IMPORTANT DATE |
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June 10 | Open of Abstract Submission Site | ||
Abstract Deadline (Closed) |
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August 2 | |||
September 2 | Late News Paper Deadline (Closed) |
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October 20 | Deadline of Early Bird Registration |
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November 12-15 | Conference |
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November 30 | Deadline of JJAP Special Issue |
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SECTION |
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1-1: Advanced Lithography and Patterning 1-2: Electron and Ion Beam Technologies 1-3: Patterning Materials 2-1: Nanocarbons & 2D Materials 2-2: Nanodevices 2-3: Nanofabrication 2-4: Inorganic Nanomaterials | 2-5: Organic Nanomaterials 2-6: Nano Surfaces, Interfaces, and Advanced Nano Metrology 3: Nanoimprint, Hybrid-NIL, Biomimetics, and Functional Surfaces 4: BioMEMS, Lab on a Chip, and Nanobiotechnology 5: Microsystem Technology and MEMS 6: Atomic Layer Processing (ALP) |
PLENARY |
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Dr. Yoshihisa Kagawa, Sony Semiconductor Solutions Corporation, Japan | |
Dr. Jan van Schoot, ASML, The Netherlands |
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Dr. Hisashi Saito, Ministry of Economy, Trade and Industry, Japan |
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SPECIAL TALK |
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Dr. Martin van den Brink, Former President, and CTO, ASML, The Netherlands |
SYMPOSIUM |
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Symp. A | SYMPOSIUMThe Path to Sustainable Lithography | |
Symp. B | SYMPOSIUMProcess and Device Technologies for Quantum Computing II | |
Symp. C | SYMPOSIUMInnovative Technology to Regulate Living Body |