Committee

MNC 2023 COMMITTEE LIST
ORGANIZING COMMITTEE
Organizing Committee
Chair		Seiya Kasai (Hokkaido Univ.)
Organizing Committee
Vice Chairs		Toshiyuki Tsuchiya (Kyoto Univ.)Katsuhiko Nishiguchi (NTT)
Organizing CommitteesJinho Ahn (Hanyang Univ.)
Seiji Akita (Osaka Metropolitan Univ.)
Hiroshi Arimoto (AIST)
Koji Asakawa (Kioxia)
Tanemasa Asano (Kyushu Univ.)
Toyohiro Chikyow (NIMS)
Kazuaki Furukawa (Meisei Univ.)
Yoshihiko Hirai (Osaka Metropolitan Univ.)
Toshiro Hiramoto (Univ. of Tokyo)
Toshiyuki Horiuchi (Tokyo Denki Univ.)
Koji Ishibashi (RIKEN)
Fumitaro Ishikawa (Hokkaido Univ.)
Takanori Ichiki (Univ. of Tokyo)
Toshiro Itani (AIST)
Toshiki Ito (Canon)
Isao Kawata (imec Tokyo Office)
Eun Kyu Kim (Hanyang Univ.)
Jong Su Kim (Yeungnam Univ.)
Atsushi Kohno (Fukuoka Univ.)
Daiyu Kondo (Fujitsu)
Hidetoshi Kotera (Kyoto Univ.)
Takahiro Kozawa (Osaka Univ.)
Shinya Kumagai (Meijo Univ.)
Masaru Kurihara (Hitachi)
Seiji Nagahara (Tokyo Electron)
Tomoki Nagai (JSR)
Takashi Nagamine (Tokyo Ohka)
Masao Nagase (Tokushima Univ.)
Takahiro Namazu（Kyoto Univ. of Advanced Sci.)
Atsushi Miura (Hokkaido Univ.)
Yasuyuki Miyamoto (Tokyo Inst. of Technol.)
Yukinori Ochiai (Univ. of Tokyo)
Shinji Okazaki (Alitecs)
Yukinori Ono (Shizuoka Univ.)
Shintaro Sato (Fujitsu)
Takashi Sato (Alitecs)
Motofumi Suzuki (Kyoto Univ.)
Kouichi Takase (Nihon Univ.)
Hironobu Taoka (Nihon Synopsys)
Hiroshi Yamaguchi (NTT)
Hiroshi Yamashita (Nuflare Technol.)
ADVISORY　(Tentative)
AdvisoryYoshinobu Aoyagi (Ritsumeikan Univ.)
Chih-Hao Chang (Univ. of Texas)
Kenji Gamo (Emeritus, Osaka Univ.)
Gabi Grützner (micro resist)
Kazuhiro Hane (Tohoku Univ.)
L.R. Harriott (Univ. of Virginia)
Yasuhiro Horiike (Univ. of Tsukuba)
Sunao Ishihara (Univ. of Tokyo)
Dieter Kern (Univ. of Tubingen)
Masanori Komuro (Emeritus, KEK)
Michael Kraft (Kuleuven)
B. Robert Ilic (Natl. Inst. of Standards and Technol.)
Jean-François de Marneffe (imec)
Shinji Matsui (Emeritus, Univ. of Hyogo)
Takashi Meguro (Tokyo Univ. of Sci.)
Suk-Ki Min (Kyung Hee Univ.)

A.R. Neureuther (UC Berkeley)
Laurent Pain (Leti)
Stella W. Pang (City Univ. of Hong Kong)
R.F.W. Pease (Stanford Univ.)
Kurt Ronse (IMEC)
Michael Roukes (Caltech)
Ryuichi Shimizu (Emeritus, Osaka Univ.)
Jang-Kyoo Shin (Kyungpook Univ.)
Shuichi Shoji (Waseda Univ.)
H.I. Smith (MIT)
James Spallas (KLA)
Takuo Sugano (Emeritus, Univ. of Tokyo)
Seiichi Tagawa (Osaka Univ.)
Mikio Takai (Emeritus,Osaka Univ.)
Stefan Wurm (SEMATECH)
Qiangfei Xia (Univ. of Massachusetts)
STEERING COMMITTEE
Steering Committee ChairSeiji Nagahara (Tokyo Electron)
Steering Committee Vice ChairDaiyu Kondo (Fujitsu) Atsushi Miura (Hokkaido Univ.)
Steering Committees, OrganizingSeiya Kasai (Hokkaido Univ.)Toshiyuki Tsuchiya (Kyoto Univ.)
Katsuhiko Nishiguchi (NTT)
Steering Committees,
Program		Koji Asakawa (Kioxia)
Shinya Kumagai (Meijo Univ.)		Tomoki Nagai (JSR)
Kouichi Takase (Nihon Univ.)
Steering Committees,
Treasure		Hiroshi Yamashita (Nuflare Technol.)
Steering Committees,
Local Arrange		Fumitaro Ishikawa (Hokkaido Univ.)
Steering Committees,
Sponsor, Web.		Takashi Nagamine (Tokyo Ohka)
Takahiro Namazu （Kyoto Univ. of Advanced Sci.)
Hironobu Taoka (Nihon Synopsys)
Isao Kawata (imec Tokyo Office)
Steering Committees,
Overseas		Sung Woo Hwang (Samsung SDS)
Hong Yee Low (Singapore Univ. of Technol. and Design)
Cheng-Yao Lo (Natl. Tsing Hua Univ.)
PROGRAM COMMITTEE
Program ChairKoji Asakawa (Kioxia)
Program Vice ChariShinya Kumagai (Meijo Univ.)
Kouichi Takase (Nihon Univ.)		Tomoki Nagai (JSR)
JJAP EditorShinjiro Hara (Hokkaido Univ.)
1-1: Advanced Lithography and PatterningSection Head
Sachiko Kobayashi (Kioxia)
Sub Head
Tetsuo Harada (Univ. of Hyogo)
Geert Vandenberghe (IMEC)		Members
James Bonafede (Cymer Japan)
Kunihiko Kasama (Usio)
Yasutaka Morikawa (DNP)
Takeyoshi Ohashi (Hitachi)
Kenichi Oyama (Tokyo Electron)
Wolfgang Demmerle (Synopsys, Germany)　
Mark Maslow (ASML)
1-2: Electron and Ion Beam TechnologiesSection Head
Makoto Sakakibara (Hitachi)
Sub Head
Hiroshi Yamashita (Nuflare Technol.)
Junichi Yanagisawa (Univ. of Shiga Pref.)
Kuen-Yu Tsai （Natl. Taiwan Univ.）
Members
Keiichiro Hitomi (Hitachi)
Takaomi Ito (Elionix)
Atsushi Kinomura (Kyoto Univ.)
Yasunari Sohda (Univ. of Tsukuba)
Kyu Chang Park (Kyung Hee Univ.)
1-3: Patterning Materials　Section Head
Toru Fujimori (FUJIFILM)
Sub Head
Julius Santillan (AIST)
Mark Neisser (Tsinghua Univ.)		Members
Satoshi Enomoto (Toyo Gosei)
Kazuyo Morita (Oji Holdings)
Seiji Nagahara (Tokyo Electron)
Tomoki Nagai (JSR)
Kazumasa Okamoto (Osaka Univ.)
Hiroki Yamamoto (QST)
2-1: Nanocarbon & 2D MaterialsSection Head
Yasumitsu Miyata (Tokyo Metropolitan Univ.)
Sub Head
Shohei Chiashi (Univ. of Tokyo)
Ryota Negishi (Toyo Univ.)
Members
Jong-Hyun Ahn （Yonsei U niv.）
Atsushi Ando (AIST)
Wen-Hao Chang (Natl. Chiao Tung Univ.)
Masafumi Inaba (Kyushu Univ.)
Ryo Kitaura (Nagoya Univ.)
Satoru Konabe (Hosei Univ.)
Takahiro Kondo (Univ. of Tsukuba)
Kenzo Maehashi (Tokyo Univ. of Agriculture and Technol. )
Shinichiro Mouri (Ritsumeikan Univ.)
Susumu Okada (Univ. of Tsukuba)
Haruka Omachi (Nagoya Univ.)
Keisuke Shinokita (Kyoto Univ.)
Taishi Takenobu (Nagoya Univ.)
Masaki Tanemura (Nagoya Inst. of Technol.)
Kazuhiro Yanagi (Tokyo Metropolitan Univ.)
2-2: NanodevicesSection Head
Nobuhiko Ozaki (Wakayama Univ.)
Sub Head
Shigeo Asahi (Kobe Univ.)
Jun Tatebayashi (Osaka Univ.)
Members
Sanguan Anantathanasarn (Furukawa FITEL)
Shinjiro Hara (Hokkaido Univ.)
Akio Higo (Univ. of Tokyo)
Yasuaki Ishikawa (Aoyama Gakuin Univ.)
Yuuichiro Mitani (Tokyo City Univ.)
Munetoshi Seki (Univ. of Tokyo)
Kuniharu Takei (Hokkaido Univ.)
Takahisa Tanaka (Keio Univ.)
Takeshi Yanagida (Univ. of Tokyo)
2-3: NanofabricationSection Head
Kouichi Takase (Nihon Univ.)
Sub Head
Hirofumi Tanaka (Kyushu Inst. of Technol.)
Katsuhiro Tomioka (Hokkaido Univ.)		Members
Kazuhiko Endo (Tohoku Univ.)
Tsuyoshi Hasegawa (Waseda Univ.)
Ryu Hasunuma (Tsukuba Univ.)
Tsuyoshi Hatano (Nihon Univ.)
Wataru Mizubayashi (AIST)
Akio Ohta (Fukuoka Univ.)
Takeru Okada (Tohoku Univ.)
Tomohiro Shimizu (Kansai Univ.)
Shingubara Shoso (Kansai Univ.)
You Yin (Gunma Univ.)
2-4: Inorganic NanomaterialsSection Head
Takashi Tsuchiya (NIMS)
Sub Head
Jun Kano (Okayama Univ.)
Takao Shimizu (NIMS)
Members
Kazuto Hatakeyama (Kumamoto Univ.)
Shu Nakaharai (Tokyo Univ. of Technol.)
Takaaki Taniguchi (NIMS)
Yurina Terasawa (Kumamoto Univ.)
Shinya Tsukada (Shimane Univ.)
2-5: Organic NanomaterialsSection Head
Akito Masuhara (Yamagata Univ.)
Sub Head
Takeshi Yasuda (NIMS)
Members
Naoya Aizawa (Osaka Univ.)
Tesuro Katayama (Tokushima Univ.)
Daiki Kuzuhara (Iwate Univ.)
Ryohei Yamakado (Yamagata Univ.)
2-6: Nano Surfaces, Interfaces,
and Advanced Microscopy		Section Head
Takayuki Hoshino (Nagoya Univ.)
Sub Head
Osamu Kubo (Gifu Univ.)
Members
Masayuki Abe (Osaka Univ)
Shoji Hotta (Hitachi High-Tech)
Tadashi Ishida ( (Tokyo Inst. of Technol.)
Ryuzo Kawamura (Saitama Univ.)
Naritaka Kobayashi (Univ. of Shiga Pref.)
Reo Kometani (Univ. of Tokyo)
Hiroki Miyazako (Univ. of Tokyo)
Hayato Sone (Gunma Univ.)
Koji Sugano (Kobe Univ.)
3: Nanoimprint, Hybrid-NIL,
Biomimetics, and Functional Surfaces 		Section Head
Jun Taniguchi (Tokyo Univ. of Sci.)
Sub Head
Yuji Hirai (Chitose Inst. of Sci. and Technol.)
Heon Lee (Korea Univ.)
Fu-Yuh Chang （Natl. Taiwan Univ. of Sci. and Technol.)
Hong Yee Low （Singapore Univ. of Technol. and Design)
Michael Muhlberger (PROFACTOR GmbH)
Members
Yoshihiko Hirai (Osaka Metropolitan Univ.)
Toshiki Ito (CANON)
Shunya Ito (Dexerials)
Kazuma Kurihara (AIST)
Akihiro Miyauchi (Tokyo Medical and Dental)
Makoto Okada (Asahi Kasei)
Nobuji Sakai (Samsung Japan)
Junpei Sakurai (Nagoya Univ.)
Yuzuru Shimazaki (Hitachi)
Kenta Suzuki (AIST)
4: BioMEMS, Lab on a Chip, and
Nanobiotechnology		Section Head
Kazuaki Furukawa (Meisei Univ.)
Sub Head
Shigeyasu Uno (Ritsumeikan Univ.)

Members
Tomohiro Hayashi ( (Tokyo Inst. of Technol.)
Akihide Hibara ( (Tokyo Inst. of Technol.)
Shinya Kumagai (Meijo Univ.)
Akira Matsumoto (Tokyo Medical and Dental)
Atsushi Miura (Hokkaido Univ.)
Takeo Miyake (Waseda Univ.)
Ryugo Tero (Toyohashi Univ. of Technol.)
5: Microsystem Technology and MEMSSection Head
Yoshihiro Hasegawa (Hiroshima City Univ.)
Sub Head
Ryo Takigawa (Kyushu Univ.)
Shugo Miyake (Kobe City College of Technol.)
Members
Kentaro Iwami (Tokyo Univ. of Agriculture and Technol.)
Sumito Nagasawa (Shibaura Inst. of Technol.)
Toru Nakakubo (Canon)
Takahiro Namazu （Kyoto Univ. of Advanced Sci.)
Yasushi Tomizawa (Toshiba)
Daisuke Yamane (Ritsumeikan Univ.)
6: Atomic Layer Processing (ALP)Section Head
Fumihiko Hirose (Yamagata Univ.)
Sub Head
Hiroshi Arimoto (AIST)
Shigeo Yasuhara (Japan Advanced Chemicals)
Myung Mo Sung (Hanyang Univ.)
Jiyoung Kim (Univ. of Texas)


Members
Christian Dussarrat (AIR Liquide)
Kenji Ishikawa (Nagoya Univ.)
Kazuhiro Karahashi (Osaka Univ.)
Yasutaka Matsuo (Hokkaido Univ.)
Fumikazu Mizutani (Kojundo Chemical Lab.)
Norifusa Sato (NIMS)
Jin-Seong Park (Hanyang Univ.）
Koichi Tokudome (Tosoh)
Noriyuki Uchida (AIST)