MNC 2018, November 13-16, 2018
31st International Microprocesses and Nanotechnology Conference
Sapporo Park Hotel, Sapporo, Japan







06GN17   
Comparison of mechanical characteristics of focused ion beam fabricated silicon nanowires    
G. Ina 1, T. Fujii 2, T. Kozeki 1, E. Miura 1, S. Inoue 1 and T. Namazu 2, 1 Univ. of Hyogo, 2 Akita Pref. Univ. and 3 Aichi Inst. of Technol., Japan

10D-5-3   
Mechanical Properties Characterization and Fabrication Damage Investigation of Silicon Nanowires Based on Four-Different Sample Preparation Techniques    G. Ina 1, T. Fujii 2, T. Kozeki 1, S. Inoue 1 and T. Namazu 3, 1 Univ. of Hyogo, 2 Akita Pref. Univ. and 3 Aichi Inst. of Technol., Japan

10P-7-91   
Thermoplasmonic Marangoni Flow Around a Microbubble in Degassed Water   
K. Namura, K. Nakajima and M. Suzuki, Kyoto Univ., Japan

11P-11-2   
Dependence of Dissolution Kinetics of ZEP 520A on Change of Molecular Weight Induced by Electron Beam Irradiation   
A. Konda 1, H. Yamamoto 1, T. Kozawa 1 and S. Yoshitake 2, 1 Osaka Univ., and 2 NuFlare Technol., Japan

11C-10-4   
Molecular Dynamics study on Dipole Layer Formation at High-k/SiO2 Interface: -Possibility of Oxygen Ion Migration Induced by the Imbalance of Multipole Potentials-   
R. Kunugi, N. Nakagawa and T. Watanabe, Waseda Univ., Japan


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