MNC 2013
26th International Microprocesses and Nanotechnology Conference
Nov. 5-8, 2013
, Royton Sapporo, Hokkaido, Japan






MNC 2013 Committee Chairs
     
Organizing Chair:
Takashi Meguro
(Tokyo Univ. of Sci.) 
Organizing Vice Chair:
Koji Ishibashi
(Riken)
Organizing Vice Chair:
Takashi Fukui
(Hokkaido Univ.)
Steering Chair:
Yasuyuki Miyamoto
(Tokyo Inst. of Technol.) 
Local Steering Chair:
Seiya Kasai
(Hokkaido Univ.)
     
Steering Vice Chair:
Toyohiro Chikyow
(NIMS)
Steering Vice Chair:
Yukinori Ono
(Univ. of Toyama)

 Program Chair:
Takahiro Kozawa
(Osaka Univ.)
Program Vice Chair:
Seiji Akita
(Osaka Pref. Univ.)
Program Vice Chair: 
Masao Nagase
(Univ. of Tokushima)
 

Organizing Committee Members
Chair T. Meguro (Tokyo Univ. of Sci.)
Vice Chair K. Ishibashi (Riken) T. Fukui (Hokkaido Univ.)
Members K. Asakawa (Toshiba) T. Itani (EIDEC)
T. Asano (Kyushu Univ.) M. Komuro (KEK)
H. Arimoto (AIST)    S. Matsui (Univ. of Hyogo)
R. Ebinuma (Canon) Y. Ochiai (AIST)
K. Fujii (Renesas Electronics) M. Ohfuchi (Fujitsu Labs.)
T. Fukui (Hokkaido Univ.) S. Okazaki (Gigaphoton)
K. Hane (Tohoku Univ.) S. Shoji (Waseda Univ.)
N. Hayashi (Dai Nippon Printing) S. Tagawa (Osaka Univ.)
T. Horiuchi (Tokyo Denki Univ.) J. Tanaka (Hitachi)
K. Ishibashi (Riken) Y. Todokoro (Nara Inst. Sci. & Technol.)
S. Ishihara (Univ. of Tokyo) H. Yamaguchi (NTT)
Advisory Members
G. Ben Assayag (CEMES-CNRS) J. Melngailis (Univ. of Meryland)
Y. Aoyagi (Ritsumeikan Univ.) W. Milne (Univ. of Cambridge)
C.Y. Chang (Natl. Nano Device Lab.) S.-K. Min (Kyung Hee Univ.)
R. Cheung (Univ. of Edinburgh) A.R. Neureuther (UC Berkeley)
Z. Durrani (Imperial College London) L.E. Ocola (Nanofabrication Group)
R.C. Farrow (New Jersey Inst. of Technol.) R.F.W. Pease (Stanford Univ.)
M. Fritze (Univ. of Southern) R. Shimizu (IIAS)
K. Gamo (Osaka Univ.) T. Sugano (Univ. of Tokyo)
L.R. Harriott (Univ. of Virginia) M. Takai (Osaka Univ.)
Y. Horiike (Univ. of Tsukuba) S. Tedesco (Leti)
O. Joubert (CRS-LTM) C. Vieu (LAAS-CNRS/INSA)
D. Kern (Univ. of Tubingen) J.C. Wiesner (Consultant)
Steering Committee Members
Chair Y. Miyamoto (Tokyo Inst. of Technol.)
Vice Chair T. Chikyow (NIMS) Y. Ono (Univ.of Toyama)
Program T. Kozawa (Osaka Univ.)
S. Akita (Osaka Pref. Univ.) M. Nagase (Tokushima Univ.)
Exhibition J. Sachen (GenISys) S. Nagahara (Tokyo Electron)
Tressure H. Yamashita (HOYA)
Contribution T. Iwai (Tokyo Ohka)
Public N. Samoto (JEOL)
Overseas J.H. Ahn (Hanyang Univ.) A. Chen (ASML)
O.H. Kim (POSTEC) J.-K. Shin (Kyungpook Univ.)
C.K. Sung (National Tsing Hua Univ.) T.-K. Ku (ITRI)Kyungpook National Univ.)
H.Y. Low (Singapore Univ. of Technol. and Design)
Local Steering Committee Members
Chair S. Kasai (Hokkaido Univ.)
K. Ueno (Hokkaido Univ.)
S. Hara (Hokkaido Univ.)
K. Tomioka (Hokkaido Univ.)
Program Committee Members
Chair T. Kozawa (Osaka Univ.)
Vice Chair S. Akita (Osaka Pref. Univ.)
Vice Chair M. Nagase (Univ. of Tokushima)
1-1: Advanced Photolithography
Section Head T. Sato (Toshiba)
Sub Head J. Miyazaki (ASML)
Sub Head J.H. Ahn (Hanyang Univ.)
H. Futatsuya (Fujitsu Semiconductor)
H. Kawai (Nikon)
Y. Morikawa (DNP)
M. Shibuya (Tokyo Polytechnic Univ.)
T. Tamura (Nuflare)
G. Vandenberghe (IMEC)
A. Yamaguchi (Hitachi)
1-2: Electron and Ion Beam Technologies
Section Head H. Yamashita (HOYA)
Sub Head J. Yamamoto (Hitachi)
Sub Head K.-Y. Tsai (National Taiwan Univ.)
S. Babin (A-Beam)
M. Kotera (Osaka Inst. of Technol.)
S. Ogawa (AIST)
H. Nozue (Nuflare)
A. Yamada (Advantest)
Y. Yamamoto (hitachi-hitec)
J. Yanagisawa (Univ. of Shiga Pref.)
1-3: Resist and Directed Self-Assembly
Section Head S. Nagahara (Tokyo Electron)
Sub Head T. Azuma (Toshiba)
R. Gronheid (imec)
T. Hirayama (Tokyo Ohka)
J. Kon (Fujitsu)
H. Oizumi (Hitachi)
K. Okamoto (Hokkaido Univ.)
T. Yamaguchi (NTT)
H. Yamamoto (Osaka Univ.)
H. Yoshida (Hitachi)
K. Yoshimoto (Kyoto Univ.)
2-1 Nanocarbons
Section Head K. Maehashi (Osaka Univ.)
Sub Head D. Kondo (Fujitsu Labs.)
Sub Head J.-H. Ahn (Yonsei Univ.)
S. Chiashi (Univ. of Tokyo)
H. Fukidome (Tohoku Univ.)
K. Hirahara (Osaka Univ.)
S. Okada (Univ. of Tsukuba)
T. Takenobu (Waseda Univ.)
M. Tanemura (Nagoya Inst. of Technol.)
K. Ueno (Saitama Univ.)
2-2: Nanodevices
Section Head Y. Ishikawa (Nara Inst. of Sci. and Technol.)
Sub Head H. Ikeda (Shizuoka Univ.)
Sub Head J.-T. Sheu (National Chiao Tung Univ.)
Sub Head S. W. Hwang (Samsung Advanced Institute of Technology )
N. Banno (Leap)
N. Clement (CNRS)
T. Maemoto (Osaka Inst. of Technol.)
K. Nishiguchi (NTT)
T. Yanagida (Osaka Univ.)
2-3: Nanofabrication
Section Head S. Shingubara (Kansai Univ.)
Sub Head A. Kohno (Fukuoka Univ.)
T. Hasegawa (NIMS)
R. Hasunuma (Tsukuba Univ.)
K.-B. Kim (Seoul Natl. Univ.)
K. Kita (Univ. of Tokyo)
Y. Liu (AIST)
T. Shinada (AIST)
K. Takase (Nihon Univ.)
2-4: Inorganic Nanomaterials
Section Head K. Terabe (NIMS)
Sub Head Y. Matsumoto (Tohoku Univ.)
Sub Head E.K. Kim (Hanyang Univ.)
T. Higuchi (Tokyo Univ. of Sci.)
K. Kobayashi (NIMS)
Y. Naitou (AIST)
X.W. Zhao (Tokyo Univ. of Sci.)
2-5: Organic Nanomaterials
Section Head S. Takami (Tohoku Univ.)
Sub Head H. Kasai (Tohoku Univ.)
M. Kiguchi (Tokyo Inst. of Technol.)
K. Noda (Keio Univ.)
Y. Takenaka (AIST)
N. Zettsu (Shinshu Univ.)
2-6: NanoTool
Section Head R. Kometani (Univ. of Tokyo)
Sub Head K. Sugano (Kobe Univ.)
T. Hoshino (Univ. of Tokyo)
S. Hotta (Hitachi)
O. Kubo (Osaka Univ.)
T. Namazu (Univ. of Hyogo)
3: Nanoimprint, Nanoprint and Rising Lithography
Section Head A. Yokoo (NTT)
Sub Head J. Taniguchi (Tokyo Univ. of Sci.)
Sub Head F.-Y. Chang (National Taiwan Univ. of Sci. and Technol.)
Sub Head H. Lee (Korea Univ.)
Sub Head E.-S. Lee (Korea Inst. of Machinery and Materials)
Sub Head H.Y. Low (Singapore Univ. of Technol. and Design)
Y. Hirai (Osaka Pref. Univ.)
H. Hiroshima (AIST)
A. Miyauchi (Hitachi)
M. Okinaka (Canon)
N. Sakai (Sumsung R&D Inst. Japan)
4: BioMEMS, Lab on a Chip
Section Head K. Furukawa (NTT)
Sub Head K. Tawa (AIST)
Sub Head F.-G. Tseng (National Tsing Hua Univ.)
H. Hisamoto (Osaka Pref. Univ.)
T. Ichiki (Univ. of Tokyo)
A. Matsumoto (Tokyo Medical and Dental Univ.)
Y. Murakami (Toyohashi Univ. of Technology)
Y. Takamura (JAIST)
M. Tokeshi (Hokkaido Univ.)
5: Microsystem Technology and MEMS
Section Head N. Miki (Keio Univ.)
Sub Head T. Namazu (Univ. of Hyogo)
Sub Head W. Fang (National Tsing Hua Univ.)
Sub Head J.-W. Hsieh (Asia Pacific Microsystems)
Sub Head S.H. Kong (Kyungpook Univ.)
T. Ando (Ritsumeikan Univ.)
D. Fujisawa (Mitsubishi Electric)
E. Iwase (Waseda Univ.)
M. Kiuchi (Sumitomo Precision Products)
S. Nagasawa (Shibaura Univ.)
T. Sakata (NTT)
M. Sohgawa (Niigata Univ.)
Y. Tomizawa (Toshiba)




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