MNC 2022

Keynote

Section
Name and Affiliation
1-1: Advanced Lithography and Patterning
Prof. Jinho Ahn, Hanyang University, Korea
1-2: Electron and Ion Beam Technologies

Prof. Yasuyuki Miyamoto, Tokyo Inst. of Technol., Japan

Prof. Nobuhiko Nishiyama, Tokyo Inst. of Technol., Japan

Prof. Safumi Suzuki, Tokyo Inst. of Technol., Japan

- PAPER TITLE
Electron beam lithography in processes for electron/opto/teraherz devices
- SHORT BIOGRAPHY
Yasuyuki Miyamoto is a Professor of Department of Electrical and Electronic Engineering, School of Engineering, Tokyo Institute Technology. He received B.E., M. E., and D.E. degrees in Physical Electronics from Tokyo Institute Technology in 1983, 1985, and 1988, respectively. In 1988 he jointed Department of Physical Electronics, Tokyo Institute of Technology as a Research Associate.
He is interested in compound semiconductor electron devices and nano-fabrication process for electron devices. Also, he is in charge of MEXT program ARIM in Tokyo Institute Technology. He is a fellow of JSAP.
1-3: Patterning Materials
Dr. Peter De Bisschop, Imec, Belgium
2-1: Nanocarbons & 2D Materials
Prof. Tomoki Machida, Univ. of Tokyo, Japan
2-2: Nanodevices

Prof. Satoshi Iwamoto, Univ. of Tokyo, Japan
- PAPER TITLE
Semiconductor-based topological nanophotonics: fundamentals and recent progress
- SHORT BIOGRAPHY
Iwamoto is a professor at the Research Center of Advanced Science and Technology and the Institute of Industrial Science at the University of Tokyo. His research interests include topological photonics and phononics, singular optics, light-matter interaction in photonic nanostructures, and fabrication technology of photonic nanostructures. He received Young Scientist Award of Japanese Society of Applied Physics (2000), the Young Scientists’ Prize, the Commendation for Science and Technology by MEXT, Japan (2012), and the 45th Laser Society of Japan/Distinguished Paper Award (Review Paper Section) (2021). He is a Fellow of Optica (Formerly OSA).
2-4: Inorganic Nanomaterials

Prof. Hitoshi Tabata, Univ. of Tokyo, Japan
- PAPER TITLE (Tentative)
Functional Oxides as a Treasure Box of Oxide Electronics
- SHORT BIOGRAPHY
TABATA graduated from Kyoto University in 1988. He worked at Technical Institute of Kawasaki Heavy Industries from 1988 to 1994 and moved to Osaka University, The Institute of Scientific and Industrial Research as a Research Associate. He was a professor of Nano-science and Nano-technology Center at Osaka University from 2002 to 2006. After 2006, He is currently professor at The University of Tokyo and a fellow of Japan Society of Applied Physics (JSAP). He received a Japan Society for the Promotion of Science (JSPS) Prize in 2008 and outstanding paper award of JSAP in 2013. And he is JSAP fellow from 2014.
6: Atomic Layer Processing (ALP)

Prof. Jiyoung Kim, University of Texas
- PAPER TITLE
Atomic Layer Deposition Application for EUV Photo Resist

Prof. Jin-Seong Park, Hanyang University
- PAPER TITLE
Recent Progress of Molecular Layer-Deposited Inhibitor Using Metalcone film for Nanoscale Area-Selective Deposition