General

36th International Microprocesses and Nanotechnology Conference (MNC 2023)

November 14-17, 2023

The Japan Society of Applied Physics

The Institute of Electrical Engineers of Japan
The Institute of Electronics, Information and Communication Engineers
The Japan Society for Precision Engineering
The Japan Society of Mechanical Engineers
The Japanese Society for Synchrotron Radiation Research
The Japanese Society of Microscopy
The Japan Society of Vacuum and Surface Science

Microprocesses and Nanotechnology play an important role of technical backbone for constructing the advanced information communications society with ubiquitous net works of the 21st century.
The MNC conference is now in its 36th year and is intended to provide a forum for discussing lithography science and process technology using photon, electron, ion, other energetic particles and nanomaterials. This conference covers not only their applications to micro-and nano-structure fabrication and related physics and devices, but also their fusion applications with other fields like bio, medical information, and communication technology.

1: Lithography, Metrology and Related Technologies
1-1: Advanced Lithography and Patterning
1-2: Electron and Ion Beam Technologies
1-3: Patterning Materials
2: Nanotechnology
2-1: Nanocarbons & 2D Materials
2-2: Nanodevices
2-3: Nanofabrication
2-4: Inorganic Nanomaterials
2-5: Organic Nanomaterials
2-6: Nano Surfaces, Interfaces, and Advanced Microscopy
3: Nanoimprint, Hybrid-NIL, Biomimetics, and Functional Surfaces
4: BioMEMS, Lab on a Chip, and Nanobiotechnology
5: Microsystem Technology and MEMS
6: Atomic Layer Processing (ALP)

Deadline: from June 10 to July 1, 2023
Digest of Papers (Download) release date: November 14, 2023

MNC Special Issue from Japanese Journal of Applied Physics (JJAP) (June, 2024)

Organizing Committee Chair: Seiya Kasai (Hokkaido Univ.)
Steering Committee Chair: Seiji Nagahara (Tokyo Electron) 　
Program Committee Chair: Koji Asakawa (Kioxia)