals for Smart Displays Applications | Daniel Saldivar Ayala and Yoshiaki Kanamori, Tohoku Univ., Japan |
| Nov. 12 | 12P-1 | Poster I | EUV Dose Reduction Using Deposited Organic Underlayers: From Low-NA to High-NA EUV | Achintya Kundu 1, Viktor Kampitakis 1, Victor Blanco 1, Mihir Gupta 1, Remi Vallat 1, Mahmudul Hasan 1, Hyo Seon Suh 1, Pieter Vanelderen 1, Sandip Halder 1, Laurent Souriau 1, Kurt Ronse 1, Philippe Leray 1, Alina Talmantaite 2, Kishan Patel 2, Bruno Galizia 2, David De Roest 2, 1 imec and 2 ASM Belgium, Belgium |
| Nov. 12 | 12P-2 | Poster I | Voltage-Dependent Screening of Line-Edge Roughness, Line-Width Roughness and Line Wiggling in High-NA EUV P18 Line/Space Patterns | Simon Peters 1, Danilo De Simone 2, Gian Lorusso 2, Hyo Seon Suh 2, Philippe Foubert 2, Yannick Feurprier 1, Nayoung Bae 3, Koki Omachi 4, Kathleen Nafus 3, Michael Carcasi 3, Arame Thiam 1, Peter De Schepper 7, Jan Doise 7, Soichiro Okada 6, Koh Shimada 6, Shimura Satoru 6, Shigeru Tahara 4, 1 Tokyo Electron Europe, 2 imec, Belgium, 3 Tokyo Electron America, USA, 4 Tokyo Electron Miyagi, Japan, 6 Tokyo Electron Kyushu, Japan and 7 Inpria, USA |
| Nov. 12 | 12P-3 | Poster I | Resist Sensitivity Evaluation for Short-Wavelength EUV in the 3.1-13.5 nm Range at NewSUBARU | Takanari Nishida 1, Shinji Yamakawa 1, Masashi Yoshimura 2, Naoki Hayase 1 and Tetsuo Harada 1, 1 Univ. of Hyogo and 2 SPring-8 Service, Japan |
| Nov. 12 | 12P-4 | Poster I | Lithography on Curved Surfaces Using Collimate Proximity Exposure | Toshiyuki Horiuchi, Jun-ya Iwasaki and Hiroshi Kobayashi, Tokyo Denki Univ., Japan |
| Nov. 12 | 12P-5 | Poster I | Analysis of CDU Distribution Components and Feedback-Based Improvement | Yoshiki Matsunami 1, Masakazu Mori 1, Wei Chung Ma 2, Chien Hung Wu2, Huang Yu 2, Wenlong Mao 2, Haifeng Li 2, Zhihao Zhao 2, Gaoshi Zhang 2, Zheng Zhe 3 and Zhi Liu 3, 1 Nikon Corporation, Japan, 2 Nexchip Semiconductor and 3 Nikon Precision, China |
| Nov. 12 | 12P-6 | Poster I | Large Junction–Resistance Changes in Epitaxial Graphene Stacked–Junction Transistors by Current Injection | Takeru Akatochi, Takashi Ikuta and Yasuhide Ohno, Tokushima Univ., Japan, |
| Nov. 12 | 12P-7 | Poster I | Effect of Folding Treatment on Hydrogen-Sensing Performance of Carbon-Nanotube-Composite Paper | Hiromasa Aoyama 1, Yuma Morita 2, Koya Arai 2 and Takahide Oya 1, 1 Yokohama National Univ. and 2 Mitsubishi Materials, Japan |
| Nov. 12 | 12P-9 | Poster I | Soft Integrated Photonic Devices Nonlinearly Functioned by Nanomaterials | Myungjin Kang 1,2, Bowon Ryu 1,3, Inhun Cho 1,2, Seungjae Gong 1,2, Hyowon Moon 1,3, and Yong-Won Song 1,3, 1 KIST, 2 Korea Univ. and 3 Univ. of Sci. and Technol., Korea |
| Nov. 12 | 12P-10 | Poster I | On-Device AI-Based BLDC Motor Anomaly Detection Using a LaserInduced Graphene (LIG) Vibration Sensor | Hak Jun Lee, Se Eung Ahn and Byunghoon Ryu, Inha Univ., Korea |
| Nov. 12 | 12P-11 | Poster I | Improvement of thermoelectric conversion performance of Peltier thread by composing high-conductive carbon-nanotube-composite threads | Kotaro Utsumi and Takahide Oya, Yokohama National Univ., Japan |
| Nov. 12 | 12P-12 | Poster I | Enhanced Lysine Sensing via Functionalization of WS2 with Atomic Layer Deposited Pt Nanoparticles | Jisang Yoo 1, Iaan Cho 1, Jaehyeok Kim 1, Tatsuya Nakazawa 2, Bonggeun Shong 3 and Hyungjun Kim 1, 1 Yonsei Univ, Korea, 2 TANAKA PRECIOUS METAL GROUP, Japan and 3 Hanyang Univ., Korea |
| Nov. 12 | 12P-13 | Poster I | Properties of carbon nanotubes (CNTs) and microstructure of the pellicle for enabling high durability against EUV irradiation in lithography processes | Isao Ichikawa 1, Wataru Morita 1, Katsuhiko Horigome 1, Mamoru Kobayashi 1, Takeshi Kondo 1 Marcio D. Lima 2, Naoya Saiki 2, Julius Joseph S. Santillan 3 and Toshiro Itani 3, 1 LINTEC, Japan, 2 LINTEC OF AMERICA, USA and 3 AIST, Japan |
| Nov. 12 | 12P-14 | Poster I | Light outcoupling of monolayer MoS₂ directly deposited on silicon-oninsulator substrates | Taiga Mori, Tomoya Ebisawa and Yusuke Hoshi, Tokyo City Univ., Japan |
| Nov. 12 | 12P-15 | Poster I | High-Performance p-Type WSe₂ Top-Gate Transistors and Logic Circuits Enabled by a Transferred WOₓ Buffer Layer | Hayoung Kim, Jonggyu Choi and Jong-Hyun Ahn, Yonsei Univ., Korea |
| Nov. 12 | 12P-16 | Poster I | Fabrication Strategies for Graphene Neural Electrodes: Transfer-Free Inverted Fabrication and Au Nanoparticle Surface Functionalization | Dayeon Jeon, Jineui Kim, Juyeong Hong, Duo Xu and Jong-Hyun Ahn, Yonsei Univ., Korea |
| Nov. 12 | 12P-17 | Poster I | Evaluation of Graphene Gate Stacks for Applications in Ultra-Thin Gate Metal Layers | Yuto Noguchi 1, Taiki Seto 1, Mangnan Ke 2, Shohei Kumagai 3, Toshihiro Okamoto 3 and Nobuyuki Aoki 1, 1 Chiba Univ., 2 Yokohama National Univ. and 3 Science Tokyo, Japan |
| Nov. 12 | 12P-18 | Poster I | Numerical Investigation of Geometry and Thermal Environment Effects on Flexible Carbon-Nanotube-Based Thermoelectric Devices | Wajid Ali Khan 1, Ryota Sakuma 1, Misa Ishimura 1 , Yu Miyazawa 2, Ken Nishiura 3, Junei Kobayashi 1, Sumitaka Tachikawa 2, Hideki Uchida 3, Takashi Nakajima 1 and Masahiro Motosuke 1, 1 Tokyo Univ. of Sci., 2 Japan Aerospace Exploration Agency and 3 Zeon, Japan |
| Nov. 12 | 12P-19 | Poster I | Localized electronic states in double-walled boron nitride nanotubes induced by interwall interactions | Nadia Sultana, Yanlin Gao, Mina Maruyama and Susumu Okada, Univ. of Tsukuba, Japan |
| Nov. 12 | 12P-20 | Poster I | Effect of Hydrocarbon Species in Plastic Pyrolysis Gas on Carbon Nanotube Growth by Chemical Vapor Deposition | Azusa Murakami, Kotaro Takanashi, Seinosuke Hattori, Yuki Tanaka, Samon Suzuki, Yusato Suzuki, Chiaki Terashima and Takashi Ikuno, Tokyo Univ. of Sci., Japan |
| Nov. 12 | 12P-21 | Poster I | Defect-induced Dirac band in hexagonal boron nitride with monatomic vacancy networks | Fakiha Gulzar, Yanlin Gao, Mina Maruyama and Susumu Okada, Univ. of Tsukuba, Japan |
| Nov. 12 | 12P-22 | Poster I | Interfacial Optimization of CNT/PDMS Nanocomposite Wearable In-Sensor Reservoir Computing Device for Real-Time Object Recognition | Kouki Kimizuka 1, Ahmet Karacali 1, Saman Azhari 1,2, Yuki Usami 1,2, Shuhei Ikemoto 1,2, Hakaru Tamukoh 1,2 and Hirofumi Tanaka 1,2, 1 Kyushu Inst. of Technol. and 2 Waseda Univ., Japan |
| Nov. 12 | 12P-23 | Poster I | Effect of Defect Structures in Graphite Nanogaps on SERS Activity | Y. Terada, K. Yanagisawa, F. Sakamoto, S. Kurosu, A. Yamaguchi, Y. Kobayashi and R. Negishi, Toyo Univ. Japan |
| Nov. 12 | 12P-24 | Poster I | Promoting Direct Growth of Monolayer Graphene on h-BN by Removing Carbon-Based Surface Contaminants | A. Sasanuma 1, T. Kawasaki 1, H. Yokoo 1, S. Kanda 1, Y. Kobayashi 1, F. Sakamoto 1, K. Watanabe 2, T. Taniguchi 2 and R. Negishi 1, 1 Toyo Univ. and 2 NIMS, Japan |
| Nov. 12 | 12P-25 | Poster I | Study on Site-selective Formation of MoS2 Pattern Films by Direct Sulfurization of MoO3 Patterns | Koki Nakane, Kazushi Inoue, Takao Kikuchi, Yui Aruga, Eiji Hatta, Kazuhisa Sueoka and Agus Subagyo, Hokkaido Univ., Japan |
| Nov. 12 | 12P-26 | Poster I | First-Principles Analysis of Quantitative Dimension and Electronic Properties in MXene/TMDC Intercalation Structures | Koichi Nakamura, Kyoto Univ. of Advanced Science, Japan |
| Nov. 12 | 12P-27 | Poster I | Electrostatic properties of two-dimensional carbon covalent networks under an external electric field | Minori Tachibana 1, Tomoe Yayama 2, Mina Maruyama 1, Yanlin Gao 1 and Susumu Okada 1, 1 Univ. of Tsukuba and 2 Kogakuin Univ., Japan |
| Nov. 12 | 12P-28 | Poster I | Memristive Electrical Properties of CNT Forest Films and CNT/Cellulose Nanofiber Composite Films for Neuromorphic Sensor Applications | Hiroshi Furuta, Yuki Sato, Shuya Setoguchi, Muhammad Shahbaz and Hisao Makino, Kochi Univ. of Technology, Japan |
| Nov. 12 | 12P-29 | Poster I | Fabrication and Electrical Characterization of Nanoscale Double-Gated ITO TFTs | Ting-Yu Chen 1, Tse-Yu Liao 1, Guo-Wei Huang 2, Pei-Wen Li 1 and Horng-Chih Lin 1, 1 National Yang Ming Chiao Tung Univ. and 2 National Applied Research Labs., Taiwan |
| Nov. 12 | 12P-30 | Poster I | IGZO-Regulated Vacancy Dynamics in Trilayer HfO2 Memristor for Analog Neuromorphic Computing | Mohsin Ali, Yongho Lee, and Hee-Dong Kim, Sejong Univ., Korea |
| Nov. 12 | 12P-31 | Poster I | Monolithic Integration of a Transient-Tolerant 1T-1M Memristor-Based Threshold Logic Gate (TLG) Unit Cell on a 180-nm CMOS Platform | Won-Chul Lee 1,2, Solji Park 2, A-ryeong Lee 2, Jonghyun Song 1,2, Hyoungho Ko 2, and Jongwon Lee 2, 1 National Nanofab Center and 2 Chungnam National Univ., Korea |
| Nov. 12 | 12P-32 | Poster I | Au plasmonic electrode for enhancing the light-extraction of near-infrared edge-emitting light sources | Haruna Nakajima 1, Atsushi Ono 2, and Nobuhiko Ozaki 1, 1 Wakayama Univ. and 2 Shizuoka Univ., Japan |
| Nov. 12 | 12P-33 | Poster I | Amplified and Selective NO2 Sensing With IGZO/Graphene Heterostructures via Interfacial Charge-Transfer Modulation | Noah Jang, Hyunjun Kim, Da Ye Kim and Seong Ho Kong, Kyungpook National Univ., Korea |
| Nov. 12 | 12P-34 | Poster I | Ultrathin Ionic Diodes from Zwitterionic Liquid Crystalline Block Copolymers | Megu Aoki 1, Yuya Ishizaki 2 and Shusaku Nagano 1, 1 Rikkyo Univ. and 2 Shinshu Univ., Japan |
| Nov. 12 | 12P-35 | Poster I | Memristive Electron Transport of Giant Polyoxometalate in Nanojunctions | Yuma Kondo 1, Tomoki Misaka 1, Hiroshi Ohoyama 1 and Takuya Matsumoto 2, 1 The Univ. of Osaka and 2 Kyushu Inst. of Technol., Japan |
| Nov. 12 | 12P-36 | Poster I | A 650 V SiC DMOSFET with a P-Shield for enhanced gate oxide reliability Under Heavy-Ion Irradiation | Juhui Kim, Sangyeob Kim, Subin Choi and Ogyun Seok, Pusan National Univ., Korea |
| Nov. 12 | 12P-37 | Poster I | Heteroepitaxial Growth of AlGaAs on Sapphire (0001) by Molecular Beam Epitaxy | Sota Wajima 1, Hidetoshi Hashimoto 1, Daiki Sato 2, Atsushi Koizumi 2, Tomohiro Nishitani 2, Yuma Suzuki 1, Satoshi Hiura 1, Hiromichi Ohta 1 and Fumitaro Ishikawa 1, 1 Hokkaido Univ. and 2 Photo electron Soul,, Japan |
| Nov. 12 | 12P-38 | Poster I | Evaluation of P3HT:PCBM Blend Films for Optical-Input Physical Reservoir Devices | Haruka Fujikawa 1, Hiroshi Ohoyama 1, Takuya Matsumoto 2, Tomoki Misaka 1, 1 The Univ. of Osaka and 2 Kyushu Inst. of Technol., Japan |
| Nov. 12 | 12P-39 | Poster I | A 1.2-kV 4H-SiC Semi-Superjunction MOSFET Enabled by Al and P Channeling Implantation | Seungri Yang, Junki Jung, Sumin Park, Hyerin Ju, Yeonghyeon Kim and Ogyun Seok, Pusan National Univ., Korea |
| Nov. 12 | 12P-40 | Poster I | Process Development and Reliability Assessment of NO-Based Re-Oxidized Ultra-Thin Gate Oxide in 130nm CMOS Technology | Jeongin Yu, Ryeowon Park, Haecheol Hwang, Jonghyun Song, Myung Keun Lee, Yongsoo Cho, Dong-Wook Lee, Yuri Lim, Sangwha Lee, Seung-Jong Yoo, Namjoo Kim, Woo-Suk Sul and Won-Chul Lee, National Nanofab Center, Korea |
| Nov. 12 | 12P-41 | Poster I | Room-Temperature Circularly Polarized Photoluminescence Properties of GaNAs/GaInNAs/GaNAs Heterostructures under External Electric Fields | Kyota Nakadate, Hiroto Kise, Ayano Morita, Yuma Suzuki, Eita Tagawa, Junichi Takayama, Akihiro Murayama and Satoshi Hiura, Hokkaido Univ., Japan |
| Nov. 12 | 12P-42 | Poster I | Sub-ppm NO2 detection via Capacitance–Voltage Readout in a MemristorHeater-Integrated CNT/SnO2 Heterojunction | Taegi Kim 1, Myoungsu Chae 2, Yongho Lee 1 and Hee-Dong Kim 1, 1 Sejong Univ., Korea and 2 The Univ. of Tokyo, Japan |
| Nov. 12 | 12P-43 | Poster I | Semimetallic TiS2 Contact Layers Grown by Atomic Layer Deposition for Reducing Contact Resistance in MoS2 Field-Effect Transistors | Juhee Park, Hwi Yoon, Sangyoon Lee, Jeongwoo Seo, Inkyu Sohn, Jisang Yoo and Hyungjun Kim, Yonsei Univ., Korea |
| Nov. 12 | 12P-44 | Poster I | A Low-Power Single-Loop System Combining Material Physical Reservoir Computing Device with Digital Posit Extraction | Ahmet Karacali, Muzhen Xu, Yuki Usami and Hirofumi Tanaka, Kyushu Institute of Technology, Japan |
| Nov. 12 | 12P-45 | Poster I | Single-Crystalline Metallic and Superconductor-Semiconductor Hybrid Nanodevices | Francesco Maraspini 1, Mauro David 1, Martin Mairhofer 1, Johannes Bratu 1, Felician Steininger 1, Julian Mayer 1, Masiar Sistani 1, Lukas Wind 1, Walter M. Weber 1, Olivier Buisson 2, Cécile Naud 2 and Alois Lugstein 1, 1 TU Wien, Austria and 2 Néel Institute, France |
| Nov. 12 | 12P-46 | Poster I | Machine learning-based Non-destructive Characterization of Interface Traps in Si MOSFETs | Renxiang Lyu, Hyoto Yamaguchi, Zenji Yatabe and Seiya Kasai, Hokkaido Univ., Japan |
| Nov. 12 | 12P-47 | Poster I | Quantum Transport in a Graphene Mach–Zehnder Interferometer Incorporating Porous Graphene Regions | Francine Kathryna Hapin Fernandez 1,2 Kazuma Takaoka 1 and Nobuya Mori 1, 1 The Univ. of Osaka, Japan and 2 De La Salle Univ., Philippines |
| Nov. 12 | 12P-48 | Poster I | Information Processing Capacity in a 2-Dimensional CR Circuit Model of a Gold-Nanoparticle Physical Reservoir | Kenta Shigeoka, Yutaro Mitsuda, Oon Sim Jui, Hiroshi Shimada and Yoshinao Mizugaki, The Univ. of Electro-Communications, Japan |
| Nov. 12 | 12P-49 | Poster I | High-Performance Memristor Based Gas Sensor for NO₂: Mechanism and Sensing Performance | Yongho Lee, Taegi Kim and Hee-Dong Kim, Sejong Univ., Korea |
| Nov. 12 | 12P-50 | Poster I | Titanium–Carbon: A Bilayer Electrode for Enhanced Operational Stability in n-i-p Perovskite Solar Cells | Dzetty Soraya Abdul Aziz 1, Rodgers Odhiambo Otieno 1, Theerapat Arpornrat 2, Pipat Ruankham 2 and Takashi Sagawa 1, 1 Kyoto Univ., Japan and 2 Chiang Mai Univ., Thailand |
| Nov. 12 | 12P-51 | Poster I | Voltage-tunable nonlinear dynamics of Si NEMS resonators for physical reservoir computing applications | Nay Win Aung 1, Takahiro Namazu 1,2 and Amit Banerjee 1, 1 Kyoto Univ. of Advanced Science and 2 Tohoku Univ., Japan |
| Nov. 12 | 12P-52 | Poster I | High Mobility In2O3 Thin Film Transistors Fabricated with MetalBridging-Free Lift-Off Process | Chang-Hsin Kuo 1, Guo-Wei Huang 2, Pei-Wen Li 1 and Horng-Chih Lin 1, 1 National Yang Ming Chiao Tung Univ. and 2 National Applied Research Labs., Taiwan |
| Nov. 12 | 12P-53 | Poster I | Evaluation of SWNT/Porphyrin Derivative Composites for Light-enhanced In-Materio Physical Reservoir Computing Device | Yu Imaru 1, Kouki Kimizuka 1,Yuki Usami 1, Koki Nietani 1, Deep Banergee 1, Hiroyuki Furuta 3,4 and Hirofumi Tanaka 1, 1 Kyushu Inst. of Technol., 2 Kyushu Univ., Japan and 3 Shanghai Univ., China |
| Nov. 12 | 12P-54 | Poster I | Handwriting Stroke Classification Based on Dynamic Changes of FingerPressure and Hand Motion Analyzed by an Ag₂S Physical Reservoir | Mei Endo and Tsuyoshi Hasegawa, Waseda Univ., Japan |
| Nov. 12 | 12P-55 | Poster I | Characterization of N-Doped GeTe/Sb2Te3 Multilayer Phase-Change Materials | Shota Yoshimoto, Ryohei Izumi, Kazuki Matsuda, Shuo Li and You Yin, Gunma Univ., Japan |
| Nov. 12 | 12P-56 | Poster I | Effect of Polymer Counter Materials on the Dynamic Friction Coefficient of Resin Nanostructured Surfaces | Haruya Kawashima, Kensei Ichiba, Tomohiro Shimizu and Takeshi ITO, Kansai Univ., Japan |
| Nov. 12 | 12P-57 | Poster I | Direct Delivery of Functional Molecules into Bacteria with Nanotube Injector | Rongtao Zhang 1, Gabor Mehes 1, Hideki Kinoshita 2 and Takeo Miyake 1, Waseda Univ. and 2 Tokai Univ., Japan |
| Nov. 12 | 12P-58 | Poster I | Temporal Evaluation of the Antibacterial Activity of NanoSpike® Films Against Coccal Bacteria | Yukito Sakurai 1, Tomohiro Shimizu 1, Kensei Ichiba 1, Shigemitsu Tanaka 2 and Takeshi Ito 1, 1 Kansai Univ. and 2 Osaka Research Inst. of Industrial Sci. and Technol., Japan |
| Nov. 12 | 12P-59 | Poster I | Fabrication of ZnO Multilayer Inverse Opal Structures Using Self-Assembly Technology and Evaluation of Optical and Magnetic Properties | Shota Nomoto 1, Hibiki Inui 2, Kensei Ichiba 1, Takeshi Ito 1, Koichi Takase 2 and Tomohiro Shimizu 1, 1 Kansai Univ. and 2 Nihon Univ., Japan |
| Nov. 12 | 12P-60 | Poster I | Detection of Adhesion of Nanosheets in Gate-all-around FET by a Critical Dimension-Scanning Electron Microscope (CD-SEM) | Kenzo Manabe, Chia-Tsong Chen, Toshihiro Narushima, Ryutaro Nishino, Toshifumi Irisawa and Yoshihiro Hayashi, AIST, Japan |
| Nov. 12 | 12P-61 | Poster I | Magnetic Properties of Al Nanoparticles Prepared by Pulsed Laser Ablation and of Al Nanoparticle-Ag Nanoparticle Composites | Mitsuru Inada 1, Ryo Yonezawa 1, Akira Matsuo 2 and Taku Saiki 1, 1 Kansai Univ. and 2 The Univ. of Tokyo, Japan |
| Nov. 12 | 12P-62 | Poster I | Characterization of thermal annealing process of InAs nanowires in selective-area growth | Doma Hachimiya, Yuki Azuma, Keita Taniyama, Ryuta Nakamura and Katsuhiro Tomioka, Hokkaido Univ., Japan |
| Nov. 12 | 12P-63 | Poster I | Oxygen plasma modulation of ferroelectric TiN/Hf0.5Zr0.5O2/TiN devices | Tung-Ming Pana 1,2, En-Hsin Liu 1, Wei-Che Weng 1, Jhong-Hao Wu 1 and Jim-Long Her 1, 1 Chang Gung Univ. and 2 Chang Gung Memorial Hospital, Taiwan |
| Nov. 12 | 12P-64 | Poster I | Selective-Area Growth of Vertical InGaAs Nanowires on Si Using Metal/Insulator Composite Mask | Keita Taniyama, Hitoshi Watanabe, Yuki Azuma and Katsuhiro Tomioka, Hokkaido Univ., Japan |
| Nov. 12 | 12P-65 | Poster I | Control of TADF Yield in Triplet Porphyrins through Complexation with Clay Nanosheets | Shoma Hatayama, Kosuke Sugawa, Keiji Ohno and Joe Otsuki, Nihon Univ., Japan |
| Nov. 12 | 12P-66 | Poster I | O-Doped Sb3Te for High-Performance Phase-Change Device | Syuhei Fukuda, Shota Yoshimoto, Shuo Li, and You Yin, Gunma Univ., Japan |
| Nov. 12 | 12P-67 | Poster I | Thermal annealing process of InGaAs nanowires in selective-area growth | Ryuta Nakamura, Keita Taniyama, Yuki Azuma, Doma Hachimiya and Katsuhiro Tomioka, Hokkaido Univ., Japan |
| Nov. 12 | 12P-68 | Poster I | Enhanced Heavy-Ion Robustness of 650-V SiC MOSFETs Using Double Epitaxial Drift Structures | GeonJin Do, Sangyeob Kim, Jeongtae Kim, Juhui Kim and Ogyun Seok, Pusan National Univ., Korea |
| Nov. 12 | 12P-69 | Poster I | Deposition Characteristics of Ag and Au Nanoparticles Prepared by Arc Plasma Deposition (APD) and Their SERS Properties | Masahiro Yasukawa, Tomohiro Shimizu, Kensei Ichiba and Takeshi Ito, Kansai Univ., Japan |
| Nov. 12 | 12P-70 | Poster I | Nanodot Formation on Si and Polyimide Using 31,000-b-11,000 g/mol Molecular Weight PS-b- PDMS Blockcopolymer | Takuro Obe, Yuki Hirota, Fangzhu Meng, Shuo Li and You Yin, Gunma Univ., Japan |
| Nov. 12 | 12P-71 | Poster I | Flexible Thick-Film Hydrogen Sensors Based on TiO₂ and TiO₂/B₂O₃ Composites Utilizing Graphite Electrodes on Kapton Substrates | Mohd Nizar Hamidon 1, Azlinda Abu Bakar 2, Norliza Ismail 2, Intan Helina Hasan 1, 1 Universiti Putra Malaysia and 2 Univ. Kuala Lumpur, Malaysia |
| Nov. 12 | 12P-72 | Poster I | Relationship between Carbon Content and Etching Profile of Passivation Film in Deep Reactive Ion Etching Using SF6/C4F8 and SF6/CO2 | Mie Tohnishi, Mina Sato, Yukari Oshima, Miho Fujimoto and Akihiro Matsutani, Science Tokyo, Japan |
| Nov. 12 | 12P-73 | Poster I | Effects of Oxygen Flow Rate and Film Thickness on the Electrical Response of WOx Flexible Resistive Sensors under Repeated Bending | Fangzhu Meng, Makito Inoue, Shuo Li and You Yin, Gunma Univ., Japan |
| Nov. 12 | 12P-74 | Poster I | Process Optimization of SU-8 Banks for the Realization of an Approximately 100-PPI MEMT-OLED Pixel Array | Nahyun Kim, Dong Hyun Kim, Nam Kyu Ryou, Hyo Sik Jo, Chan Ho Ryu, Seok Hee Hong, Ho Jin Lee and Tae Geun Kim, Korea Univ., Korea |
| Nov. 12 | 12P-75 | Poster I | Handedness-Dependent Electron Transport in Chiral WO3 Nanohelices | Sayuki Oka 1, Chanunthorn Chananomawathorn 2, Mati Horprathum 2, Yohei Yomogida 1 and Kazuki Nagashima 1, 1 Hokkaido Univ., Japan and 2 NECTEC, Thailand |
| Nov. 12 | 12P-76 | Poster I | Elucidation of Trap Mechanisms in Ni/SiO₂/AlN/GaN Structures using Angle-Resolved Hard X-ray Photoelectron Spectroscopy | Shunsuke Yamaguchi 1, Daisuke Kawasaki 1, Kakeru Uetani 1 , Mariko Shimizu 2, Kento Minamikawa 2, Tatsuo Shimizu 2, Yosuke Kajiwara 2, Yuichiro Mitani 1 and Hiroshi Nohira 1, 1 Tokyo City Univ. and 2 Toshiba, Japan |
| Nov. 12 | 12P-77 | Poster I | Valence state and electronic structure for metal-insulator transition of orientationcontrolled VO2 thin film | Naohiro Egawa 1, Taisei Yamada 1, Naoya Arihara 1, Daisuke Shiga 2, Hiroshi Kumigashira 2, and Tohru Higuchi 1, 1 Tokyo Univ. of Sci. and 2 Tohoku Univ., Japan |
| Nov. 12 | 12P-78 | Poster I | Direct Growth of Polycrystalline Diamond Films on Various Insulating Substrates without Interlayers | Makoto Takayanagi 1, Kei Ikeda 1, Yuta Izu 2, Kaoru Yagishita 1, Susumu Shiraki 3, Yukihiro Sakamoto 2 and Tomofumi Susaki 1, 1 Mitsubishi Chemical, 2 Chiba Inst. of Technology and 3 Nippon Institute of Technol., Japan |
| Nov. 12 | 12P-79 | Poster I | Effects of a remote Si-doped GaAs layer on photoluminescence properties of InGaAs quantum dots | Futa Sakai, Ayano Morita, Yuma Suzuki, Hiroto Kise, Junichi Takayama, Akihiro Murayama and Satoshi Hiura, Hokkaido Univ., Japan |
| Nov. 12 | 12P-80 | Poster I | Effects of N2 and O2 Post-Deposition Annealing on the Structural Evolution of Nitrogen-Doped ZnO Thin Films | Abrarul Haque 1, Yasuji Yamada 1, Toshiyuki Yoshida 1, Norihiro Oshime 2 and Shinya Tsukada 3, 1 Shimane Univ., 2 QST, and 3 Hiroshima Univ., Japan |
| Nov. 12 | 12P-81 | Poster I | Electron-proton mixed conduction at medium temperature range of oxygen vacancies-controlled WO3-x thin film | Michiataka Tsunoda 1, Ryota Morizane 1, Daisuke Shiga 2, Hiroshi Kumigashira 2 and Tohru Higuchi 1, 1 Tokyo Univ. of Sci. and 2 Tohoku Univ., Japan |
| Nov. 12 | 12P-82 | Poster I | Modeling Femtosecond-Laser-Induced Zinc Nitrate Chemistry for LiquidPhase Nanofabrication Using CAP-Coupled Real-Time TD-DFTB | Pin-Shiuan Chiu, Yu-Chieh Lin, Tien-Li Chang and Chun-Ta Chen, National Taiwan Normal Univ., Taiwan |
| Nov. 12 | 12P-83 | Poster I | Investigation of pH Sensors Using Ga2O3 Nanorods Passivated by Photoelectrochemical Method | Ching-Ting Lee 1,2, Pin-Chang Huang 1, Mu-Ju Wu 1, Hsin-Ying Lee 1, 1 National Cheng Kung Univ. and 2 Yuan Ze Univ., Taiwan |
| Nov. 12 | 12P-84 | Poster I | Effect of DMSO/DMF Solvent Ratio on Coordination States and Crystallization Behavior of Sn-Based Perovskite Precursors | On Matsumoto, Mariko Murayama, Nishio Taichiro and Eiji Tokunaga, Tokyo Univ. of Sci., Japan |
| Nov. 12 | 12P-85 | Poster I | Defect-Engineered Sr2Co1+xMo1-xO6-δ Double Perovskite Oxides for FuelFlexible High-Temperature Energy Conversion | Shu-Yi Tsai, Ying-Yi Chen and Kuan-Zong Fung, National Cheng Kung Univ., Taiwan |
| Nov. 12 | 12P-86 | Poster I | Investigation of Ga2O3 Nanorod NO2 Gas Sensors with Roughened Seed Layer and Gold-Black Nanoparticle Decoration | Hsin-Ying Lee 1, Tun-Hui Yang 1, Mu-Ju Wu 1, Ching-Ting Lee 1,2, 1 National Cheng Kung Univ. and 2 Yuan Ze Univ., Taiwan |
| Nov. 12 | 12P-87 | Poster I | Development of All-Inorganic Solid-State AI Hardware Utilizing Domain Structures in Hexagonal Manganite YMnO3 | R. Kadowaki, M. Xu, K. Furuta, Y. Umezaki, H. Tanaka and Y. Horibe, Kyushu Inst. of Technology, Japan |
| Nov. 12 | 12P-88 | Poster I | Magneto-optical Phenomena in Surface Plasmon Systems Consisting of Stacked Nanolayers with Magnetic Nanograins | Haruki Yamane 1, Jiaxiang Liu 2, Yukiko Yasukawa 3, Naoki Ichiji 4, Takuya Ishida 5 and Takashi Hasegawa 2, 1 Akita Industrial Technol. Center, 2 Akita Univ., 3 Chiba Tech., 4 NIMS and 5 Utsunomiya Univ., Japan |
| Nov. 12 | 12P-89 | Poster I | Synthesis and Physical Property Characterization of High-Entropy Superconducting REBa2Cu3O7-δ (RE = Rare-Earth Elements) | T. Hayashi, T. Okada and Y. Horibe, Kyushu Inst. of Technol., Japan |
| Nov. 12 | 12P-90 | Poster I | B-Site-Controlled Magneto-Electrochemical Charge Storage in LaMO3 Perovskite Electrodes under Weak Magnetic Fields | Yun-Tai Yu, Heng-Chih Kuo, Shuan-Wei Yu, Wen-Chi Tu, Shih-Lung Yu and Sheng Yun Wu, National Dong Hwa Univ., Taiwan |
| Nov. 12 | 12P-91 | Poster I | Cs Adsorption-Dependent Local Structural Changes around K in Weathered Biotite Revealed by K K-edge XAFS | Yumeno Masebo 1, Mitsunori Honda 2, Kousetsu Hayakawa 2, Rina Yabuta 2, Masato Oda 3, Hiroyuki Ishii 1 and Masakazu Muraguchi 4, 1 Univ. of Tsukuba, 2 JAEA, 3 Wakayama Univ., and 4 Hokkaido Univ. of Science, Japan |
| Nov. 12 | 12P-92 | Poster I | Thermal Expansion Compatibility and Interface Stability of RF-Sputtered Mn₁.₅Co₁.₅O₄ Spinel Nanofilms on Metallic Substrates | Shu-Yi Tsai, Ying-Yi Chen and Kuan-Zong Fung, National Cheng Kung Univ., Taiwan |
| Nov. 12 | 12P-93 | Poster I | Porous Crystalline Metal-Organic Frameworks with Lanmodulin-Like Pockets for Selective Capture of Rare-Earth Metals | Dr Liang Feng 1,2, 1 National Univ. of Singapore, Singapore and 2 Duke Univ., USA |
| Nov. 12 | 12P-94 | Poster I | CdCS3 as an environmentally friendly photocatalyst for enhancing visible light absorbance and stabilizing photocatalytic hydrogen generation | Haoran Shi, Bo Yan and Guowei Yang, Sun Yat-sen Univ., China |
| Nov. 12 | 12P-95 | Poster I | DFT-Based Modeling of Sperm Trajectories from Observational Data | Nanami Okada 1, Shinsuke Oh-hara 1, Satoshi Kishigami 1 and Yoshiaki Ukita 2, 1 Univ. of Yamanashi and 2 Univ. of Hyogo, Japan |
| Nov. 12 | 12P-96 | Poster I | Ultrasensitive Detection of the Lung Cancer-Associated EGFR L858R Mutation Using a MagnetoOptical Faraday Biosensing Platform | Kuen-Lin Chen 1, Po-Wen Chang 1, Pradeep Kumar 2, Yu-Ching Huang 2 and Chiu-Hsien Wu 1, 1 National Chung Hsing Univ. and 2 Ming Chi Univ. of Technology, Taiwan |
| Nov. 12 | 12P-97 | Poster I | Colorimetric Biosensing Using Gold Nanoparticles for Protein Discrimination | Farzana Yasmin, Kenneth Bamba, Bilguun Baatar and Lihong Heidi Jiao, Grand Valley State Univ., USA |
| Nov. 12 | 12P-98 | Poster I | Impedance Characterization of a Small Number of RBL-2H3 Cells Using a Microfabricated Sensor Chip | Miyabi Yamasaki 1, Yuto Matsubayashi 2, Keita Kishimoto 2, Shigeyasu Uno 2, Yuhki Yanase 3 and Kenji Sakamoto 1, 1 Kyushu Institute of Technol. and 2 Ritsumeikan Univ. and 3 Hiroshima Univ., Japan |
| Nov. 12 | 12P-99 | Poster I | A Handheld Lab-on-a-Chip Platform for Wash-Free Plasmonic Detection of Biomarkers | Do Hyun Kang 1, Da-In Kwon 1,3, Yeong-Eun Yoo 1, Jae-Ho Jin 2, Ji Hyo Park 1, Ga Eun Han 1, Kwanoh Kim 1, Jae Sung Yoon 1 and Seong Min Kang 3, 1 KIMM, 2 Neo Nanotech and 3 Sogang Univ., Korea |
| Nov. 12 | 12P-100 | Poster I | Microfluidic RPA–LFD Platform for Rapid Detection of stx1 and stx2 Genes in Escherichia coli O157:H7 from Food Samples | Lung-Ming Fu, National Cheng Kung Univ., Taiwan |
| Nov. 12 | 12P-101 | Poster I | Femtosecond Laser-Induced TiO2/GO Heterostructures on Flexible Substrates for Lactic Acid Sensing | Yi-Ting Huang 1, Pin-Shiuan Chiu 1, Qi-Xuan Wu 2, Chun-Ta Chen 1, Tien-Li Chang 1, 1 National Taiwan Normal Univ. and 2 Lunghwa Univ. of Science and Technol. Taiwan |
| Nov. 12 | 12P-102 | Poster I | Development of a Microfluidic Impedance Analysis System for Real-Time Microplastic Monitoring | Sung-min Sim 1, Sang-Ho Lee 2 and Jung-Mu Kim 1, 1 Jeonbuk National Univ. and 2 Korea Institute of Industrial Technology, Korea |
| Nov. 12 | 12P-103 | Poster I | Periodic Nanostructures Fabricated by Nanoimprint Lithography for the Inhibition of Biofilm Formation | Li-An Chien 1, Chung-Hsiang Lin 2 and Chao-Min Cheng 1, 1 National Tsing Hua Univ. and 2 Quantum NIL, Taiwan |
| Nov. 12 | 12P-104 | Poster I | Development of a Portable Aptamer–Based Sensor for GHSA Detection | Se Eung Ahn, Hak Jun Lee and Byunghoon Ryu, Inha Univ., Korea |
| Nov. 12 | 12P-105 | Poster I | Effects of Electrolyte Species on the Electrical and Mechanical Properties of Electric EelInspired Layered Hydrogel Batteries | Mizuho Hatanaka 1, Yusuke Nakamuta 1 and Mitsugu Todo 2, 1 Sojo Univ. and 2 Kyushu Univ., Japan |
| Nov. 12 | 12P-106 | Poster I | Sustainable Nanomedicine: Plant-Based Titanium Dioxide Nanoparticles for Enhanced Renal Cancer Radiotherapy | Mahima Yadav 1, Jason Hodge 2, Terry Piva 3, Moshi Geso 3, Rod Lynch 4, Bill Patterson 4, Faiza Basheer 1 and Rasika M Samarasinghe 1, 1 Deakin Univ., Austra, 2 Univ. Hospital Geelong, 3 RMIT Univ. and 4 andrew Love Cancer Centre, Australia |
| Nov. 12 | 12P-107 | Poster I | Electrochemical Response of Reactive Magnetron-Sputtered Ti-Ag-O Thin Films toward Kynurenine Detection | Mohammad Arefi Sigaroudi, Riya Thomas, Denis Music, Malmö Univ., Sweden |
| Nov. 13 | 13A-1 | 9:00 | Diversification of patterning materials in the EUV era (Invited) | Douglas J. Guerrero, Brewer Science, USA |
| Nov. 13 | 13A-2 | 09:30 | Impact of EUV-Induced Crosslinking on Lithographic Performance in a Model PFAS-Free Chemically Amplified Resist | Chien-Hsun YU 1,2, John S. Petersen 1, Pol Van Dorpe 1,2 and Fabian Holzmeier 1, 1 imec and 2 KU Leuven, Belgium |
| Nov. 13 | 13A-3 | 09:50 | QCM-Based Analysis of Photoresist Development Kinetics Through Swelling and Expansion Gel Layers | Yuqing Jin 1, Takehiro Masuda 1, Yuko Tsutsui Ito 1, Miho Izukawa 1, Takahiro Kozawa 1, Kayoko Cho 1,2, Kazuo Sakamoto 2 and Makoto Muramatsu 2, 1 The Univ. of Osaka and 2 Tokyo Electron Kyushu, Japan |
| Nov. 13 | 13A-4 | 10:10 | A Sober look beyond EUV Lithography Photoresist Requirements | Yi D. Liu 1, Roel Gronheid 2, Craig Higgins 1 and Alessandro Vaglio Pret 1,3, 1 KLA, USA, 2 KLA, Belgium and 3 KLA, Italy |
| Nov. 13 | 13A-5 | 10:40 | Deep Learning Prediction and Optimisation of Nanolithography Processes | Ismaeil Alnaab , Ying Tran, Ben Mills and Yasir Noori, Univ. of Southampton, UK |
| Nov. 13 | 13A-6 | 11:00 | Cross-Attention-Based Attribution of Pattern-Geometry Variations and Instrument-Induced Beam Blur in Line-and-Space CD-SEM Metrology | Shunki Tsuboya 1, Yasunori Goto 2 and Mayuka Osaki 1, 1 Hitachi Ltd. and 2 Hitachi High-Tech, Japan |
| Nov. 13 | 13A-7 | 11:20 | Effect of ion implantation damage on the formation of Au nanoparticles inside SiO2 layer using SiO2/Si and Si substrates | Shunsuke Ito 1, Masayoshi Ichimiya 1, Takahiko Ban 1, Atsushi Kinomura 2 and Junichi Yanagisawa 1, 1 The Univ. of Shiga and 2 Kyoto Univ., Japan |
| Nov. 13 | 13A-8 | 12:00 | Carbon Impurity Reduction in ALD InOx Films via Alternating H2O and Pure Ozone Pulses | Chia-Tsong Chen 1, Kazuki Ishiyama 1,2, Masashi Yamazaki 1, Hiroshi Arimoto 1, Yukinori Morita 1, Toshifumi Irisawa 1, Naoto Kameda 3, Yuji Ogawa 3, Soichiro Motoda 4, Tetsuya Nishiguchi 4 and Tatsuro Maeda 1, 1 AIST, 2 Nihon Univ., 3 MEIDENSHA and 4 MEIDEN NANOPROCESS INNOVATIONS, Japan |
| Nov. 13 | 13A-9 | 12:20 | Atomic layer deposition of p-type SnO thin films using a liquid precursor, Sn(EtCp)2 | Fumikazu Mizutani 1, Nobutaka Takahashi 1, Tomomi Sawada 2 and Toshihide Nabatame 2, 1 Kojundo Chemical Laboratory and 2 NIMS, Japan |
| Nov. 13 | 13A-10 | 12:40 | Characteristics of HfSiOx dielectrics on modified β-Ga2O3 surface using the dummy-SiO2 process | Toshihide Nabatame, Tomomi Sawada, Takashi Onaya, Hiromi Miura, Manami Miyamoto, Kazuhito Tsukagoshi, and Yoshihiro Irokawa, NIMS, Japan |
| Nov. 13 | 13A-11 | 14:20 | Atomic Layer Deposition of Ge-Sb-Se Ternary Alloy for Vertical SelectorOnly Memory | Jeongwoo Seo 1, Minu Cho 1, Youngjae Kang 2, Jong-bong Park 2, Kiyeon Yang 2, Wooyoung Yang 2 and Hyungjun Kim 1, 1 Yonsei Univ. and 2 Samsung Advanced Institute of Technol., Korea |
| Nov. 13 | 13A-12 | 14:40 | Green Manufacturing Metrics of Atomic Layer Deposition for Tungsten Plug Formation | Soh Takemoto, Shinji Migita, Misako Morota, Naoya Okada, Masanaga Fukasawa, Akiko Hirata, Takehiro Yamaki, Sho Kataoka and Noriyuki Uchida, AIST, Japan |
| Nov. 13 | 13A-13 | 15:00 | In Situ XPS Study of Si Oxidation in the Initial Cycles of TDMAS/O₃ SiO₂ ALD | Yuuki Tsuchiizu 1, Daisuke Ohori 2, Teruhisa Ohtsuka 3, Masashi Yamazaki 3, Hiroshi Arimoto 3 and Kazuhiko Endo 1, 1 Tohoku Univ., 2 Kansai Univ. and 3 AIST, Japan |
| Nov. 13 | 13B-1 | 9:00 | Molecule-based carrier modulation in 2D transition metal dichalcogenides (Invited) | Daisuke Kiriya, The Univ. of Tokyo, Japan |
| Nov. 13 | 13B-2 | 09:30 | Mo Cap Thickness Dependence of Circular Polarization Detection Efficiency in MgO/CoFeB-based Spin Photodiodes | Takeru Omi, Daiki Mineyama, Itsu Tanaka, Shinnosuke Wada, Ayano Morita, Junichi Takayama, Akihiro Murayama and Satoshi Hiura, Hokkaido Univ., Japan |
| Nov. 13 | 13B-3 | 09:50 | ISPVA-Programmed Memristor-Driven 8-Bit Grayscale Control in an 8 × 8 Capacitorless Active-Matrix Micro-LED Array | Jae Seong Park, Ho Jin Lee, Seok Hee Hong, Chan Ho Ryu, Dong Hyun Kim, Jong Min Joo, Jae Ho Choi, Hyeon Jeong Lee and Tae Geun Kim, Korea Univ., Korea |
| Nov. 13 | 13B-4 | 10:30 | Long-Term Photo-stabilization of FAPbBr₃ Perovskite Nanocrystals in Polymer Matrices through Lecithin Passivation | Takuro Iizuka 1, Rinku Watanabe 1, Khang Vinh Huynh 1, Satoshi Asakura 2, Motofumi Kashiwagi 3 and Akito Masuhara 1, 1 Yamagata Univ., 2 ISE CHEMICALS and 3 ZEON, Japan |
| Nov. 13 | 13B-5 | 10:50 | Enhanced photoluminescence by Sr-doping in PbBr-based perovskite spincoated films | Masanao Era 1, Koichi Sakaguchi 1 Zhanglin Gua2 and Toshinori Matsushima 2, 1 Saga Univ. and 2 Kyushu Univ., Japan |
| Nov. 13 | 13B-6 | 11:10 | Low-voltage Operation of Organic Ternary Inverters with High-k Dielectric Gate Insulators | Ryoma Hayakawa 1,2, Haruka Sekiguchi 1,2, Yutaka Noguchi 2 and Yutaka Wakayama 1, 1 NIMS and 2 Meiji Univ., Japan |
| Nov. 13 | 13B-7 | 11:50 | Low-Temperature Metal Oxides as Semiconductors and Dielectrics for BEOL Integration with Microsystems (Invited) | Harold M.H. Chong 1, Ben D. Rowlinson 1,2, Zibo Yan 1, Yaxin Zhan 1, Kun Zhang 1, Kian S. Kiang 1, Alex-H Wang 1, Omesh Kapur 1, Zohreh Hajiabadi 1, Aiden Graham 1, David B. Thomas 1, Firman Simanjuntak 1 and Ruomeng Huang 1, Univ. of Southampton and Univ. of Edinburgh, UK |
| Nov. 13 | 13B-8 | 12:20 | Microfabrication Process for MEMS-Based Spintronics Devices | Yi-Te Huang, Yuki Okamoto, Yuki Hibino, Takanori Shirokura, Hitoshi Kubota, Ryohei Takei, Takeshi Kobayashi and Hiroko Arai, AIST, Japan |
| Nov. 13 | 13B-9 | 12:40 | LIG Angle Sensor Integrated into Joint Structure for Multi-Legged Origami Microrobots | Hayato Takahashi and Sumito Nagasawa, Shibaura Institute of Technol., Japan |
| Nov. 13 | 13B-10 | 14:20 | Octopus-Inspired Frustum-Shaped Microsuction Cups with Reverse-Tapered Sidewalls for High Adhesion Force | Shota Watanabe, Kota Morishita, Yuji Takata, Yuya Tanaka and Takaaki Suzuki, Gunma Univ., Japan |
| Nov. 13 | 13B-11 | 14:40 | Reflectance change during phase transformation in TiNi shape memory alloy films | Taichi Murakami 1, Masaki Shimofuri 2, Toshiyuki Tsuchiya 2 and Shugo Miyake 1, 1 Setsunan Univ. and 2 Kyoto Univ., Japan |
| Nov. 13 | 13B-12 | 15:00 | Fracture Behavior of Porous Ni-Plating Layer on Al Foil and Exothermic Characteristics of Cold-Rolled Al/Ni Multilayer Powder | Souto Yamashita 1, Kenji Tanimoto 2 and Shugo Miyake 1, 1 Setsunan Univ. and 2 Kinki Boushoku, Japan |
| Nov. 13 | 13B-13 | 15:20 | Degradation Mechanisms in Sintered Ag–Ag and Ag–Cu Die-Attach Materials under Thermal Cycling | Alessandra Gallegos Sanchez 1, Mitsuhiro Nishida 2 and Takahiro Namazu 1,3, 1 Kyoto Univ. of Advanced Sci., 2 Nihon Superior and 3 Tohoku Univ., Japan |
| Nov. 13 | 13B-14 | 15:40 | O2 Plasma-Activated Room-Temperature Au-Au Bonding in Ambient Air for Heterogeneous Die-Level Integration of LiNbO3 and Si | Kosei Matsunobu and Ryo Takigawa, Kyushu Univ., Japan |
| Nov. 13 | 13C-1 | 09:00 | Detection of ppb Level NO2 Using Methylated Germanane | Daichi Kato 1, Osamu Kubo 1, Akira Nishino 1 and Hiroshi Tabata 2, 1 Gifu Univ. and 2 The Univ. of Osaka, Japan |
| Nov. 13 | 13C-2 | 09:20 | Synergistic defect engineering via oxygen plasma on femtosecond laserreduced MoS2/GO composites for enhanced flexible humidity sensing | Tong-Yao Han 1, Yuan-Jun Chen 2, Shana Smith 1 and Tien-Li Chang 2, 1 National Taiwan Univ. and National Taiwan Normal Univ., Taiwan |
| Nov. 13 | 13C-3 | 09:40 | Facile fabrication of stimuli-responsive soft actuators based on self-folding of laser-induced graphene/hydrogel bilayers | Takumi Sugimoto, Takaaki Nara and Hiroki Miyazako, The Univ. of Tokyo, Japan |
| Nov. 13 | 13C-4 | 10:00 | Microscale Mixed Reality Platform via Dynamic Electric Fields for NextGeneration Lab Automation | Yuta Nakane, Daigo Natsuhara, Hisataka Maruyama and Takayuki Hoshino, Nagoya Univ., Japan |
| Nov. 14 | 13C-5 | 10:40 | Deriving the effective mass, Fermi velocity, and screening length of charges by momentum-resolved electron energy loss spectroscopy (Invited) | Ming-Wen Chu, National Taiwan Univ., Taiwan |
| Nov. 15 | 13C-6 | 11:10 | Formation of amorphous Ru-B/monolayer MoS2 contact for realization of reduced contact resistivity | Koume Fujita, Toshiya Sasaki, Mihyeon Kim, Tianyishan Sun, Toshiaki Kato and Yuta Saito, Tohoku Univ., Japan |
| Nov. 16 | 13C-7 | 11:30 | Reconstruction of Random Impurity Distribution in Nanowires from Electron Transmission Dynamics | Fugo Nashiki 1, Masakazu Muraguchi 1, Yoshitaka Itoh 1 and Tota Suko 2, 1 Hokkaido Univ. of Science and 2 Waseda Univ., Japan |
| Nov. 17 | 13C-8 | 11:50 | Electrical Resistance Tomography-based Physical Unclonable Functions utilized by Multiscale Randomness in Laser-Induced Graphene Networks | Keiya Minakawa, Yuki Kimura, Issa Asahara, Nobuyuki Masuda, and Takashi Ikuno, Tokyo Univ. of Science, Japan |
| Nov. 18 | 13C-9 | 12:10 | Atomic-Scale Three-Dimensional Solvation Structure Measurement at Mica – Ionic Liquid Interface by AFM Capable of Simultaneous Vertical and Lateral Force Detection | Yuuji Atienza, Yoshihisa Yamaoka and Naritaka Kobayashi, The Univ. of Shiga Pref., Japan |
| Nov. 19 | 13C-10 | 12:30 | Arcuate Deformation-Boosted Droplet Flow-Induced Power Generation Using Flexible Fluoropolymer-Layered PEDOT:PSS Devices | Yoka Shu, Shin’ichi Warisawa and Reo Kometani, The Univ. of Tokyo, Japan |
| Nov. 13 | 13C-11 | 14:20 | Tailored Control of Ion Transport: From Molecular Design to Device Applications (Invited) | Kentaro Aoki 1, Nobuyuki Zettsu 2 and Yuki Nagao 1, 1 JAIST and 2 Shinshu Univ., Japan |
| Nov. 13 | 13C-12 | 14:50 | Thickness-Dependent Ion Conductivity Associated with Water Uptake, Morphology, and Molecular Orientation in Anion Exchange Membrane Thin Films | Ryota Segawa 1, Kentaro Aoki 1, Nobuyuki Zettsu 2 and Yuki Nagao 1, 1 JAIST and 2 Shinshu Univ., Japan |
| Nov. 13 | 13C-13 | 15:10 | Photochromic Tuning of Cu-Doped ZnS Nanocrystals by Engineering the Local Coordination Environment | Tamami Sato, Shunsuke Kobashi and Yoichi Kobayashi, Ritsumeikan Univ., Japan |
| Nov. 13 | 13C-14 | 15:30 | Amplified Photoinduced Surface Ligand Desorption of CdS/ZnS Core/Shell Nanocrystals | Bunta Takano, Daisuke Yoshioka, I-Ya Chang and Yoichi Kobayashi, Ritsumeikan Univ., Japan |
| Nov. 13 | 13D-1 | 9:05 | The Evolution of AI Technologies Through Medical AI Research: From Discriminative AI to Generative AI (Invited) | Atsushi Teramoto, Meijo Univ., Japan |
| Nov. 13 | 13D-2 | 9:35 | How Useful Is AI for Single-Cell Image Analysis? (Invited) | Akihiro Isozaki, Ritsumeikan Univ., Japan |
| Nov. 13 | 13D-3 | 10:20 | Smart healthcare sensor patch powered by reservoir computing (Invited) | Kuniharu Takei, Hokkaido Univ., Japan |
| Nov. 13 | 13D-4 | 10:50 | (Invited) | Kaori Terata, Akita Univ., Japan |
| Nov. 13 | 13D-5 | 11:20 | Machine learning-assisted gas identification using integrated sensors Short Biography (Invited) | Takahisa Tanaka, Keio Univ., Japan |
| Nov. 13 | 13D-6 | 14:20 | Inkjet-Based Adaptive Planarization Materials (Invited) | Takashi Sekito, Merck Electronics, Japan |
| Nov. 13 | 13D-7 | 14:50 | Inkjet-based Adaptive Planarization | Shintaro Aichi, Masaki Saito, Hideo Tanaka and Keita Sakai, Canon, Japan |
| Nov. 13 | 13D-8 | 15:10 | Damage control caused by external nano particles in nanoimprint lithography | Yoshihiko Hirai 1, Toshiki Ito 2, Shingo Ishida 2 and Takehiko Iwanaga 2, 1 Osaka Metropolitan Univ. and 2 Canon, Japan |
| Nov. 13 | 13D-9 | 15:30 | One-Step Via/Trench Process Integration for Dual Damascene Interconnects Using Step-Structured Nanoimprint Lithography | Kenta Suzuki 1, Akiko Hirata 1, Tetsuya Ueda 1, Yoshihiro Hayashi 1, Ryosuke Hamamoto 2, Atsushi Kusaka 2, Kidai Sogo 2, Tomomi Funayoshi 2, Makoto Ogusu 2 and Kiyohito Yamamoto 2, 1 AIST and 2 Canon, Japan |
| Nov. 13 | 13P-1 | Poster II | Structural manipulation of amorphous silica nanocantilevers by focused Ga ion beam | Abbhiraj Singh 1, Takahiro Namazu 1,2 and Amit Banerjee 1, 1 Kyoto Univ. of Adversity Science and 2 Tohoku Univ., Japan |
| Nov. 13 | 13P-2 | Poster II | A Fast Pattern Prediction Method Using Pattern and Kernel Decomposition for Electron-Beam Lithography | Chun-Hung Liu, Cheng-Han Wu, I-Lin Yeh, Yu-Hsi Liu, Yu-Lin Chung, Ze-An Ding and Meng-Gu Tsai, National Taipei Univ., Taiwan |
| Nov. 13 | 13P-3 | Poster II | Adaptive Background Dose Compensation for High-Density Curvilinear Mask Process Correction | Chun-Hung Liu, Kai-Hong Yang, Chia-Hua Chang, Nian-Ting Wu, Sheng-Kai Wong, Yu-Lin Chung, and Ze-An Ding, National Taipei Univ., Taiwan |
| Nov. 13 | 13P-4 | Poster II | An Adaptive Slope-Based Parametric Point Spread Function Calibration Method for Accurate Curvilinear Pattern Prediction | Chun-Hung Liu, Meng-Gu Tsai and Ze-An Ding, National Taipei Univ., Taiwan |
| Nov. 13 | 13P-5 | Poster II | A Dose-Based Electron Beam Inverse Lithography Method Using a Smooth Clamp Transformation Function | Yu-Lin Chung, Ze-An Ding, Chun-Hung Liu and Nian-Ting Wu, National Taipei Univ., Taiwan |
| Nov. 13 | 13P-6 | Poster II | Influence-Kernel-Based Fragmentation for Curvilinear Mask Process Correction | Chun-Hung Liu, Sheng-Kai Wong, Nian-Ting Wu, Ze-An Ding, Yu-Lin Chung, Yu-Tang Sun, and Yu-Jun Zhong, National Taipei Univ., Taiwan |
| Nov. 13 | 13P-7 | Poster II | Selective Localization of PS-b-PMMA Patterns for Advanced Microelectronic Applications | R. Feougier 1, A. Berthoud, G. J. Rademaker 1, K. Benotmane 1, A. Royera, N. Bonfieni 1, Z. Mehrez 1, M. Stigliani 1, C. GiroudGarampon 1, G. Claveau 2 and M. Barlas 2, 1 Univ. Grenoble Alpes and CEA, Leti and 2 STMicroelectronics, France |
| Nov. 13 | 13P-8 | Poster II | Radiation-induced reactions of organogermanium | Sayaka Oshitani 1, Shotaro Fuku 1, Yusa Muroya 1, Yuko Tsutsui Ito 1, Akihiro Konda 1, Eichi Nomura 1, Takahiro Kozawa 1, Kohei Machida 2, Satoshi Enomoto 2 and Shinichi Yamashita 3, 1 The Univ. of Osaka, 2 Toyo Gosei and 3 The Univ. of Tokyo, Japan |
| Nov. 13 | 13P-9 | Poster II | Dissolution dynamics of poly(4-hydroxystyrene) film with acid generator and organic base | Kihiro Furukawa 1, Takehiro Masuda 1, Kyoko Matsuoka 1, Masaaki Higashino 2, Tokiya Morioka 2, Jeesoo Choi 2, Nao Umemoto 2 and Takahiro Kozawa 1, 1 The Univ. of Oska and 2 Nippon Junryo Yakuhin, Japan |
| Nov. 13 | 13P-10 | Poster II | Enhanced EUV Sensitivity and Patterning Performance of Metal Oxide Nanoparticle Resists through Halogen-Containing Carboxylic Acid Ligands | Seiya Tanaka 1, Koki Abe 1 and Hiroki Yamamoto 2, 1 Kanto Denka Kogyo and 2 QST, Japan |
| Nov. 13 | 13P-11 | Poster II | Resist dissolution behavior in poly(4-hydroxystyrene)-contaminated tetramethylammonium hydroxide developer | Seungjoo Baek 1, Masahiko Harumoto 2, Yuqing Jin 3 and Takahiro Kozawa 3, 1 SCREEN SPE Germany, Germany, 2 SCREEN Semiconductor Solutions and 3 The Univ. of Osaka, Japan |
| Nov. 13 | 13P-12 | Poster II | Molecular simulation of EUV lithography with parameters determined through KrF lithography experiments | Yosuke Ohta 1,2, Hiroto Wakamatsu 1 and Masahiro Yasuda 1, 1 Osaka Metropolitan Univ. and 2 Litho Tech Japan, Japan |
| Nov. 13 | 13P-13 | Poster II | Rapid Thermal Solvent Vapor Annealing and Metallization of PS-bPHAdMA thin films for Block Copolymer Lithography | Francis McCallum 1, Shin Hasegawa 1, andrew K. Whittaker 2 and Hiroki Yamamoto 1, 1 QST, Japan and 2 The Univ. of Queensland, Australia |
| Nov. 13 | 13P-14 | Poster II | Fundamental Coordination Chemistry Mechanisms During Crosslinking of Model Organometallic Photoresists | Ankur Agarwal 1, Arnaud Dauendorffer 2 and Ryan Burns 1, 1 Tokyo Electron America, USA and 2 Tokyo Electron Kyushu, Japan |
| Nov. 13 | 13P-15 | Poster II | Hot-Electron Defluorination of Perfluoroalkyl Substances through Protective ZnS Shells on CdS Nanocrystals | Kohki Tanaka and Yoichi Kobayashi, Ritsumeikan Univ., Japan |
| Nov. 13 | 13P-16 | Poster II | Breaking the Trade-Off between Flexibility and X-ray Detection Performance via Perovskite Quantum Dots/Organic Dye Hybrids | Mao Goto 1, Yutaka Fujimoto 2, Akito Watanabe 3, Takeshi Fujiwara 4, Hiroki Kawamoto 2, Keisuke Asai 2 and Akito Masuhara 1, 1 Yamagata Univ., 2 Tohoku Univ., 3 The Univ. of Tokyo and 4 AIST, Japan |
| Nov. 13 | 13P-17 | Poster II | Effects of Spacer Length and Mainchain Structures in LC Copolymers with Binary Mesogens on Liquid Crystal Phases and Thermal Conductivities | Wakana Uchiyama 1, Yuya Ishizaki 2 and Shusaku Nagano 1, 1 Rikkyo Univ. and 2 Shinshu Univ., Japan |
| Nov. 13 | 13P-18 | Poster II | Preparation of self-doped polythiophene monolayers and evaluation of their physical reservoir properties | Kentaro Suzuki 1, Yuya Ishizaki 2, Hirokazu Yano 3 and Shusaku Nagano 1, 1 Rikkyo Univ., 2 Shinshu Univ. and 3 Tosoh, Japan |
| Nov. 13 | 13P-19 | Poster II | π-Conjugation-Extended Molecules for Perovskite Solar Cells | Daichi Koseki 1,2, Chathuranganie 1. M. Senevirathne 1, Dai Senba 1, Yuki Fujita 1, Jun Lin 1, Mengde Zhai 1,3, Juan Shang 1, Telugu Bhim Raju 1, Shintaro Ida 1,4, Motonori Watanabe 1, Aleksandar Staykov 1, Hiroshi Segawa 2, Zhanglin Guo 1, and Toshinori Matsushima 1, 1 Kyushu Univ., 2 The Univ. of Tokyo, Jpaan, 3 Jiangsu Univ., China and 4 Kumamoto Univ., Japan |
| Nov. 13 | 13P-20 | Poster II | Printable polymer hole transport layers enabled by surface p-doping for efficient and stable organic photovoltaics | Minwoo Nam, Keimyung Univ., Korea |
| Nov. 13 | 13P-21 | Poster II | Optical Responses of Crown Ether-Modified X-Shaped π-Conjugated Fluorophore toward Various Cations | Ryota Tazawa, Izumi Kobayashi and Ryohei Yamakado, Yamagata Univ., Japan |
| Nov. 13 | 13P-22 | Poster II | Charge-Transfer Exciton Formation at Lead Halide Perovskite Nanocrystal–Carbazole Interface | Aoi Hamatsu1, Caleb Okulski 2, Jun Matsui 1 and Hinako Ebe 1, 1 Yamagata Univ., Japan and 2 Pomona College, USA |
| Nov. 13 | 13P-23 | Poster II | Effect of mainchain structure on hybrid LC phases in side-chain LC polymer blends with binary heterogeneous mesogens | Shoichi Kanai 1, Yuya Ishizaki 2, Takahiro Seki 3 and Shusaku Nagano 1, 1 Rikkyo Univ., 2 Shinshu Univ. and 3 Nagoya Univ., Japan |
| Nov. 13 | 13P-24 | Poster II | Charge Relaxation Dynamics of Polymer-Wrapped Single-Walled Carbon Nanotube-Oriented Nanofilms for In-Materio Reservoir Computing | Jumpei Igarashi 1, Yuya Ishizaki-Betchaku 2, Shusaku Nagano 3, Hinako Ebe 1 and Jun Matsui 1, 1 Yamagata Univ., 2 Shinshu Univ. and 3 Rikkyo Univ., Japan |
| Nov. 13 | 13P-25 | Poster II | Theoretical Molecular Design of Hydrogen Storage Devises Based on the Graphene Nanoflake | Hiroto Tachikawa 1, Tetsuji Iyama 1 and Shigeaki Abe 2, 1 Hokkaido Univ. and 2 Kitami Inst. of Technol., Japan |
| Nov. 13 | 13P-26 | Poster II | π-Bridge Engineering of 4- Fluorophenyl Substituted Phenanthro[9,10d]imidazole-based hole transport materials for efficient and stable perovskite solar cells | Telugu Bhim Raju and Toshinori Matsushima, Kyushu Univ., Japan |
| Nov. 13 | 13P-27 | Poster II | The effect of orientation changes on the information processing performance of physical reservoirs using liquid crystals | Ryosuke Nakajima, Seiya Watanabe, Hiroyuki S. Kato and Megumi Akai-Kasaya, The Univ. of Osaka, Japan |
| Nov. 13 | 13P-28 | Poster II | Quantitative Local Stress Evaluation of Fe–Si–B Amorphous Alloy Strips by Micro-Raman Spectroscopy | Tatsuya Fujii 1, Ryutaro Yoshioka 1, Keisuke Takabayashi 2, Makoto Yamaguchi 2 and Tsunehisa Suzuki 1, 1 Akita Pref. Univ. and 2 Akita Univ., Japan |
| Nov. 13 | 13P-29 | Poster II | Improved Ge/Si Junction with Micro-oxidized Buffer Layer | Chiung Wei Lin and Jie Ruei Kuo, Tatung Univ., Taiwan |
| Nov. 13 | 13P-30 | Poster II | Orientation Dependence of Magnetic Domain Behavior in Fe–Si–B Amorphous Alloy Strips under Tensile Stress | Yuki Suetsugu, Tsunehisa Suzuki, Mitsuyoshi Nomura and Tatsuya Fujii, Akita Pref. Univ., Japan |
| Nov. 13 | 13P-31 | Poster II | Application of block-wise maximum-likelihood estimation for quantum measurement of diamond nitrogen-vacancy center depth | Shuntaro Usui 1,3, Philipp J. Vetter 2, Yuka Kobayashi 1,3, Fedor Jelezko 2, Shinobu Onoda 3, Takeshi Ohshima 3 and Takashi Tanii 1, 1 Waseda Univ., Japan, 2 Ulm Univ., Germany and 3 National Institutes for Quantum Science and Technology, Japan |
| Nov. 13 | 13P-32 | Poster II | Surface potential heterogeneity at high-entropy alloy-carbon interfaces probed by Kelvin probe force microscopy | P. Dagar, N. Nicoara, D. Ramasamy, S.M. Thalluri, Y.V. Kolen'ko and S. Sadewasser, International Iberian Nanotechnology Lab., Portugal |
| Nov. 13 | 13P-33 | Poster II | STM measurement of Perfluorodecanethiol | Marika Murakami 1, Hiroshi Ohoyama 1, Takuya Matsumoto 1,2 and Tomoki Misaka 1, 1 Osaka Univ. and 2 Kyushu Inst. of Technol., Japan |
| Nov. 13 | 13P-34 | Poster II | Polarizability measurement for a giant polyoxsometalate molecule by Fowler-Nordheim tunneling spectroscopy | Tomoki Misaka 1, Masahiro Nakayama 1, Yuma Kondo 1 , Hiroshi Ohyoyama 1 and Takuya Matsumoto 1,2, 1 The Univ. of Osaka and 2 Kyushu Inst. of Technol., Japan |
| Nov. 13 | 13P-35 | Poster II | Study on single-crystalline Fe3O4 films formation on graphene for spintronics application | Katsuyuki Yagi, Hiroki Hamada, Eiji Hatta, Kazuhisa Sueoka and Agus Subagyo, Hokkaido Univ., Japan |
| Nov. 13 | 13P-36 | Poster II | Effect of Non-Conductive Area Ratio on Electroconvection and Ion Transport in Patterned Ion Exchange Membranes | Hyunwoo Choi, Eojin Lee, Seokhee Han and Bumjoo Kim, Kongju National Univ., Korea |
| Nov. 13 | 13P-37 | Poster II | Particulate Matter Capture of Magnetoelectric Polymer Composite Mesh for Stable Continuous Emission Monitoring System | Minyeong Cheon, Eunbee Lee and Su-Chul Yang, Dong-A Univ., Korea |
| Nov. 13 | 13P-38 | Poster II | Femtosecond Laser-Induced Dual-Scale Hierarchical LIPSS on Titanium for Enhanced Hydrophobicity and Anti-Bioadhesion | Yu-Chieh Lin 1, Yu-Chen Chi 1, Hong-Ru Huang 1, Chia-Hung Hung 2, Tien-Li Chang 1, 1 National Taiwan Normal Univ. and 2 National Cheng Kung Univ., Taiwan |
| Nov. 13 | 13P-39 | Poster II | Fabrication and Characterization of CO2 Infrared Optical Filter with Superhydrophobic film based on Silica Sol-Gel solution | Ganghyun Kim 1,2, Donghyuk Jung 1,2, Yijun Yang 1,2, Yuntae Ha 1,2, Uksu Han 1,2, Gyuri Park 1,2 and DongGeon Jung 1, 1 KITECH and 2 Kyungpook National Univ., Korea |
| Nov. 13 | 13P-40 | Poster II | CuO Nanowire-Modified Laser-Induced Graphene Electrodes for Highly Sensitive Electrochemical Detection of Oxytetracycline Antibiotics | Natchanon Yimngam 1, Narathon Khemasiri 2, Piyawan Leepheng 3, Panuwat Luengrojanakul 3, Pacharapan Thumutok 3, Panita Kasamechonchung 3, Tuksadon Wutikhun 3, Wantana Koetniyom 1, Thanawee Chodjarusawad 4, Annop Klamchuen 3 and Jiti Nukeaw 2, 1 King Mongkut’s Univ. of Technology North Bangkok, 2 KMITL, 3 NSTDA and 4 Burapha Univ., Thailand |
| Nov. 13 | 13P-41 | Poster II | Rapid Dynamic Response of Suspended PEDOT:PSS Actuators Fabricated by Electron Beam Lithography | Yandong Yang, Shin’ichi Warisawa and Reo Kometani, The Univ. of Tokyo, Japan |
| Nov. 13 | 13P-42 | Poster II | Restoration of 3D-printed cellulose hydrogel structure by swelling of dry film | F. Yano, Y. Abe, and I. Hanasaki, Tokyo Univ. of Agriculture and Technol., Japan |
| Nov. 13 | 13P-43 | Poster II | Three-Dimensional Gold Microfabrication Using an Electron-Beam-Induced Virtual Cathode Display | Daigo Natsuhara, Fumika Suzuki, Yuta Nakane, Hisataka Maruyama and Takayuki Hoshino, Nagoya Univ., Japan |
| Nov. 13 | 13P-44 | Poster II | A Generative Biomimetic Framework Beyond Natural Evolution Learning Genotype–Phenotype Relationships with DNA Encoder and DDPM | Tomoya Akimoto, Daigo Natsuhara, Hisataka Maruyama and Takayuki Hoshino, Nagoya Univ., Japan |
| Nov. 13 | 13P-45 | Poster II | Fabrication of a freestanding gold film with a moth-eye structure using solvent-soluble UV-curable resin | Taichi Ogawa and Jun Taniguchi, Tokyo Univ. of Sci., Japan |
| Nov. 13 | 13P-46 | Poster II | Fabrication and friction force measurements of the bilayer structures inspired by a snake-skin | Eria Ito, Makito Haruta and Yuji Hirai, Chitose Institute of Science and Technology, Japan |
| Nov. 13 | 13P-47 | Poster II | Anti-Fouling Effect of Cross-Linked PVA Films on Barnacle Settlement | Shuren Sugawara 1, Shota Asano 1, Yasuyuki Nogata 2 and Yuji Hirai 1, 1 Chitose Institute of Science and Technology and 2 Central Research Institute of Electric Power Industry, Japan |
| Nov. 13 | 13P-48 | Poster II | Eco-Friendly and Substrate-Conscious Double-Sided Microfilm Patterning on Curved Surfaces Using Water-Developable Hyaluronic Acid-Based Resist | Momoka Kamada 1, Hiryu Hayashi 1, Rika Tsutakawa 1 Maki Murai 2, Satoshi Murakami 2, Takushi Watanabe2 , Hironori Ohashi 2, Mayu Morita 1, Misaki Oshima 1 and Satoshi Takei 1, 1 Toyama Pref. Univ. and 2 DKS, Japan |
| Nov. 13 | 13P-49 | Poster II | Microtrichia-Inspired Spike-like Microstructures Based on Ladybird Hindwings for Friction Control | Keisei Hirono 1, Kazuya Saito 1, Natsuki Tsushima 1,2 and Fujio Tsumori 1, 1 Kyushu Univ. and 2 The Univ. of Tokyo, Japan |
| Nov. 13 | 13P-50 | Poster II | Period control of silicone grating via toluene addition | Kotaro Daikoku and Itsunari Yamada, Setsunan Univ., Japan |
| Nov. 13 | 13P-51 | Poster II | Microprint and Nanoimprint Method for Resist Pattern Planarized on Silicon Nanodisk Array | Daisuke Tojima 1, Hiroshi Ono 2 , Narumi Ono 1, Akiko Onuma 1, Tetsuya Katase 2 and Masaru Nakagawa 1, 1 Tohoku Univ. and 2 Meisyo Kiko, Japan |
| Nov. 13 | 13P-52 | Poster II | Microlens-Assisted Fabrication of Slanted High-Aspect-Ratio Metal Molds for Micro-Well Bio-Devices | Geehong Kim, Mun Jeong Choi, HyungJun Lim, SoonGeun Kwon and HakJong Choi, Korea Inst. of Machinery and Materials, Korea |
| Nov. 13 | 13P-53 | Poster II | Three-dimensional Water-Repellency Model of Water Strider Surface Microstructures | Kaoru Uesugi Ritsumeikan Univ., Japan |
| Nov. 13 | 13P-54 | Poster II | Nanostructured Materials with Multiple Functions | Jae Hong Park, National NanoFab Center, Korea |
| Nov. 13 | 13P-55 | Poster II | Tunable Wettability of Thermally Imprinted Microstructured Elastomer Surfaces by Mechanical Stretching | Kentaro Kano 1, Natsuki Tsushima 1,2 and Fujio Tsumori 1, 1 Kyushu Univ. and 2 The Univ. of Tokyo, Japan |
| Nov. 13 | 13P-56 | Poster II | Fabrication of High-Aspect-Ratio Patterns by Residual-Layer-Free Transfer Using a Hybrid Soft Replica Mold with a Light-Shielding Layer | Yutaro Moriyama and Jun Taniguchi, Tokyo Univ. of Sci., Japan |
| Nov. 13 | 13P-57 | Poster II | Electrochemical Determination of Cannabidiol Using a Molecularly Imprinted Polymer Modified Screen-Printed Carbon Electrode | Teeranuch Khummung, Supakorn Puengvigrai and Darinee Phromyothin, King Mongkut’s Institute of Technol. Ladkrabang, Thailand |
| Nov. 13 | 13P-58 | Poster II | Vacuum micro-nano imprinting fabrication of Micro Array Lens for optical communication applications | Chih-Sheng Chang 1, Fuh-Yu Chang 1, Chih-Hao Lin 2, Hao Chen 3 and Yi-ching Chung 3, 1 National Taiwan Univ. of Science and Technology, 2 Lextar Electronics and 3 Radiant Opto-Electronics, Taiwan |
| Nov. 13 | 13P-59 | Poster II | Anisotropic Droplet Sliding and Retention on Nanoimprinted Line-andSpace/Moth-Eye Hybrid Structures | Yuu Sumita and Jun Taniguchi, Tokyo Univ. of Sci., Japan |
| Nov. 13 | 13P-60 | Poster II | Fabrication of Hyaluronic Acid Microneedles Using Deep Sea Water | Mayu Morita 1, Misaki Oshima 1, Hiryu Hayashi 1, Momoka Kamada 1, Rika Tsutakawa 1, Naoto Sugino 2, Yoshiyuki Yokoyama 3, Satoshi Takei 1, 1 Toyama Pref. Univ., 2 Sanko Gosei and 3 Toyama Industrial Technol. Res. and Development Center, Japan |
| Nov. 13 | 13P-61 | Poster II | Machine Learning-Integrated Magnetic Tactile Sensing Based on Auxetic Metamaterials | Hyojun Hwang and Soonjae Pyo, Seoul National Univ. of Sci. and Technol., Korea |
| Nov. 13 | 13P-62 | Poster II | Crack‑Induced Peelable NiAl Layers for Al Busbar Joining Using Dual‑Composition Al/Ni Reactive Films | Sarankamol Athichaikhongphat 1 and Takahiro Namazu 1,2, 1 Kyoto Univ. of Advanced Sci. and 2 Tohoku Univ., Japan |
| Nov. 13 | 13P-63 | Poster II | Shape and Size Control of Electron-Beam-Induced Si Nanodots | Abbhiraj Singh 1, Kota Sugisaka 2, Takashi Sumigawa 2, Ryosuke Matsumoto 3 and Takahiro Namazu 1,4, 1 Kyoto Univ. of Advanced Science, 2 Kyoto Univ., 3 The Univ. of Osaka and 4 Tohoku Univ., Japan |
| Nov. 13 | 13P-64 | Poster II | Guide-Vane-Integrated Triboelectric Nanogenerator for Real-Time Self-Powered Wind-Speed Sensing | Yeongwoo Kim, Jingu Jeong and Soonjae Pyo, Seoul National Univ. of Sci. and Technol., Korea |
| Nov. 13 | 13P-65 | Poster II | Room-Temperature Vacuum Sealing Using Modified Surface Activated Si–SiO₂ Bonding | Junpei Nakamura, Jun Utsumi and Ryo Takigawa, Kyushu Univ., Japan |
| Nov. 13 | 13P-66 | Poster II | Simplified Fabrication of Soft Electrohydraulic Actuators via PVA Sacrificial Layer-Assisted CNT Transfer | Hanju Oh, Mingyu Kang, Jongil An and Soonjae Pyo, Seoul National Univ. of Sci. and Technol., Korea |
| Nov. 13 | 13P-67 | Poster II | Generation of Regularly Aligned Nano- and Micro-Textured Surfaces by Molecular Beam Epitaxy Using Helicon Sputtering Beam Source - Observation of generating process - | Keisuke Watanabe and Akira Kakuta, National inst. of Technol. Tokyo College, Japan |
| Nov. 13 | 13P-68 | Poster II | Geometry-Dependent Thermoelectric Response and Hydrogen Sensing Characteristics of Thermopile-Based Sensors | Gyuri Park 1,2, Uksu Han 1,2, Yuntae Ha 1,2, Ganghyun Kim 1,2, Jeong Dong Hyuk 1,2, Yijun Yang 1,2 and Dong Geon Jung 1, 1 KITECH and 2 Kyungpook National Univ., Korea |
| Nov. 13 | 13P-69 | Poster II | Equivalent Circuit Modelling of Nonlinear Nano-Electro-Mechanical Systems Resonators via Freeware Simulator | Kyosuke Tokuno 1, Tomoya Miyoshi 1, Zhicheng Shen 2, Yoshishige Tsuchiya 2 and Daisuke Yamane 1, 1 Ritsumeikan Univ. and 2 Univ. of Southampton, UK |
| Nov. 13 | 13P-70 | Poster II | Development of Microfluidic Flow Injection Taste Sensor System | Oguchi Hiroto 1, Takeshi Okada 1, Ryo Takigawa 2 and Yusuke Tahara 1, 1 Shinshu Univ. and 2 Kyushu Univ., Japan |
| Nov. 13 | 13P-71 | Poster II | Room temperature bonding of Ag thin films in ambient air | Takeru Fukuyama, Kosei Matsunobu and Ryo Takigawa, Kyushu Univ., Japan |
| Nov. 13 | 13P-72 | Poster II | Tunable Compressive Response of DLP-Printed Structures through Grayscale-Based Mechanical Property Distribution | Mingyu Kang, Jiyun Park, Keun Park and Soonjae Pyo, Seoul National Univ. of Sci. and Technol., Korea |
| Nov. 13 | 13P-73 | Poster II | Piezoresistive Pressure Sensor Based on Percolation Control in Ecoflex Gel-CNT Composite | Choongjin Lee and Soonjae Pyo, Seoul National Univ. of Science and Technology, Korea |
| Nov. 13 | 13P-74 | Poster II | Nonlinearity Characterization of MEMS Tactile Sensors Encapsulated in Soft Skin Adhesive PDMS | Ryusei Araragi, Haruto Honda, Ryuga Sano, Takashi Abe and Masayuki Sohgawa, Niigata Univ., Japan |
| Nov. 13 | 13P-75 | Poster II | A Four-Quadrant Terahertz Metasurface Enabling Logic Operations with Output Forcing Mode | Zhiheng Lu 1, Hongli Wang 1 , Zhihao Li 1, Yoshiaki Kanamori 2 and Ying Huang 1, 1 Sun Yat-sen Univ., China and 2 Tohoku Univ., Japan |
| Nov. 13 | 13P-76 | Poster II | Mechanistic Insights into Hydrogen-Source-Dependent Chlorine Elimination Pathways in HCDS-Based ALD | Ji Ryang Lee 1,2 and S. Joon Kwon 1, 1 Samsung Institute of Technology and 2 Sungkyunkwan Univ., Korea |
| Nov. 13 | 13P-77 | Poster II | Extremely low carbon concentration InOx film at 200°C using ALD with pure ozone and water vapor oxidation | Naoto Kameda 1, Kenichi Uehara 2, Shigeo Yasuhara 2, Soichiro Motoda 3 and Tetsuya Nishiguchi 3, 1 MEIDENSHA, 2 Japan Advanced Chemicals and 3 MEIDEN NANOPROCESS INNOVATIONS, Japan |
| Nov. 13 | 13P-78 | Poster II | Efficiency enhancement of dye-sensitized solar cells by cesium adsorption on aluminum-silicate coated TiO2 photoelectrodes | Tsubasa Takami, Ryo Miyazawa, Keita Suzuki, Masanori Miura, Bashir Ahmmad and Fumihiko Hirose, Yamagata Univ., Japan |
| Nov. 13 | 13P-79 | Poster II | A design concept of digital twin for multistep inorganic 3D printing | Norifusa Satoh, NIMS, Japan |
| Nov. 13 | 13P-80 | Poster II | All-dry process vertical molecular wire structured photoresist for advanced EUV lithography | Heemin Kang, Taeeon Kim, Junsung Huh, Sujin Park and Myung Mo Sung, Hanyang Univ., Korea |
| Nov. 13 | 13P-81 | Poster II | Effect of Surface Activation Process on Room-Temperature Bonding of ALD Al₂O₃ Thin Films | Kenji Uno and Ryo Takigawa, Kyushu Univ., Japan |
| Nov. 13 | 13P-82 | Poster II | Novel Tantalum Precursor for High-Quality Ta₂O₅ Thin Films by Atomic Layer Deposition | Luis Misal 1, Sunao Kamimura 1, Christian Dussarrat 1, Nicolas Blasco 2, 1 Air Liquide Labs., Japan and 2 Air Liquide Advanced Materials, France. |
| Nov. 13 | 13P-83 | Poster II | Organic-Inorganic Hybrid Positive-Tone Photoresist via MLD for EUV Lithography | Junseong Hur, Soojin Park, Heemin Kang, Taeeon Kim, Dai Cuong Tran and Myung Mo Sung, Hanyang Univ., Korea |
| Nov. 13 | 13P-84 | Poster II | Competitive absorption of TDMAT and TMA in complex oxide films atomic layer deposition observed by IR absorption spectroscopy | Hajime Kobayashi, Ryo Miyazawa, Masanori Miura, Bashir Ahmmad Arima and Fumihiko Hirose, Yamagata Univ., Japan |
| Nov. 13 | 13P-85 | Poster II | Low-Temperature Crystallization of ZnO Thin Films by RoomTemperature ALD with Plasma Ion Treatment | Kosuke Ozawa, Ryo Miyazawa, Masanori Miura and Fumihiko Hirose, Yamagata Univ., Japan |
| Nov. 13 | 13P-86 | Poster II | Fabrication of Positive-Tone Patterns via Area-Selective Atomic Layer Deposition | Soojin Park, Heemin Kang, Junseong Hur, Taeeon Kim, Tran Cuong Dai and Myung Mo Sung, Hanyang Univ., Korea |
