MNC 2025 Award

Outstanding Paper
1X nm half-pitch pattern transfer using a spin-on glass and amorphous carbon hard mask for nanoimprint lithography
Kenta Suzuki 1 , Ryosuke Hamamoto 1, Yuji Kasashima 1,Tetsuya Ueda 1, Wataru Mizubayashi 1, Masanaga Fukasawa 1,
Yoshihiro Hayashi 1, Masaki Ishida 2, Tomomi Funayoshi 2, Hiromi Hiura 2, Masayuki Kagawa 2,
Noriyasu Hasegawa 2 and Kiyohito Yamamoto 2. 1 AIST and 2 Canon, Japan

Most Impressive Presentation Award
20C-2-3
Construction of a Light-Driven On-Chip Hydrogel Actuator Mimicking Intestinal Structure and Motility
Riku Takahashi, Shogo Himori and Aya Tanaka, NTT, Japan

Young Author’s Award
18B-3-3
Ag/Ag2S Nano particles device based lightweight cryptographic system toward IoT edge security
Hiroki Tabata 1, Yuma Yamashita 1, Oradee Srikimkaew 2, Yuki Usami 1, Shunsuke Araki 1 and Hirofumi Tanaka 1
1 Kyushu Inst. of Technol., Japan and 2 Walailak Univ., Thailand

Most Impressive Poster Award
19P-1-58
Visible Light Induced Decomposition of Perfluoroalkyl Substances by CdS/ZnS Core/Shell Nanocrystals
Kohki Tanaka 1, Yuki Nagai 1 and Yoichi Kobayashi 1,2, 1 Ritsumeikan Univ. and 2 JST-PRESTO, Japan

Most Impressive Poster Award
20P-1-14
Balancing Precision and Efficiency: An In-house Monte Carlo Simulator for Electron Scattering in EUV Mask Structures
Chun-Hung Liu, Hsin-Ya Tseng, Ze-An Ding and Yun-Chin Li, National Taipei Univ., Taiwan