MNC 2018, November 13-16, 2018
31st International Microprocesses and Nanotechnology Conference
Sapporo Park Hotel, Sapporo, Japan




Area Title Name Affiliation
　Plenary AI Based Self-Driving Vehicles and Its Relation with Nano Electronics 　Tsuguo Nobe 　Intel and Nagoya University, Japan
EUV Lithography at Threshold of High-Volume Manufacturing and Beyond 　Anthony Yen 　ASML, USA
Materials innovation and integration for new computing paradigms 　Kirsten Moselund 　IBM Research Zurich, Switzealnd
　Symp. A: Nano-Metrology for Exploring the Limit Application of Dynamic Light Scattering; 　Redouane Borsali 　University of Grenoble Alpes, France
CD SEM Metrology for the 5nm Technology Node and Beyond
 　Gian Lorusso 　imec, Belgium
X-ray based dimensional metrology for the semiconductor industry 　Joe Kline 　NIST, USA
Advanced CD-SEM metrology for Novel patterning technologies 　Takeshi Kato 　Hitachi High-Technologies Corporation, Japan
X-ray nanoscopic phase imaging with grating interferometry 　Atsushi Momose 　Tohoku University, Japan
Development of EUV Phase Imaging Microscope for Mask-3D-Effect and Defect Evaluation 　Tetsuo Harada 　University of Hyogo, Japan
Symp. B: Recent Progress of Atomic Layer Processing (ALP) Technology    Single Reaction Control in Atomic Layer Etching for LSI Device Fabricatrion 　Masaru Kurihara 　Hitachi, Japan
Consecutive Area-Selective Deposition Using Self-Assembled Monolayer 　Jiyoung Kim 　University of Texas at Dallas, USA
Study of High-k Gate Insulator for GaN Power Device by Atomic Layer Deposition (Invited) 　Toshihide Nabatame 　NIMS, Japan
Ultra-Thin Ferroelectric HfZrO2 by Atomic-Layer Deposition (ALD) for Steep Slope Transistors Application 　Min-Hung Lee 　National Taiwan Normal University, Taiwan
Symp. C: Thermal and Electronic Properties of Nanoscale Interfaces(Tentative Title)  
Thermal and Thermoelectric Transport in Metal-Coordinated Polymers:Towards Flexible Devices
 　Shannon Yee 　Georgia Institute of Technology, USA
Study of the thermal properties of nanoscale interface with high temporal resolution 　Weigang Ma 　Tsinghua University, China
Measurements of charge, heat and spin transport in organic
semiconductors
 　Deepak Venkateshvaran 　Univ. of Cambridge, UK
Symp. D: BioMEMS, Lab on a Chip, and Nanotechnology (Tentative Title)    Three dimensional UV lithography technologies for microphysiological systems 　Yoshikazu Hirai 　Kyoto University, Japan
Stimulation of Cells by Cold Atmospheric Plasma for Wound Treatment (Invited) 　Tetsuji Shimizu 　AIST, Japan
Next Breakthroughs in Pluripotent Stem Cell Applications 　Kiichiro Tomoda 　Osaka Medical College, Japan
Toward a data-driven strategy for designs of biomaterials 　Tomohiro Hayashi 　Tokyo Institute of Technology, Japan
　1-1: Photolithography and Patterning EUV material challenges and solutions 　Geert Vandenberghe 　imec, Belgium
How to Measure Accurately True LER Occurring in EUV Lithography 　Hiroki Kawada 　Hitachi High-Technologies Corporation, Japan
　1-2: Electron and Ion Beam Sources of Resist Surface Charging in Electron Beam Lithography 　Noriaki Nakayamada 　NuFlare Technology, Japan
　1-3: Resist and Directed Self-Assembly Defect reduction strategies for directed self-assembly process 　Hyo Seon Suh 　imec, Belgium
 2-1: Nanocarbons  Bottom-Up Chemical Synthesis of Atomically Precise Graphene Nanoribbons and Their Potentials 　Akimitsu Narita 　Max Planck Institute for Polymer Research, Germany
Hybrid Nano Carbon Materials for Energy Electrodes 　Seong Chan Jun 　Yonsei Univ., Korea
　2-2: Nanodevices Control of Heat and Charge Transport in Carbon-Nanotube- Based Thermoelectric Materials Using Bionanoparticles 　Masakazu Nakamura 　Nara Institute of Science and Technology (NAIST), Japan
　2-3: Nanofabrication Etched Ge Surface Treatment for Ge NW/fin FETs 　Yao-Jen Lee 　National Nano Device Labs. (NDL), Taiwan
　2-4: Inorganic Nanomaterials Room Temperature coating of Ceramic film by Aerosol Deposition 　Jun Akedo 　AIST, Japan
Heterojunction based on atomically thin semiconductor and its application 　Kazuhito Tsukagoshi 　NIMS, Japan
Solution-processed 2D molecular crystals for transistor applications 　Yun Li 　Nanjing University, China
　2-5: Organic Nanomaterials Polymeric Solid-State Ionic Gate Dielectrics for Low-Voltage Field-Effect Transistors 　Yong-Young Noh 　Dongguk University, Korea
Coordination Polymers Boost Nano- and Micro-Fabrication 　Kenji Hirai 　Hokkaido University, Japan
　2-6: Nano-Tool

Application of helium ion microscopy (HIM) to nano- electronics and bio-science

 　Shinichi Ogawa 　AIST, Japan
　3: Nanoimprint, Hybrid-NIL, Biomimetics, and Functional Surfaces  Nanoimprint Lithography of Oxides via Better Chemistry 　M.S.M. Saifullah 　A*STAR, Singapore
Biomimetics: Emulation of Biological “Bricolage" for Sustainable Paradigm Shift toward Survival in Anthropocene (Invited) 　Masatsugu Shimomura 　Chitose Institute of Science and Technology, Japan
　4: BioMEMS, Lab on a Chip, and Nanobiotechnology  Optically Driven Nano-Robots and Chemical IC Chips for Micro-RNA Detection and Tissue Enginneing Based on 3D Micro/Nano Fabrication 　Koji Ikuta 　University of Tokyo, Japan
Development of microwave scattering field tomography for next-generation breast cancer screening 　Kenjiro Kimura 　Kobe University, Japan
　5: Microsystem Technology and MEMS Highly sensitive spintronic strain-gauge sensor and Spin-MEMS microphone 　Yoshihiko Fuji 　Toshiba Corporation, Japan
Surface activated bonding of LiNbO3 and Si for optical microsystem 　Ryo Takigawa 　Kyushu University, Japan


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