{"id":1871,"date":"2023-05-25T13:45:27","date_gmt":"2023-05-25T04:45:27","guid":{"rendered":"https:\/\/imnc.jp\/2023\/?page_id=1871"},"modified":"2023-06-05T14:14:48","modified_gmt":"2023-06-05T05:14:48","slug":"seminar","status":"publish","type":"page","link":"https:\/\/imnc.jp\/2023\/seminar\/","title":{"rendered":"Seminar in JP"},"content":{"rendered":"\n\n\n\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t
MNC 2023 \u6280\u8853\u30bb\u30df\u30ca\u30fc\u300cALD\u6280\u8853\u30bb\u30df\u30ca\u30fc\u300d<\/td>\n<\/tr>\n
\u65e5\u7a0b:<\/td>2023\u5e7411\u670814\u65e5(\u706b) 13:00-17:20<\/td>\n<\/tr>\n
\u5834\u6240:<\/td>\u4eac\u738b\u30d7\u30e9\u30b6\u30db\u30c6\u30eb\u672d\u5e4c2F Room B
\nhttps:\/\/www.keioplaza-sapporo.co.jp\/location\/<\/a><\/td>\n<\/tr>\n
\u53c2\u52a0\u8cbb:<\/td>\u6280\u8853\u30bb\u30df\u30ca\u30fc\u306f\u4e8b\u524d\u306e\u304a\u7533\u8fbc\u307f\u3067\u5b9a\u54e1160\u540d\u3092\u8d85\u3048\u3066\u304a\u308a\u307e\u3059\u306e\u3067\u3001\u5f53\u65e5\u65b0\u305f\u306b\u53d7\u4ed8\u306f\u884c\u3044\u307e\u305b\u3093\u306e\u3067\u4f55\u5352\u3054\u4e86\u627f\u304f\u3060\u3055\u3044\u3002<\/td>\n<\/tr>\n
<\/td>\u958b\u4f1a\u306e\u6328\u62f6\t
\n\u5ee3\u702c \u6587\u5f66 (\u5c71\u5f62\u5927\u5b66\u3000MNC 2023 \u8ad6\u6587\u59d4\u54e1\u4f1a \u30bb\u30af\u30b7\u30e7\u30f3\u30d8\u30c3\u30c9\uff09<\/td>\n<\/tr>\n
13:00-13:45<\/td>\u300cInitial interface reactions of atomic layer deposition\u300d
\nJiyoung Kim (The University of Texas at Dallas)
\n\"\"
\nShort Biography
\nJiyoung Kim is a professor of Materials Science and Engineering and affiliated at Depts. of Electrical and Mechanical Engineering at the University of Texas at Dallas since 2005. He received the B.S. (1986) and the M.S. (1988) at Seoul National University, and the Ph.D. (1994) at the University of Texas at Austin. He worked as an integration engineer at Texas Instrument, Inc (Dallas, TX) from 1994 to 1996. From 1996 to 2005 he was an assistant\/associate professor at Kookmin University, (Seoul, Korea). He is an author or coauthor of more than 400 peer reviewed journal and proceeding papers. He has served various conference\/symposium chairs including 2014 AVS-ALD conference. His research interests are in the area of future semiconductor technology particularly focusing on implementation of advanced ALD process, characterization and its applications for logic, memory and analog\/power devices. <\/td>\n<\/tr>\n
13:45-14:20<\/td>\u300cALP\u306b\u304a\u3051\u308b\u30b1\u30df\u30ab\u30eb\u306e\u8a2d\u8a08\u300d
\n\u5b89\u539f\u3000\u91cd\u96c4 (\u30b8\u30e3\u30d1\u30f3\u30fb\u30a2\u30c9\u30d0\u30f3\u30b9\u30c8\u30fb\u30b1\u30df\u30ab\u30eb\u30ba )
\n\"\"
\n\u7565\u6b74
\n1994\u5e74\u7acb\u547d\u9928\u5927\u5b66\u7406\u5de5\u5b66\u90e8\u5fdc\u7528\u5316\u5b66\u79d1\u4fee\u58eb\u5352\u5f8c\u30c8\u30ea\u30b1\u30df\u30ab\u30eb\u7814\u7a76\u6240\u5165\u793e\u3002
\n1998\u5e74\u30c8\u30ea\u30b1\u30df\u30ab\u30eb\u7814\u7a76\u6240\u7c73\u56fd\u3078\u8ee2\u52e4\u3057\u3000AMAT\u7528TDMAT\u306e\u8a8d\u5b9a\u3084\u30a4\u30f3\u30c6\u30eb\u7528Low-k\u6750\u6599DMDMOS\u306eHVM\u8a8d\u5b9a\u30fb\u4f9b\u7d66\u306b\u5f93\u4e8b\u30572004\u5e74\u5e30\u56fd\u9000\u793e\u30022004\u5e74\u3088\u308a\u30b8\u30e3\u30d1\u30f3\u30fb\u30a2\u30c9\u30d0\u30f3\u30b9\u30c8\u30fb\u30b1\u30df\u30ab\u30eb\u30ba\u3067\u6280\u8853\u958b\u767a\u306b\u643a\u308f\u308a2006\u5e74\u304b\u30892010\u5e74\u306b\u306f\u6771\u5317\u5927\u5b66\u6d41\u4f53\u79d1\u5b66\u7814\u7a76\u6240\u306b\u3066\u4e2d\u6027\u7c92\u5b50\u30d3\u30fc\u30e0\u3092\u7528\u3044\u305f\u4f4e\u8a98\u96fb\u7387\u5c64\u9593\u7d76\u7e01\u819c\u306b\u95a2\u3059\u308b\u7814\u7a76\u3092\u884c\u3044\u535a\u58eb\uff08\u5de5\u5b66\uff09\u3092\u53d6\u5f97\u3002
\n<\/td>\n<\/tr>\n
14:20-14:55<\/td>\u300cReaxFF MD Simulations for Analysis of Thin-Film Growth Mechanisms in Boron Nitride ALD Processes
\n\uff08\u53cd\u5fdc\u6027\u529b\u5834\u5206\u5b50\u52d5\u529b\u5b66\u6cd5\u306b\u3088\u308b\u7a92\u5316\u30db\u30a6\u7d20ALD\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3051\u308b\u8584\u819c\u6210\u9577\u6a5f\u69cb\u306e\u89e3\u6790\uff09 \u300d\t
\n\u5fb3\u5897\u3000\u5d07 (\u6771\u5317\u5927\u5b66\u6d41\u4f53\u79d1\u5b66\u7814\u7a76\u6240)\u3000
\n\"\"
\n\u7565\u6b74
\nTakashi Tokumasu is a professor of Institute of Fluid Science, Tohoku University. He has his expertise in analyzing nanoscale flow phenomena. Especially, he is focusing on the effect of quantum characteristics of molecules on macroscopic flow and thermodynamic phenomena. Moreover, he applies these techniques and knowledge to the development of materials for next generation power sources (fuel cells, batteries) and semiconductor fabrication processes. He performs large scale molecular dynamics simulations to analyze such nanoscale flow phenomena.<\/td>\n<\/tr>\n
14:55-15:15<\/td>\u4f11\u61a9
\n<\/td>\n<\/tr>\n
15:15-15:50<\/td>\u300c\u9ad8\u7d14\u5ea6\u30aa\u30be\u30f3\u304a\u3088\u3073O2\u30d7\u30e9\u30ba\u30de\u9178\u5316ALD\u306b\u3088\u308b\u9ad8AR\u30c8\u30ec\u30f3\u30c1\u3078\u306e\u88ab\u8986\u6027\u300d
\n\u8429\u539f\u3000\u5d07\u4e4b (\u660e\u96fb\u30ca\u30ce\u30d7\u30ed\u30bb\u30b9\u30fb\u30a4\u30ce\u30d9\u30fc\u30b7\u30e7\u30f3)
\n\"\"
\n\u7565\u6b74
\n2014\u5e74\u3000\u7fa4\u99ac\u5927\u5b66\u5927\u5b66\u9662\u5de5\u5b66\u7814\u7a76\u79d1\u751f\u7523\u30b7\u30b9\u30c6\u30e0\u5de5\u5b66\u5c02\u653b \u4fee\u58eb\u8ab2\u7a0b\u4fee\u4e86\u3002
\n2014\u5e74\uff5e\u3000\u682a\u5f0f\u4f1a\u793e\u660e\u96fb\u820e\u5165\u793e\u3002
\n2020\u5e74\uff5e\u3000\u660e\u96fb\u30ca\u30ce\u30d7\u30ed\u30bb\u30b9\u30fb\u30a4\u30ce\u30d9\u30fc\u30b7\u30e7\u30f3\u682a\u5f0f\u4f1a\u793e\u3000\u52e4\u52d9\u3002
\n\u6280\u5e2b\u3002\u30d4\u30e5\u30a2\u30aa\u30be\u30f3\u3092\u7528\u3044\u305f\u6210\u819c\u30d7\u30ed\u30bb\u30b9\u958b\u767a\u306b\u5f93\u4e8b\u3002<\/td>\n<\/tr>\n
15:50-16:25<\/td>\u300cFundamentals and Applications of Atomic Layer Etching\uff08\u539f\u5b50\u5c64\u30a8\u30c3\u30c1\u30f3\u30b0\u306e\u57fa\u790e\u3068\u5fdc\u7528\uff09\u300d
\n\u5510\u6a4b\u3000\u4e00\u6d69 (\u5927\u962a\u5927\u5b66)\u3000
\n\"\"
\n\u7565\u6b74
\n\uff11\uff19\uff18\uff17\u5e74\u7b51\u6ce2\u5927\u5b66\u5927\u5b66\u9662\u7406\u5de5\u5b66\u7814\u7a76\u79d1\u4fee\u58eb\u8ab2\u7a0b\u7d42\u4e86\uff0c\u5de5\u5b66\u535a\u58eb\uff08\uff11\uff19\uff19\uff16\uff09
\n\uff11\uff19\uff18\uff17\u5e74\u5e74\u5bcc\u58eb\u901a\u7814\u7a76\u6240\u3000\uff12\uff10\uff11\uff15\u5e74\u5927\u962a\u5927\u5b66\u5de5\u5b66\u7814\u7a76\u79d1 \u7279\u4efb\u6559\u6388
\n\u539f\u5b50\u30fb\u5206\u5b50\u7dda\u304a\u3088\u3073\u30a4\u30aa\u30f3\u30d3\u30fc\u30e0\u3092\u7528\u3044\u305f\u30d7\u30e9\u30ba\u30de\u306b\u542b\u307e\u308c\u308b\u6d3b\u6027\u7a2e\u3068\u8868\u9762\u3068\u306e\u76f8\u4e92\u4f5c\u7528\u306e\u7814\u7a76\u306b\u5f93\u4e8b
\n<\/td>\n<\/tr>\n
16:25-17:00<\/td>\u300cA Proposal of Material Design for Atomic Layer Process\u300d
\n\u5c71\u53e3 \u6b23\u79c0 (\u65e5\u7acb\u88fd\u4f5c\u6240)
\n\"\"
\n\u7565\u6b74
\n1991\u5e74\u4eac\u90fd\u5927\u5b66\u5de5\u5b66\u7814\u7a76\u79d1\u535a\u58eb\u8ab2\u7a0b\u5358\u4f4d\u53d6\u5f97\u8a8d\u5b9a\u9000\u5b66\uff08\u5408\u6210\u5316\u5b66\uff09\u3002\u96fb\u6c17\u5316\u5b66\u7684\u5909\u63db\u3092\u6d3b\u7528\u3057\u305f\u751f\u7406\u6d3b\u6027\u7269\u8cea\u5408\u6210\u53cd\u5fdc\u306e\u7814\u7a76\u3067\u4eac\u90fd\u5927\u5b66\u535a\u58eb\uff08\u5de5\u5b66\uff09\u3002
\n\u65e5\u7acb\u88fd\u4f5c\u6240\u306b\u5165\u793e\u5f8c\u306f\u3001\u914d\u7dda\u57fa\u677f\uff08\u30d5\u30a9\u30c8\u30ea\u30bd\u3001\u3081\u3063\u304d\uff09\u3001\u534a\u5c0e\u4f53\u30d1\u30c3\u30b1\u30fc\u30b8\uff08WLCSP\uff09\u3001\u8868\u9762\u5b9f\u88c5\u30fb\u30de\u30a4\u30af\u30ed\u30d0\u30f3\u30d7\u63a5\u5408\u3001\u534a\u5c0e\u4f53\u30a8\u30c3\u30c1\u30f3\u30b0\uff08\u30a6\u30a7\u30c3\u30c8\u3001\u30c9\u30e9\u30a4\uff09\u7b49\u306e\u5404\u9818\u57df\u306b\u304a\u3044\u3066\u8868\u9762\u5de5\u5b66\u7684\u77e5\u898b\u3092\u6d3b\u7528\u3057\u305f\u591a\u7a2e\u591a\u69d8\u306a\u6750\u6599\u30fb\u30d7\u30ed\u30bb\u30b9\u306e\u7814\u7a76\u958b\u767a\u306b\u5f93\u4e8b\u3002\u73fe\u5728\u306e\u4e3b\u306a\u7814\u7a76\u30c6\u30fc\u30de\u306f\u539f\u5b50\u5c64\u30a8\u30c3\u30c1\u30f3\u30b0\u3002
\n<\/td>\n<\/tr>\n
17:00-17:10<\/td>\u300c\u5317\u5927ALD\u88c5\u7f6e\u306b\u3088\u308b\u6210\u819c\u4e8b\u4f8b\u306e\u7d39\u4ecb\u300d
\n\u677e\u5c3e\u3000\u4fdd\u5b5d (\u5317\u6d77\u9053\u5927\u5b66\u96fb\u5b50\u79d1\u5b66\u7814\u7a76\u6240)\u3000
\n\"\"
\n\u7565\u6b74
\n2001\u5e74\u3000\u5317\u6d77\u9053\u5927\u5b66\u5de5\u5b66\u7814\u7a76\u79d1\u535a\u58eb\u8ab2\u7a0b\u5358\u4f4d\u53d6\u5f97\u9000\u5b66\u300212\u6708\u535a\u58eb\uff08\u5de5\u5b66\uff09\u3002
\n2018\u5e74\u3000\u5317\u6d77\u9053\u5927\u5b66\u96fb\u5b50\u79d1\u5b66\u7814\u7a76\u6240\u6559\u6388
\n\u8868\u9762\u5fae\u7d30\u52a0\u5de5\u306b\u3088\u308b\u5149\u6a5f\u80fd\u30c7\u30d0\u30a4\u30b9\u306e\u958b\u767a\u3084\u754c\u9762\u79d1\u5b66\u306e\u7814\u7a76\u306b\u5f93\u4e8b\u3002
\n2010\u5e74\u3088\u308a\u5fae\u7d30\u52a0\u5de5\u306b\u95a2\u3059\u308b\u7814\u7a76\u652f\u63f4\u696d\u52d9\u306b\u95a2\u308f\u308a\u3001\u73fe\u5728\u306f\u6587\u90e8\u79d1\u5b66\u7701\u30de\u30c6\u30ea\u30a2\u30eb\u5148\u7aef\u30ea\u30b5\u30fc\u30c1\u30a4\u30f3\u30d5\u30e9\uff08ARIM\uff09\u4e8b\u696d\u306b\u304a\u3044\u3066\u5317\u6d77\u9053\u5927\u5b66\u5b9f\u65bd\u8cac\u4efb\u8005\u3002<\/td>\n<\/tr>\n
17:10-17:20<\/td>\u300c\u7523\u7dcf\u7814NPF\u306eALD\u5b9f\u9a13\u74b0\u5883\u3000\u2015XPS\u4ed8\u304dALD\u88c5\u7f6e\u306e\u7d39\u4ecb\u3092\u4e2d\u5fc3\u306b\u2015\u300d
\n\u6709\u672c\u3000\u5b8f (\u7523\u7dcf\u7814\u30ca\u30ce\u30d7\u30ed\u30bb\u30b7\u30f3\u30b0\u65bd\u8a2d)\u3000
\n\"\"<\/td>\n<\/tr>\n
17:40-19:40<\/td>MNC 2023 Get Together Party<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n\n","protected":false},"excerpt":{"rendered":"","protected":false},"author":2,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"uagb_featured_image_src":{"full":false,"thumbnail":false,"medium":false,"medium_large":false,"large":false,"1536x1536":false,"2048x2048":false,"page_builder_slider_small":false,"size1":false,"size2":false,"size3":false,"size4":false,"size5":false,"size6":false,"size7":false,"size8":false,"size9":false,"size10":false,"size11":false,"size12":false,"size-card":false},"uagb_author_info":{"display_name":"mnc2022","author_link":"https:\/\/imnc.jp\/2023\/author\/mnc2022\/"},"uagb_comment_info":0,"uagb_excerpt":null,"_links":{"self":[{"href":"https:\/\/imnc.jp\/2023\/wp-json\/wp\/v2\/pages\/1871"}],"collection":[{"href":"https:\/\/imnc.jp\/2023\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/imnc.jp\/2023\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/imnc.jp\/2023\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/imnc.jp\/2023\/wp-json\/wp\/v2\/comments?post=1871"}],"version-history":[{"count":2,"href":"https:\/\/imnc.jp\/2023\/wp-json\/wp\/v2\/pages\/1871\/revisions"}],"predecessor-version":[{"id":1941,"href":"https:\/\/imnc.jp\/2023\/wp-json\/wp\/v2\/pages\/1871\/revisions\/1941"}],"wp:attachment":[{"href":"https:\/\/imnc.jp\/2023\/wp-json\/wp\/v2\/media?parent=1871"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}