{"id":623,"date":"2021-06-17T12:48:53","date_gmt":"2021-06-17T03:48:53","guid":{"rendered":"http:\/\/imnc.jp\/2021\/?page_id=623"},"modified":"2021-10-21T16:18:10","modified_gmt":"2021-10-21T07:18:10","slug":"program","status":"publish","type":"page","link":"http:\/\/imnc.jp\/2021\/program\/","title":{"rendered":"Program"},"content":{"rendered":"\n\n\n\n\n
\"\"<\/a><\/span><\/td>\nMNC2021_Session Schedule<\/a>\u00a0<\/strong><\/span><\/td>\nWorld time converter<\/span><\/strong><\/span><\/td>\nhttps:\/\/www.worldtimebuddy.com\/<\/strong><\/a><\/span><\/td>\n<\/tr>\n
\"\"<\/a><\/span><\/td>\n\u00a0MNC 2021 Program<\/a><\/strong><\/span><\/td>\n \"\"<\/a><\/span><\/td>\n\u00a0MNC2021_How to join_How to deal with Q&A (for Poster Session Speaker)<\/a>
\n<\/strong><\/span><\/td>\n<\/tr>\n
\"\"<\/a><\/span><\/td>\nMNC 2021 Online Manual
\n(for Oral Speakers, Chairperson and Participants)<\/strong><\/a><\/span><\/td>\n		\"\"<\/a><\/td>\n\u00a0How to Join MNC 2021 from October 26<\/a><\/strong><\/span><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
October 26, On-demand (Keynote and Poster Session)<\/span>
\n<\/strong>\n\n\n\n\t\n\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t
On-demand Session: Keynote Session and Poster Session<\/th>\n<\/tr>\n<\/thead>\n
Keynote Speakers<\/td>\n<\/tr>\n
Keynote-11\t
\nHIGH-NA EUV LITHOGRAPHY: CURRENT STATUS AND OUTLOOK FOR THE FUTURE (Keynote)\t
\n
\nHarry Levinson, HJL Lithography, USA
\n<\/td>		Keynote-12\t\t
\nDEVELOPMENT OF MASSIVE PARALLEL ELECTRON BEAM WRITE (MPEBW)
\nSYSTEM : AIMING AT DIGITAL FABRICATION OF INTEGRATED CIRCUIT (Keynote)
\n
\nMasayoshi Esashi 1, Hiroshi Miyaguchi 1, Akira Kojima 1, Naokatsu Ikegami 1, Nobuyoshi Koshida 2 and Hideyuki Ohyi 3, 1 Tohoku Univ., 2 Tokyo Univ. of Agriculture and Technol. and 3 Crestec, Japan<\/td>		Keynote-13\t\t
\nEvolution of patterning materials towards the Moore's Law 2.0 Era (Keynote)\t
\n
\nDario L. Goldfarb, IBM Watson Res. Center, USA
\n
\n<\/td>\n<\/tr>\n
Keynote-21\t\t
\nLow-dimensional carbon nanostructures: From graphene to carbon atomic chains (Keynote)\t
\n
\nKazu Suenaga 1, Ryosuke Senga 2, Jinhua Hong 2, Junhao Lin 2, Pranjal Gogoi 2, Luiz Tizei 2 and Yung-Chang Lin 2, 1 Osaka Univ. and 2 AIST, Japan
\n<\/td>		Keynote-23\t\t
\nDevelopment of probe microscope techniques for nanofabrication and manipulation (Keynote)
\n
\nFutoshi Iwata, Shizuoka Univ., Japan
\n<\/td>		Keynote-24\t\t
\nMaterials drive Si photonics (Keynote)\t
\n
\nMitsuru Takenaka, Kasidit Toprasertpong and Shinichi Takagi, Univ. of Tokyo, Japan
\n
\n<\/td>\n<\/tr>\n
Keynote-26\t\t
\nApplications of femtosecond laser amplifier to microprocesses for biological cells (Keynote)\t
\n
\nYoichiroh Hosokawa, NAIST, Japan
\n<\/td>		Keynote-3\t\t
\nRoll-to-roll fabrication of lab-on-chip devices (Keynote)\t
\n
\nJussi Hiltunen, VTT Technical Research Centre of Finland
\n<\/td>		Keynote-4\t\t
\nBiodevice Technology: From Fundamentals to Applications (Keynote)\t
\n
\nTakanori Ichiki 1,2, 1 Univ. of Tokyo and 2 iCONM, Japan
\n
\n<\/td>\n<\/tr>\n
Keynote-5\t\t
\nMEMS Piezo-resistive Strain Gages with Expanding Applications (Keynote)\t
\n
\nIsao Shimoyama, Toyama Prefectural Univ., Japan
\n<\/td>		Keynote-6\t\t
\nPOWDER ALD: A MATERIALS SUPPLIER\u2019S PERSPECTIVES (Keynote)\t
\n
\nChristian Dussarrat, Air Liquide Labs., Japan
\n<\/td>		<\/td>\n<\/tr>\n
Poster Session (1-1: Advanced Lithography and Patterning) <\/td>\n<\/tr>\n
P11-1\t\t
\nCLIP-ON OPTICAL COMPONENTS BY ADDITIVE MANUFACTURING FOR ENHANCED IMAGING CAPABILITIES \t
\nParvathi Nair S.1, Jonathan Trisno 1, and Joel K.W. Yang 1,2, 1 SUTD and 2 IMRE, Singapore
\n<\/td>		P11-2\t\t
\nSTRIVING FOR ATOMIC PRECISION IN DOPANT ARRAY QUANTUM DEVICES\t
\nJames H.G. Owen, Ehud Fuchs, Robin Santini and John N. Randall, Zyvex Labs, USA
\n<\/td>		P11-3\t\t
\nAnisotropic pyrochemical dry etching of fluorinated ethylene propylene initiated by irradiation of synchrotron radiation \t
\nK. Fujitani, S. Amano, A. Yamaguchi, Y. Haruyama, and Y. Utsumi, Univ. of Hyogo, Japan
\n<\/td>\n<\/tr>\n
Poster Session (1-3: Patterning Materials)<\/td>\n<\/tr>\n
P13-1\t\t
\nFabrication of ZnO\/Si Surface Patterning by defect control via Galvanic-Submerged Photo-Synthesis of Crystallites\t
\nJumpei Tsukamura 1,Yuki Takahashi 1 , Zhang Lihua 1, Melbert Jeem 1, Kazumasa Okamoto 2, and Seiichi Watanabe 1, 1 Hokkaido Univ. and 2 Osaka Univ., Japan
\n<\/td>		P13-2\t\t
\nAnalysis of mitigating factors for line edge roughness generated during electron beam lithography using machine learning\t
\nYuqing Jin 1, Takahiro Kozawa 1, and Takao Tamura 2, 1 Osaka Univ. and 2 NuFlare Technol., Japan
\n<\/td>		P13-3\t\t
\nFabrication of 3D hetero nanostructure via galvanic submerged photo-synthesis of crystallites \t
\nYuki Takahashi, Melbert Jeem, Lihua Zhang, and Seiichi Watanabe, Hokkaido Univ., Japan
\n<\/td>\n<\/tr>\n
P13-4\t\t
\nUtilizing a photosensitive dry film resist in proton beam writing \t
\nHironori Seki 1, Keiya Kawamura 1, Hidetaka Hayashi 2, Yasuyuki Ishii 3, Nitipon Puttaraksa 4 and Hiroyuki Nishikawa 1, 1 Shibaura Inst. of Technol., 2 Ecodesign Promotion Networ, 3 Takasaki Advanced Radiation Res. Inst., Japan and 4 King Mongkut's Univ. of Technol., Thailand
\n<\/td>		P13-5\t\t
\nApplication of ethyltrimethylammonium hydroxide (ETMAH) developer for contact hole patterning in EUVL\t
\nJulius Joseph Santillan and Toshiro Itani, Osaka Univ., Japan<\/td>		<\/td>\n<\/tr>\n
Poster Session (2-1: Nanocarbons & 2D Materials)<\/td>\n<\/tr>\n
P21-1\t\t
\nFar-infrared emission from graphene on SiC by current injection \t
\nTaichi Kataoka, Fumiya Fukunaga, Naruse Murakami, Yoshiki Sugiyama, Yasuhide Ohno and Masao Nagase, Tokushima Univ., Japan
\n
\n<\/td>		P21-2\t\t
\nElectrically Driven Broadband Emitter with A Macroscopically Aligned Carbon Nanotube Film on Silicon Chips\t
\nShinichiro Matano 1, Hidenori Takahashi 1, Natsumi Komatsu 2, Yui Shimura 1, Kenta Nakagawa 1,3, Junichiro Kono 2, and Hideyuki Maki 1, 1 Keio Univ., Japan, 2 Rice Univ., USA and 3 KISTEC., Japan<\/td>		P21-3\t\t
\nElectrical detection of influenza virus based on DNA-aptamer-modified graphene\t
\nKanna Takematsu, Takashi Ikuta, Kaori Tsukakoshi, Kazunori Ikebukuro and Kenzo Maehashi, Tokyo Univ. of Agriculture and Technol., Japan<\/td>\n<\/tr>\n
P21-4\t\t
\nFabrication and evaluation of Polymer actuator using polyaniline \t
\nTaiga Mitsuda, Kei Miyakawa, Shohei Sakurai, and Masahito Kushida, Chiba Univ., Japan<\/td>		P21-5\t\t
\nVertically aligned carbon nanotubes grown from Langmuir-Blodgett films with nano alloy particles\t
\nShohei Sakurai, Mayu Iida, Kousei Okunuki, and Masahito Kushida, Chiba Univ., Japan<\/td>		P21-6\t\t
\nStudy Of N Doped Carbon Nanofibers Synthesized On Nichrome Foil For Urea Oxidation Reaction\tBhagyahsri Todankar 1, Yazid Yaakob 1,2, Golap Kalita 1, and Masaki Tanemura 1, 1 Nagoya Inst. of Technol., Japan and 2 Univ. Putra Malaysia, Malaysia <\/td>\n<\/tr>\n
P21-7\t\t
\nCharacterization of Epitaxial CVD Graphene on Ir(111)\/\u03b1-Al2O3(0001) by Photoelectron Momentum Microscopy\t
\nEri Hashimoto 1, Keigo Tamura 1, Hayato Yamaguchi 1, Fumihiko Matsui 2, and Shinji Koh 1, 1 Aoyama Gakuin Univ. and 2 Inst. for Molecular Sci., Japan<\/td>		P21-8\t\t
\nIntegrated FPC Laser-Induced Graphene Strain Sensor with Pneumatic Finger by Fused Additive Method 3D Printed Method
\nChao-Shin Hsu 1, Yi-Chun Chuang 1, Yu-Hsin Yen 1, Cheng-Chun Huang 2, Ching-Yuan Su 2, Ching-Liang Dai 1, and Yao-Chuan Tsai 1, 1 Natl. Chung Hsing Univ. and 2 Natl. Central Univ., Taiwan<\/td>		P21-9\t\t
\nCNT-Si heterojunction solar cells with aligned carbon nanotube films\t
\nMotonori Nakamura 1, Keisuke Sugimoto 1, Junichiro Kono 2, and Koji Takamura 1, 1 Natl. Inst. of Technol., Asahikawa College, Japan and 2 Rice Univ., USA<\/td>\n<\/tr>\n
P21-10\t\t
\nDeep ultraviolet light detection by AlGaN\/Gr hetero junction photodiode array\t
\nYoshinori Nakagawa 1, Shigeki Okauchi 1, Masahiko Sano 1, Takashi Mukai 1, Yasuhide Ohno 2, and Masao Nagase 2, 1 Nichia and 2 Tokushima Univ., Japan
\n<\/td>		P21-11\t\t
\nMetal Linkers and Edge Structures on Coordination Nanosheets Stimulate Hydrogen Evolution Reaction\t
\nAtsuki Sato 1, Akichika Kumatani 1,2, Choon Meng Tan 3, Ying-Chiao Wang 2, Naoya Fukui 3, Hiroaki Maeda 3, Hitoshi Shiku 1, Kazuhito Tsukagoshi 1,2, Hiroshi Nishihara 2, 1 Tohoku Univ., 2 NIMS, 3 Tokyo Univ. of Sci., Japan
\n<\/td>		P21-12\t\t
\nGrowth of ultra-high-density carbon nanotube forest for thermal and electrical transport materials\t
\nKento Tabata, Yuga Kono, Takayuki Nakano and Yoku Inoue, Shizuoka Univ., Japan
\n<\/td>\n<\/tr>\n
P21-13\t\t
\nPd-Ni-decorated CNTs based hydrogen gas sensor\t
\nMaeum Han 1, Jae Keon Kim 1,2, J. Lee 1,2, H.K. An 2, S.H. Kong 1 and Daewoong Jung 2, 1 Kyungpook Natl. Univ. and 2 KITECH, Korea
\n<\/td>		P21-14\t\t
\nHighly stretchable CNT yarn strain sensor for health monitoring\t
\nMaeum Han 1, Jun Yeop Lee 1,2, Dong Geon Jung 2, Seong Ho Kong 1 and Daewoong Jung 2, 1 Kyungpook Natl. Univ., 2 KITECH, Korea
\n<\/td>		P21-15\t\t
\nTemperature, magnetic field, and gate-voltage dependence on the electrical conductivity of single-walled carbon nanotube thin films \t
\nHiroki Date 1, Takenori Fujii 1, Taiki Inoue 2, Esko I. Kauppinen 3, Shigeo Maruyama 1 and Shohei Chiashi 1, 1 Univ. of Tokyo, 2 Osaka Univ., Japan and 3 Aalto Univ., Finland
\n<\/td>\n<\/tr>\n
P21-16\t\t
\nStudy the influence of radical materials on the progress of unzipping carbon nanotube\t
\nRikuto Oyabu, Yuki Usami and Hirofumi Tanaka, Kyushu inst. of Technol., Japan<\/td>		<\/td><\/td>\n<\/tr>\n
Poster Session (2-2: Nanodevices )<\/td>\n<\/tr>\n
P22-1\t\t
\nSelective-Area Growth of Ge Nanowires on SiO2-Masked Si (111) Substrates by Vaper-Liquid-Solid Method
\nD. Goto 1, M. Makino 1, R. Horiguchi 1, W. Jevasuwan 2, N. Fukata 2, and S. Hara 1, 1 Hokkaido Univ. and 2 NIMS, Japan
\n<\/td>		P22-2\t\tModeling of Quantum Electron Transmission Process in Two-dimensional Nanowire System using Recurrent Neural Network \tKeita Kawahara 1, Yuto Ogra 1, Yoshitaka Itoh 1, Tota Suko 2, and Masakazu Muraguchi 1, 1 Hokkaido Univ. of Sci. and 2 Waseda Univ., Japan
\n<\/td>		P22-3\t\t
\nSelf-Catalyzed Molecular Beam Epitaxial Growth of GaAs nanowires on 2-inch Si (001) wafer\t
\nNaoto Danjo, Kenta Sakaguchi, Fumitaro Ishikawa, Ehime Univ., Japan
\n<\/td>\n<\/tr>\n
P22-4\t\t
\nRadiation Plumes on Gallium Nitride Nanocircuits Under Simulated Space Radiation \t
\nK. Xie and V. M. Ayres, Michigan State Univ., USA<\/td>		P22-5\t\t
\nObservation and theoretical calculation of spin transport in Ni78Fe22\/molecules\/Ni78Fe22 nanojunction devices\t
\nKyohei Hayashi 1, Yuma Sasaki 2, Kaeko Senshu 1, Takahiro Misawa 2, Junji Nishii 2, and Hideo Kaiju 1, 1 Keio Univ. and 2 Hokkaido Univ., Japan
\n<\/td>		P22-6\t\t
\nElectrical Characteristics of Single-Electron Transistors Made by Dielectrophoresis of Gold Nanoparticles with Different Diameters\t
\nTetsuya Urae 1, Tomoki Yagai 1, Kazuma Sekine 1, Masataka Moriya 1, Hiroshi Shimada 1, Ayumi Hirano-Iwata 2, Fumihiko Hirose 3, and Yoshinao Mizugaki 1, 1 Univ. of Electro-Communications, 2 Tohoku Univ., and 3 Yamagata Univ., Japan
\n<\/td>\n<\/tr>\n
P22-7\t\t
\nNegative Capacitance Field-Effect Transistor with Hetero-MetalGate to Suppress the Reverse Drain-Induced Barrier Lowering\t
\nJae Yeon Park, Shinhee Kim, Seungwon Go and Sangwan Kim, Ajou Univ., Korea
\n<\/td>		P22-8\t\t
\nTemperature Dependence of Power Generation Capacity of Cavity-free Planar Si Micro Thermoelectric Device\t
\nT. Hoshina 1, K. Abe 1, M. Tomita 1, T. Matsuki 1,2, S.Y.Y. Chung 1, H. Ikeda 3, and T. Watanabe 1, 1 Waseda Univ., 2 AIST and 3 Shizuoka Univ., Japan
\n<\/td>		P22-9\t\t
\nConsideration of Multiple 3D Bottleneck Barrier Heights on Vth Fluctuated by Ion Implantation to Source and Drain Extensions of SOI Tri-Gate FinFETs\t
\nToshiyuki Tsutsumi, Meiji Univ., Japan
\n<\/td>\n<\/tr>\n
P22-10\t\t
\nDesign of comb-shaped single-electron slime mold circuit and its applications to solving travelling salesman problem\t
\nTakuya Matsuoka and Takahide Oya, Yokohama Natl. Univ., Japan
\n<\/td>		P22-11\t\t
\nImprovement of noble metal-free ReRAM characteristics by insertion of thin SiOx layer at the ZrOx\/electrode interfaces\t
\nKeito Toyama, Ryusuke Akiyama, Kento Yuki and Shinya Aikawa, Kogakuin Univ., Japan
\n<\/td>		P22-12\t\t\t
\nEffect of Resistance of Wiring on Power Generation Performance in Planar Micro Thermoelectric Generation Module\t
\nA. Kurosaki 1, M. Tomita 1, K. Oda 1, K. Abe 1, T. Matsuki 1,2, S.Y.Y. Chung 1, T. Watanabe 1, 1 Waseda Univ. and 2 AIST, Japan
\n<\/td>\n<\/tr>\n
Poster Session (2-3: Nanofabrication)<\/td>\n<\/tr>\n
P23-1\t\t
\nStudy on Silicidation Reaction of Fe-NDs with SiH4\t
\nHiroshi Furuhata, Katsunori Makihara, Akio Ohta, Noriyuki Taoka, and Seiichi Miyazaki, Nagoya Univ., Japan
\n<\/td>		P23-2\t\t
\nVoice Data Augmentation for Classification Using Silver Selenide Nanowire Device Connecting to Neural Network Hardware\t
\nTakumi Kotooka, Yuichiro Tanaka, Hakaru Tamkoh, Yuki Usami, and Hirofumi Tanaka, Kyushu Inst. of Technol., Japan
\n<\/td>		P23-3\t\t
\nSynaptic emulation by Ag-Ag2S nanoparticles-based atomic switch\t
\nOradee Srikimkaew 1,2, Saman Azhari 1, Yuki Usami 1 and Hirofumi Tanaka 1,2, 1 Kyushu Inst. of Technol., Japan and 2 Suranaree Univ. of Technol., Thailand
\n<\/td>\n<\/tr>\n
P23-4\t\t
\nN-O Co-Doped Sb2Te3 Chalcogenide for High Performance Artificial Synaptic Device\t
\nYou Yin, Koji Niiyama and Takao Fujiwara, Gunma Univ., Japan
\n
\n<\/td>		P23-5\t\t
\nFabrication of TiO2\/Au core-shell array for visible light responsive photocatalysts\t
\nIsami Nakamura, Kaito Oshio and Kouichi Takase, Nihon Univ., Japan<\/td>		Withdrawn
\n
\nP23-6\t\t
\nMagnetic properties of TiO2 nanoparticles pulverlized by a ball mill\t
\nTaiga Yamanouchi, and Kouichi Takase, Nihon Univ., Japan
\n<\/td>\n<\/tr>\n
P23-7\t\t
\nFemtosecond laser direct writing of layered pure hydroxyapatite based on nanoparticle assembly\t
\nHiroaki Nishiyama, Shogo Nara and Feng Zhonggang, Yamagata Univ., Japan
\n
\n<\/td>		P23-8\t\t
\nFabrication of metal oxide 2D inverse opal film using ordered polystyrene spheres template\t
\nYusuke Kiyomi, Takeshi Ito, Shoso Shingubara and Tomohiro Shimizu, Kansai Univ., Japan<\/td>		P23-9\t\t
\nSupervised optimization of Boolean logic functions by in-materio reservoir computing using single-walled carbon nanotube\/porphyrin polyoxometalate random network\t
\nDeep Banerjee, Saman Azhari, Yuki Usami and Hirofumi Tanaka, Kyushu Inst. of Technol., Japan<\/td>\n<\/tr>\n
P23-10\t\t
\nDevelopment of Pd Nanospheres (Core)\/TiO2(Shell) Nanospheres Showing Surface Plasmon Resonance in a Near-Infrared Region for Photothermal Therapy\t
\nYutaro Hayakawa, Kosuke Sugawa, and Joe Otsuki, Nihon Univ., Japan
\n
\n
\n<\/td>		P23-11\t\t
\nThe critical role of single-walled carbon nanotubes in nonlinear spatiotemporal dynamics of carbon nanotubes-polyoxometalate network for reservoir computing\t
\nSaman Azhari, Deep Banerjee, Shuho Murazoe, Takumi Kotooka, Yuki Usami and Hirofumi Tanaka, Kyushu Inst. of Technol., Japan<\/td>		P23-12\t\t
\nDirect Electrospray Patterning Deposition for Flexible Organic Devices\t
\nAyaka Kanno, Takahisa Moriwaki, Hiroshi Yamauchi and Takashi Tadokoro, Tokyo Denki Univ., Japan<\/td>\n<\/tr>\n
P23-13\t\t
\nNonlinearity and memory function of in-materio reservoirs using Polyoxometalate \/Single-Walled Carbon Nanotube Complex Random Network\t
\nShuho Murazoe, Takumi Kotooka, Yuki Usami and Hirofumi Tanaka, Kyushu Inst. of Technol., Japan<\/td>		P23-14\t\t
\nPromotion of perpendicular growth of silicon nanowires by MACE-formed surface nanoholes
\nAkio Uesugi, Syusuke Nishiyori, Koji Sugano, and Yoshitada Isono, Kobe Univ., Japan
\n<\/td>		P23-15\t\t
\nRefractive Index Susceptibility of Mie Resonance-Based Extinction Band of PbS nanocrystals\t
\nMasato Furuya\uff0cKosuke Sugawa and Joe Otsuki, Nihon Univ., Japan<\/td>\n<\/tr>\n
Poster Session (2-4: Inorganic Nanomaterials )<\/td>\n<\/tr>\n
P24-1\t\t
\nResistive switching and neuromorphic function of Pt\/Ti0.96Co0.04O2-\u03b4\/Pt thin films by controlling interface state\t
\nT. Takada 1, Y. Yamaguchi 1, T. Tsuchiya 2 and T. Higuchi 1, 1 Tokyo Univ. of Sci. and 2 NIMS, Japan
\n
\n
\n
\n<\/td>		P24-2\t\t
\nCharge transfer and conduction type conversion in n-type SnO2 thin films by nitrogen annealing\t
\nKotaro Watanabe, Takuma Kawaguchi, Tomohiro Yamaguchi, Takeyoshi Onuma, Tohru Honda and Shinya Aikawa, Kogakuin Univ., Japan<\/td>		P24-3\t\t
\nUnderstanding opto-electrical emission and absorption behavior in corrosion by-product of zinc\t
\nM. Jeem 1, M. Fujioka 1, M. Ono 1,2, S. Watanabe 1 and J. Nishii 1, 1 Hokkaido Univ. and 2 AGC, Japan
\n<\/td>\n<\/tr>\n
P24-4\t\t
\nThe Fabrication of Mesoporous Single Crystal Ellipsoid TiO2 Nanoparticle with Enhanced Visible Light Photodegradation
\nEfficiency\tZhehan Yu, Shilei Zhu, Lihua Zhang and Seiichi Watanabe, Hokkaido Univ., Japan
\n<\/td>		P24-5\t\t
\nSWCNT freestanding films decorated with Sb2Te3 nanoparticles and electrodeposited Sb2Te3 layers for thermoelectric applications\t
\nR. Eguchi and M. Takashiri, Tokai Univ., Japan<\/td>		P24-6\t\t
\nStructural manipulation for solid electrolyte Na3OBr to improve ionic conductivity\t
\nHiroaki Asakawa, Wei Shi, Mariko Murayama and Xinwei Zhao, Tokyo Univ. of Sci., Japan<\/td>\n<\/tr>\n
P24-7\t\t
\nMetal decoration on bismuth telluride nanoplates using electroless plating\t
\nH. Yamazaki and M. Takashiri, Tokai Univ., Japan<\/td>		<\/td><\/td>\n<\/tr>\n
Poster Session (2-5: Organic Nanomaterials) <\/td>\n<\/tr>\n
P25-1\t\t
\nBlue emissive perovskite quantum dots with superior optical properties\t
\nNaoaki Oshita 1, Keisuke Kikuchi 1, Satoshi Asakura 1,2, Takayuki Chiba 1 and Akito Masuhara 1, 1 Yamagata Univ. and 2 Ise Chem., Japan
\n<\/td>		P25-2\t\t
\nPhotoinduced phase transition of compatible polymer blends of side-chain liquid crystalline polymers containing azobenzene mesogens\t
\nTakumi Kokubo 1, Tatsunaga Nakajima 1, Naoki Hida 2, Takahiro Seki 2 and Shusaku Nagano 1, 1 Rikkyo Univ. and 2 Nagoya Univ., Japan
\n<\/td>		P25-3\t\t
\nEffect of spacer length on induced SmE phase in side-chain liquid crystalline copolymers by random copolymerization\t
\nYuma Shibuya 1, Naoki Hida 2, Takahiro Seki 2 and Shusaku Nagano 1, 1 Rikkyo Univ. and 2 Nagoya Univ., Japan
\n<\/td>\n<\/tr>\n
P25-4\t\t
\nSynthesis and stabilization of high-performance perovskite quantum dots with novel cross-linkable ligands\t
\nTaisei Kimura 1, Ryohei Yamakado 1, Satoshi Asakura 1,2, Takayuki Chiba 1 and Akito Masuhara 1, 1 Yamagata Univ., and 2 Ise Chem., Japan
\n<\/td>		P25-5\t\t
\nAnisotropic SRG formation systems in monoaxially oriented liquid crystalline polymer films\t
\nReona Kanazu 1, Mitsuo Hara 1, Syusaku Nagano 2 and Takahiro Seki 1, 1 Nagoya Univ. and 2 Rikkyo Univ., Japan
\n<\/td>		P25-6\t\t
\nInduced highly ordered smectic phases in side-chain liquid crystal polysiloxanes with binary mesogen mixtures by copolymerization and blending.\t
\nNaoki Hida 1, Tatsunaga Nakajima 2 and Takumi Kokubo 2, Mitsuo Hara 1, Shusaku Nagano 2 and Takahiro Seki 1, 1 Nagoya Univ. and 2 Rikkyo Univ., Japan
\n<\/td>\n<\/tr>\n
P25-7\t\t
\nProton conductive side-chain liquid crystalline polymer system and photoalignment\t
\nKazuya Hirata 1, Wang Fangfang 2, Yuki Nagao 2, Takahiro Seki 3 and Shusaku Nagano 1, 1 Rikkyo Univ., 2 JAIST and 3 Nagoya Univ., Japan
\n<\/td>		P25-8\t\t
\nInduced smectic E phase in binary polymer blends of in side-chain liquid crystal polymers.\t
\nTatsunaga Nakajima 1, Naoki Hida 2, Takahiro Seki 2 and Shusaku Nagano 1, 1 Rikkyo Univ. and 2 Nagoya Univ., Japan
\n<\/td>		P25-9\t\t
\nOH- Conductivity and Water Uptake of Anion Exchange Ionomer\t
\nFangfang Wang, Dongjin Wang and Yuki Nagao, JAIST, Japan
\n<\/td>\n<\/tr>\n
P25-10\t\t
\nLyotropic liquid crystal property and organized structure in sulfonated polyimide thin films with oligooxyethylene side chains\t
\nYuze Yao 1, Miaomiao Liu 1, Hayato Watanabe 2, Mitsuo Hara 2, Shusaku Nagano 3 amd Yuki Nagao 1, 1 JAIST, 2 Nagoya Univ. and 3 Rikkyo Univ., Japan
\n<\/td>		<\/td><\/td>\n<\/tr>\n
Poster Session (2-6: NanoTool)<\/td>\n<\/tr>\n
P26-1\t\t
\nSpeed switching of gliding microtubule motility by an electron beam\t
\nHiroki Miyazako 1, Kai Uemura 1, Ryuzo Kawamura 2 and Takayuki Hoshino 1,3, 1 Univ. of Tokyo and 2 Saitama Univ. and 3 Hirosaki Univ., Japan
\n<\/td>		P26-2\t\t
\nAtomic resolution liquid cell scanning transmission electron microscopy\t
\nM. Takeguchi, X. Li and and K. Mitsuishi, NIMS, Japan
\n<\/td>		P26-3\t\t
\nEvaluation of Thermal Transport Properties of Single Crystal Silicon with Different Crystal Orientation by Nanoindentation Method\t
\nO. Norimasa, M. Hase, M. Hayamizu, H. Murotani and M.Takashiri, Tokai Univ., Japan
\n<\/td>\n<\/tr>\n
P26-4\t\t
\nWithdrawn<\/td>		P26-5\t\t
\nFabrication of an optomechanical resonator with a spiral bull\u2019s eye antenna for the measurement of light wavelength\t
\nReo Kometani, Penekwong Khemnat and Shin'ichi Warisawa, Univ. of Tokyo, Japan<\/td>		<\/td>\n<\/tr>\n
Poster Session (3: Nanoimprint, Hybrid-NIL, Biomimetics, and Functional Surfaces)<\/td>\n<\/tr>\n
P3-1\t\t
\nSmart design system for thermal nanoimprint process using machine learning
\nRyuhei Yamamura, Kai Kameyama, Hideki Tanabe, Sou Tsukamoto, Hiroaki Kawata, Masaaki Yasuda and Yoshihiko Hirai, Osaka Pref. Univ., Japan
\n<\/td>		P3-2\t\t
\nOptimization of resist drop layout in nanoimprint lithography process\t
\nYasutada Nakagawa 1, Takuya Kono 2 and Kazuhiro Takahata 2, 1 Toshiba and 2 KIOXIA, Jaapan
\n, Japan<\/td>		P3-3\t\t
\nLifetime Prediction of Release coating for UV-NIL using Line-patterned Silicon Mold\t
\nAtsuhiro Furuta and Jun Taiguchi, Tokyo Univ. of Sci., Japan
\n<\/td>\n<\/tr>\n
P3-4\t\t
\nStudy on Filling Process of Molecular Weight Dispersive Resin for fine Cavity \t
\nKeisuke Nakajima, Masaaki Yasuda, Yuya Miyashita, Ryuhei Yamamura and Yoshihiko Hirai, Osaka Pref. Univ., Japan
\n<\/td>		P3-5\t\t
\nThe Magnetic Molecularly Imprinted Polymers based on Screen-Printed Electrode for Albumin Protein Determination \t
\nPiyawan Leepheng, Dalawan Limthin, Korakot Onlaor, Benchapol Tunhoo, Darinee Phromyothin and Thutiyaporn Thiwawong, King Mongkut's Inst. of Technol. Ladkrabang, Thailand
\n<\/td>		P3-6\t\t
\nFabrication of the glass microstructures by a low energy consumption\t
\nYoshiyuki Doi, Yuji Hirai and Masatsugu Shimomura, Chitose Institute of Science and Technol., Japan
\n<\/td>\n<\/tr>\n
P3-7\t\t
\nEnhanced Sensitivity and Selectivity of Salbutamol Detection based on Reduced Graphene Oxide combined with Molecularly Imprinted Polymers (RGO\/MIP)\t
\nDalawan Limthin 1, Piyawan Leepheng 1, Korakot Onlaor 1, Benchapol Tunhoo 1, and Annop Klamchuen 2, Thutiyaporn Thiwawong 1 and Darinee Phromyothin 1, 1 King Mongkut's Institute of Technol. and 2 National Science and Technology Development Agency, Thailand
\n<\/td>		P3-8\t\t
\nThe adhesion of marine benthic diatoms on the surfaces with hexagonal packed micro dimple arrays\t
\nTaiki kishigami 1, Takayuki Murosaki 2, Yasuyuki Nogata 3, Masatsugu Shimomura 1 and Yuji Hirai 1, 1 Chitose Institute of Sci. and Technol., 2 Asahikawa Medical Univ. and 3 Central Research Institute of Electric Power, Japan<\/td>		<\/td>\n<\/tr>\n
Poster Session (4: BioMEMS, Lab on a Chip, and Nanobiotechnology)<\/td>\n<\/tr>\n
P4-1\t\t
\nProposal of chlorophyll concentration and a\/b ratio measurement method using a filter-free multiple-wavelength detection sensor
\nNobuhiro Watanabe, Yong-Joon Choi, Kazuhiro Takahashi, Seitaro Toda, Kotaro Takayama, Toshihiko Noda, and Kazuaki Sawada, Toyohashi Univ. of Technol., Japan
\n<\/td>		P4-2\t\t
\nIntracellular cargo delivery through electrochemical metal-organic hybrid nanogate\t
\nBowen Zhang 1, Dinuo Zheng 1, Kazuhiro Oyama 1, Tsutomu Mikawa 2, Takeo Miyake 1,3, 1 Waseda Univ., 2 RIKEN and 3 JST-PRESTO, Japan
\n<\/td>		P4-3\t\t
\nCell Separation and Concentration Microfluidic Chip for Allergy Diagnosis\t
\nShunsuke Shinuchi 1, Koichiro Kobayashi 2, Yuhki Yanase 3 and Kenji Sakamoto 1, 1 Kyushu Inst. of Technol., 2 Natl. Inst. of Technol. Oshima College and 3 Hirosima Univ., Japan
\n<\/td>\n<\/tr>\n
P4-4\t\t
\nOn-chip long-term perfusable microvascular network culture\t
\nMasataka Nakamura, Kotaro Nishikata, Yusuke Ninomiya and Nobuyuki Futai, Shibaura Inst. of Technol., Japan
\n<\/td>		P4-5\t\t
\nImproved Read-Out of an Automated Neuronal Cell Assay using Micro Patterned Micro Titer Plates fabricated by UV-NIL\t
\nM. Lohse 1, M.W. Thesen 1, A. Haase 2, M. Smolka 2, N. Briz Iceta 3, A. Ayerdi Izquierdo 3, I. Ramos 4, C. Salado 4 and A. Schleunitz 1, 1 micro resist technology GmbH, 2 Joanneum Research Materials, Austria, 3 TECNALIA and 4 Innoprot, Spain
\n<\/td>		P4-6\t\t
\nQuantitative Evaluation of a Single Exosome on a Plasmonic Chip with Fluorescence Microscope under the Transmitted-Light\t
\nK. Fukutomi, E. Fujimoto and K. Tawa, Kwansei Gakuin Univ., Japan
\n<\/td>\n<\/tr>\n
P4-7\t\t
\nOptimization of the spinning condition for simultaneously determination of raw milk components using lab-on-a-disc\t
\nP. Chamnan 1, M. Yingkajorn 1, P. Saengdee 2, W. Sripumkhai 2, P. Pattamang 2, N. Ranron 2, W. Jeamsaksiri 2, N. Atthi 2, K. Vongkamjan 1,3, 1
\nPrince of Songkla Univ., Thailand, 2 NECTEC and 3 Kasetsart Univ., Thailand\"<\/td>		<\/td><\/td>\n<\/tr>\n
Poster Session (5: Microsystem Technology and MEMS)<\/td>\n<\/tr>\n
P5-1\t\t
\nCharacteristics of Ni-Nb-Zr thin film amorphous alloy diaphragms annealed below crystallization temperature\t
\nF. Haga 1, T. Yamazaki 1, C. Oka 1, S. Hata 1, Y. Hoshino 2 and J. Sakurai 1, 1 Nagoya Univ. and 2 MIRISE Technologies, Japan
\n<\/td>		P5-2\t\t
\nCarbon nanomaterials integrated with silicone substrate for stretchable strain sensor applications
\nZheng-Yan Lei 1, Hsin-Jou Wang 1, Cheng-Chun Huang 2, Ching-Yuan Su 2, Ching-Liang Dai 1 and Yao-Chuan Tsai 1, 1 Natl. Chung Hsing Univ. and 2 Natl. Central Univ., Taiwan
\n<\/td>		P5-3\t\t
\nFabrication and characterization of coupled silicon phononic resonators with piezoelectric transducers\t
\nM. Kurosu, D. Hatanaka, H. Okamoto and H. Yamaguchi, NTT, Japan
\n<\/td>\n<\/tr>\n
P5-4\t\t
\nBroadband stop filters using H-shaped metamaterial at the THz region \t
\nYing Huang, Taiyu Okatani and Yoshiaki Kanamori, Tohoku Univ., Japan
\n<\/td>		P5-5\t\t
\nObservation of materials under the load by in-situ tensile test\t
\nFuyu Shimada\uff0cMasashi Nakatani\uff0cMie Kawabata\uff0cKei Ameyama and Taeko Ando, Ritsumeikan Univ., Japan
\n<\/td>		P5-6\t\t
\nSmoothing of silicon micropore X-ray optics by thermal annealing\t
\nAoto Fukushima 1, Yuichiro Ezoe 1, Kumi Ishikawa 1, Daiki Ishi 1, Sae Sakuda 1, Tomoki Uchino 1, Ayata Inagaki 1, Yoko Ueda 1, Hiromi Morishita 1, Luna Sekiguchi 1, Takatoshi Murakawa 1, Yukine Tsuji 1, Masaki Numazawa 2, Kazuhisa Mitsuda 3 and Yoshiaki Kanamori 4, 1 Tokyo Metropolitan Univ., 2 RIKEN, 3 Natl. Astronomical Observatory of Japan and 4 Tohoku Univ., Japan
\n<\/td>\n<\/tr>\n
P5-7\t\t
\nNon-invasive heart rate measurement system using Laser doppler flowmetry with body motion artifact noise reduction algorithm for Husbandry training\t
\nTakumi Hiejima 1, Hirofumi Nogami 1, Aya Saito 2, Kazuyuki Ban 3, Ryo Takigawa 1and Jumpei Arata 1, 1 Kyushu Univ., 2 Omuta City Zoo and 3 Toyohashi Zoo and Botanical Park, Japan
\n<\/td>		P5-8\t\t
\nEffect of B-doped Al\/Ni multilayer film on cracking NiAl layer after reactive bonding\t
\nKenta Kodama and Takahiro Namazu, Kyoto Univ. of Advanced Sci., Japan
\n<\/td>		P5-9\t\t
\nElectron Beam Induced Silicon Quantum Dots for Strength Control of Silicon Oxide Film\t
\nShingo Kammachi and Takahiro Namazu, Kyoto Univ. of Advanced Sci., Japan
\n<\/td>\n<\/tr>\n
P5-10\t\t
\nPressure-Controlled Ultrasound Probe for Reliable Imaging in Breast Cancer Diagnosis\t
\nYukina Matsumoto, Ayu Katsumura and Norihisa Miki, Keio Univ., Japan
\n<\/td>		P5-11\t\t
\nPOLYCRYSTALLINE-SILICON BASED DOUBLE-GATE ION-SENSITIVE FIELDEFFECT TRANSISTORS USING APTES\/SiO2 STACKED SENSING MEMBRANE\t
\nJun-Rong Chen 1, Henry J.H. Chen 1, Shin-Lun Tseng 1and Sun-Zen Chen 2, 1 Natl. Chi Nan Univ. and 2 Natl. Tsing Hua Univ., Taiwan
\n<\/td>		P5-12\t\t
\nConsideration of the mechanism of single-layered Cu2O nanospheres bonded on metal substrates in irradiating near-infrared femtosecond laser pulses\t
\nShohei Murayama 1, Kien Vu Trung Nguyen 1, Masateru Anzai 1, Hideyuki Magara 2, Takahiro Nakamura 2 and Mizue Mizoshiri 1, 1 Nagaoka Univ. of Technol. and 2 Tohoku Univ., Japan<\/td>\n<\/tr>\n
P5-13\t\t
\nImproved MEMS-based hydrogen sensor\t
\nMaeum Han 1, Young Sam Kim 1,2, Yijun. Yang 2, H.K. An 2, S.H. Kong 1 and Daewoong Jung 2, 1 Kyungpook Natl. Univ. and 2 KITECH., Korea
\n<\/td>		P5-14\t\t
\nEvaluation of thermal effusivity of intermetallic compounds by modulated thermoreflectance method\t
\nFumiya Nakamura, Taishi Murakami and Shugo Miyake, Kobe City College of Technol., Japan
\n<\/td>		P5-15\t\t
\nAcceleration measurement in dental implants\t
\nHirofumi Nogami, Takumi Hiejima, Ryo Takigawa and Yasuyuki Matsushita, Kyushu Univ., Japan
\n
\n<\/td>\n<\/tr>\n
P5-16\t\t
\nDEVELOPMENT OF MICROFLUIDIC-BASED TASTE SENSOR WITH LIPID POLYMER MEMBRANE \t
\nYuma Kurihara 1, Ryo Takigawa 2, Fumihiro Sassa 2 and Yusuke Tahara 1, 1 Shinshu Univ. and 2 Kyushu Univ., Japan
\n<\/td>		P5-17\t\t
\nSurface activated bonding of Au thin microbumps using ultra-violet treatment\t
\nToshiki Maeakawa 1, Kaname Watanabe 1, Hirofumi Nogami 1, Yuichiro Kurokawa 1, Yusuke Tahara 2 and Ryo Takigawa 1, 1 Kyushu Univ. and 2 Shinshu Univ., Japan
\n<\/td>		P5-18\t\t
\nContinuous Size Classification Device for Marine Microplastics by Pinched Flow Fractionation\t
\nKentaro Shimomoto and Sumito Nagasawa, Shibaura Inst. of Technol., Japan<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/span>
\nOctober 27, Online (Plenary, Symposium, Regular Session)<\/span><\/span>
\n\n\n\n\n\t\n\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t
Room A<\/th>Room B<\/th>Room C<\/th>\n<\/tr>\n<\/thead>\n
27A-1-0
\n10:00
\nOpening Remark
\nTakahiro Kozawa, Osaka Univ., Japan<\/td>		<\/td><\/td>\n<\/tr>\n
27A-1-1
\n10:10
\nNANOPORES AND NANOGAPS FOR SENSING SINGLE BIOMOLECULES (Plenary)\t
\nMasateru Taniguchi, Osaka Univ., Japan <\/td>		<\/td><\/td>\n<\/tr>\n
27A-1-2\t\t
\n10:50
\nPatterning at the atomic scale, can EUV get us there? (Pleanry)\t
\nPatrick Naulleau, Lawrence Berkeley National Laboratory
\n<\/td>		<\/td><\/td>\n<\/tr>\n
27A-1-3
\n11:30
\nComputational Lithography: Accelerating the Future (Plenary)\t
\nVivek Singh, NVIDIA, USA
\n<\/td>		<\/td><\/td>\n<\/tr>\n
Lunch Time<\/td>\n<\/tr>\n
27A-2: Symp. A. EUVL Stochastics Symposium: Overcoming the Challenge of Stochastics for High Resolution EUV Lithography I
\n13:30-15:15, October 27, 2021
\nChairs:
\nShinji Okazaki (Alitecs)
\nTomoki Nagai (JSR)
\n<\/td>		27B-2: Nanofabrication I \t
\n13:30-14:40, October 27, 2021
\nChairs:\t
\nKouichi Takase (Nihon Univ.)
\nTomohiro Shimizu (Kansai Univ.)
\n<\/td>		27C-2: CNT & TMDC I\t
\n13:30-14:50, October 27, 2021\t
\nChairs:
\nYasumitsu Miyata (Tokyo Metropolitan Univ.)
\nRyota Negishi (Toyo Univ.)
\n<\/td>\n<\/tr>\n
27A-2-1\t
\n13:30\t
\nEUVL Stochastics Symposium (Invited)\t
\nTakahiro Kozawa, Osaka Univ., Japan
\n<\/td>		27B-2-1\t
\n13:30\t
\nDevelopment of Digital Type CMOS-MEMS Cointegrated
\nPressure Sensor Using Cost-Effective Minimal Fab Tools
\n (Invited)\t
\nYongxun Liu 1, I. Akita 1, T. Matsukawa 1, H. Tanaka 1,
\nK. Koga 2, K. Nemoto 1, S. Khumpuang 1,2, M. Nagao 1,
\nY. Morita 1, and S. Hara 1, 2, 1 AIST and MINIMAL, Japan
\n<\/td>		27C-2-1\t
\n13:30\t
\nTime-domain thermoreflectance study on the correlation
\nbetween heat and charge carrier flows via vertical
\nelectrolyte-gating device\t
\nKan Ueji 1, Nobuhiro Muto 1, Yuya Matsuoka 1, Yota Ichinose 1,
\nYohei Yomogida 1, Takashi Yagi 2, Jana Zaumseil 3,
\nKazuhiro Yanagi 1, 1 Tokyo Metropolitan Univ., 2 AIST, Japan
\nand 3 Univ. Heidelberg, Germany
\n
\n<\/td>\n<\/tr>\n
27A-2-2\t
\n13:45\t
\nDevelopment status of EUV Chemically Amplified Resist (Invited)\t
\nKazuishi Tanno, Yuki Fukumura, Tatsuya Fujii, Kenta Suzuki, Yasuhiro Yoshii, Tasuku Matsumiya, Takuya Ikeda, Yoshitaka Komuro and Shinichi Hidesaka, Tokyo Ohka Kogyo, Japan
\n
\n<\/td>		27B-2-2\t
\n14:00\t
\nTransmission color sheet using 2D plasmonic metasurface
\nembedded in elastomer nanosheet\t
\nTay Shan Wei 1, Toshinori Fujie 2, Kazuaki Sawada 1, Kazuhiro
\nTakahashi 1, 1 Toyohashi Univ. of Technol. and 2 Tokyo Tech., Japan
\n<\/td>		27C-2-2\t
\n13:50\t
\nHall effect in random networks of single-wall carbon
\nnanotubes\t
\nYohei Yomogida 1, Kanako Horiuchi 1, Ryotaro Okada 1,
\nHideki Kawai 1, Yota Ichinose 1, Hiroyuki Nishidome 1,
\nKan Ueji 1, Natsumi Komatsu 2, Weilu Gao 3, Junichiro Kono 2
\nand Kazuhiro Yanag 1, 1 Tokyo Metropolitan Univ., Japan,
\n2 Rice Univ. and 3 Univ. of Utah, USA
\n<\/td>\n<\/tr>\n
27A-2-3\t
\n14:15\t
\nThe status of stochastic issues - Photon stochastic and Chemical stochastic - (Invited)\t
\nToru Fujimori, FUJIFILM Corporation, Japan
\n<\/td>		27B-2-3\t
\n14:20\t
\nThinning of silicon nitride films for in situ environmental cell by
\ngas cluster ion beam\t
\nMasaya Takeuchi, Reki Fujiwara, and Noriaki Toyoda,
\nUniv. of Hyogo, Japan
\n<\/td>		27C-2-3\t
\n14:10\t
\nAir-stable, efficient n-type doping of MoS2 by salt\u2013crown
\nether treatment\t
\nHiroto Ogura 1, Masahiko Kaneda 1, Yusuke Nakanishi 1,
\nYoshiyuki Nonoguchi 2, Jiang Pu 3, Mari Ohfuchi 4,
\nToshifumi Irisawa 5, Hong En Lim 1, Takahiko Endo 1,
\nKazuhiro Yanagi 1, Taishi Takenobu 3 and Yasumitsu Miyata 1,
\n1 Tokyo Metropolitan Univ., 2 Kyoto Inst. of Technol.,
\n3 Nagoya Univ., 4 Fujitsu and 5 AIST, Japan
\n<\/td>\n<\/tr>\n
27A-2-4\t
\n14:45\t
\nThe study of chain scission type photoresist for EUV lithography (Invited)
\nH. Matsumoto 1, M. Hoshino 1, A. Shirotori 1,2, D. De Simone 2 and G. Vandenberghe 2, 1 ZEON, Japan and 2 IMEC, Belgium
\n
\n<\/td>		27C-2-4\t
\n14:30\t
\nImproved method for determining layer number of two-dimensional materials using optical microscopy\t
\nMiki Miyazaki, Akinobu Kanda and Hikari Tomori, Univ. of Tsukuba, Japan
\n<\/td>\n<\/tr>\n
27A-3: Symp. A. EUVL Stochastics Symposium: Overcoming the Challenge of Stochastics for High Resolution EUV Lithography II\t
\n15:45-17:15, October 27, 2021
\nChairs:
\nShinji Okazaki (Alitecs)
\nTomoki Nagai (JSR)
\n<\/td>		27B-3: Nanofabrication II\t
\n15:10-16:10, October 27\t
\nChairs:
\nRyu Hasunuma (Univ. of Tsukuba)
\nTakeru Okada (Tohoku Univ.)
\n<\/td>		27C-3:Symp. B. Forefront of low-dimensional nanomaterials for
\nfuture applications\t
\n15:30-18:00, October 27, 2021
\nChairs:\t
\nDaiyu Kondo (Fujitsu)
\nAtsushi Ando (AIST)
\n<\/td>\n<\/tr>\n
27A-3-1\t
\n15:45\t
\nStudy on beam-induced transient reaction process of carboxylic acids used as ligands of metal oxide nanocluster resists (Invited)\t
\nYusa Muroya, Osaka University, Japan
\n<\/td>		27B-3-1\t
\n15:10\t
\nIn-materio voice classification based on self-doped polyaniline
\nby binarized convolutional neural network\t
\nYuki Usami 1,2, Yuichiro Tanaka 1, Hakaru Tamukoh 1, Takuya Matsumoto 2, Wilfred G. van der Wiel 3 and Hirofumi Tanaka 1,2, 1 Kyushu Inst. of Technol., 2 Osaka Univ., Japan and 3 Univ. of Twente, The Netherlands<\/td>		27C-3-1\t
\n15:30\t
\nImpurity control of hexagonal Boron Nitride Crystals obtained by flux growth process (Invited)
\nTakashi Taniguchi, NIMS, Japan
\n<\/td>\n<\/tr>\n
27A-3-3\t
\n16:15\t
\nFundamental Study of the Origin of the Stochastics in EUV Resist (Invited)\t
\nTakeo Watanabe, Testuo Harada, and Shinji Yamawaka, Univ. of Hyogo, Japan
\n
\n<\/td>		27B-3-2\t
\n15:30\t
\nReservoir Computing Hardware-based Ag\/Ag2S Core-shell
\nNanoparticles for Supervised Learning\t
\nDang Thien Tan 1,2, Banerjee Deep 1, Yuki Usami 1 and
\nHirofumi Tanaka 1,2, 1 Kyushu Inst. of Technol., Japan and
\n2 Ho Chi Minh Univ. of Technol., Vietnam
\n<\/td>		27C-3-2\t
\n16:00\t
\nRoom temperature in-plane ferroelectricity in SnS (Invited)\t
\nKosuke Nagashio, Univ. of Tokyo, Japan
\n
\n<\/td>\n<\/tr>\n
27A-3-4\t
\n16:45
\nThe Lithography Roadmap and the Impact of Stochastics (Invited)\t
\nMark Neisser, Tan Kah Kee Innovation Laboratory, China
\n<\/td>		27B-3-3\t
\n15:50\t
\nDemonstration of deep learning with molecular-gap atomic
\nswitches using a sulfurized Ag active electrode\t
\nYuta Iwakiri and Tsuyoshi Hasegawa, Waseda Univ., Japan
\n<\/td>		27C-3-3\t
\n16:30\t
\nC60-Nanowire Two-State Resistance Switching (Invited)\t
\nKazuhito Tsukagoshi 1,2, Hiroshi Suga 1,2 and Yukiya Umeta 1,2, 1 NIMS and 2 Chiba Inst. of Technol., Japan
\n
\n<\/td>\n<\/tr>\n
<\/td><\/td>27C-3-4\t
\n17:00\t
\nCARBON NANOTUBE TECHNOLOGIES FOR FLEXIBLE ELECTRONICS (Invited)\t
\nYutaka Ohno, Nagoya Univ., Jpaan
\n<\/td>\n<\/tr>\n
<\/td><\/td>27C-3-5\t
\n17:30\t
\nOn the Fundamental Mechanisms that underpin Process Technology for Atomically Thin 2D Films (Invited)\t
\nStephan Hofmann, Univ. of Cambridge, UK
\n<\/td>\n<\/tr>\n
27A-4: Symp. A. EUVL Stochastics Symposium: Overcoming the Challenge of Stochastics for High Resolution EUV Lithography III\t
\n18:30-20:00, October 27, 2021\t
\nChairs:
\nSeiji Nagahara (Tokyo Electron)
\nTomoki Nagai (JSR)
\n<\/td>		27B-4: Nanofabrication III
\n16:10-17:10, October 27\t
\nChairs:
\nTsuyoshi Hatano (Nihon Univ.)
\nWataru Mizubayashi (AIST)<\/td>		<\/td>\n<\/tr>\n
27A-4-1\t
\n18:30\t\t
\nHigh-NA EUV Imaging and stochastics: From system introduction towards low-k1 extension (Invited)\t
\nEelco van Setten, Jan van Schoot, Ruben Maas, Claire van Lare, Friso Wittebrood, Gijsbert Rispens, Gerardo Bottiglieri, John McNamara, Jo Finders, ASML Netherlands, The Netherlands
\n<\/td>		27B-4-1\t
\n16:10\t\t
\nCharacterization of Electronic Charged States of High Density Self-aligned Si-based Quantum Dots Evaluated with AFM\/Kelvin Probe Technique\t
\nYuki Imai, Katsunori Makihara, Akio Ohta, Noriyuki Taoka, and Seiichi Miyazaki, Nagoya Univ., Japan
\n<\/td>		<\/td>\n<\/tr>\n
27A-4-2\t
\n19:00
\nMaterials for Extreme Ultraviolet Lithography: State of the Art and Challenges towards High-NA (Invited)
\nDanilo De Simone, Imec, Belgium
\n<\/td>		27B-4-2\t
\n16:30\t\t
\nOrdered Nanodot Array Fabrication for quantum Dot
\nSolar Cell\t
\nYou Yin, Keisuke Yanagisawa, Takashi Akahane and
\nRento Mayuzumi, Gunma Univ., Japan
\n<\/td>		<\/td>\n<\/tr>\n
27A-4-3
\n19:30
\nStochastic challenges for the ultimate resolution in photolithography (Invited)\t
\nYasin Ekinci, Paul Scherrer Inst., Switzerland
\n<\/td>		27B-4-3\t
\n16:50\t\t
\nImproved thermal treatment of polydimethylsiloxane (PDMS)
\nfor double casting of microstructures
\nShichen Li, Son Van Nguyen, and Bong-Kee Lee,
\nChonnam Natl Univ., Korea
\n<\/td>		<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
\nOctober 28, Online (Symposium, Regular Session)<\/span><\/span>
\n\n\n\n\n\t\n\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t
Room A<\/th>Room B<\/th>Room C<\/th>\n<\/tr>\n<\/thead>\n
28A-1: Symp. A. EUVL Stochastics Symposium: Overcoming the Challenge of Stochastics for High Resolution EUV Lithography IV\t
\n9:00-10:30, October 28, 2021\t
\nChairs:
\nTakahiro Kozawa (Osaka Univ.)
\nSeiji Nagahara (Tokyo Electron)<\/td>		28B-1: TMDC II\t
\n9:00-10:10, October 28
\nChairs:\t
\nHaruka Omachi (Nagoya Univ.)
\nTaishi Takenobu (Nagoya Univ.)
\n<\/td>		<\/td>\n<\/tr>\n
28A-1-1\t
\n9:00\t
\nTraversing from 0.33 NA to 0.55 NA EUV lithography: a EUV resist perspective (Invited)\t
\nAnna Lio, Intel, USA
\n<\/td>		28B-1-1\t
\n9:00\t
\nEvolutions of the Dirac Fermions in Monatomic Layers (Invited)\t
\nIwao Matsuda, Univ. of Tokyo, Japan
\n
\n<\/td>		<\/td>\n<\/tr>\n
28A-1-2\t
\n9:30\t
\nEUVL Adoption to 7nm Versal Production (Invited)
\nToshiyuki Hisamura, Xilinx, USA
\n<\/td>		28B-1-2\t
\n9:30\t
\nImproved synthesis of WS2 nanotubes with relatively small diameters by tuning sulfurization timing and reaction temperature\t
\nMd. Ashiqur Rahman 1,2, Yohei Yomogida 1, Mai Nagano 1, Ryoga Tanaka 1, Yasumitsu Miyata 1, and Kazuhiro Yanagi 1, Tokyo Metropolitan Univ., Japan and 2 Comilla Univ., Bangladesh
\n<\/td>		<\/td>\n<\/tr>\n
28A-1-3\t
\n10:00\t
\nFast quantification of EUV stochastic defect probabilities using Gaussian Random Field models (Invited)\t
\nAzat Latypov 1, Chih-I Wei 2, Peter De Bisschop 3, Gurdaman Khaira 1 and Germain Fenger 1, 1Siemens Digital Industries Software, USA, 2 Siemens Digital Industries Software and 3 IMEC, Belgium
\n<\/td>		28B-1-3\t
\n9:50\t
\nInfluence of Intercalation on the Thermal Conductance on Artificially Stacked MoS2\t
\nWenyu Yuan\u30001, Kan Ueji 1, Takashi Yagi 2, Takahiko Endo 1, Hong En Lim 1, Yasumitsu Miyata 1, Yohei Yomogida 1, Kazuhiro Yanagi 1, 1 Tokyo Metropolitan Univ. and 2 AIST, Japan
\n<\/td>		<\/td>\n<\/tr>\n
28A-2: Symp. A. EUVL Stochastics Symposium: Overcoming the Challenge of Stochastics for High Resolution EUV Lithography V\t
\n11:00-12:30, October 28, 2021\t
\nChairs:
\nTakahiro Kozawa (Osaka Univ.)
\nSeiji Nagahara (Tokyo Electron)
\n<\/td>		28B-2: Graphene, Nanocarbon\t
\n10:30-11:30, October 28, 2021\t
\nChairs:
\nSusumu Okada (Univ. of Tsukuba)
\nMasaki Tanemura (Nagoya Inst. of Technol.)
\n<\/td>		28C-2: BioMEMS, Lab on a Chip, and Nanobiotechnolog I\t
\n11:00-12:00, October 28, 2021\t
\nShinya Kumagai (Meijo Univ.)
\n<\/td>\n<\/tr>\n
28A-2-1\t
\n11:00\t
\nApplying Stochastic Simulation to Study Defect Formation in EUV Photoresists (Invited)\t
\nLawrence S. Melvin III 1, Ulrich Welling 2, Yudhishthir Kandel 1, Zachary A. Levinson 1, Hironobu Taoka 3, Hans-Jurgen Stock 2, Wolfgang Demmerle 2, 1 Synopsys, USA, 2 Synopsys, Germany and 3 Nihon Synopsys, Japan
\n
\n
\n<\/td>		28B-2-1\t
\n10:30\t
\nOxygen Resistance Enhancement of Graphene-Oxide-Semiconductor Planar-Type Electron Sources Using Hexagonal Boron Nitride \t
\nNaoyuki Matsumoto 1,2, Yoshinori Takao 1, Masayoshi Nagao 2 and Katsuhisa Murakami 2, 1 Yokohama Natl. Univ. and 2 AIST, Japan
\n<\/td>		28C-2-1\t
\n11:00\t
\nDetection system of bacteria, Legionella by photogate type
\noptical sensor\t
\nYuto Honda 1, Yong-Joon Choi 1, Kensuke Murakami 1,
\nKazuhiro Takahashi 1, Toshihiko Noda 1, Kazuaki Sawada 1,
\nHiromu Ishii 1, Katsuyuki Machida 2, Hiroyuki Ito 2,
\nSatoshi Miyahara 3, Yasuhiko Nikaido 3 and Mitsumasa Saito 3,
\n1 Toyohashi Univ. of Technol., 2 Tokyo Tech and 3 Medical Univ.
\nof Occupational and Environmental Health, Japan
\n<\/td>\n<\/tr>\n
28A-2-2\t
\n11:30\t
\nDEFECT REDUCTION IN EUV LITHOGRAPHY MATERIALS USING HIGH PERFORMANCE FILTRATION (Invited)\t
\nR. Beera 1, L.D' Urzo 2, T. Umeda 3, T. Mizuno 3, A. Singh 1, R. Shick 1, P. Foubert 4 and W. Drent 4, 1 Pall, USA, 2 Pall, Belgium, 3 Nihon Pall, Japan and 4 imec, Belgium
\n
\n<\/td>		28B-2-2\t
\n10:50\t
\nFlexible piezoresistive stretchable strain sensor based on laser-induced graphene \t
\nYu-Hsin Yen 1, Chao-Shin Hsu 1, Cheng-Chun Huang 2, Ching-Yuan Su 2 and Yao-Chuan Tsai 1, 1 Natl. Chung Hsing Univ. and 2 Natl. Central Univ., Taiwan
\n<\/td>		28C-2-2\t
\n11:20\t
\nHighly sensitive passive glucose sensor based on parity-time (PT) symmetric resonators\t
\nT. Takamatsu 1, Y. Shijie 1, T. Xiao 1, L. Hu 1, Y. Cui 1, Q. Zhang 1 and T. Miyake 1,2, 1 Waseda Univ. and 2 JST-PRESTO, Japan
\n<\/td>\n<\/tr>\n
28A-2-3\t
\n12:00\t
\nAddressing the Defectivity Challenges of EUV Lithography (Invited)\t
\nDavid Medeiros, Entegris, USA
\n<\/td>		28B-2-3\t
\n11:10\t
\nCarbon Onion Stored Mechanical Energy Response to Space Radiation \t
\nK. Xie\u30001, V.M. Ayres 1, H.C. Shaw 2 and A. Hirata 3, 1 Michigan State Univ., 2 NASA Goddard Space, USA and 3 Tokyo Tech., Japan
\n<\/td>		28C-2-3\t
\n11:40\t
\nWireless electrochromic soft contact lenses controlled by a dual-band wireless power transfer system
\nLunjie Hu, Taiki Takamatsu, Lu Chen, Te Xiao and Takeo Miyake, Waseda Univ., Japan
\n
\n<\/td>\n<\/tr>\n
Lunch Time<\/td>\n<\/tr>\n
28A-3: Symp. A. EUVL Stochastics Symposium: Overcoming the Challenge of Stochastics for High Resolution EUV Lithography VI\t
\n13:30-15:00, October 28, 2021\t
\nChairs:
\nTakahiro Kozawa (Osaka Univ.)
\nShinji Okazaki (Alitecs)<\/td>		28B-3: Nanowires\/Quantum Dots\t
\n13:30-15:00, October 28, 2021\t
\nChair:
\nShinjiro Hara (Hokkaido Univ.)
\n<\/td>		28C-3: BioMEMS, Lab on a Chip, and Nanobiotechnolog II\t
\n13:30-15:00, October 28, 2021\t
\nChair:
\nAtsushi Miura (Hokkaido Univ.)
\n<\/td>\n<\/tr>\n
28A-3-1\t
\n13:30\t
\nUpdate of >300W High Power LPP-EUV Source Challenge IV for Semiconductor HVM (Invited)\t
\nHakaru Mizoguchi, Hiroaki Tomuro, Yuichi Nishimura, Hirokazu Hosoda, Tamotsu Abe, Hiroshi Tanaka, Yukio Watanabe, Yutaka Shiraishi, Tatsuya Yanagida, Georg Soumagne, Fumio
\nIwamoto, Shinji Nagai, Yoshifumi Ueno, Takashi Suganuma, Gouta Niimi, Takayuki Yabu, Tsuyoshi Yamada, Hiroaki Nakarai and Takashi Saitou, Gigaphoton, Japan<\/td>		28B-3-1\t
\n13:30\t
\nMetal Oxide Nanostructures and Nanodevices for Artificial Odor\/Smell Integrated Systems (Invited) \t
\nTakeshi Yanagida, Univ. of Tokyo, Japan
\n<\/td>		27C-3-1\t
\n13:30\t
\nElectrochemical control of enzyme cascade reactions with a protonic biotransducer
\nYukun Chen 1, Mingyin Cui 1, Bingfu Liu 1, Noriyo Mitome 2 and Takeo Miyake 1,3, 1 Waseda Univ., 2 Tokoha Univ. and 3 JST-PRESTO, Japan
\n<\/td>\n<\/tr>\n
28A-3-2\t
\n14:00\t
\nEUV resist material and process optimization for reducing stochastics effects in EUV lithography (Invited)\t
\nSeiji Nagahara, Tokyo Electron, Japan
\n<\/td>		28B-3-2\t
\n14:00\t
\nFormation and optical characteristics of GaN:Eu\/GaN core-shell nanowires grown by organometallic vapor phase epitaxy\t
\nT. Otabara, J. Tatebayashi, S. Hasegawa, S. Ichikawa, M. Ashida, and Y. Fujiwara, Osaka Univ., Japan
\n<\/td>		28C-3-2\t
\n13:50\t
\nBottom-up fabrication of bicontinuously structured and
\ndiffusion-functionalized microneedles as a platform for
\nsustained drug delivery applications\t
\nTakuya Miyazaki 1,2, Kevin Barthelmes 1,2, Kiyoshi Ikehara 1,
\nYuji Miyahara 2 and Akira Matsumoto 1,2, 1 KISTEC and
\n2 Tokyo Medical and Dental Univ., Japan
\n<\/td>\n<\/tr>\n
28A-3-3\t
\n14:30\t
\nA study of the effect of EUV masks on the EUVL stochastics (Invited)\t
\nYasutaka Morikawa, DNP, Japan<\/td>		28B-3-3\t
\n14:20\t
\nAlGaOx Nanowires Phosphor Obtained by Wet Oxidation of AlGaAs Providing a White Light Under UV-LED Illumination\t
\nTakeru Tanigawa, Rikuo Tsutsumi and Fumitaro Ishikawa, Ehime Univ., Japan
\n<\/td>		28C-3-3\t
\n14:10\t
\nDevelopment of shape prediction model for nanoparticles in liquid based on deep learning analysis of Brownian motion\t
\nHiroaki Fukuda 1, Hiromi Kuramochi 1, Hiroaki Takehara 1,2, and Takanori Ichiki 1,2, 1 Univ. of Tokyo and 2 iCONM, Japan
\n<\/td>\n<\/tr>\n
<\/td>28B-3-4\t
\n14:40\t
\nNear-infrared dual-wavelength surface-emitting light source using a vertical cavity resonating with discrete emission wavelengths of InAs quantum dots\t
\nJ. Oshima 1, N. Ozaki 1, H. Oda 2, E. Watanabe 3, H. Ohsato 3, N. Ikeda 3, Y. Sugimoto 3 and R. Hogg 4, 1 Wakayama Univ., 2 CIST, 3 NIMS, Japan and 4 Univ. Glasgow, UK
\n
\n<\/td>		28C-3-4\t
\n14:30\t
\nIn-Mold Flexible Hybrid Electronics (FHE) Based on Advanced Wafer-Level Packaging with Chiplets (Invited)\t
\nTakafumi Fukushima, Tohoku Univ., Japan<\/td>\n<\/tr>\n
28A-4-1: Symp. A. EUVL Stochastics Symposium: Overcoming the Challenge of Stochastics for High Resolution EUV Lithography VII\t
\n15:15-16:45, October 28, 2021\t
\nSeiji Nagahara (Tokyo Electron)
\nShinji Okazaki (Alitecs)
\n<\/td>		28B-4: Nanoelectronics\t
\n15:30-17:00, October 28\t
\nChair:
\nYuuichiro Mitani (Tokyo City Univ.)
\n<\/td>		28C-4: Symp. C. Biological Phenomena and Functions within Micro- and Nanospace\t
\n16:00-18:00, October 28\t
\nChairs;
\nKazuaki Furukawa (Meisei Univ.)
\nAkihide Hibara (Tohoku Univ.)
\n<\/td>\n<\/tr>\n
28-A4\t
\n15:15\t
\nPanel Discussion
\nSeiji Nagahara, Tokyo Electron (TEL), Japan,
\nAnna Lio, Intel, USA,
\nEelco van Setten, ASML, Netherlands
\nDanilo De Simone, imec, Belgium
\nPatrick Naulleau, Lawrence Berkeley National Lab., USA
\nTakeo Watanabe, Univ. of Hyogo, Japan
\nHarry Levinson, HJL Lithography, USA<\/td>		28B-4-1\t
\n15:30\t
\nUltra-sharp three-terminal switch using nano-scale phase transition material (Invited)\t
\nTakeaki Yajima, Kyushu Univ., Japan
\n<\/td>		28C-4-1\t
\n16:00\t
\nMICROFLUIDIC DEVICES FOR CLINICAL APPLICATIONS (Invited)\t
\nManabu Tokeshi 1,2, 1 Hokkaido Univ. and 2 Nagoya Univ., Japan
\n<\/td>\n<\/tr>\n
<\/td>28B-4-2\t
\n16:00\t
\nDual switching operation of vertical gate-all-around transistor using InGaAs\/GaSb core-shell nanowires on Si\t
\nHironori Gamo, Junichi Motohisa and Katsuhiro Tomioka, Hokkaido Univ., Japan
\n<\/td>		28C-4-2\t
\n16:30\t
\nBiomolecular Needling Systems for Medicals (Invited)\t
\nBeomjoon Kim, Univ. of Tokyo, Japan
\n<\/td>\n<\/tr>\n
<\/td>28B-4-3\t
\n16:20\t
\nExperimental Investigation of Interface Defect Properties in PtOx\/ZnO Schottky Diodes by Deep Level Transient Spectroscopy\t
\nMikiya Matsumura, Takahisa Tanaka and Ken Uchida, Univ. of Tokyo, Japan
\n<\/td>		28C-4-3\t
\n17:00\t
\nAdditive fabrication for low-cost, large-area bioelectronics (Invited)
\nPhilipp Rinklin, Leroy Grob, Sabine Zips and Bernhard Wolfrum, Technical Univ. of Munich, Germany<\/td>\n<\/tr>\n
<\/td>28B-4-4\t
\n16:40\t
\nElectronic state analysis of rectangular cross-sectional GeSn nanowires with various geometries and Sn composition \t
\nM. Sato 1, H. Tanaka 1,2, and T. Kimoto 1, 1 Kyoto Univ. and 2 Osaka Univ., Japan<\/td>		28C-4-4\t
\n17:30\t
\nRECENT PROGRESS IN METASURFACE BIOSENSORS (Invited)\t
\nMasanobu Iwanaga, NIMS, Japan<\/td>\n<\/tr>\n
28A-5: Symp. D. Enhancing technology for next generation lithography I\t
\n17:15-19:15, October 28, 2021\t
\nChairs:
\nSeiji Nagahara (Tokyo Electron)
\nKouji Asakawa (KIOXIA)
\n<\/td>		28B-5: Atomic Layer Processing (ALP) I\t
\n18:30-20:10, October 28, 2021\t
\nChairs:
\nHiroshi Arimoto (AIST)
\nNorifusa Sato (NIMS)
\n<\/td>		28B-5: Atomic Layer Processing (ALP) II\t
\n20:20-22:10, October 28, 2021\t
\nChairs:
\nFumikazu Mizutani (Kojundo Chemical Lab.)
\nShigeo Yasuhara (Japan Advanced Chemicals)
\n<\/td>\n<\/tr>\n
28A-5-1\t
\n17:15\t
\nUV nanoimprint lithography with laser-drilled screen printing, fluorescence alignment, and hybridized resist materials (Invited)\t
\nMasaru Nakagawa, Tohoku Univ., Japan
\n<\/td>		28B-5-1 \t
\n18:30\t
\nAtomic Layer Processing: A toolbox for fabricating novel functional hybrid materials (Invited)\t
\nMato Knez, CIC nano, GUNE BRTA, Spain
\n<\/td>		28B-5-5\t
\n20:20\t
\nVapor-phase infiltration for microelectronics applications (Invited)\t
\nChang-Yong Nam, Brookhaven National Laboratory, USA
\n<\/td>\n<\/tr>\n
28A-5-2\t
\n17:45\t
\nChemically Tailored Block Copolymers For Patternable Nanostructured Materials (Invited)\t
\nTeruaki Hayakawa, Tokyo Tech., Japan
\n<\/td>		28B-5-2\t
\n19:00\t
\nProcess Overview of Area Selective Atomic Layer Deposition for Advanced Bottom-up Nanofabrication (Invited)\t
\nWoohee Kim, Hanyang Univ., Korea
\n<\/td>		28B-5-6\t
\n20:50\t
\nSurface reaction via cyclic HI and O2 plasma for Ge digital etching\t
\nH. Ishii\u30001,2, W. H. Chang 2, H. Ishii 2, M. Ke 1 and T. Maeda 1,2, 1 Tokyo Univ. of Sci. and 2 AIST, Japan
\n<\/td>\n<\/tr>\n
28A-5-3\t
\n18:15\t
\nDevelopment of non-expanding Polymers after Vapor Phase Infiltration and Evaluation of their Etch-resistance (Invited)
\nNorikatsu Sasao, Shinobu Sugimura and Koji Asakawa, KIOXIA, Japan
\n<\/td>		28B-5-3\t
\n19:30\t
\nPMA Evaluation of TiN ALD in InGaAs Nanosheet MOSFETs\t
\nT. Go, M. Kitamura, T. Gotow and Y. Miyamoto, Tokyo Tech., Japan
\n<\/td>		28B-5-7\t
\n21:10\t
\nHigh Temperature Atomic Layer Deposition of Hafnium Oxide using Homoleptic Hafnium Aminoalkoxide Precursor\t
\nAkihiro Nishida 1,2, Tomoharu Yoshino 2, Yoshiki Ooe 2 and Yasutaka Matsuo 1, 1 Hokkaido Univ., 2 ADEKA, Japan
\n<\/td>\n<\/tr>\n
28A-5-4\t
\n18:45\t
\nAl2O3 nanostructures fabricated by Sequential Infiltration Synthesis in Cylinder Forming PS-b-PMMA Block Copolymer Thin Films (Invited)\t
\nMichele Perego 1, Alessia Motta 1, Marco Bigatti 1, Gabriele Seguini 1, Federica E. Caligiore 1, Alessia Motta 1, Grazia Tallarida 1, Elena Cianci 1, Soonmin Yim 2, Paul Nealey 2, Francesc, Perez Murano 3, Guido Rademaker 4, Ahmed Gharbi 4, Raluca Tiron 4, 1 IMM-CNR Agrate Unit, Italy, 2 Univ. of Chicago, USA, 3 IMB-CNM, CSIC, Spain and 4 CEA-LETI MINATEC, France
\n<\/td>		28B-5-4\t
\n19:50\t
\nGrowth mechanism of the atomic layer deposition of GaN thin films using pentamethylcyclopentadienyl gallium and combinations of NH3\/H2 plasma and N2 plasma\t
\nM. Mizui, N. Takahashi, S. Higashi and F. Mizutani, Kojundo Chemical Lab., Japan
\n<\/td>		28B-5-8\t
\n21:30\t
\nMultistep inorganic synthesis with atomic layer deposition to fabricate 3-dimensional THz phononic structure\t
\nNorifusa Satoh, NIMS, Japan
\n<\/td>\n<\/tr>\n
<\/td><\/td>28B-5-9\t
\n21:50\t
\nFerroelectric HfZrO2 downscaling limit on Silicon using O3, and H2O as oxidation agents\t
\nHeber Hernandez-Arriaga 1, Jaidah Mohan 1, Yong Chan Jung 1, Jin-Hyun Kim 1, Chang-Han Rho 2, Rino Choi 2 and Jiyoung Kim 1, 1 Univ. of Texas, USA and 2 Inha Univ., Korea<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
\nOctober 29, Online (Symposium, Regular Session)<\/span>
\n\n\n\n\n\t\n\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t
Room A<\/th>Room B<\/th>Room C<\/th>\n<\/tr>\n<\/thead>\n
29A-1: Symp. D. Enhancing technology for next generation lithography II\t
\n9:30-10:30, October 29, 2021\t
\nChairs:
\nMasaru Nakagawa (Tohoku Univ.)
\nNorikatsu Sasao (Kioxia)
\n
\n<\/td>		<\/td>29C-1: Microsystem Technology and MEMS Session I
\nChair:
\nSumito Nagasawa (Shibaura Inst. of Technol.) <\/td>\n<\/tr>\n
29A-1-2\t
\n9:30\t
\nLeveraging Selective Deposition to Enable Next Generation EUV Lithography and Novel Patterning Integration (Invited)\t
\nKatie lutker-Lee, TEL Technology Center, America, USA<\/td>		<\/td>29C-1-1\t
\n9:00\t
\nRaman Spectroscopic Analysis for Nondestructive Estimation of Bundled Carbon Nanotube Defects Leading to Failure\t
\nTomohito Kino and and Takahiro Namazu, Kyoto Univ. of Advanced Sci., Japan
\n<\/td>\n<\/tr>\n
29A-1-3\t
\n10:00\t
\nPost-Polymerization Modification of PS-b-PMMA: A Strategy for Fine-Tuning the Microphase-Separated Nanostructures (Invited)
\nTakuya Isono 1, Ken Miyagi 2, Takahiro Dazai 2, Kazufumi Sato 2, Redouane Borsali 3, Takuya Yamamoto 1, Kenji Tajima 1 and Toshifumi Satoh 1, 1 Hokkaido Univ., 2 Tokyo Ohka Kogyo, Japan and 3 Univ. Grenoble Alps, France<\/td>		<\/td>29C-1-2\t
\n9:20\t
\nComparison in Sintered Silver Die Attach Failure between Thermal Shocked Test and Four-point Bending Test\t
\nKeisuke Wakamoto 1,2, Yuga Kumakiri 2, Takukazu Otsuka 1, Ken Nakahara 1 and Takahiro Namazu 2, 1 ROHM and 2 Kyoto Univ. of Advanced Sci., Japan
\n<\/td>\n<\/tr>\n
<\/td><\/td>29C-1-3\t
\n9:40\t
\nEvaluation of microscale thermal characteristics of cold-rolled aluminum alloy by thermoreflectance method
\nSouto Yamashita and Shugo Miyake, Kobe City College of Technol., Japan
\n<\/td>\n<\/tr>\n
<\/td><\/td>29C-1-4\t
\n10:00\t
\nStudy on the thermal behavior of Carbon-Fiber-Reinforced-Plastic (CFRP) sheet using a periodic heating method
\nSho Nagata 1, Tsuyoshi Nishi 1, Hiromichi Ohta 1, Takahiro Igarashi 2 and Shugo Miyake 3, 1 Ibaraki Univ., 2 Japan Atomic Energy Agency and 3 Kobe City College of Technol., Japan<\/td>\n<\/tr>\n
29A-2: Patterning Materials\t
\n11:00-12:30, October 29, 2021\t
\nChairs:
\nKazumasa Okamoto (Osaka Univ.)
\nKazuyo Morita (Oji Holdings)
\n
\n<\/td>		29B-2: NanoTool\t
\n10:10-12:20, October 29, 2021
\nChairs:\t
\nKoji Sugano (Kobe Univ.)
\nTakayuki Hoshino (Hirosaki Univ.)
\n
\n<\/td>		29C-2: Microsystem Technology and MEMS Session II
\nChair:
\nRyo Takigawa (Kyushu Univ.)<\/td>\n<\/tr>\n
29A-2-1\t
\n11:00\t
\nLight-driven fabrication of helical nanostructures and their optical applications(Invited)\t
\nDong Ki Yoon, KAIST, Korea
\n
\n<\/td>		29B-2-1\t
\n10:10\t
\nApplications of femtosecond laser amplifier to microprocesses for biological cells (Invited)\t
\nYoichiroh Hosokawa, NAIST, Japan<\/td>		29C-2-1\t
\n11:00\t
\nDrift and Noise Characteristics of Sensor Module With A Single Axis Gold Proof Mass MEMS Accelerometer for Micro Muscle Sound Measurement
\nAkira Onishi, Kohei Shibata, Akihiro Uchiyama, Katsuyuki Machida, Taiki Ogata, Noboru Ishihara, Hirotaka Uchitomi, Tso-Fu Mark Chang, Masato Sone, Yoshihiro Miyake, Kazuya Masu and Hiroyuki Ito, Tokyo Tech., Japan
\n<\/td>\n<\/tr>\n
29A-2-2\t
\n11:30\t
\nEffects of Resist-CrN Interaction on Resist Patterns of Chemically Amplified Resists Used for Electron Beam Lithography \t
\nAkihiro Konda 1, Kazumasa Okamoto 1, Takahiro Kozawa 1, and Takao Tamura 2, 1 Osaka Univ. and 2 NuFlare Technol., Japan
\n
\n<\/td>		29B-2-2\t
\n10:50\t
\nFabrication and observation of nanopore in two-dimensional materials using Helium ion microscope (Invited)\t
\nKentaro Kawai 1, Shogo Sugita, Kohei Noda, Takumi Hayashi 1, Kenta Arima 1, Kazuya Yamamura 1, and Osamu Tabata 2, 1 Osaka University and 2 Kyoto Univ. of Advanced Science, Japan
\n<\/td>		29C-2-2\t
\n11:20\t
\nMicro-Hexapod Robot Having an Origami-like SU-8 Coated Rigid Frame\t
\nKenjiro Sugimoto and Sumito Nagasawa, Shibaura Inst. of Technol., Japan
\n<\/td>\n<\/tr>\n
29A-2-3\t
\n11:50\t
\nDecarboxylation and polymerization processes of metal resist ligands \t
\nT. Otsuka 1, Y. Muroya 1, T. Kozawa 1, T. Ikeda 2, Y. Komuro 2, and D. Kawana 2, 1 Osaka Univ. and 2 Tokyo Ohka Kogyo, Japan
\n<\/td>		29B-2-3\t
\n11:20\t
\nDesign of Scanning Path for Dynamic Virtual Cathode Tool\t
\nKen Sasaki, Kenki Nomura and Takayuki Hoshino, Hirosaki Univ., Japan
\n<\/td>		29C-2-3\t
\n11:40\t
\nSensor and Actuator Double Functional Component for Micro Robot Leg Joints \t
\nT. Hara and S. Nagasawa, Sibaura Inst. of Technol., Jaan
\n<\/td>\n<\/tr>\n
29A-2-4\t
\n12:10\t
\nThe effects of tetramethyl ammonium hydroxide concentration on the dissolution of poly(4-hydroxystyrene) \t
\nNaoki Tanaka 1, Kyoko Matsuoka 1, Takahiro Kozawa 1, Takuya Ikeda 2, Yoshitaka Komuro 2, and Daisuke Kawana 2, 1 Osaka Univ. and 2 Tokyo Ohka Kogyo, Japan<\/td>		29B-2-4\t
\n11:40\t
\nCharacterization of nanogap with gold nanoparticle dimer controlled by four-point bending for electrical and optical single molecule measurement \t
\nYuanzhi Chang, Takayuki Sumitomo, Akio Uesugi, Koji Sugano and Yoshitada Isono, Kobe Univ., Japan<\/td>		<\/td>\n<\/tr>\n
<\/td>29B-2-5\t
\n12:00\t
\nHighly sensitive vibration measurement method of nanomechanical resonator using convolutional neural network\t
\nKohei Tsumune, Shin'ichi Warisawa and Reo Kometani, Univ. of Tokyo, Japan
\n<\/td>		<\/td>\n<\/tr>\n
29A-3: Advanced Lithography and Patterning
\n13:30-15:00 October 29, 2021\t
\nChairs:
\nSachiko Kobayashi (KIOXIA)
\nTetsuo Harada (Univ. of Hyogo)
\n<\/td>		29B-3: Nanomaterials\t
\n13:30-15:20, Ocotober 29, 2021
\nChairs:
\nJun Kano (Okayama Univ.)
\nTakao Shimizu (NIMS)
\n
\n<\/td>		29C-3: Microsystem Technology and MEMS Session III
\nChair:
\nYoshihiro Hasegawa (Hiroshima City Univ.) <\/td>\n<\/tr>\n
29A-3-1\t
\n13:30\t
\nChallenge of attenuated phase shift mask for EUV lithography (Invited)\t
\nIkuya Fukasawa, Yohei Ikebe, Takeshi Aizawa, Tsutomu Shoki, and Takahiro Onoue, HOYA, Japan
\n
\n<\/td>		29B-3-1\t
\n13:30\t
\n(Invited)\t
\nNobuhiro Matsushita, Tokyo Tech., Japan
\n<\/td>		29C-3-1\t
\n13:30\t
\nSOI-MEMS device for fabrication and physical properties measurement of single-crystal silicon nanogap with (111) cleavage plane surfaces\t
\nMasaki Shimofuri, Yoshikazu Hirai, Amit Banerjee and Toshiyuki Tsuchiya, Kyoto Univ., Japan
\n<\/td>\n<\/tr>\n
29A-3-2\t
\n14:00\t
\nEUV stochastic resist modeling in high NA\t
\nR. Tsuzuki and K. Oyama, Tokyo Electron, Japan
\n<\/td>		29B-3-2\t
\n14:00\t
\nCrystalline Phase Transition in Two-dimensional Ruthenate Nanosheets Induced by Cobalt-doping\t
\nLeanddas Nurdiwijayanto and Takaaki Taniguchi, NIMS, Japan
\n<\/td>		29C-3-2\t
\n13:50\t
\nSequential Automatic Assembling Method for Microstructure Using Shape Memory Polymer Units\t
\nK. Kojima and S. Nagasawa, Shibaura Inst. of Technol., Japan
\n<\/td>\n<\/tr>\n
29A-3-3\t
\n14:20\t
\nThe measurement of the refractive index n and k value of the EUV resist by EUV reflectivity measurement method \t
\nYosuke Ohta 1, Atsushi Sekiguchi 1, Tetsuo Harada 2 and Takeo Watanabe 2, 1 Litho Tech Japan and 2 Univ. of Hyogo, Japan
\n<\/td>		29B-3-3\t
\n14:20\t
\nRole of Ca in CaF2 incorporated In2O3 transparent conductive films\t
\nKaito Oe, Shun Mori, Kotaro Watanabe, Hiroki Nagai, Tomohiro Yamaguchi, Takeyoshi Onuma, Tohru Honda and Shinya Aikawa, Kogakuin Univ., Japan
\n<\/td>		29C-3-3\t
\n14:10\t
\nMiniaturized pneumatic finger integrated with FPCB strain sensor\t
\nYi-Chun Chuang 1, Tun-Yi Cheng 1, Yu-Ching Lin 2, Takahito Ono 2 and Yao-Chuan Tsai 1, 1 Natl. Chung Hsing Univ., Taiwan and 2 Tohoku Univ., Japan<\/td>\n<\/tr>\n
29A-3-4\t
\n14:40\t\t
\nINVESTIGATION OF PROJECTION EXPOSURE SYSTEM USING A PAIR OF PARABOLIC MIRRORS \t
\nToshiyuki Horiuchi and Hiroshi Kobayashi, Tokyo Denki Univ., Japan
\n<\/td>		29B-3-4\t
\n14:40\t
\nDesign of high fluorescence Sm3+ doped anatase type TiO2 thin film by machine learning using experimental XRD patterns\t
\nYuri Tamamoto, Mariko Murayama and Xiwei Zhao, Toyo Univ., Japan
\n<\/td>		29C-3-4\t
\n14:30\t\t
\nMAGNETIC DRIVEN TENTACLES FOR BIO-MIMIC
\nMOTION\t
\nToshiki Murakami and Fujio Tsumori, Kyushu Univ., Japan
\n<\/td>\n<\/tr>\n
<\/td>29B-3-5\t
\n15:00\t
\nConductivity Improvement of Anti-perovskite Solid Electrolyte Na3OX for Sodium Batteries\t
\nWei Shi 1, Masataka Ohta 1, Mariko Murayama 1,2 and Xinwei Zhao 1, 1 Tokyo Univ. of Sci. and 2 Toyo Univ., Japan<\/td>		<\/td>\n<\/tr>\n
29A-4:Electron and Ion Beam Technologies\t
\n15:30-17:00, October 29, 2021\t
\nChairs:
\nMakoto Sakakibara (Hitachi)
\nHiroshi Yamashita (Nuflare Technol.)
\nJunichi Yanagisawa (Univ. of Shiga Pref.)
\n
\n<\/td>		29B-4: Nano Devices\t
\n15:40-17:30, October 29, 2021
\nChairs:\t
\nTakashi Tsuchiya (NIMS)
\nKazuto Hatakeyama (AIST)
\n<\/td>		29C-4: Organic Nanomaterials\t
\n15:30-17:20, October 29, 2021\t
\nChairs:
\nAkito Masuhara (Yamagata Univ.)
\nShusaku Nagano (Rikkyo Univ.)
\n
\n<\/td>\n<\/tr>\n
29A-4-1\t
\n15:30\t
\nDeep learning model for 3D profiling of high-aspect-ratio features using high-voltage CD-SEM (Invited)
\nWei Sun 1, Yasunori Goto 2, Takuma Yamamoto 2 and Keiichiro Hitomi 1, 1 Hitachi and 2 Hitachi High-Tech, Japan
\n<\/td>		29B-4-1\t
\n15:40\t
\nin situ observation of electrochemical lithiation\/delithiation of Si thin film electrodes by X-ray photoelectron spectroscopy (Invited)\t
\nTakuya Masuda, NIMS and Hokkaido Univ., Japan
\n<\/td>		29C-4-1\t
\n15:30\t
\nHighly proton-conductive polymer thin films with organized structure and molecularly oriented structure (Invited)\t
\nYuki Nagao, JAIST, Japan
\n<\/td>\n<\/tr>\n
29A-4-2\t
\n16:00\t
\nDevelopment of electron beam lithography technique for fabrication of highly integrated silicon quantum bits
\nKimihiko Kato, Yongxun Liu, Shigenori Murakami, Yukinori Morita and Takahiro Mori, AIST, Japan
\n<\/td>		29B-4-2\t
\n16:10\t
\nAnomalous Surface Ion conduction of Ce1-xSmxO2-\u03b4 Thin Film with Mixed Valence State\t
\nGo Notake 1, Daiki Nishioka 1, Ukyo Kobayashi 1, Hideaki Murasawa 1, Daisuke Shiga 2, Koji Horiba 3, Hiroshi Kumigashira 2 and Tohru Higuchi 1, 1 Tokyo Univ. of Sci., 2 Tohoku Univ. and 3 KEK, Japan
\n
\n<\/td>		29C-4-2\t
\n16:00\t
\nWeakly Acidic Filler-filled Type Polymer Electrolyte Membrane for PEFC\t
\nTomohiro Nohara 1, Yukina Suzuki 1, Keisuke Tabata 1, Takaaki Saito 1, Toshihiko Arita 2, Akito Masuhara 1, 1 Yamagata Univ. and 2 Tohoku Univ., Japan
\n<\/td>\n<\/tr>\n
29A-4-3\t
\n16:20\t
\nCharacterization of Ar beam from the new fast atom beam source \t
\nR. Morisaki 1, T. Yamazaki 1, C. Oka 1, J. Sakurai 1, T. Akao 2, T. Takahashi 2, H. Tsuji 2, N. Ohno 1, and S. Hata 1, 1 Nagoya Univ., 2 NGK INSULATORS, Japan
\n<\/td>		29B-4-3\t
\n16:30\t
\nFabrication of nanostructured Pt counter electrodes for electrochemical sensors\t
\nIvan Turkevych, AIST, Japan
\n
\n<\/td>		29C-4-3\t
\n16:20\t
\nEstablishing precise control conditions of the emission wavelength on perovskite quantum dots by crystal lattice distortion\t
\nRyota Sato 1, Rikuo Suzuki 1, Yusaku Morikawa 1, Satoshi Asakura 1,2, Takayuki Chiba 1 and Akito Masuhara 1, 1 Yamagata Univ. and 2 Ise Chem., Japan
\n<\/td>\n<\/tr>\n
29A-4-4\t
\n16:40\t
\nUniversal Liquid Metal Alloy Ion Sources (LMAIS) for FIB nanofabrication\t
\nT. Richter 1*, P. Mazarov 1, F. Meyer 1, W. Pilz 1, L. Bischoff 2, and N. Klingner 2, 1 Raith and 2 Helmholtz-Zentrum Dresden-Rossendorf, Germany<\/td>		29B-4-4\t
\n16:50\t
\nMetal-assisted chemical etching of silicon nanowires for nanocomposite field effect transistors\t
\nChun-Teng Chen, Jung-Chun Tseng, Hao-Jen Cheng and Gen-Wen Hsieh, Natl. Yang Ming Chiao Tung Univ., Taiwan
\n
\n<\/td>		29C-4-4\t
\n16:40\t
\nMulti polymer layer-coated silica nanoparticles for polymer electrolyte membrane prepared by RAFT polymerization with particles\t
\nKeisuke Tabata 1, Haruki Nakazaki 1, Tomohiro Nohara 1, Toshihiko Arita 2 and Akito Masuhara 1, 1 Yamagata Univ. and 2 Tohoku Univ., Japan
\n<\/td>\n<\/tr>\n
<\/td>29B-4-5\t
\n17:10\t
\nDemonstration of flexible transparent conductive film using B-doped In2O3\t
\nShun Mori, Yukiya Ichinoseki, Kotaro Watanabe, Kaito Murano, Kaito Oe, Hiroki Nagai, Tomohiro Yamaguchi, Takeyoshi Onuma, Tohru Honda and Shinya Aikawa
\nKogakuin Univ., Japan<\/td>		29C-4-5\t
\n17:00\t
\nUltrapure-blue Light-emitting Electrochemical Cell Using \u03bd-DABNA\t
\nYuki Tanaka 1, Jiang Pu 1, Takuji Hatakeyama 2 and Taishi Takenobu 1, 1 Nagoya Univ. and 2 Kwansei Gakuin Univ., Japan<\/td>\n<\/tr>\n
<\/td><\/td><\/td>\n<\/tr>\n
29A-5: Nanoimprint, Hybrid-NIL, Biomimetics, and Functional Surfaces\t
\n17:30-20:00, October 29, 2021\t
\nChairs:
\nAkihiro Miyauchi (Tokyo Medical and Dental)
\nJun Taniguchi (Tokyo Univ. of Sci.)
\nKazuma Kurihara (AIST)
\nJunpei Sakurai (Nagoya Univ.)
\n<\/td>		<\/td><\/td>\n<\/tr>\n
29A-5-1\t
\n17:30\t
\nTechnology Transfer from Reflection to Transmission on the Optical Devices inspired by Morpho Butterfly (Invited)
\nAkira Saito 1,2, Kazuma Yamashita 1, Takuma Hattori 1,2, and Yuji Kuwahara 1,2, 1 Osaka Univ. and 2 RIKEN SPring-8 Center, Japan
\n<\/td>		<\/td><\/td>\n<\/tr>\n
29A-5-2\t
\n18:00\t
\nA new adhesive mechanism learning from the nanofilaments and mucus of a clingfish sucker\t
\nKazuma Tsujioka 1, Yasutaka Matsuo 2, Yuji Hirai 1 and Masatsugu Shimomura 1, 1 Chitose Inst. of Sci. and 2 Hokkaido Univ., Japan
\n<\/td>		<\/td><\/td>\n<\/tr>\n
29A-5-3\t
\n18:20\t
\nDevelopment of a Morpho butterfly-inspired optical diffuser with high controllability
\nKazuma Yamashita 1, Takuma Hattori 1,2, Yuji Kuwahara 1,2 and Akira Saito 1,2, 1 Osaka Univ. and 2 RIKEN SPring-8, Japan
\n
\n
\n<\/td>		<\/td><\/td>\n<\/tr>\n
29A-5-4\t
\n18:40\t
\nNanoimprint Lithography Methods for Achieving sub-3nm Overlay
\nShintaro Aichi 1, Kenji Yamamoto 1, Hideyuki Wada 1, Yoshio Suzaki 1, Kazuhiro Sato 1, Satoshi Iino 1, Satoru Jimbo 1, Osamu Morimoto 1, Mitsuru Hiura 1, Nilabh Roy 2, Anshuman Cherala 2 and Jin Choi 2, 1 Canon, Japan and 2 Canon Nanotechnologies, USA
\n<\/td>		<\/td><\/td>\n<\/tr>\n
29A-5-5\t
\n19:00\t
\nFabrication of self-standing thin films with small through-holes by imprint and photolithography hybrid process\t
\nH. Tanabe, H. Kawata, M. Yasuda, Y. Hirai and H. Kikuta, Osaka Pref. Univ., Japan
\n<\/td>		<\/td><\/td>\n<\/tr>\n
29A-5-6\t
\n19:20\t
\nSUB-MICRON IMPRINT PATTERNING OF COMPOUND SHEET WITH CERAMIC NANO POWDER
\nRyoma Taira and Fujio Tsumori, Kyushu Univ., Japan
\n<\/td>		<\/td><\/td>\n<\/tr>\n
29A-5-7\t
\n19:40\t
\nRobust PDMS Pattern and Hexagonal Guard Ring Micro-structure with Hydrophobic Properties for Marine Antifouling Applications \t
\nNithi Atthi 1, Witsaroot Sripumkhai 1, Pattaraluck Pattamang 1, Rattanawan Meananeatra 1, Oraphan Thongsook 1, Norabadee Ranron 1, Krynnaras Pankong 1, Wutthinan Jeamsaksiri 1, Yoichiro Kitani 2, Shouzo Ogiso 2 and Nobuo Suzuki 2, 1 NECTEC, Thailand and 2 Kanazawa Univ., Japan
\n<\/td>		<\/td><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/span><\/h5>\n","protected":false},"excerpt":{"rendered":"MNC2021_Session Schedule\u00a0 World time converter https:\/\/www.worldtimebuddy.com\/ \u00a0MNC 2021 Program \u00a0MNC2021_How […]","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"page-noside.php","meta":[],"_links":{"self":[{"href":"http:\/\/imnc.jp\/2021\/wp-json\/wp\/v2\/pages\/623"}],"collection":[{"href":"http:\/\/imnc.jp\/2021\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"http:\/\/imnc.jp\/2021\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"http:\/\/imnc.jp\/2021\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"http:\/\/imnc.jp\/2021\/wp-json\/wp\/v2\/comments?post=623"}],"version-history":[{"count":15,"href":"http:\/\/imnc.jp\/2021\/wp-json\/wp\/v2\/pages\/623\/revisions"}],"predecessor-version":[{"id":1399,"href":"http:\/\/imnc.jp\/2021\/wp-json\/wp\/v2\/pages\/623\/revisions\/1399"}],"wp:attachment":[{"href":"http:\/\/imnc.jp\/2021\/wp-json\/wp\/v2\/media?parent=623"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}