MNC 2011, 24th International Microprocesses and Nanotechnology Conference
October 24-27, 2011
, ANA Hotel Kyoto, Kyoto, Japan






MNC 2011 Committee Chairs
       
Organizing Chair:
Hiroshi Yamaguchi
(NTT) 
Organizing Vice Chair:
Kazuhiro Hane
(Tohoku Univ.)
Organizing Vice Chair:
Toshiro Itani
(EIDEC)
Steering Chair:
Takashi Meguro
(Tokyo Univ. of Sci.) 
Steering Vice Chair:
Junichi Fujita
(Univ. of Tsukuba)
       
Program Chair:
Yasuyuki Miyamoto
(Tokyo Inst. of Technol.) 
 Program Vice Chair:
Masao Nagase
(Univ. of Tokushima)
 Program Vice Chair:
Yukinori Ono
(NTT)

 


Organizing Committee Members
Chair 
Vice Chair

Members
H. Yamaguchi (NTT)
K. Hane (Tohoku Univ.)
T. Itani (EIDEC)
T. Asano (Kyushu Univ.)
H. Arimoto (AIST)   
R. Ebinuma (Canon)
K. Fujii (Renesas Electronics)
T. Fukui (Hokkaido Univ.)
N. Fukushima (Toshiba)
K. Hane (Tohoku Univ.)
N. Hayashi (Dai Nippon Printing)
T. Horiuchi (Tokyo Denki Univ.)
K. Ishibashi (Riken)
A. Ishihama (Sharp)



S. Ishihara (Univ. of Tokyo)
M. Komuro (NEDO)
S. Matsui (Univ. of Hyogo)
Y. Ochiai (Toyo Gosei)
M. Ohfuchi (Fujitsu Labs.)
S. Okazaki (EUVA)
S. Shoji (Waseda Univ.)
S. Tagawa (Osaka Univ.)
Y. Todokoro (Nara Inst. Sci. & Technol.)
A. Tokui (Nikon)
S. Zaima (Nagoya Univ.) 
Advisory Members
H. Ahmed (Cambridge Univ.)
Y. Aoyagi (Ritsumeikan Univ.)
C.Y. Chang (Natl. Nano Device Lab.)
M. Feldman (Louisiana State Univ.)
F. Fortagne (Leica Microsystem)
K. Gamo (Osaka Univ.)
M. Gentili (Inovation & Technol. Management)
G. Gruetzner (Micro Resist Technol.)
L.R. Harriott (Univ. of Virginia)
Y. Horiike (NIMS)
O. Joubert (CRS-LTM)
D. Kern (Univ. of Tubingen)
H.W.P. Koops (NaWoTec GmbH)
J. Melngailis (Univ. of Meryland)
S.-K. Min (Kyung Hee Univ.)
A.R. Neureuther (UC Berkeley)
R.F.W. Pease (Stanford Univ.)
F. Schellenberg (Widerkehr and Associates)
R. Shimizu (IIAS)
C. Shih (ERSO/ITRI)
H.I. Smith (MIT)
T. Sugano (Univ. of Tokyo)
M. Takai (Osaka Univ.)
S. Tedesco (Leti)
T. Tsurushima (Kyushu Univ.)
M. De Vittorio (Univ. of Salento)
M. Wang (China Academic Sci.)
J. Wiesner (Nikon Precision)

Steering Committee Members
Chair
Vice Chair
Program


Place
Overseas
T. Meguro (Tokyo Sci. of Technol.)
J. Fujita (Univ. of Tsukuba)
Y. Miyamoto (Tokyo Inst. of Technol.)
Y. Ono (NTT)
N. Samoto (JEOL)
S. Fujita (Kyoto Univ.)
J.H. Ahn (Hanyang Univ.)
O.H. Kim (POSTEC)

M. Nagase (Tokushima Univ.)
K. Toometsuka (Tokyo Electron)
H. Yamashita (HOYA)
N. Taneichi (Tokyo Ohka)


A. Chen (ASML)
C.K. Sung (National Tsing Hua Univ.)
Program Committee Members
Chairperson:
Vice-Chairpersons:

Y. Miyamoto (Tokyo Inst. of Technol.)
M. Nagase (Univ. of Tokushima)
Y. Ono (NTT)
1-1: Lithography and Metrology
Section Head:
Sub Head:




Members:
T. Sato (Toshiba)
H. Yamashita (HOYA)
J. Ahn (Hanyang Univ.)
K.-Y. Tsai (National Taiwan Univ.)

K. Ogino (Fujitsu)
H. Kawai (Nikon)
M. Kotera (Osaka Inst. of Technol.)
M. Shibuya (Tokyo Polytechnic Univ.)
S. Nagahara (Tokyo Electron)
H. Nozue (Nuflare)
H. Futatsuya (Fujitsu)
J. Miyazaki (ASML)
H. Mohri (DNP)
J. Yanagisawa (Univ. of Shiga Pref.)
A. Yamaguchi (Hitachi)
A. Yamada (Advantest)
J. Yamamoto (Hitachi)
1-2:Resist Materials and Processing
Section Head:
Sub Head:

Members:
T. Kozawa (Osaka Univ.)
H. Oizumi (Selete)

T. Azuma (Toshiba)
K. Okamoto (Hokkaido Univ.)
H. Kudo (Kanagawa Univ.)
R. Sugi (JSR)
I. Takemoto (Sumitomo Chemical)
K. Nozaki (Fujitsu)
T. Hirayama (Tokyo Ohka)
T. Yamaguchi (NTT)
2-0:Nanocarbon
Section Head:
Sub Head:


Members:
K. Maehashi (Osaka Univ.)
D. Kondo (Fujitsu Labs.)

J. Fujita (Univ. of Tsukuba)
H. Fukidome (Tohoku Univ.)
K. Hirahara (Osaka Univ.)
T. Kaneko (Tohoku Univ.)
M. Nagashio (Univ. of Tokyo)
S. Okada (Univ. of Tsukuba)
T. Takenobu (Waseda Univ.)
M. Tanemura (Nagoya Inst. of Technol.)
2-1:Nanodevices 
Section Head:
Sub Head:





Members:
K. Nishiguchi (NTT)
S. Kasai (Hokkaido Univ.)
T.-S. Chao(National Chiao Tung Univ.)
S. W. Hwang (Korea Univ.)
J.-T. Sheu (National Chiao Tung Univ.)

N. Banno (Leap)
H. Ikeda (Shizuoka Univ.)
Y. Isikawa (Nara Inst. of Sci. and Technol.)
T. Maemoto (Osaka Inst. of Technol.)
T. Suemasu (Univ. of Tsukuba)
2-2:Nanofabrication
Section Head:
Sub Head:


Members:
M. Masahara (AIST)
A. Kohno (Fukuoka Univ.)

T. Asahi (Ehime Univ..)
T. Hasegawa (NIMS)
T. Hasunuma (Tsukuba Univ.)
K. Kita (Univ. of Tokyo)
T. Shinada (Waseda Univ.)
S. Shingubara (Kansai Univ.)
K. Takase (Nihon Univ.)
2-3:Nanomaterials
Section Head:
Sub Head:


Members:
T. Chikyo (NIMS)
Y. Matsumoto (Tokyo Inst. of Technol.)
E.-K. Kim (Hanyang Univ.)

T. Ishida (AIST)
T. Mano (NIMS)
T. Matsuki (Renesas Electronics)
T. Tanii (Waseda Univ.)
Y. Sakuma (NIMS)
X.W. Zhao (Tokyo Univ. of Sci)
2-4:Nano-Tool
Section Head:
Sub Head:


Members:
S. Akita (Osaka Pref. Univ.)
T. Ono (Tohoku Univ.)

H. Ina (Canon)
M. Kitazawa (Olympus)
D.-W. Lee(Chonnam National Univ.)
Y. Mitsui (Hitachi Hightechnologies)
M. Miyoshi (Univ. of Tokyo)
S. Takahashi (Univ. of Tokyo)
M. Yasutake (SII Nano technol.)
3:Nanoimprint, Nanoprint and Rising Lithography
Section Head:
Sub Head:







Members:
H. Hiroshima (AIST)
A. Yokoo (NTT)
F.-Y. Chang (National Taiwan Univ.)
F.-B. Hsiao (National Cheng Kung Univ.)
E.-S. Lee (Korea Institute of Machinery and Materials)
H. Lee (Korea Univ.)
H.Y. Low (Institute of Materials Research and Engineering)

Y. Hirai (Osaka Pref. Univ.)
A. Miyauchi (Hitachi)
M. Okinaka (Canon)
N. Sakai (Sumsung Yokohama Res. Inst.)
J. Taniguchi (Tokyo Univ. of Sci.)
4:BioMEMS, Lab on a Chip
Section Head:
Sub Head:



Members:
Y. Murakami (Hiroshima Univ.)
H. Takei (Toyo Univ.)
F.-G. Tseng (National Tsing Hua Univ.)

T. Horiuchi (NTT)
T. Ichiki (Univ. of Tokyo)
O.C. Jeong (Inje Univ.)
T. Kaya (Konicaminolta)
K.K. Lee (Ajou Univ.)
S. Maruo (Yokohama National Univ.)
T. Matsumoto (Tokyo Medical and Dental Univ.)
Y. Takamura (JAIST)
M. Tokeshi (Nagoya Univ.)
K. Yasuda (Tokyo Medical and Dental Univ.)
5:Microsystem Technol and MEMS
Section Head:
Sub Head:





Members:
H. Takao (Kagawa Univ.)
N. Miki (Keio Univ.)
J.-W. Hsieh (Asia Pacific Microsystems)
S.-H. Kong  (Kyungpook Univ.)
W. Fang (National Tsing Hua Univ.)

T. Ando (Ritsumeikan Univ.)
A. Koga (Toshiba)
Y.-C. Lin (Tohoku Univ.)
J. Nagasawa (Tohoku Univ.)
T. Namazu (Univ. of Hyogo)
T. Sakata (NTT)
M. Sohgawa (Osaka Univ.)
D. Takamuro (Mitsubishi Electric)



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