{"id":610,"date":"2022-06-03T14:10:54","date_gmt":"2022-06-03T05:10:54","guid":{"rendered":"https:\/\/imnc.jp\/2026\/?page_id=610"},"modified":"2026-04-30T20:17:55","modified_gmt":"2026-04-30T11:17:55","slug":"symp-a","status":"publish","type":"page","link":"https:\/\/imnc.jp\/2026\/symp-a\/","title":{"rendered":"Symposium A"},"content":{"rendered":"\n<table id=\"tablepress-17\" class=\"tablepress tablepress-id-17\">\n<tbody>\n<tr class=\"row-1\">\n\t<td colspan=\"2\" class=\"column-1\"><strong><div style=\"font-size:24px;\">Symposium A: AI \u00d7 High-NA EUV \u00d7 Novel Materials \u00d7 Sustainability<\/font><br \/>\n<\/td>\n<\/tr>\n<tr class=\"row-2\">\n\t<td class=\"column-1\"><strong><div style=\"font-size:18px;\"><Strong>Prof. Takahiro Kozawa, The University of Osaka, Japan<\/Strong><\/Font><\/td><td class=\"column-2\"><\/td>\n<\/tr>\n<tr class=\"row-3\">\n\t<td colspan=\"2\" class=\"column-1\"><strong><div style=\"font-size:18px;\"><Strong>Dr. Arame Thiam, Tokyo Electron Europe, Belgium<\/Strong><\/Font><br \/>\n<img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/imnc.jp\/2026\/wp-content\/uploads\/2026\/06\/Dr.Arame_.jpg\" alt=\"\" width=\"120\" height=\"120\" class=\"alignnone size-full wp-image-4009\" \/><br \/>\n<\/Strong><div style=\"font-size:15px;\"><strong>Paper Title<\/Font><\/strong><br \/>\nNovel Patterning Technologies enabling High NA EUV Logic and DRAM features scaling<br \/>\n<strong>Short Biography<\/strong><br \/>\nDr Arame Thiam is Senior Process Engineer at Tokyo Electron Belgium. She supports High NA EUV lithography joint learning program with imec, focusing on patterning exploration for Logic advanced technology nodes. After starting her career in CEA-Leti Grenoble Patterning group working on e-beam lithography, she joined Imec in 2015. Her focus was lithography process development support of Imec Interconnects, Beyond CMOS, OIO and Quantum computing programs.<br \/>\nShe received her M.Sc. and PhD in Microelectronics and Nanotechnologies from the University of Lille 1 (France).<br \/>\n<\/td>\n<\/tr>\n<tr class=\"row-4\">\n\t<td colspan=\"2\" class=\"column-1\"><strong><div style=\"font-size:18px;\"><Strong>Prof. Tsumoru Shintake, Okinawa Institute of Science and Technology, Japan<\/Strong><\/Font><br \/>\n<\/td>\n<\/tr>\n<tr class=\"row-5\">\n\t<td colspan=\"2\" class=\"column-1\"><strong><div style=\"font-size:18px;\"><Strong>Dr. Anuja De Silva, Lam Research, USA<\/Strong><\/Font><br \/>\n<\/td>\n<\/tr>\n<tr class=\"row-6\">\n\t<td colspan=\"2\" class=\"column-1\"><strong><div style=\"font-size:18px;\"><Strong>Dr. Toshiaki Tanigaki, Hitachi, Ltd., Japan<\/Strong><\/Font><br \/>\n<\/td>\n<\/tr>\n<tr class=\"row-7\">\n\t<td colspan=\"2\" class=\"column-1\"><strong><div style=\"font-size:18px;\"><Strong>Dr. Luciana Meli, IBM Research, USA<\/Strong><\/Font><br \/>\n<\/td>\n<\/tr>\n<tr class=\"row-8\">\n\t<td colspan=\"2\" class=\"column-1\"><strong><div style=\"font-size:18px;\"><Strong>Dr. Ivan Pollentier, imec, Belgium<\/Strong><\/Font><br \/>\n<\/td>\n<\/tr>\n<tr class=\"row-9\">\n\t<td colspan=\"2\" class=\"column-1\"><strong><div style=\"font-size:18px;\"><Strong><br \/>\n<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<!-- #tablepress-17 from cache -->\n","protected":false},"excerpt":{"rendered":"","protected":false},"author":2,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"uagb_featured_image_src":{"full":false,"thumbnail":false,"medium":false,"medium_large":false,"large":false,"1536x1536":false,"2048x2048":false,"page_builder_slider_small":false,"size1":false,"size2":false,"size3":false,"size4":false,"size5":false,"size6":false,"size7":false,"size8":false,"size9":false,"size10":false,"size11":false,"size12":false,"size-card":false},"uagb_author_info":{"display_name":"mnc2026","author_link":"https:\/\/imnc.jp\/2026\/author\/mnc2022\/"},"uagb_comment_info":0,"uagb_excerpt":null,"_links":{"self":[{"href":"https:\/\/imnc.jp\/2026\/wp-json\/wp\/v2\/pages\/610"}],"collection":[{"href":"https:\/\/imnc.jp\/2026\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/imnc.jp\/2026\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/imnc.jp\/2026\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/imnc.jp\/2026\/wp-json\/wp\/v2\/comments?post=610"}],"version-history":[{"count":11,"href":"https:\/\/imnc.jp\/2026\/wp-json\/wp\/v2\/pages\/610\/revisions"}],"predecessor-version":[{"id":1725,"href":"https:\/\/imnc.jp\/2026\/wp-json\/wp\/v2\/pages\/610\/revisions\/1725"}],"wp:attachment":[{"href":"https:\/\/imnc.jp\/2026\/wp-json\/wp\/v2\/media?parent=610"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}