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MNC 2012, 25th International Microprocesses and Nanotechnology Conference
Oct. 30-Nov. 2, 2012, Kobe Meriken Park Oriental Hotel, Kobe, Japan
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| Abstract Deadline |
July 1, 2012
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| Late News Paper Deadline |
September 15, 2012
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| Registration Deadline |
October 15, 2012
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| Papers will be published online |
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| JJAP Deadline |
| November 30, 2012 |
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Microprocesses and Nanotechnology play an
important role of technical backbone for constructing the advanced information
communications society with ubiquitous net works of the 21st century.
The MNC conference is now in its 25th year and is intended to provide a
forum for discussing lithography science and process technology using photon,
electron, ion, other energetic particles and nanomaterials. This conference
covers not only their applications to micro-and nano-structure fabrication
and related physics and devices, but also their fusion applications with
other fields like bio, medical information, and communication technology.
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SCOPE
1:Lithography and Related Technologies and Metrology
1-1: Lithography and Metrology
1-2: Resist Materials and Processing
2: Nanotechnology
2-0 Nanocarbons
2-1: Nanodevices
2-2: Nanofabrication
2-3: Nanomaterials
2-4: Nano Tool
3: Nanoimprint, Nanoprint and Rising Lithography
4: BioMEMS, Lab on a Chip
5: Microsystem Technology and MEMS
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SYMPOSIUM
Symposium on Patterning Innovation for Sub-20 nm Devices
Symp. A: Extreme Ultraviolet Lithography and Lithography Extensions
Symp. B: Nanoimprint
Symp. C: Directed Self Assembly
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