|
|
MNC 2010, 23rd International Microprocesses and Nanotechnology
Conference
November 9-12,
2010, Rihga Royal Hotel Kokura, Fukuoka,
Japan
|
|
|
|
|
MNC 2011
October 24-27, 2011
ANA Hotel Kyoto, Kyoto, Japan
November 9-12, 2010
Secretariat (4F Sakura, Rihga Royal Hotel Kokura)
TEL: +81-93-531-7065
Resist Materials and Processing session's Invited talk was withdrawn
Vivek M. Prabhu (NIST)
Pre-registration has been closed. If you wish to attend MNC 2010, please
come to the onsite registration desk at venue.
|
|
Online Registration and Hotel Accomodation Site.
|
Abstract Deadline |
June 30,
July 6, 2010 |
Late News Paper Deadline |
September 15, 2010
|
Registration Deadline |
October 20, 2010
|
JJAP Deadline |
November 30, 2010 |
|
|
|
|
Microprocesses and Nanotechnology play an
important role of technical backbone for constructing the advanced information
communications society with ubiquitous net works of the 21st century.
The MNC conference is now in its 23rd year and is intended to provide a
forum for discussing lithography science and process technology using photon,
electron, ion, other energetic particles and nanomaterials. This conference
covers not only their applications to micro-and nano-structure fabrication
and related physics and devices, but also their fusion applications with
other fields like bio, medical information, and communication technology.
|
|
|
SCOPE
1: Lithography, and Related Technologies
1-1: DUV, EUV Lithography
1-2: Electron- and Ion-Beam Lithography
1-3: Resist Materials and Processing
2: Nanotechnology
2-0 Nanocarbon
2-1: Nanodevice
2-2: Nanofabrication
2-3: Nanomaterials
2-4: Nano Tool
3: Nanoimprint, Nanoprint and Rising Lithography
4: Bio MEMS, Lab on a Chip
5: Microsystem Technology and MEMS
Symp. A: Cost-Effective Efficient Litho Technologies
- Holding the Keys
to "Green Lithography" |
MNC 2010 Plenary Speakers |
|
|
|
Prof. Masayoshi
Esashi
Tohoku Univ.
''Prospect of
Micro/
Nanotechnology for
Fusion in Microelectronics" |
Dr. Michael
Roukes
Kavli Nanoscience Inst.
California Inst. of Technol.
''Large-Scale
Integration
of Nanosystem'' |
Dr. Sam Sivakumar
INTEL CORPORATION
''Managing the Technical and
Economic Challenges of
Next-Generation Lithography'' |
|
|
|
|
|
|
|
|
|
|
|