Chairperson:
Vice-Chairpersons:
|
Y. Ono (Univ. of Toyama)
T. Kozawa (Osaka Univ.) M. Nagase (Univ. of Tokushima)
|
1-1: Lithography and Metrology |
Section Head:
Sub Head:
Members: |
T. Sato
(Toshiba)
H. Yamashita (HOYA)
J. Ahn (Hanyang Univ.)
K.-Y. Tsai (National Taiwan Univ.)
H. Futatsuya (Fujitsu)
H. Kawai (Nikon)
M. Kotera (Osaka Inst. of Technol.)
J. Miyazaki (ASML)
Y. Tanaka (Renesas Electronics)
H. Nozue (Nuflare)
K. Ogino (Fujitsu Semiconductor)
M. Shibuya (Tokyo Polytechnic Univ.)
A. Yamada (Advantest)
A. Yamaguchi (Hitachi)
J. Yamamoto (Hitachi)
J. Yanagisawa (Univ. of Shiga Pref.)
|
1-2:Resist Materials and Processing |
Section Head:
Sub Head:
Members: |
S. Nagahara (Tokyo Electron)
T. Azuma (Toshiba)
R. Gronheid (IMEC)
T. Hirayama (Tokyo Ohka) H. Kudo (Kansai Univ.)
K. Nozaki (Fujitsu)
H. Oizumi (Hitachi)
K. Okamoto (Hokkaido Univ.)
T. Yamaguchi (NTT)
H. Yamamoto (Osaka Univ.)
|
2-0:Nanocarbon |
Section
Head:
Sub Head:
Members: |
K. Maehashi (Osaka Univ.)
D. Kondo (Fujitsu Labs.)
S. Chiashi (Univ. of Tokyo)
J. Fujita (Univ. of Tsukuba)
H. Fukidome (Tohoku Univ.)
K. Hirahara (Osaka Univ.)
S. Okada (Univ. of Tsukuba)
T. Takenobu (Waseda Univ.)
M. Tanemura (Nagoya Inst. of Technol.)
K. Ueno (Saitama Univ.) |
2-1:Nanodevices |
Section Head:
Sub
Head:
Members: |
K. Nishiguchi (NTT)
S. Kasai (Hokkaido Univ.)
S. W. Hwang (Samsung Advanced Inst. of Technol.)
J.-T. Sheu (National Chiao Tung Univ.)
N. Banno (Leap)
N. Clement (CNRS)
H. Ikeda (Shizuoka Univ.)
Y. Ishikawa (Nara Inst. of Sci. and Technol.)
T. Maemoto (Osaka Inst. of Technol.)
T. Suemasu (Univ. of Tsukuba)
T. Yanagida (Osaka Univ.)
|
2-2:Nanofabrication |
Section Head:
Sub Head:
Members: |
S. Shingubara (Kansai Univ.)
A. Kohno (Fukuoka Univ.)
T. Asahi (Ehime Univ.) T. Hasegawa (NIMS)
T. Hasunuma (Tsukuba Univ.)
K.-B. Kim (Seoul Natl. Univ.)
K. Kita (Univ. of Tokyo)
Yongxun Liu (AIST)
T. Shinada (Waseda Univ.)
K. Takase (Nihon Univ.) |
2-3:Nanomaterials |
Section Head:
Sub Head:
Members:
|
T.
Chikyo (NIMS)
T. Ishida (AIST)
E.-K. Kim (Hanyang Univ.)
M. Kiguchi (Tokyo Inst. of Technol.)
Y. Matsumoto (Tokyo Inst. of Technol.)
K. Noda (Kyoto Univ.)
T. Ohzono (AIST)
Y. Sakuma (NIMS)
T. Tanii (Waseda Univ.)
K. Terabe (NIMS)
N. Zettsu (Nagoya Univ.)
X.W. Zhao (Tokyo Univ. of Sci)
|
2-4:Nano-Tool |
Section Head:
Sub Head:
Members: |
S.
Akita (Osaka Pref. Univ.)
T. Ono (Tohoku Univ.)
M. Kitazawa (Olympus)
D.-W. Lee(Chonnam National Univ.)
T. Matsumoto (Canon)
Y. Mitsui (Hitachi Hightechnologies)
M. Miyoshi (Univ. of Tokyo)
S. Takahashi (Univ. of Tokyo)
|
3:Nanoimprint, Nanoprint and Rising Lithography |
Section Head:
Sub Head:
Members: |
H.
Hiroshima (AIST)
A. Yokoo (NTT)
F.-Y. Chang (National Taiwan Univ.)
E.-S. Lee (Korea Institute of Machinery and Materials)
H. Lee (Korea Univ.)
H.Y. Low (Institute of Materials Research and Engineering)
Y. Hirai (Osaka Pref. Univ.)
A. Miyauchi (Hitachi)
M. Okinaka (Canon)
N. Sakai (Sumsung Yokohama Res. Inst.)
J. Taniguchi (Tokyo Univ. of Sci.)
|
4:BioMEMS, Lab on a Chip |
Section Head:
Sub Head:
Members: |
T. Ichiki (Univ. of Tokyo)
A. Matsumoto (Tokyo Medical and Dental Univ.)
F.-G. Tseng (National Tsing Hua Univ.)
K. Furukawa (NTT)
K. Tawa (AIST)
O.C. Jeong (Inje Univ.)
K.K. Lee (Ajou Univ.)
Y. Murakami (Toyohashi Univ. of Technology)
Y. Takamura (JAIST)
M. Tokeshi (Hokkaido Univ.)
K. Yasuda (Tokyo Medical and Dental Univ.)
T. Yamaguchi (JSR Life Sci.)
|
5:Microsystem Technology and MEMS |
Section Head:
Sub Head:
Members: |
H. Takao (Kagawa Univ.)
N. Miki (Keio Univ.)
J.-W. Hsieh (Asia Pacific Microsystems)
S.-H.
Kong (Kyungpook National Univ.)
W. Fang (National Tsing Hua Univ.)
T. Ando (Ritsumeikan Univ.)
D. Fujisawa (Mitsubishi Electric)
E. Iwase (Waseda Univ.)
A. Koga (Toshiba)
Y.-C. Lin (Tohoku Univ.)
T. Namazu (Univ. of Hyogo)
T. Sakata (NTT)
M. Sohgawa (Osaka Univ.)
|