MNC 2018, November 13-16, 2018
31st International Microprocesses and Nanotechnology Conference
Sapporo Park Hotel, Sapporo, Japan



MNC 2018 Committee Chairs
     
 Organizing Chair:
Seiya Kasai
(Hokkaido Univ., Japan)
Organizing Vice Chair:
Chikyow Toyohiro
(NIMS, Japan)
 
Steering Chair:
Takahiro Kozawa
(Osaka Univ., Japan) 
Steering Vice Chair:
Toshiyuki Tsuchiya
(Kyoto Univ., Japan) 
 
       
 Program Chair:
Yukinori Ono
(Shizuoka Univ., Japan) 
Program Vice Chair:
Katsuhiko Nishiguchi
(NTT, Japan)
   
  Program Vice Chair:
Takashi Sato
(Toshiba Memory, Japan) 

Committee Members
Organizing Committee
Chair S. Kasai (Hokkaido Univ.)
Vice Chair T. Chikyow (NIMS)
Members
J. Ahn (Hanyang Univ.) Y.M. Kim (Dankook Univ.) Y. Ono (Shizuoka Univ.)
S. Akita (Osaka Pref. Univ.) A. Kohno (Fukuoka Univ.) S. Sato (Fujitsu Labs.)
H. Arimoto (AIST)   H. Kotera (RIKEN) T. Sato (Toshiba Memory)
K. Asakawa (Toshiba Memory) T. Kozawa (Osaka Univ.) M. Suzuki (Kyoto Univ.)
H. Azuma (Canon) S. Matsui (Univ. of Hyogo) T. Tsuchiya (Kyoto Univ.)
Y. Hirai (Osaka Pref. Univ.) T. Meguro (Tokyo Univ. of Sci.) H. Yaegashi (Tokyo Electron)
T. Horiuchi (Tokyo Denki Univ.) Y. Miyamoto (Tokyo Inst. of Technol.) H. Yamashita (Nuflare Technol.)
T. Ichiki (Univ. of Tokyo) M. Nagase (Univ. of Tokushima) A. Yamaguchi (Hitachi)
K. Ishibashi (RIKEN) K. Nishiguchi (NTT) H. Yamaguchi (NTT)
T. Itani (EIDEC) Y. Ochiai (JST)
E.-K. Kim (Hanyang Univ.) S. Okazaki (ALITECS)
Advisory Members
K. Aoyagi (Ritsumeikan Univ.) D. Kern (Univ. of Tubingen) R. Shimizu (Osaka Univ.)
A. Boisen (DTU Nanotech) M. Komuro (KEK) S. Shoji (Waseda Univ.)
S. Cabrini (Lawrence Berkeley Natl. Lab.) J. Melngailis (Univ. of Meryland) H.I. Smith (MIT)
C.Y. Chang (Natl. Nano Device Lab.) S.-K. Min (Kyung Hee Univ.) T. Sugano (Emeritus, Univ. of Tokyo)
T. Fukui (Emiritus, Hokkaido Univ.) L. Montelius (INL) T. Tagawa (Osaka Univ.)
K. Gamo (Emeritus,Osaka Univ.) L. Muray (KLA Tencor) M. Takai (Emeritus,Osaka Univ.)
K. Hane (Tohoku Univ.) A.R. Neureuther (UC Berkeley) S. Tan (INTEL Intel)
L.R. Harriott (Univ. of Virginia) S.W. Pang (City Univ. of Hong Kong) S. Tedesco (Leti)
C.L. Henderson (Georgia Tech.) R.F.W. Pease (Stanford Univ.) J. Wiesner (Nikon Precision)
Y. Horiike (Univ. of Tsukuba) F. Perez-Murano (IMB-CNM) S. Wurm (SEMATECH)
S. Ishihara (Univ. of Tokyo) K. Ronse (IMEC)
S.S. Keller (DTU Nanotech) M. Roukes (Caltech)
Steering Committee Members
Chair T. Kozawa (Osaka Univ.)
Vice Chair T. Tsuchiya (Kyoto Univ.)
Program Y. Ono (Shizuoka Univ.)
T. Sato (Toshiba Memory) K. Nishiguchi (NTT)
Exhibition H. Takemura (GenISys)
Treasure H. Yamashita (NuFlareTechnol.)
Contribution H. Yamazaki (Tokyo Ohka)
Public S. Nagahara (Tokyo Electron)
Local H. Kaiju (Hokkaido Univ.) K. Tomioka (Hokkaido Univ.)
K. Ueno (Hokkaido Univ.)
Overseas A. Chen (ASML) C.K. Sung (National Tsing Hua Univ.)
H.Y. Low (Singapore Univ. of Technol. and Design) J.-K. Shin (Kyungpook Univ.)
C.-Y. Lo (Natl. Tsing Hua Univ.)
Program Committee Members
Chair Y. Ono (Shizuoka Univ.)
Vice Chair T. Sato (Toshiba Memory) K. Nishiguchi (NTT)
1-1: Photolithography and Patterning
Section Head T. Uchiyama (Toshiba Memory)
Sub Head J. Miyazaki (ASML) A. Yamaguchi (Hitachi)
Members J. Ahn (Hanyang Univ.) T. Harada (Univ. of Hyogo)
Y. Morikawa (DNP) H.-K. Oh (Hanyang Univ.) K. Oyama (Tokyo Electron)
G. Vandenberghe (IMEC)
1-2: Electron and Ion Beam Technologies
Section Head H. Yamashita (NuflareTechnol.)
Sub Head J. Yamamoto (Hitachi) H.S. Kim Sun Moon Univ., Korea)
Sub Head K.-Y. Tsai (Natl. Taiwan Univ.
Members H. Abe (Toshiba) S. Babin (A-Beam)
A. Kinomura (Kyoto Univ.) M. Kotera (Osaka Inst. of Technol.) J. Yanagisawa (Univ. of Shiga Pref.)
1-3: Resist and Directed Self-Assembly
Section Head T. Azuma (EIDEC)
Sub Head T. Nagai (JSR) S.O. Kim (KAIST)
Members H. W. Kim (Samsung) D.H. Kim (Ewha Univ.)
C. Lim (SK Hynix)
S.-J. Jeong (SAIT)
S. Nagahara (Tokyo Electron)
H. Oizumi (Gigaphoton) K. Okamoto (Osaka Univ.) H. Yamamoto (QST)
H. Yoshida (Hitachi) K. Yoshimoto (Kyoto Univ.)
2-1 Nanocarbons
Section Head D. Kondo (Fujitsu Labs.)
Sub Head S. Okada (Univ. of Tsukuba) J.-H. Ahn (Yonsei Univ.)
Members A. Ando (AIST) S. Chiashi (Univ. of Tokyo)
G. Kalita (Nagoya Inst. of Technol.) M. Katagiri (Panasonic) S. Konabe (Hosei Univ.)
K. Maehashi (Tokyo Univ. of Agriculture and Technol.) K. Matsuda (Kyoto Univ.) R. Negishi (Osaka Univ.)
T. Takenobu (Nagoya Univ.) M. Tanemura (Nagoya Inst. of Technol.) K. Ueno (Saitama Univ.)
K. Yanagi (Tokyo Metropolitan Univ.)
2-2: Nanodevices
Section Head T. Yanagida (Kyushu Univ.)
Sub Head Y. Ishikawa (Nara Inst. of Sci. and Technol.)
Members N. Banno (NEC) Y. Chen (Fudan Univ.)
S. Hara (Hokkaido Univ.) Y. Hotta (Univ. of Hyogo) T. Maemoto (Osaka Inst. of Technol.)
T. Nozaki (AIST) M. Seki (Univ. of Tokyo) K. Takei (Osaka Pref. Univ.)
K. Uchida (Keio Univ.)
2-3: Nanofabrication
Section Head S. Shingubara (Kansai Univ.)
Sub Head K. Takase (Nihon Univ.)
Sub Head Y.J. Hong (Sejong Univ.)
Members Ariando (Natl. Univ. of Singapore) T. Hasegawa (Waseda Univ.)
R. Hasunuma (Tsukuba Univ.) T. Kawashima (Tohoku Univ.) J.J. Lee (KIMM)
Y. Liu (AIST) T. Shimizu (Kansai Univ.) H. Tanaka (Kyushu Inst. of Technol.)
K. Tomioka (Hokkaido Univ.) J. Xu (Nanjing Univ.)
2-4: Inorganic Nanomaterials
Section Head M. Osada (Nagoya Univ.)
Sub Head M. Suzuki (AIST)
Members A. Funatsu (Kumamoto Univ.) J. Kano (Okayama Univ.)
M. Tada (Tokyo Inst. of Technol.) T. Taniguchi (NIMS) T. Tsuchiya (NIMS)
E. Yamamoto (Nagoya Univ.)    
     
2-5: Organic Nanomaterial
Section Head R. Hayakawa (NIMS)
Sub Head A. Masuhara (Yamagata Univ.)
Members N. Hiroshiba (Waseda Univ.) Y. Jeong (Korea Basic Sci. Inst.)
F.S. Kim (Chung-Ang Univ.)
S. Masuo (Kwansei Gakuin Univ.) S. Nagano (Nagoya Univ.)
S. Takami (Tohoku Univ.) S. Yamamoto (Tohoku Univ.)  
2-6: NanoTool
Section Head R. Kometani (Univ. of Tokyo)
Sub Head K. Sugano (Kobe Univ)
Members T. Hoshino (Hirosaki Univ.) S. Hotta (Hitachi Hi-Technol.)
O. Kubo (Osaka Univ.) T. Namazu (Aichi Inst. of Technol.) Y. Sugiyama (Hitachi Hi-Tech Sci.)
3: Nanoimprint, Hybrid-NIL, Biomimetics, and Functional Surfaces
Section Head A. Miyauchi (Tokyo Medical and Dental)
Sub Head J. Taniguchi (Tokyo Univ. of Sci.) H. Lee (Korea Univ.)
F.-Y. Chang (Natl. Taiwan Univ. of Sci.
and Technol.)
E.-S. Lee (Korea Inst. of Machinery
and Materials)
H.Y. Low (Singapore Univ. of Technol.
and Design)
Members Y. Hirai (Osaka Pref. Univ.) J. Mizuno (Waseda Univ.)
M. Okada (Asahi Kasei) M. Okinaka (Canon) N. Sakai (Samsung R&D Inst. Japan)
Y. Shimazaki (Hitachi) K. Suzuki (AIST)
4: BioMEMS, Lab on a Chip, and Nanobiotechnology
Section Head A. Matsumoto (Tokyo Medical and Dental)
Sub Head A. Miura (Hokkaido Univ.)
Members T. Akagi (Univ. of Tokyo) K. Furukawa (Meisei Univ.)
T. Hayashi (Tokyo Inst. of Technol.) S. Kumagai (Meijo Univ.) H. Nagai (AIST)
K. Tawa (Kwansei Gakuin Univ.) R. Tero (Toyohashi Univ. of Technol.) M. Tokeshi (Hokkaido Univ.)
5: Microsystem Technology and MEMS
Section Head Y. Tomizawa (Toshiba) 
Sub Head S. Nagasawa (Shibaura Inst. of Technol.) R. Takigawa (Kyushu Univ.)
Sub Head S.H. Kong (Kyungpook Univ.)  
Members Y. Hasegawa (Hiroshima City Univ.) K. Iwami (Tokyo Univ. of Agriculture and Technol.)
S. Miyake (Kobe City College of Technol.) T. Nakakubo (Canon) T. Namazu (Aichi Inst. of Technol.)
D. Yamane (Tokyo Inst. of Technol.)

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