| Symposium A: Symposium on "Big Data" for Advanced Patterning I | |||
| 11A-2-1 | Wed., 13:35-14:05, Nov. 11, 2015 | Potential of Open Science to Change the Framework of Manufacturing beyond Industry 4.0 (Invited) | K. Hayashi, National Institute of Science and Technology Policy, Japan |
| 11A-2-2 | Wed., 14:05-14:35, Nov. 11, 2015 | Technology and Design Co-Optimization for era of ''Big Data'' Low k1 Imaging (Pitch Scale) to Cost Scale (Invited) | J. Kye, Globalfoundries, USA |
| 11A-2-3 | Wed., 14:35-15:05, Nov. 11, 2015 | OPC: a Cross Road of Data Flows (Invited) | P.D. Bisschop, IMEC, Belgium |
| 11A-2-4 | Wed., 15:05-15:35, Nov. 11, 2015 | Lots of Data at Small Nodes (Invited) | W. Demmerle 1, T. Schmöller 1, H. Taoka 2 and D. Yim 2, 1 Synopsys, Germany and 2 Nihon Synopsys G.K., Japan |
| 13A-8-1 | Fri., 9:00-9:30, Nov. 13, 2015 | Holistic Lithography: a Data Driven Framework for Advanced Patterning Optimization (Invited) | S. Hunsche and Y. Zou, ASML/Brion Technologies, USA |
| 13A-8-2 | Fri., 9:30-10:00, Nov. 13, 2015 | Litho Turnkey Solution with Smart Data Management (Invited) | T. Matsuyama, H. Aoyama, S. Kudo, H. Kono, A. Sugiyama, P. Seemoon and K. Masaki, Nikon, Japan |
| 13A-9-1 | Fri., 10:15-10:45, Nov. 13, 2015 | Advanced Manufacturing Insight : A Framework for Big Data Analytics in Semiconductor Manufacturing (Invited) | Brian E. Stine, PDF Solutions, USA |
| 13A-9-2 | Fri., 10:45-11:15, Nov. 13, 2015 | Small Number, Big Data - Patterning Challenges for Nano Scale (Invited) | K. Nawa, Tokyo Electron, Japan |
| 13A-9-3 | Fri., 11:15-11:45, Nov. 13, 2015 | 'Big data'' in Semiconductor Metrology and Inspection: Why and How? (Invited) | H. Fukuda, Hitachi-Hightechnologies, Japan |
| Symposium B: Two Dimensional Nanomaterials I | |||
| 12C-4-1 | Thurs., 9:00-9:30, Nov. 12, 2015 | Molecular Beam Epitaxy of Large Area Metal Dichalcogenide 2D Semiconductors and van der Waals Heterostructures on A1N(0001)/Si(111) and Sapphire Substrates (Invited) | A. Dimoulas, N.C.S.R. ''Demokritos'', Greece |
| 12C-5-1 | Thurs., 10:45-11:15, Nov. 12, 2015 | Bandgap Engineering and Substitutional Doping of Graphene Nanoribbons (Invited) | R.R. Cloke 1, T. Marangoni 1, G.D. Nguyen 1, T. Joshi 1, D.J. Rizzo 1, C. Bronner 1, T. Cao 1, S.G. Louise 1, M.F. Crommie 1,2 and F.R. Fischer 1,2, 1 Univ. of California Berkeley and 2 Lawrence Berkeley Natl. Lab., USA |
| Symposium C: Next Generation Lab on a Chip I | |||
| 12A-4-1 | Thurs., 9:00-9:30, Nov. 12, 2015 | Quartz and Glass Analytical Microsystems (Invited) | C. Zhang, E. Freeman, G. Hatipoglu, H. Min, D. Gaddes and S. Tadigadapa, Pennsylvania State Univ., USA |
| 12A-4-2 | Thurs., 9:30-10:00, Nov. 12, 2015 | Micro/nano Fabrications for Biophysical Studies of Motor Proteins (Invited) | R. Yokokawa, Kyoto Univ., Japan |
| 12A-4-3 | Thurs., 10:00-10:30, Nov. 12, 2015 | Plant-on-a-Chip: Towards Improving Global Crop Productivity (Invited) | H. Hida, Kobe Univ., Japan |
| 12A-5-1 | Thurs., 10:45-11:15, Nov. 12, 2015 | Microstructured Meshes as Platforms for Cell Culture and Induction of Self-Assembly-Mediated Organoid Formation (Invited) | O. Kennedy 1, O. Kurosawa 1, S. Yamazaki 1, H. Oana 1, H. Kotera 2 and M. Washizu 1, 1 Univ. of Tokyo and 2 Kyoto Univ., Japan |
| 12A-5-2 | Thurs., 11:15-11:45, Nov. 12, 2015 | On-chip Electrical Lysis and Extraction of Cytoplasmic RNA and Genomic DNA from Single Cells (Invited) | H. Shintaku 1,2, K. Kuriyama 2 and J.G. Santiago 2, 1 Kyoto Univ., Japan and 2 Stanford Univ., USA |
| 12A-5-3 | Thurs., 11:45-12:15, Nov. 12, 2015 | On-Chip Direct Cytoplasmic Transfer between Live Single Cells (Invited) | K. Wada, RIKEN, Japan |