Committee – MNC 2022, Nov. 8-11, 2022


ORGANIZING COMMITTEE
Organizing Committee Chair	Masao Nagase (Tokushima Univ.)
Organizing Committee Vice Chairs	Seiya Kasai (Hokkaido Univ.)	Toshiyuki Tsuchiya (Kyoto Univ.)
Organizing Committees	Jinho Ahn (Hanyang Univ.) Seiji Akita (Osaka Metropolitan Univ.) Hiroshi Arimoto (AIST) Koji Asakawa (Kioxia) Tanemasa Asano (Kyushu Univ.) Toyohiro Chikyow (NIMS) Kazuaki Furukawa (Meisei Univ.) Yoshihiko Hirai (Osaka Metropolitan Univ.)) Toshiyuki Horiuchi (Tokyo Denki Univ.) Koji Ishibashi (RIKEN) Takanori Ichiki (Univ. of Tokyo) Toshiro Itani (Osaka Univ.) Toshiki Ito (Canon) Eun Kyu Kim (Hanyang Univ.) Youngmin Kim (Donkook Univ.) Atsushi Kohno (Fukuoka Univ.) Daiyu Kondo (Fujitsu)	Hidetoshi Kotera (RIKEN) Takahiro Kozawa (Osaka Univ.) Masaru Kurihara (Hitachi) Takashi Meguro (Tokyo Univ. of Sci.) Seiji Nagahara (Tokyo Electron) Yasuyuki Miyamoto (Tokyo Tech.) Takashi Nagamine (Tokyo Ohka) Katsuhiko Nishiguchi (NTT) Yukinori Ochiai (Univ. of Tokyo) Shinji Okazaki (Alitecs) Yukinori Ono (Shizuoka Univ.) Shintaro Sato (Fujitsu) Takashi Sato (Kioxia) Motofumi Suzuki (Kyoto Univ.) Hiroshi Yamaguchi (NTT) Hiroshi Yamashita (Nuflare Technol.)
ADVISORY
Advisory	Yoshinobu Aoyagi (Ritsumeikan Univ.) Kenji Gamo (Emeritus, Osaka Univ.) Kazuhiro Hane (Tohoku Univ.) L.R. Harriott (Univ. of Virginia) Yasuhiro Horiike (Univ. of Tsukuba) Sunao Ishihara (Univ. of Tokyo) Dieter Kern (Univ. of Tubingen) Masanori Komuro (Emeritus, KEK) Michael Kraft (Kuleuven) B. Robert Ilic (Natl. Inst. of Standards and Technol.) Gerald Lopez (Univ. of Pennsylvania) Jean-François de Marneffe (imec) Shinji Matsui (Emeritus, Univ. of Hyogo) Suk-Ki Min (Kyung Hee Univ.) A.R. Neureuther (UC Berkeley) Stella W. Pang (City Univ. of Hong Kong)	R.F.W. Pease (Stanford Univ.) Kurt Ronse (IMEC) Michael Roukes (Caltech) Martha I. Sanchez (LytEn Inc.) Ryuichi Shimizu (Osaka Univ.) Shuichi Shoji (Waseda Univ.) H.I. Smith (MIT) James Spallas (KLA) Takuo Sugano (Emeritus, Univ. of Tokyo) Seiichi Tagawa (Osaka Univ.) Mikio Takai (Emeritus,Osaka Univ.) Serge Tedesco (Leti) Massimo De Vittorio (Istituto Italiano di Tecnol. & Univ. del Salento) Stefan Wurm (SEMATECH)
STEERING COMMITTEE
Steering Committee Chair	Katsuhiko Nishiguchi (NTT)
Steering Committee Vice Chair	Fumitaro Ishikawa (Hokkaido Univ.)
Steering Committees, Organizing	Masao Nagase (Tokushima Univ.) Seiya Kasai (Hokkaido Univ.)	Toshiyuki Tsuchiya (Kyoto Univ.)
Steering Committees, Program	Daiyu Kondo (Fujitsu) Koji Asakawa (Kioxia)	Kazuaki Furukawa (Meisei Univ.) Seiji Nagahara (Tokyo Electron)
Steering Committees, Treasure	Hiroshi Yamashita (Nuflare Technol.)
Steering Committees, Sponsor	Takashi Nagamine (Tokyo Ohka)
Steering Committees, Overseas	Sung Woo Hwang (Samsung SDS) Jang-Kyoo Shin (Kyungpook Univ.) Alek Chen (ASML)	Hong Yee Low (Singapore Univ. of Technol. and Design) Cheng-Yao Lo (Natl. Tsing Hua Univ.)
PROGRAM COMMITTEE
Program Chair	Daiyu Kondo (Fujitsu)
Program Vice Chari	Kouji Asakawa (KIOXIA) Kazuaki Furukawa (Meisei Univ.)	Seiji Nagahara (Tokyo Electron)
JJAP Editor	Shinjiro Hara (Hokkaido Univ.)
1-1: Advanced Lithography and Patterning	Section Head Sachiko Kobayashi (Kioxia) Sub Head Tetsuo Harada (Univ. of Hyogo) Geert Vandenberghe (IMEC)	Members James Bonafede (Cymer Japan) Wolfgang Demmerle (Synopsys, Germany)　 Kunihiko Kasama (Usio) Mark Maslow (ASML) Yasutaka Morikawa (DNP) Takeyoshi Ohashi (Hitachi) Kenichi Oyama (Tokyo Electron)
1-2: Electron and Ion Beam Technologies	Section Head Makoto Sakakibara (Hitachi) Sub Head Hiroshi Yamashita (Nuflare Technol.) Junichi Yanagisawa (Univ. of Shiga Pref.) Kuen-Yu Tsai (Natl. Taiwan Univ.） Ho Seob Kim (Sun Moon Univ., Korea)	Members Sergey Babin （A-Beam) Takaomi Ito (Elionix) Atsushi Kinomura (Kyoto Univ.) Kyu Chang Park (Kyung Hee Univ.) Yasunari Sohda (Univ. of Tsukuba) Keiichiro Hitomi (Hitachi)
1-3: Patterning Materials	Section Head Tomoki Nagai (JSR) Sub Head Julius Santillan (Osaka Univ.) Mark Neisser (Tsinghua Univ.)	Members Satoshi Enomoto (Toyo Gosei) Kazuyo Morita (Oji Holdings) Seiji Nagahara (Tokyo Electron) Kazumasa Okamoto (Osaka Univ.) Hiroki Yamamoto (QST)
2-1: Nanocarbon & 2D Materials	Section Head Shohei Chiashi (Univ. of Tokyo) Sub Head Yasumitsu Miyata (Tokyo Metropolitan Univ.) Ryota Negishi (Toyo Univ.)	Members Jong-Hyun Ahn （Yonsei U niv.） Atsushi Ando (AIST) Wen-Hao Chang (Natl. Chiao Tung Univ.) Masayuki Katagiri (Sony) Satoru Konabe (Hosei Univ.) Takahiro Kondo (Univ. of Tsukuba) Kenzo Maehashi (Tokyo Univ. of Agriculture and Technol. ) Keisuke Shinokita (Kyoto Univ.) Susumu Okada (Univ. of Tsukuba) Haruka Omachi (Nagoya Univ.) Taishi Takenobu (Nagoya Univ.) Masaki Tanemura (Nagoya Inst. of Technol.) Kazuhiro Yanagi (Tokyo Metropolitan Univ.)
2-2: Nanodevices	Section Head Jun Tatebayashi (Osaka Univ.) Sub Head Nobuhiko Ozaki (Wakayama Univ.)	Members Sanguan Anantathanasarn (Furukawa FITEL) Shigeo Asahi (Kobe Univ.) Shinjiro Hara (Hokkaido Univ.) Akio Higo (Univ. of Tokyo) Yasuaki Ishikawa (Aoyama Gakuin Univ.) Yuuichiro Mitani (Tokyo City Univ. ) Munetoshi Seki (Univ. of Tokyo) Kuniharu Takei (Osaka Metropolitan Univ.) Takahisa Tanaka (Univ. of Tokyo) Takeshi Yanagida (Univ. of Tokyo)
2-3: Nanofabrication	Section Head Kouichi Takase (Nihon Univ.) Sub Head Hirofumi Tanaka (Kyushu Inst. of Technol.)	Members Tsuyoshi Hasegawa (Waseda Univ.) Ryu Hasunuma (Tsukuba Univ.) Tsuyoshi Hatano (Nihon Univ.) Wataru Mizubayashi (AIST) Takeru Okada (Tohoku Univ.) Tomohiro Shimizu (Kansai Univ.) Shoso Shingubara (Kansai Univ.) Katsuhiro Tomioka (Hokkaido Univ.) You Yin (Gunma Univ.)
2-4: Inorganic Nanomaterials	Section Head Takashi Tsuchiya (NIMS) Sub Head Jun Kano (Okayama Univ.)	Members Kazuto Hatakeyama (AIST) Shu Nakaharai (NIMS) Takao Shimizu (NIMS) Takaaki Taniguchi (NIMS) Yurina Terasawa (Waseda Univ.) Shinya Tsukada (Shimane Univ.)
2-5: Organic Nanomaterials	Section Head Akito Masuhara (Yamagata Univ.) Sub Head Sadahiro Masuo (Kwansai Univ.)	Members Naoya Aizawa (Osaka Univ.) Tesuro Katayama (Tokushima Univ.) Daiki Kuzuhara (Iwate Univ.) Ryohei Yamakado (Yamagata Univ.) Takeshi Yasuda (NIMS)
2-6: NanoTool	Section Head Koji Sugano (Kobe Univ.) Sub Head Takayuki Hoshino (Hirosaki Univ.)	Members Shoji Hotta (Hitachi High-Technol.) Tadashi Ishida (Tokyo Tech.) Ryuzo Kawamura (Saitama Univ.) Naritaka Kobayashi (Univ. of Shiga Pref.) Reo Kometani (Univ. of Tokyo) Osamu Kubo (Osaka Univ.) Hiroki Miyazako (Univ. of Tokyo) Takahiro Namazu (Kyoto Univ. of Advanced Sci.) Yasuhiko Sugiyama (Hitachi Hightech. Sci.)
3: Nanoimprint, Hybrid-NIL, Biomimetics, and Functional Surfaces	Section Head Jun Taniguchi (Tokyo Univ. of Sci.) Sub Head Akihiro Miyauchi (Tokyo Medical and Dental) Heon Lee (Korea Univ.) Fu-Yuh Chang （Natl. Taiwan Univ. of Sci. and Technol.) Hong Yee Low （Singapore Univ. of Technol. and Design) Michael Muhlberger (PROFACTOR GmbH)	Members Yoshihiko Hirai (Osaka Metropolitan Univ.) Yuji Hirai (Chitose Inst. of Sci. and Technol.) Toshiki Ito (CANON) Shunya Ito (Dexerials) Kazuma Kurihara (AIST) Makoto Okada (Asahi Kasei) Nobuji Sakai (Samsung R&D Institute Japan) Junpei Sakurai (Nagoya Univ.) Yuzuru Shimazaki (Hitachi) Kenta Suzuki (AIST)
4: BioMEMS, Lab on a Chip, and Nanobiotechnology	Section Head Atsushi Miura (Hokkaido Univ.) Sub Head Shinya Kumagai (Meijo Univ.)	Members Takanori Akagi (Tokyo Tech.) Kazuaki Furukawa (Meisei Univ.) Tomohiro Hayashi (Tokyo Tech.) Akihide Hibara (Tohoku Univ.) Akira Matsumoto (Tokyo Medical and Dental) Takeo Miyake (Waseda Univ.) Ryugo Tero (Toyohashi Univ. of Technol.)
5: Microsystem Technology and MEMS	Section Head Ryo Takigawa (Kyushu Univ.) Sub Head Yoshihiro Hasegawa (Hiroshima City Univ.) Shugo Miyake (Kobe City College of Technol.)	Members Hiroki Hiraga (Toshiba) Kentaro Iwami (Tokyo Univ. of Agriculture and Technol.) Sumito Nagasawa (Shibaura Inst. of Technol.) Toru Nakakubo (Canon) Takahiro Namazu （Kyoto Univ. of Advanced Sci.) Yasushi Tomizawa (Toshiba) Daisuke Yamane (Ritsumeikan Univ.)
6: Atomic Layer Processing (ALP)	Section Head Hiroshi Arimoto (AIST) Sub Head Fumihiko Hirose (Yamagata Univ.)	Members Christian Dussarrat Kenji Ishikawa (Nagoya Univ.) Kazuhiro Karahashi (Osaka Univ.) Yasutaka Matsuo (Hokkaido Univ.) Fumikazu Mizutani (Kojundo Chemical Lab.) Jin-Seong Park （Hanyang Univ.） Norifusa Sato (NIMS) Koichi Tokudome (Tosoh) Noriyuki Uchida (AIST) Shigeo Yasuhara (Japan Advanced Chemicals)