Chairperson:
Vice-Chairpersons:
|
Y. Miyamoto (Tokyo Inst. of Technol.)
M. Nagase (Univ. of Tokushima)
Y. Ono (NTT)
|
1-1: Lithography and Metrology |
Section Head:
Sub Head:
Members: |
T. Sato
(Toshiba)
H. Yamashita (HOYA)
J. Ahn (Hanyang Univ.)
K.-Y. Tsai (National Taiwan Univ.)
K. Ogino (Fujitsu)
H. Kawai (Nikon)
M. Kotera (Osaka Inst. of Technol.)
M. Shibuya (Tokyo Polytechnic Univ.)
S. Nagahara (Tokyo Electron)
H. Nozue (Nuflare)
H. Futatsuya (Fujitsu)
J. Miyazaki (ASML)
H. Mohri (DNP)
J. Yanagisawa (Univ. of Shiga Pref.)
A. Yamaguchi (Hitachi)
A. Yamada (Advantest)
J. Yamamoto (Hitachi)
|
1-2:Resist Materials and Processing |
Section Head:
Sub Head:
Members: |
T.
Kozawa (Osaka Univ.)
H.
Oizumi (Selete)
T. Azuma (Toshiba)
K. Okamoto (Hokkaido Univ.)
H. Kudo (Kanagawa Univ.)
R. Sugi (JSR)
I. Takemoto (Sumitomo Chemical)
K. Nozaki (Fujitsu)
T. Hirayama (Tokyo Ohka)
T. Yamaguchi (NTT)
|
2-0:Nanocarbon |
Section
Head:
Sub Head:
Members: |
K. Maehashi (Osaka Univ.)
D. Kondo (Fujitsu Labs.)
J. Fujita (Univ. of Tsukuba)
H. Fukidome (Tohoku Univ.)
K. Hirahara (Osaka Univ.)
T. Kaneko (Tohoku Univ.)
M. Nagashio (Univ. of Tokyo)
S. Okada (Univ. of Tsukuba)
T. Takenobu (Waseda Univ.)
M. Tanemura (Nagoya Inst. of Technol.) |
2-1:Nanodevices |
Section Head:
Sub
Head:
Members: |
K. Nishiguchi (NTT)
S. Kasai (Hokkaido Univ.)
T.-S. Chao(National Chiao Tung Univ.)
S. W. Hwang (Korea Univ.)
J.-T. Sheu (National Chiao Tung Univ.)
N. Banno (Leap)
H. Ikeda (Shizuoka Univ.)
Y. Isikawa (Nara Inst. of Sci. and Technol.)
T. Maemoto (Osaka Inst. of Technol.)
T. Suemasu (Univ. of Tsukuba)
|
2-2:Nanofabrication |
Section Head:
Sub Head:
Members: |
M.
Masahara (AIST)
A. Kohno (Fukuoka Univ.)
T. Asahi (Ehime Univ..)
T. Hasegawa (NIMS)
T. Hasunuma (Tsukuba Univ.)
K. Kita (Univ. of Tokyo)
T. Shinada (Waseda Univ.)
S. Shingubara (Kansai Univ.)
K. Takase (Nihon Univ.) |
2-3:Nanomaterials |
Section Head:
Sub Head:
Members:
|
T.
Chikyo (NIMS)
Y. Matsumoto (Tokyo Inst. of Technol.)
E.-K. Kim (Hanyang Univ.)
T. Ishida (AIST)
T. Mano (NIMS)
T. Matsuki (Renesas Electronics)
T. Tanii (Waseda Univ.)
Y. Sakuma (NIMS)
X.W. Zhao (Tokyo Univ. of Sci)
|
2-4:Nano-Tool |
Section Head:
Sub Head:
Members: |
S.
Akita (Osaka Pref. Univ.)
T. Ono (Tohoku Univ.)
H. Ina (Canon)
M. Kitazawa (Olympus)
D.-W. Lee(Chonnam National Univ.)
Y. Mitsui (Hitachi Hightechnologies)
M. Miyoshi (Univ. of Tokyo)
S. Takahashi (Univ. of Tokyo)
M. Yasutake (SII Nano technol.)
|
3:Nanoimprint, Nanoprint and Rising Lithography |
Section Head:
Sub Head:
Members: |
H.
Hiroshima (AIST)
A. Yokoo (NTT) F.-Y. Chang (National Taiwan Univ.)
F.-B. Hsiao (National Cheng Kung Univ.)
E.-S. Lee (Korea Institute of Machinery and Materials)
H. Lee (Korea Univ.)
H.Y. Low (Institute of Materials Research and Engineering)
Y. Hirai (Osaka Pref. Univ.)
A. Miyauchi (Hitachi)
M. Okinaka (Canon)
N. Sakai (Sumsung Yokohama Res. Inst.)
J. Taniguchi (Tokyo Univ. of Sci.)
|
4:BioMEMS, Lab on a Chip |
Section Head:
Sub Head:
Members: |
Y. Murakami (Hiroshima Univ.)
H. Takei (Toyo Univ.)
F.-G. Tseng (National Tsing Hua Univ.)
T. Horiuchi (NTT)
T. Ichiki (Univ. of Tokyo)
O.C. Jeong (Inje Univ.)
T. Kaya (Konicaminolta)
K.K. Lee (Ajou Univ.)
S. Maruo (Yokohama National Univ.)
T. Matsumoto (Tokyo Medical and Dental Univ.)
Y. Takamura (JAIST)
M. Tokeshi (Nagoya Univ.)
K. Yasuda (Tokyo Medical and Dental Univ.)
|
5:Microsystem Technol and MEMS |
Section Head:
Sub Head:
Members: |
H. Takao (Kagawa Univ.)
N. Miki (Keio Univ.)
J.-W. Hsieh (Asia Pacific Microsystems)
S.-H.
Kong (Kyungpook
Univ.)
W. Fang (National Tsing Hua Univ.)
T. Ando (Ritsumeikan Univ.)
A. Koga (Toshiba)
Y.-C. Lin (Tohoku Univ.)
J. Nagasawa (Tohoku Univ.)
T. Namazu (Univ. of Hyogo)
T. Sakata (NTT)
M. Sohgawa (Osaka Univ.)
D. Takamuro (Mitsubishi Electric)
|