MNC 2014
27th International Microprocesses and Nanotechnology Conference
November 4-7, 2014, Hilton Fukuoka Sea Hawk, Fukuoka, Japan




Plenary Talk
Ffabrication, science, and applications of Van der Waals Heterostructures James Hone (Columbia Univ., USA)
Nanotechnology to Develop “the Magic Bullet” for Targeted Cancer Therapy Kazunori Kataoka (Univ. of Tokyo, Japan)
Adding New Capabilities to CMOS Integrated Circuits via Field-Assisted Directed Assembly of Nanowire and 2D Crystal Materials Theresa Mayer (Penn State Univ., USA)
1-1: Advanced Photolithography
Enabling Advanced Multi-patterning Applications Hidetami Yaegashi (Tokyo Electron, Japan)
1-2: Electron and Ion Beam Technologies
Computational study on electron beam lithography
Masaaki Yasuda (Osaka Prefecture University, Japan)
Advanced Nanoscale Analysis of Semiconductor Materials by TEM and SPM Takeshi Soeda (Fujitsu Labs., Japan)
1-3: Resist and Directed Self-Assembly
New Process and material proposal for Next Generation Lithography; Rikimaru Sakamoto (Nissan Chemical, Japan)
2-1 Nanocarbons
Graphene-Based Barriers for Preventing Oxidation and Diffusion Taeyoon Lee (Yonsei Univ., Korea)
Optimization of Vertical Carbon Nanotube Interconnects using the Direct Electrical Comparison of Integration Steps Marleen H. van der Veen(IMEC, Belgium)
2-2: Nanodevices
Recent Progress on Quantum Dot Intermediate Band Solar Cells; Yoshitaka Okada (Univ. of Tokyo, Japan)
III-V/Ge Channel MOS Device Technologies in Nano CMOS era Shinichi Takagi (Univ. of Tokyo, Japan)
2-3: Nanofabrication
Microwave Anneal processing for Future CMOS Yao-Jen Lee (National Nano Device Labs., Taiwan)
Fabrication of Nanogap Electrodes by Molecular Ruler Method Hirofumi Tanaka (Kyushu Inst. of Technol., Japan)
2-4: Inorganic Nanomaterials
Nanostructure Design of Functional Ceramics by Solution Processes Nobuhiro Matsushita (Tokyo Inst. of Technol., Japan)
2-5: Organic Nanomaterials
2-6: NanoTool
Micro/Nanomechanical Systems as a Sensing Tool Takahito Ono (Tohoku Univ., Japan)
3: Nanoimprint, Nanoprint and Rising Lithography
Nanoimprint lithography as a directed self-assembly tool: approaches and nanometrology Clivia M. Sotomayor Torres (ICN2, Spain)
Nanometer to micrometer scale patterning by thermal roll to roll NIL Tapio Makela (VTT Printed and Hybrid Functionalities, Finland)
4: BioMEMS, Lab on a Chip
Microfluidic Technologies for Cell and Tissue Analyses Teruo Fujii (Univ. of Tokyo, Japan)
Biosensors for Cell Migration Control and Cell Detection Stella W. Pang (City Univ. of Hong Kong, Hong Kong)
5: Microsystem Technology and MEMS
Integrated micro fabrication process for non-Si based MEMS Seiichi Hata (Nagoya Univ., Japan)
Symposium A ''Advanced Patterning''
Extending Moore’s Law with Complementary Lithography Yan Borodovsky (Intel, USA)
A Foundry View of Where Lithography is Going Harry Levinson (Globalfoundries, USA)
High-aspect-ratio micro-fabrication by proton beam writing Hiroyuki Nishikawa (Shibaura Inst. Technol., Japan)
Fabrication of Super High Resolution Seamless Roller Mold by using EB Lithography Masayuki Abe (Asahi Kasei, Japan)
LPP-EUV Source Technology for HVM Lithography; Takashi Saito (Gigaphoton, Japan)
EUV Lithography, a study of its impact on local CD uniformity Chang-Nam Ahn (ASML, Korea)
300mm wafer performance of a coordinated line epitaxy (COOL) process using directed self-assembly Yuriko Seino (EIDEC, Japan)
Limits of Lithography Beyond the 10-nm Node Burn Lin (TSMC, Taiwan)
Advanced Patterning as Key Scaling Enabler; Geert Vandenberghe (IMEC, Belgium)
Carbohydrate-based block copolymer thin films for opto- and bio-electronic devices; Redouane Borsali (CERMAV-CNRS & Grenoble Univ., France)
DSA Process Modeling and Application of ILT mask synthesis for co-optimizing design rules and DSA process characteristics Thuc Dam (Synopsis, USA)
Symposium B ''Hybrid Nanosystem''
Silicon Nanostructures for Photonics and Photovoltaics Francesco Priolo (Univ. di Catania, Itary)
Phonon Lasing (and Mode Cooling) in an Electromechanical Resonator Imran Mahboob (NTT, Japan)
Low dimensional nanomaterials: Applications on solar cell and solar energy storage
Yu-Lun Chueh (National Tsing-Hua Univ., Taiwan)
Plasmon-Induced Photoexcitaiton of Molecules Kei Murakoshi (Hokkaido Univ., Japan)


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