 |
 |
MNC 2010, 23rd International Microprocesses and Nanotechnology Conference
November 9-12, 2010, Rihga Royal Hotel Kokura, Fukuoka, Japan
|

 |
 |
|
 |
As for notice of acceptance or rejection, we will inform you by e-mail around August 5.
|
 |
Online Registration and Hotel Accomodation Site.
|
| Abstract Deadline |
June 30, 2010
July 6, 2010 |
| Late News Paper Deadline |
September 15, 2010
|
| Registration Deadline |
October 20, 2010
|
| JJAP Deadline |
| November 30, 2010 |
|
|
in Japanese Site
 |
|
|
 |
|
 |
 |
Microprocesses and Nanotechnology play an
important role of technical backbone for constructing the advanced information
communications society with ubiquitous net works of the 21st century.
The MNC
conference is now in its 23rd year and is intended to provide a forum for
discussing lithography science and process technology using photon, electron,
ion, other energetic particles and nanomaterials. This conference covers not
only their applications to micro-and nano-structure fabrication and related
physics and devices, but also their fusion applications with other fields like
bio, medical information, and communication technology. |
|
 |
SCOPE
1: Lithography, and Related Technologies
1-1: DUV, EUV Lithography
1-2: Electron- and Ion-Beam Lithography
1-3: Resist Materials and Processing
2: Nanotechnology
2-0 Nanocarbon
2-1: Nanodevice
2-2: Nanofabrication
2-3: Nanomaterials
2-4: Nano Tool
3: Nanoimprint, Nanoprint and Rising Lithography
4: Bio MEMS, Lab on a Chip
5: Microsystem Technology and MEMS
Symp. A: Cost-Effective Efficient Litho Technologies - Holding the Keys
to "Green Lithography" |
| MNC 2010 Plenary Speakers |
 |
|
|
Prof. Masayoshi
Esashi Tohoku Univ.
''Prospect of
Micro/ Nanotechnology for Fusion in Microelectronics" |
Dr. Michael
Roukes
Kavli Nanoscience Inst.
California Inst. of Technol.
''Large-Scale
Integration of Nanosystem'' |
Dr. Sam Sivakumar
INTEL CORPORATION
''Managing the Technical and
Economic Challenges of
Next-Generation Lithography'' |
|
|
|
|
|
 |
|
|

|
|
 |