Tuesday, November 9
Wednesday, November 10
Royal Holl | ■Registration Desk (3FLobby) November 9, 12:30 - 16:30 16:30- 18:30 November 10, 8:30 - 18:00 November 11, 8:30 - 19:10 November 12, 8:30 - 15:30 | |
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10P-1:Opening Session 9:30-12:20 Opening Remark and 2009 Award Presentation F. Cerrina Tribute M. Esashi, Tohoku Univ., Japan (Plenary) M. Roukes, Kavli Nanoscience Inst. California Inst. of Technol., USA (Plenary) S. Sivakumar, INTEL, USA (Plenary) | ||
Lunch | ||
Room A | Room B | Room C |
10A-2: 13:45-15:40 DUV, EUV Lithography and Metrology | 10B-2: 13:45-15:25 Nanomaterials I | 10C-2: 13:45-15:35 Microsystem Technology and MEMS I |
10A-2: 15:40-15:55, Author's Interview | ||
Lobby | ||
Coffee Break | ||
Room A | Room B | Room C |
10A-3: 16:05-18:00 Electron- and Ion-Beam Lithography | 10B-3: 15:55-17:35 Nanomaterials II | 10C-3: 16:05-17:45 Microsystem Technology and MEMS II |
10A-3: 18:00-18:15, Author's Interview | 10B-2, 3: 17:35-17:50, Author's Interview | 10C-2, 3: 17:45-18:00, Author's Interview |
Thursday, November 11
Room A | Room B | Room C |
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11A-4: 9:00-10:50 Resist Materials and Processing | 11B-4: 9:00-10:35 New Functional Nanodevices | 11C-4: 9:00-10:30 Bio MEMS, Lab on a Chip I |
11A-4: 10:50-11:05, Author's Interview | ||
Lobby | ||
Coffee Break | ||
Room A | Room B | Room C |
11A-5: 11:20-12:25 Symp. A. Green Lithography I | 11B-5: 10:55-12:35 Electron Nanodevices | 11C-5: 11:00-12:40 Bio MEMS, Lab on a Chip II |
11B-4, 5,: 12:35-12:50, Author's Interview | 11C-4, 5: 12:40-12:55, Author's Interview | |
Lunch | ||
11A-6: 14:10-16:10 Symp. A. Green Lithography II | 11B-6: 13:35-15:05 Nanofabrication I | 11C-6: 14:10-16:20 Nano Tool |
Break | ||
11B-7: 15:15-16:15 Nanofabrication II | ||
11A-5, 6: 16:10-16:25, Author's Interview | 11C-6: 16:00-16:15, Author's Interview | |
11B-6, 7: 16:15-16:30, Author's Interview | ||
Room D | ||
11D-8: 16:30-18:30 Poster Session I DUV, EUV Lithography and Metrology, Resist Materials and Processing, Nanocarbon, Nanodevices, Nanofabrication, Nanomaterials, Nanoimprint, Nanoprint and Rising Lithography, Bio MEMS, Lab on a Chip and Microsystem Technology and MEMS | ||
Room E | ||
18:40-20:40 Banquet |
Friday, November 12
Room A | Room B | Room C |
12A-9: 9:00-11:00 Symp. A. Green Lithography III | 12B-9: 9:00-10:40 Nanocarbon I | 12C-9: 9:00-10:40 Nanoimprint, Nanoprint and Rising Lithography I |
Lobby | ||
Coffee Break | ||
Room A | Room B | Room C |
12A-10: 11:30-12:30 Symp. A. Green Lithography IV | 12B-10: 11:10-13:00 Nanocarbon II | 12C-10: 11:10-12:50 Nanoimprint, Nanoprint and Rising Lithography II |
12A-9, 10: 12:30-12:45, Author's Interview | 12B-9, 10: 13:00-13:15, Author's Interview | 12C-9, 10: 12:50-13:05, Author's Interview |
Lunch | ||
Room D | ||
12D-11: 14:00-16:00 Poster Session II DUV, EUV Lithography and Metrology, Electron- and Ion-Beam Lithography, Resist Materials and Processing, Nanocarbon, Nanodevices, Nanofabrication, Nanomaterials, Nano-Tool, Nanoimprint, Nanoprint and Rising Lithography, Bio MEMS, Lab on a Chip and Microsystem Technology and MEMS |