| 9P-1: Plenary Session | 9P-1-1 | 9:50-10:30, Nov. 9, 2016 | 2D Crystals for Smart Life (Plenary) | K. Banerjee, UCSB, USA |
| 9P-1-2 | 10:50-11:30, Nov. 9, 2016 | New Device Application of Organic Semiconductors (Plenary) | S.Y. Lee, Samsung Electronics, Korea | |
| 9P-1-3 | 11:30-12:10, Nov. 9, 2016 | Design Technology CoOptimization, the Key to Unlocking New Scaling Pathways (Plenary) | L. Liebmann, GLOBALFOUNDRIES, USA | |
| 11A-9: Advanced Photolithography | 11A-9-1 | 11:15-11:45, Nov. 11, 2016 | Readiness of EUV Lithography and Its Impacts on Design and Patterning of Backend Layers for 5nm Node and Beyond (Invited) | T.-B. Chiou 1, A. Chen 2 and M. Dusa 2, 1 ASML Taiwan, Taiwan and 2 ASML US, USA |
| 9B-3: Electron and Ion Beam Technologies | 9B-3-1 | 15:35-16:05, Nov. 9, 2016 | An Application of 2-Dimensional Emitter Source for Multiple Electron Beam System (Invited) | H.S. Kim, Y.B. Lee, S.W. Choi, H.W. Kim, D.-W. Kim, S.J. Ahn, T.S. Oh and Y.-H. Song, Sun Moon Univ., Korea |
| 11A-10: Resist and Directed Self-Assembly | 11A-10-1 | 14:00-14:30, Nov. 11, 2016 | Directed Self-assembly of High-χ Block Copolymers (Invited) | A. Vora, N. Arellano, K. Schmidt, D.P. Sanders and R.D. Allen, IBM Research Almaden, USA |
| 10B-5: Nanocarbon Application | 10B-5-1 | 10:35-11:05, Nov. 10, 2016 | Dry Manufacturing of Carbon Nanotube Thin Films for Flexible Electronics Applications (Invited) | E.I. Kauppinen, Aalto Univ. School of Science, Finland |
| 10B-5-5 | 12:05-12:35, Nov. 10, 2016 | Modeling and Technology Platform for Analog High Frequency Carbon Nanotube Transistors (Invited) | S. Hermann1,2,3, M. Claus 3, S.E. Schulz1,2,3, M. Schröter 3,4, 1 TU Chemnitz, 2 ENAS, 3 TU Dresden, Germany and 4 UC San Diego, USA |
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| 11C-8: Nano Resistive and Atomic Switching Devices | 11C-8-1 | 09:00-09:30, Nov. 11, 2016 | Conductance Quantization in Binary-Oxide-Based ReRAM Cells (Invited) | Y. Nishi, H. Sasakura, Y. Kuriyama and T. Kimoto, Kyoto Univ., Japan |
| 10C-4: Nanofabrication I | 10C-4-1 | 09:00-09:30, Nov. 10, 2016 | Formation and Characterization of Elemental 2D Materials Beyond Graphene (Invited) | Y. Yamada-Takamura, JAIST, Japan |
| 10C-5: Nanofabrication II | 10C-5-1 | 10:55-11:25, Nov. 10, 2016 | Controlling Flake Size and Shape of MoS2 Monolayers Grown by Chemical Vapor Deposition | A. Özden, F. Ay, C. Sevik and N.K. Perkgöz, Anadolu Univ., Turkey |
| 10C-6: Nanofabrication III | 10C-6-1 | 14:10-14:40, Nov. 10, 2016 | III-V Nanowires for Solar Cell and Energy Applications (Invited) | H.H. Tan, Australian Natl. Univ., Australia |
| 11B-8: Inorganic Nanomaterials II | 11B-8-1 | 09:00-09:30, Nov. 11, 2016 | Nature of BaTiO3 Nanocubes for Self-Assembly and Dielectric Abnormally (Invited) | K. Kato, K. Mimura, Q. Ma, Z. Liu and K. Yasui, AIST, Japan |
| 11B-9: Inorganic Nanomaterials III | 11B-9-1 | 10:45-11:15, Nov. 11, 2016 | Laser Ablation in Liquid: from Nanocrystals Synthesis to Nanostructures Fabrication (Invited) | G.W. Yang, Sun Yat-Sen Univ., China |
| 9B-2: Organic Nanomaterials | 9B-2-1 | 13:30-14:00, Nov. 9, 2016 | Protein Engineering for Interface Design on Inorganic Nanomaterials (Invited) | M. Umetsu, Tohoku Univ., Japan |
| 9C-2: NanoTool I | 9C-2-1 | 13:30-14:00, Nov. 9, 2016 | Nanoscale Imaging and Fabrication by Focused Ion Beam System Equipped with Gas Field Ion Source (Invited) | T. Kozakai, Hitachi High-Tech Science, Japan >>>O. Matsuda, Hitachi High-Tech Science, Japan |
| 10D-6: Nanoimprint, Nanoprint and Rising Lithography | 10D-6-1 | 13:40-14:10, Nov. 10, 2016 | Enhanced Light Extraction Efficiency in Organic Light Emitting Diode Using NIL (Invited) | Y.D. Kim, H.-J. Choi, Y.H. Sung and H. Lee, Korea Univ., Korea |
| 10D-6-6 | 15:30-16:00, Nov. 10, 2016 | Nanoimprint System Development and Status for High Volume Semiconductor Manufacturing (Invited) | Y. Kondo 1, N. Nishimura 1, T. Takashima 1, T. Matsumoto 1, T. Hayashi 1, A. Kimura 1, K. Emoto 1, J. Choi 2 and P. Schumaker 2, 1 Canon, Japan and 2 Canon Nanotechnol., USA | |
| 11D-8: BioMEMS, Lab on a Chip I | 11D-8-1 | 09:00-09:30, Nov. 11, 2016 | Cell-Generated Niches for Organ-on-a-Chip Microdevices (Invited) | Y. Torisawa, Kyoto Univ., Japan |
| 11D-9: BioMEMS, Lab on a Chip II | 11D-9-1 | 10:45-11:15, Nov. 11, 2016 | Combination of Microdevices and Biological Cells to Create Novel Principle Devices (Invited) | Y. Tanaka, RIKEN, Japan |
| 10D-4: Microsystem Technology & MEMS I | 10D-4-1 | 09:00-09:30, Nov. 10, 2016 | Application on SiC Power Semiconductors to Environmentally Friendly Vehicles (Invited) | T. Nishiwaki, T. Koyama and T. Ito, Toyota Motor, Japan |
| 11A-8: Symp. A: Metrology and Inspection for Advanced Patterning | 11A-8-1 | 09:00-09:30, Nov. 11, 2016 | Metrology and Inspection for Next Generation Lithography (Invited) | M. Asano, Toshiba, Japan |
| 11A-8-2 | 09:30-10:00, Nov. 11, 2016 | Current and Future Requirements for Metrology and Inspection for Advanced Patterning (Invited) | P. Leray, A.L. Charley, P. Wong, S. Halder and P. Foubert, imec, Belgium | |
| 11A-8-3 | 10:00-10:30, Nov. 11, 2016 | Outlook of Mask Registraton and Required Metrology Technology (Invited) | K.-D. Roeth, KLA, Germany | |
| 11A-8-4 | 10:30-11:00, Nov. 11, 2016 | Electron-Beam Metrology and Inspection: Scaling, Variability, and Productivity (Invited) | Y. Momonoi and H. Fukuda, Hitachi High-Technologies, Japan | |
| 10A-6: Symp. B: Forefront of Graphene & Related 2D Materials | 10A-6-1 | 14:10-14:40, Nov. 10, 2016 | Diamane and Diamond (Invited) | R.S. Ruoff UNIST, Korea |
| 10A-6-2 | 14:40-15:10, Nov. 10, 2016 | Controlling Charge Transport, Spin Transport and Superconductivity in a Two-Dimensional Materials by the Electric Field Effect (Invited) | B. Özyilmaz, Natl. Univ. of Singapore, Singapore | |
| 10A-6-3 | 15:10-15:40, Nov. 10, 2016 | Fundamental Properties and Applications of Two-Dimensional Materials (Invited) | T. Kondo 1,2, 1 Univ. of Tsukuba and 2 Tokyo Inst. of Technol., Japan | |
| 10A-6-4 | 15:40-16:10, Nov. 10, 2016 | Graphene for Field Emission Applications (Invited) | W.I. Milne 1,3, C. Li 2, W. Lei 2, B. Wang 2, G. Duesberg 4, T. Hallam 4 and M.T. Cole 1, 1 Univ. of Cambridge, UK, 2 SEU, China, 3 Tokyo Inst. of Technol., Japan and 4 Trinity College Dublin, Ireland | |
| 10A-4: Symp. C: Nanosensors and Their Promises for IoT Society I10A-4: | 10A-4-1 | 09:00-09:30, Nov. 10, 2016 | Ultra-Low Energy Nano-Scaled Sensors for IoT Systems (Invited) | K. Uchida, Keio Univ., Japan |
| 10A-4-2 | 09:30-10:00, Nov. 10, 2016 | Integrated Circuits for Big Data and Small Sensors (Invited) | T. Kuroda, Keio Univ., Japan | |
| 10A-4-3 | 10:00-10:30, Nov. 10, 2016 | Macro-Scale, Multi-Sensing Flexible Devices for Human Interactive Applications (Invited) | K. Takei , Osaka Pref. Univ., Japan | |
| 10A-5: Symp. C: Nanosensors and Their Promises for IoT Society II10A-5: | 10A-5-1 | 10:45-11:15, Nov. 10, 2016 | On-Chip FRET Biosensor Build on Graphene-Biomolecular-Interface (Invited) | Y. Ueno 1 and K. Furukawa 1,2, 1 NTT and 2 Meisei Univ., Japan |
| 10A-5-2 | 11:15-11:45, Nov. 10, 2016 | High-Resolution 2D/3D Printing Techniques for Wearable Electronics (Invited) | J.-U. Park, UNIST, Korea | |
| 9D-2: Symp. D: Innovation from Open Facilities I | 9D-2-1 | 13:30-14:00, Nov. 9, 2016 | Overview of the Renatech Network of French Academic Clean-Rooms (Invited) | M.de Labachelerie, I. Sagnes and C. Boisard, CNRS, France |
| 9D-2-2 | 14:00-14:30, Nov. 9, 2016 | Plasmon-Induced Photoenergy Conversion Systems Using Nano-Engineered Gold Particles (Invited) | H. Misawa, 1 Hokkaido Univ., Japan and 2 Natl. Chiao Tung Univ., Taiwan | |
| 9D-3: Symp. D: Innovation from Open Facilities II | 9D-3-1 | 15:25-15:55, Nov. 9, 2016 | Vertical Comb-Drive Microscanner with 4x4 Array of Micromirrors for Phase-Shifting Mirau Micro-Interferometry (Invited) | C. Gorecki, FEMTO-ST, France |
| 9D-3-2 | 15:55-16:25, Nov. 9, 2016 | Examples of CMOS-MEMS realizations within a France-Japan collaboration (Invited) | M. Denoual 1, E. Lebrasseur 2 and Y. Mita 2, 1 Univ. of Normandie, France and 2 Univ. of Tokyo, Japan |