IMPORTANT DATE |
|||
June 10 | Open of Abstract Submission Site  |
||
July 1 | Abstract Deadline |
||
August 1 | Open of Registration Site |
||
September 1 | Late News Paper Deadline |
||
October 16 | Deadline of Early Bird Registration |
||
November 10-13 | Conference |
||
November 30 | Deadline of JJAP Special Issue |
||
SECTION |
|||
1-1: Advanced Lithography and Patterning 1-2: Electron and Ion Beam Technologies 1-3: Patterning Materials 2-1: Nanocarbons & 2D Materials 2-2: Nanodevices 2-3: Nanofabrication 2-4: Inorganic Nanomaterials | 2-5: Organic Nanomaterials 2-6: Nano Surfaces, Interfaces, and Advanced Nano Metrology 3: Nanoimprint, Hybrid-NIL, Biomimetics, and Functional Surfaces 4: BioMEMS, Lab on a Chip, and Nanobiotechnology 5: Microsystem Technology and MEMS 6: Atomic Layer Processing (ALP) |
||
PLENARY |
|
 Dr. Geert Vandenberghe, imec, Belgium Dr. Seigo Tarucha, RIKEN, Japan Prof. Chihaya Adachi, Kyushu University, Japan Prof. Wilfred van der Wiel, University of Twente, The Netherlands |
|
SPECIAL TALK |
|
Dr. Greet Storms, ASML, The Netherlands |
|
SYMPOSIUM |
|
Symp. A: AI × High-NA EUV × Novel Materials × Sustainability Symp. B: Process and Device Technologies for Quantum Computing IV Symp. C: Artificial Intelligence and Machine Learning in Biomedical Research and Applications |
