Organizing Committee
Chair H. Kotera (Kyoto Univ.)
Vice Chair E.-K. Kim (Hanyang Univ.) S. Kasai (Hokkaido Univ.)
Members
J. Ahn (Hanyang Univ.) S. Ishihara (Univ. of Tokyo) Y. Ono (Univ. of Toyama)
S. Akita (Osaka Pref. Univ.) T. Itani (EIDEC) S.W. Hwang (Samsung Advanced Inst. of Technol.)
H. Arimoto (AIST)   T. Kozawa (Osaka Univ.) S. Sato (Fujitsu Labs.)
T. Asano (Kyushu Univ.) S. Matsui (Univ. of Hyogo) T. Sato (Toshiba)
K. Asakawa (Toshiba) T. Meguro (Tokyo Univ. of Sci.) Y. Shimamoto (Hitachi)
H. Azuma (Canon) Y. Miyamoto (Tokyo Inst. of Technol.) M. Suzuki (Kyoto Univ.)
T. Chikyow (NIMS) M. Nagase (Univ. of Tokushima) Y. Todokoro (Nara Inst. Sci. & Technol.)
Y. Hirai (Osaka Pref. Univ.) K. Nishiguchi (NTT) T. Tsuchiya (Kyoto Univ.)
T. Horiuchi (Tokyo Denki Univ.) H. Nozue (NuFlare Technol. America) H. Yaegashi (Tokyo Electron)
T. Ichiki (Univ. of Tokyo) Y. Ochiai (JST) H. Yamaguchi (NTT)
K. Ishibashi (RIKEN) S. Okazaki (GIGAPHOTON)
Advisory Members
Members
K. Aoyagi (Ritsumeikan Univ.) D. Kern (Univ. of Tubingen) U. Staufer (Delft Univ. of Technol.)
H. Bruckl (Danube Univ. Krems) M. Komuro (KEK) T. Sugano (Emeritus, Univ. of Tokyo)
C.Y. Chang (Natl. Nano Device Lab.) J. Melngailis (Univ. of Meryland) T. Tagawa (Osaka Univ.)
T. Fukui (Hokkaido Univ.) S.-K. Min (Kyung Hee Univ.) M. Takai (Emeritus,Osaka Univ.)
K. Gamo (Emeritus,Osaka Univ.) A.R. Neureuther (UC Berkeley) S. Tedesco (Leti)
M.A. Guillorn (IBM Thomas J. Watson Res. Ctr) S.W. Pang (City Univ. of Hong Kong) G.P. Watson (Princeton Univ.)
C.W. Hagen (Delft Univ. of Technol.) R.F.W. Pease (Stanford Univ.) J. Wiesner (Nikon Precision)
K. Hane (Tohoku Univ.) K. Ronse (IMEC) S. Wurm (SEMATECH)
L.R. Harriott (Univ. of Virginia) M. Roukes (Caltech) U. Staufer (Delft Univ. of Technol.)
J.G. Hartley (NuFlare Technol. America) R. Shimizu (Osaka Univ.) T. Sugano (Emeritus, Univ. of Tokyo)
T. Hastings (Univ. of Kentucky) S. Shoji (Waseda Univ.)
Y. Horiike (Univ. of Tsukuba) H.I. Smith (MIT)
Steering Committee Members
Chair M. Suzuki (Kyoto Univ.)
Vice Chair J. Ahn (Hanyang Univ.) T. Kozawa (Osaka Univ.)
Program T. Tsuchiya (Kyoto Univ.) T. Sato (Toshiba)
K. Nishiguchi (NTT) S.W. Hwang (Samsung Advanced Inst. of Technol.)
Exhibition H. Takemura (GenISys)
Treasure H. Yamashita (NuFlareTechnol.)
Contribution T. Iwai (Tokyo Ohka)
Public S. Nagahara (Tokyo Electron)
Local Arrengement D. Kobayashi (Ritsumeikan Univ.) K. Takei (Osaka Pref. Univ.);
K. Sugano (Kobe Univ) R. Yokokawa (Kyoto Univ.)
Overseas A. Chen (ASML) O.H. Kim (POSTEC)
J.-K. Shin (Kyungpook Univ.) C.K. Sung (National Tsing Hua Univ.)
H.Y. Low (Singapore Univ. of Technol. and Design)
Program Committee Members
Chair T. Tsuchiya (Kyoto Univ.)
Vice Chair S.W. Hwang Samsung Advanced Inst. of Technol.) Y. Ono (Shizuoka Univ.)
K. Nishiguchi (NTT) T. Sato (Toshiba)
1-1: Advanced Photolithography
Section Head J. Miyazaki (ASML)
Sub Head A. Yamaguchi (Hitachi)
Sub Head J. Ahn Hanyang Univ.)
Members H. Futatsuya (Fujitsu Semiconductor) K. Oyama (Tokyo Electron)
H. Kawai (Nikon) T. Uchiyama (Toshiba)
Y. Morikawa (DNP) G. Vandenberghe (IMEC)
1-2: Electron and Ion Beam Technologies
Section Head H. Yamashita (NuflareTechnol.)
Sub Head J. Yamamoto (Hitachi) K.-Y. Tsai (Natl. Taiwan Univ.
Sub Head H.S. Kim (Sun Moon Univ.)
Members H. Abe (Toshiba) M. Kotera (Osaka Inst. of Technol.)
S. BabinA-Beam) H. Nozue (Nuflare Technol. America)
A. Kinomura (Kyoto Univ.) J. Yanagisawa (Univ. of Shiga Pref.)
1-3: Resist and Directed Self-Assembly
Section Head T. Azuma (EIDEC)
Sub Head T. Nagai (JSR) S.O. Kim (KAIST)
Members R. Gronheid (IMEC) T. Yamaguchi (NTT)
J. Kon (Fujitsu) H. Yamamoto (Osaka Univ.)
S. Nagahara (Tokyo Electron) H. Yoshida (Hitachi)
H. Oizumi (Gigaphoton) K. Yoshimoto (Kyoto Univ.)
K. Okamoto (Hokkaido Univ.)
2-1 Nanocarbons
Section Head D. Kondo (Fujitsu Labs.)
Sub Head S. Okada (Univ. of Tsukuba) J.-H. Ahn Yonsei Univ.
Members A. Ando (AIST) M. Tanemura (Nagoya Inst. of Technol.)
  G. Kalita (Nagoya Inst. of Technol.) K. Ueno (Saitama Univ.)
M. Katagiri (Toshiba) K. Matsuda (Kyoto Univ.)
S. Konabe (Tokyo Univ. of Sci.) K. Maehashi (Tokyo Univ. of Agri. and Technol.)
M. Takamura (NTT) R. Negishi (Osaka Univ.)
T. Takenobu (Nagoya Univ.) K. Yanagi (Tokyo Metropolitan Univ.)
2-2: Nanodevices
Section Head T. Yanagida (Kyushu Univ.)
Sub Head Y. Ishikawa (Nara Inst. of Sci. and Technol.) Y.S. Yu (Hankyung Natl. Univ.)
Members N. Banno (NEC) T. Nozaki (AIST)
Y. Chen (Fudan Univ.) M. Seki (Univ. of Tokyo)
S. Hara (Hokkaido Univ.) K. Takei (Osaka Pref. Univ.)
Y. Hotta (Univ. of Hyogo) K. Uchida (Keio Univ.)
T. Maemoto (Osaka Inst. of Technol.)
2-3: Nanofabrication
Section Head S. Shingubara (Kansai Univ.)
Sub Head K. Takase (Nihon Univ.) Y.J. Hong (Sejong Univ.)
Sub Head J.J. Lee (KIMM)
Members T. Hasegawa (Waseda Univ.) K. Makihara (Nagoya Univ.)
R. Hasunuma (Tsukuba Univ.) H. Tanaka (Kyushu Inst. of Technol.)
A. Kohno (Fukuoka Univ.) K. Tomioka (Hokkaido Univ.)
Y. Liu (AIST)
2-4: Inorganic Nanomaterials
Section Head M. Osada (NIMS)
Sub Head M. Suzuki (AIST) K. Kyhm (Pusan Natl. Univ.)
J.-W. Choi (KIST) S. Nahm (Korea Univ.)
  J. Hamagami (Kanto Gakuin) T. Taniguchi (NIMS)
     
2-5: Organic Nanomaterials
Section Head S. Takami (Tohoku Univ)
Sub Head H. Kasai (Tohoku Univ) H. Sohn (Chosun Univ.)
Members N. Hiroshiba (Tohoku Univ.) Y. Shirai (NIMS)
K. Noda (Keio Univ.)
2-6: NanoTool
Section Head R. Kometani (Univ. of Tokyo)
Sub Head K. Sugano (Kobe Univ) H.-J. Lee (KIMM)
Members T. Hoshino (Univ. of Tokyo) Y.-H. Lin (Chang Gung Univ.)
S. Hotta (Hitachi) T. Namazu (Univ. of Hyogo)
T. Kawano (Toyohashi Univ. of Technol.) Y. Sugiyama (Hitachi Hi-tech. Sci.)
O. Kubo (Osaka Univ.) Y. Yamanishi (Kyushu Univ.)
3: Nanoimprint, Nanoprint and Rising Lithography
Section Head A. Yokoo (NTT)
Sub Head J. Taniguchi (Tokyo Univ. of Sci.) H. Lee (Korea Univ.)
Sub Head F.-Y. Chang Natl. Taiwan Univ. of Sci. and Technol. E.-S. Lee Korea Inst. of Machinery and Materials
Sub Head H.Y. Low Inst. of Materials Res. and Eng.
Members Y. Hirai (Osaka Pref. Univ.) M. Okada (Univ. of Hyogo)
H. Hiroshima (AIST) M. Okinaka (Canon)
A. Miyauchi (Hitachi) N. Sakai (Samsung Electronics)
4: BioMEMS, Lab on a Chip
Section Head A. Matsumoto (Tokyo Medical and Dental Univ.)
Sub Head T. Akagi (Univ. of Tokyo)
Members K. Furukawa (Meisei Univ.) H. Hisamoto (Osaka Pref. Univ.)
Y. Murakami (Toyohashi Univ. of Technol.) H. Nagai (AIST)
Y. Takamura (JAIST) K. Tawa (Kwansei Gakuin Univ.)
M. Tokeshi (Hokkaido Univ.)
5: Microsystem Technology and MEMS
Section Head T. Namazu (Aichi Inst. of Technol.)
Sub Head S. Nagasawa (Shibaura Inst. of Technol.) D. Dao (Griffith Univ.)
Sub Head S.H. Kong (Kyungpook Natl. Univ.)
Members Y. Hasegawa (Hiroshima City Univ.) T. Nakakubo (Canon)
M. Ikeuchi (Univ. of Tokyo) T. Sakata (Josai Univ.)
K. Iwami (Tokyo Univ. of Agri. and Technol. ) R. Takigawa (Kyushu Univ.)
E. Iwase (Waseda Univ.) Y. Tomizawa (Toshiba)
S. Miyake (Kobe City College of Technol.)