| Plenary Talk |
| Ffabrication, science, and applications of Van der Waals Heterostructures |
James Hone (Columbia Univ., USA) |
| Nanotechnology to Develop “the Magic Bullet” for Targeted Cancer Therapy |
Kazunori Kataoka (Univ. of Tokyo, Japan) |
| Adding New Capabilities to CMOS Integrated Circuits via Field-Assisted Directed Assembly of Nanowire and 2D Crystal Materials |
Theresa Mayer (Penn State Univ., USA) |
| 1-1: Advanced Photolithography |
| Enabling Advanced Multi-patterning Applications |
Hidetami Yaegashi (Tokyo Electron, Japan) |
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| 1-2: Electron and Ion Beam Technologies |
Computational study on electron beam lithography
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Masaaki Yasuda (Osaka Prefecture University, Japan) |
| Advanced Nanoscale Analysis of Semiconductor Materials by TEM and SPM |
Takeshi Soeda (Fujitsu Labs., Japan) |
| 1-3: Resist and Directed Self-Assembly |
| New Process and material proposal for Next Generation Lithography; |
Rikimaru Sakamoto (Nissan Chemical, Japan) |
| 2-1 Nanocarbons |
| Graphene-Based Barriers for Preventing Oxidation and Diffusion |
Taeyoon Lee (Yonsei Univ., Korea) |
| Optimization of Vertical Carbon Nanotube Interconnects using the Direct
Electrical Comparison of Integration Steps |
Marleen H. van der Veen(IMEC, Belgium) |
| 2-2: Nanodevices |
| Recent Progress on Quantum Dot Intermediate Band Solar Cells; |
Yoshitaka Okada (Univ. of Tokyo, Japan) |
| III-V/Ge Channel MOS Device Technologies in Nano CMOS era |
Shinichi Takagi (Univ. of Tokyo, Japan) |
| 2-3: Nanofabrication |
| Microwave Anneal processing for Future CMOS |
Yao-Jen Lee (National Nano Device Labs., Taiwan) |
| Fabrication of Nanogap Electrodes by Molecular Ruler Method |
Hirofumi Tanaka (Kyushu Inst. of Technol., Japan) |
| 2-4: Inorganic Nanomaterials |
| Nanostructure Design of Functional Ceramics by Solution Processes |
Nobuhiro Matsushita (Tokyo Inst. of Technol., Japan) |
| 2-5: Organic Nanomaterials |
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| 2-6: NanoTool |
| Micro/Nanomechanical Systems as a Sensing Tool |
Takahito Ono (Tohoku Univ., Japan) |
| 3: Nanoimprint, Nanoprint and Rising Lithography |
| Nanoimprint lithography as a directed self-assembly tool: approaches and
nanometrology |
Clivia M. Sotomayor Torres (ICN2, Spain) |
| Nanometer to micrometer scale patterning by thermal roll to roll NIL |
Tapio Makela (VTT Printed and Hybrid Functionalities, Finland) |
| 4: BioMEMS, Lab on a Chip |
| Microfluidic Technologies for Cell and Tissue Analyses |
Teruo Fujii (Univ. of Tokyo, Japan) |
| Biosensors for Cell Migration Control and Cell Detection |
Stella W. Pang (City Univ. of Hong Kong, Hong Kong) |
| 5: Microsystem Technology and MEMS |
| Integrated micro fabrication process for non-Si based MEMS |
Seiichi Hata (Nagoya Univ., Japan) |
| Symposium A ''Advanced Patterning'' |
| Extending Moore’s Law with Complementary Lithography |
Yan Borodovsky (Intel, USA) |
| A Foundry View of Where Lithography is Going |
Harry Levinson (Globalfoundries, USA) |
| High-aspect-ratio micro-fabrication by proton beam writing |
Hiroyuki Nishikawa (Shibaura Inst. Technol., Japan) |
| Fabrication of Super High Resolution Seamless Roller Mold by using EB Lithography |
Masayuki Abe (Asahi Kasei, Japan) |
| LPP-EUV Source Technology for HVM Lithography; |
Takashi Saito (Gigaphoton, Japan) |
| EUV Lithography, a study of its impact on local CD uniformity |
Chang-Nam Ahn (ASML, Korea) |
| 300mm wafer performance of a coordinated line epitaxy (COOL) process using
directed self-assembly |
Yuriko Seino (EIDEC, Japan) |
| Limits of Lithography Beyond the 10-nm Node |
Burn Lin (TSMC, Taiwan) |
| Advanced Patterning as Key Scaling Enabler; |
Geert Vandenberghe (IMEC, Belgium) |
| Carbohydrate-based block copolymer thin films for opto- and bio-electronic
devices; |
Redouane Borsali (CERMAV-CNRS & Grenoble Univ., France) |
| DSA Process Modeling and Application of ILT mask synthesis for co-optimizing
design rules and DSA process characteristics |
Thuc Dam (Synopsis, USA) |
| Symposium B ''Hybrid Nanosystem'' |
| Silicon Nanostructures for Photonics and Photovoltaics |
Francesco Priolo (Univ. di Catania, Itary) |
| Phonon Lasing (and Mode Cooling) in an Electromechanical Resonator |
Imran Mahboob (NTT, Japan) |
| Low dimensional nanomaterials: Applications on solar cell and solar energy
storage |
Yu-Lun Chueh (National Tsing-Hua Univ., Taiwan)
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| Plasmon-Induced Photoexcitaiton of Molecules |
Kei Murakoshi (Hokkaido Univ., Japan) |
