| The 27th Symposium on Photomask and Naex Generation Lithography Mask Technology (PMJ 2021) | April 20-22, 2021 | Degital Foram | |
| 2021 International Conference on Solid State Devices and Materials (SSDM 2021) | September 6-9, 2021 | Sapporo Convention Center, Hokkaido, Japan | |
| The 25th International Conference on Miniaturized Systems for Chemistry and Life Sciences (Micro TAS 2021) | October 10-14, 2021 | Palm Springs, CA, USA | |
| 34th International Microprocesses and Nanotechnology Conference (MNC 2021) | October 26-29, 2021 | Art Hotel Osaka Bay Tower, Osaka, Japan | |
| International Conference on Nanoimprint and Nanoprint Technology (NNT 2021) | November 16-18, 2021 | Expoo, Finland | |